CN101329994B - 处理装置和搬送方法 - Google Patents
处理装置和搬送方法 Download PDFInfo
- Publication number
- CN101329994B CN101329994B CN2008101102312A CN200810110231A CN101329994B CN 101329994 B CN101329994 B CN 101329994B CN 2008101102312 A CN2008101102312 A CN 2008101102312A CN 200810110231 A CN200810110231 A CN 200810110231A CN 101329994 B CN101329994 B CN 101329994B
- Authority
- CN
- China
- Prior art keywords
- flexible film
- processing unit
- roller
- conveyance
- described flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 14
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 230000003139 buffering effect Effects 0.000 claims abstract description 12
- 230000007723 transport mechanism Effects 0.000 claims description 11
- 238000005452 bending Methods 0.000 claims description 6
- 238000011282 treatment Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000009489 vacuum treatment Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2380/00—Specific applications
- G09G2380/02—Flexible displays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Advancing Webs (AREA)
- Electroluminescent Light Sources (AREA)
- Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
- Coating Apparatus (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007163764 | 2007-06-21 | ||
JP2007-163764 | 2007-06-21 | ||
JP2007163764A JP4680239B2 (ja) | 2007-06-21 | 2007-06-21 | 処理装置および搬送方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101329994A CN101329994A (zh) | 2008-12-24 |
CN101329994B true CN101329994B (zh) | 2011-01-12 |
Family
ID=40205730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008101102312A Expired - Fee Related CN101329994B (zh) | 2007-06-21 | 2008-06-18 | 处理装置和搬送方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4680239B2 (ja) |
KR (1) | KR20080112969A (ja) |
CN (1) | CN101329994B (ja) |
TW (1) | TW200911667A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110135405A1 (en) * | 2009-12-04 | 2011-06-09 | Akira Miyaji | Roller apparatus and transportation apparatus |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6265871A (ja) * | 1985-09-17 | 1987-03-25 | Fuji Photo Film Co Ltd | 連続ウエブ送りと間欠ウエブ送りを接続する方法 |
JPH0774062B2 (ja) * | 1987-09-09 | 1995-08-09 | ウシオ電機株式会社 | ロールフィルムフィーダ |
JPH0342456A (ja) * | 1989-07-05 | 1991-02-22 | Ishikawajima Harima Heavy Ind Co Ltd | 帯状物の非接触式ルーパー装置 |
JP4239369B2 (ja) * | 2000-06-28 | 2009-03-18 | 株式会社村田製作所 | ウエブの蛇行制御装置およびこの蛇行制御装置を用いたセラミックグリーンシートの製造装置 |
-
2007
- 2007-06-21 JP JP2007163764A patent/JP4680239B2/ja not_active Expired - Fee Related
-
2008
- 2008-04-24 TW TW097115071A patent/TW200911667A/zh unknown
- 2008-06-18 CN CN2008101102312A patent/CN101329994B/zh not_active Expired - Fee Related
- 2008-06-20 KR KR1020080058092A patent/KR20080112969A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN101329994A (zh) | 2008-12-24 |
JP2009001376A (ja) | 2009-01-08 |
TW200911667A (en) | 2009-03-16 |
KR20080112969A (ko) | 2008-12-26 |
JP4680239B2 (ja) | 2011-05-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4753313B2 (ja) | 基板処理装置 | |
JP4633161B2 (ja) | 基板搬送装置 | |
JP4495752B2 (ja) | 基板処理装置及び塗布装置 | |
CN104150756B (zh) | 基板分断装置及基板分断装置的基板搬送方法 | |
JP5152469B2 (ja) | 基板搬送装置 | |
WO2006090619A1 (ja) | ステージ装置および塗布処理装置 | |
JP2008174361A (ja) | 基板搬送装置 | |
JP2005082404A (ja) | インライン搬送システム | |
KR101300853B1 (ko) | 기판 반송 시스템, 기판 반송 장치 및 기판 처리 장치 | |
WO2008032456A1 (fr) | Appareil de transfert de substrat et procédé de mise en oeuvre associé | |
CN101329994B (zh) | 处理装置和搬送方法 | |
JP2001196438A (ja) | 薄板状材の搬送装置 | |
JP4638931B2 (ja) | 基板処理装置 | |
WO2008044340A1 (fr) | Dispositif de transfert de substrat | |
JP2001233452A (ja) | 薄板状材の定点搬送装置 | |
JP4593461B2 (ja) | 基板搬送システム | |
JP4785210B2 (ja) | 基板搬送装置 | |
JP2005247516A (ja) | 浮上式基板搬送処理装置 | |
JP2007173365A (ja) | 塗布乾燥処理システム及び塗布乾燥処理方法 | |
KR101668778B1 (ko) | 스크라이브 장치 | |
KR101069154B1 (ko) | 기판 처리장치 | |
JP2005026554A (ja) | 基板処理方法および基板処理装置 | |
JP2926592B2 (ja) | 基板処理装置 | |
KR101141146B1 (ko) | 기판 반송 방법 | |
JP2004307115A (ja) | 処理システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110112 Termination date: 20140618 |
|
EXPY | Termination of patent right or utility model |