CN101329994B - 处理装置和搬送方法 - Google Patents

处理装置和搬送方法 Download PDF

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Publication number
CN101329994B
CN101329994B CN2008101102312A CN200810110231A CN101329994B CN 101329994 B CN101329994 B CN 101329994B CN 2008101102312 A CN2008101102312 A CN 2008101102312A CN 200810110231 A CN200810110231 A CN 200810110231A CN 101329994 B CN101329994 B CN 101329994B
Authority
CN
China
Prior art keywords
flexible film
processing unit
roller
conveyance
described flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101102312A
Other languages
English (en)
Chinese (zh)
Other versions
CN101329994A (zh
Inventor
川内拓男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN101329994A publication Critical patent/CN101329994A/zh
Application granted granted Critical
Publication of CN101329994B publication Critical patent/CN101329994B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2380/00—Specific applications
    • G09G2380/02—Flexible displays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12044—OLED

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Advancing Webs (AREA)
  • Electroluminescent Light Sources (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Coating Apparatus (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
CN2008101102312A 2007-06-21 2008-06-18 处理装置和搬送方法 Expired - Fee Related CN101329994B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007163764 2007-06-21
JP2007-163764 2007-06-21
JP2007163764A JP4680239B2 (ja) 2007-06-21 2007-06-21 処理装置および搬送方法

Publications (2)

Publication Number Publication Date
CN101329994A CN101329994A (zh) 2008-12-24
CN101329994B true CN101329994B (zh) 2011-01-12

Family

ID=40205730

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008101102312A Expired - Fee Related CN101329994B (zh) 2007-06-21 2008-06-18 处理装置和搬送方法

Country Status (4)

Country Link
JP (1) JP4680239B2 (ja)
KR (1) KR20080112969A (ja)
CN (1) CN101329994B (ja)
TW (1) TW200911667A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110135405A1 (en) * 2009-12-04 2011-06-09 Akira Miyaji Roller apparatus and transportation apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265871A (ja) * 1985-09-17 1987-03-25 Fuji Photo Film Co Ltd 連続ウエブ送りと間欠ウエブ送りを接続する方法
JPH0774062B2 (ja) * 1987-09-09 1995-08-09 ウシオ電機株式会社 ロールフィルムフィーダ
JPH0342456A (ja) * 1989-07-05 1991-02-22 Ishikawajima Harima Heavy Ind Co Ltd 帯状物の非接触式ルーパー装置
JP4239369B2 (ja) * 2000-06-28 2009-03-18 株式会社村田製作所 ウエブの蛇行制御装置およびこの蛇行制御装置を用いたセラミックグリーンシートの製造装置

Also Published As

Publication number Publication date
CN101329994A (zh) 2008-12-24
JP2009001376A (ja) 2009-01-08
TW200911667A (en) 2009-03-16
KR20080112969A (ko) 2008-12-26
JP4680239B2 (ja) 2011-05-11

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110112

Termination date: 20140618

EXPY Termination of patent right or utility model