CN101329994B - Processing device and conveying method - Google Patents

Processing device and conveying method Download PDF

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Publication number
CN101329994B
CN101329994B CN2008101102312A CN200810110231A CN101329994B CN 101329994 B CN101329994 B CN 101329994B CN 2008101102312 A CN2008101102312 A CN 2008101102312A CN 200810110231 A CN200810110231 A CN 200810110231A CN 101329994 B CN101329994 B CN 101329994B
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CN
China
Prior art keywords
flexible film
processing unit
roller
conveyance
described flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101102312A
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Chinese (zh)
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CN101329994A (en
Inventor
川内拓男
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
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Publication of CN101329994A publication Critical patent/CN101329994A/en
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Publication of CN101329994B publication Critical patent/CN101329994B/en
Expired - Fee Related legal-status Critical Current
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2380/00Specific applications
    • G09G2380/02Flexible displays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Advancing Webs (AREA)
  • Electroluminescent Light Sources (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Coating Apparatus (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

The present invention provides a processing device for implementing a plurality of treatments in turn to continuously transported flexible film (1), which comprises: a transporting mechanism (13) for continuously transporting the flexible film (1), a first treating unit (11) for implementing a first treatment to the flexible film (1), a second treating unit (12) for implementing a second treatment to the flexible film (1), and a buffer mechanism (14) for buffering the flexible film (1) according to a flexible film transporting speed difference generated between the first treating unit (11) and the second treating unit (12).

Description

Processing unit and transport method
Technical field
For example the present invention relates to the flexible film (flexible film) that conveyance continuously uses and also carry out the processing unit of a plurality of processing and the processing method in this processing unit successively in floppy disc etc.
Background technology
Because floppy disc is thin and have pliability, therefore, can be arranged on the curved surface, in addition, compares not cracky with the existing flat-panel monitor that forms on glass substrate, therefore, expectation is applied to purposes miscellaneous.
Known this floppy disc has organic luminous layer, has for example opened in 2004-361774 number open TOHKEMY 2000-268954 communique, spy about the technology of floppy disc with organic luminous layer.
When making floppy disc, it is that flexible film to continuous conveyance implements a plurality of processing successively that a kind of method is arranged, but, in processing procedure, the processing that conveyance is on one side continuously implemented on one side and as vacuum treatment, must stop conveyance and the processing implemented mixes mutually, each processing time (TACT) is not fixed in addition, can't form desirable production procedure, therefore, produce TAT (Turn Around Time: finish the product required time) and prolong such problem.
Be not only floppy disc, on one side and implement also same problem can take place under the situation of a plurality of processing conveyance flexible film on one side continuously.
Summary of the invention
The objective of the invention is to, can carry out on one side continuously the processing unit of a plurality of processing that the conveyance flexible film implements and the processing method in the processing unit with short TAT on one side provide a kind of.
According to first viewpoint of the present invention, a kind of processing unit is provided, it is to being implemented the processing unit of a plurality of processing by the flexible film of conveyance continuously successively, it is characterized in that, comprising: the continuous above-mentioned flexible film's of conveyance transport mechanism; Above-mentioned flexible film is implemented first first processing unit of handling; Above-mentioned flexible film is implemented second second processing unit of handling; And carry out the buffer gear of above-mentioned flexible film's buffering according to the above-mentioned flexible film's that between above-mentioned first processing unit and above-mentioned second processing unit, produces conveyance speed difference.
In above-mentioned first viewpoint, as above-mentioned buffer gear, the mobile roller that can adopt the above-mentioned flexible film that has in the conveyance rolled and can be provided with movably moves the mobile above-mentioned flexible film's of carrying out of roller the structure of buffering by this.
In this case, above-mentioned mobile roller has first roller and second roller, can cushion above-mentioned flexible film at both direction by they are moved.
In addition, above-mentioned buffer gear can constitute to have and push above-mentioned flexible film's the unit of pushing when utilizing above-mentioned mobile roller to cushion above-mentioned flexible film.The above-mentioned unit of pushing can have when utilizing above-mentioned mobile roller to cushion the help roll that the mode with the part of pushing above-mentioned flexible film's bending is provided with, in addition, the above-mentioned unit of pushing also can have when utilizing above-mentioned mobile roller to cushion air blast (blower) to the part blow gas of above-mentioned flexible film's bending.
Further, thus above-mentioned buffer gear can also have and makes the roller travel mechanism that above-mentioned mobile roller moves and control the control part that above-mentioned roller travel mechanism controls above-mentioned flexible film's buffer distance.
In addition, above-mentioned transport mechanism can constitute to have: roller, be provided with a plurality ofly along the conveyance path, and above-mentioned flexible film moves thereon; With the driving mechanism that makes one or more rotation driving in the above-mentioned roller.
According to second viewpoint of the present invention, a kind of transport method is provided, it is the transport method in the processing unit, above-mentioned processing unit has implements first first processing unit of handling to the flexible film, with second processing unit of above-mentioned flexible film being implemented second processing, be used for handling and above-mentioned second processing implemented above-mentioned first continuously successively by the flexible film of conveyance continuously, above-mentioned transport method is characterised in that: the buffering of carrying out above-mentioned flexible film between above-mentioned first processing unit and above-mentioned second processing unit according to the above-mentioned flexible film's who produces conveyance speed difference.
According to the present invention, because by being provided with buffer gear, conveyance speed difference according to the flexible film who produces between first processing unit and second processing unit, can carry out flexible film's buffering, therefore, stop because of vacuum treatment etc. at any one processing unit implementing to handle under the state of conveyance, perhaps the processing time of two processing units (TACT) is not under the square one, the time of the conveyance that stops the flexible film can not only be shortening as far as possible, and TAT can be shortened.
Description of drawings
Fig. 1 represents the summary side elevation of the processing unit of an embodiment of the present invention.
Fig. 2 is the stereogram of action that is used to illustrate the processing unit of an embodiment of the present invention, and expression does not make the figure of the state of buffer gear action.
Fig. 3 is the stereogram of action that is used to illustrate the processing unit of an embodiment of the present invention, the figure of the first roller operate condition of expression buffer gear.
Fig. 4 is the stereogram of action that is used to illustrate the processing unit of an embodiment of the present invention, the figure of the state of first roller of expression buffer gear and the action of second roller.
Fig. 5 represents the employed figure that pushes other example of unit of buffer gear.
Fig. 6 represents the employed figure that pushes other other example of unit of buffer gear.
Symbol description
1: 12: the second processing units 13 of 11: the first processing units of flexible film: transport mechanism 14: buffer gear 15: roller 16: driving mechanism 17a: the first roller 17b: second roller 18: help roll 19: roller travel mechanism 20: control part 21: air blast 100: processing unit G: glass substrate
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
Fig. 1 is the end view of the major part of the processing unit that relates to of expression one embodiment of the present invention, and Fig. 2~4th is used to illustrate the stereogram of the action of this buffer gear.
This processing unit 100 is used for implementing continuously a plurality of processing on the flexible film, for example, the pattern that can be applied to floppy disc forms uses coating developing device.
This processing unit 100 has continuous conveyance flexible film's 1 conveyance path 10, disposes as adjacent processing unit implemented first processing unit 11 and second processing unit 12 of predetermined processing by the flexible film 1 of conveyance in this conveyance path 10.Dispose the transport mechanism 13 that is used for along conveyance path 10 conveyance flexible films 1 in addition.And, between first processing unit 11 and second processing unit 12, dispose the buffer gear 14 of the conveyance speed difference that is used to be adjusted at the flexible film 1 who produces between them.
First processing unit 11 and second processing unit 12 for example are in a plurality of processing units of using of resist coating development treatment, can enumerate continuous conveyance flexible film 1 on one side, implement the unit of the continuous conveyance processing of resist coating or heat treated etc. on one side, in addition, temporarily stop flexible film 1, the unit of the vacuum technology that the enforcement drying under reduced pressure is such etc.
Transport mechanism 13 has a plurality of rollers 15 that are provided with along conveyance path 10 and one or several the driving mechanism 16 in the rotation driven roller 15, thereby along conveyance direction A conveyance flexible film 1.
Buffer gear 14 has: be arranged at movably conveyance in conveyance path 10 flexible film 1 below, cushion by the flexible film's 1 of conveyance the first roller 17a and the second roller 17b by moving; Help roll 18 when utilizing these rollers to cushion above the compacting flexible film 1; The roller travel mechanism 19 that the first roller 17a and the second roller 17b are moved; Thereby and the control part 20 of the 19 control flexible films' 1 of control roll travel mechanism buffering.Moreover roller travel mechanism 19 also has the function that the first roller 17a and the second roller 17b are rotated along conveyance flexible film 1 direction.
The first roller 17a of buffer gear 14 also as shown in Figure 2, standby below conveyance path 10 when cushioning, the second roller 17b is not expression in Fig. 2, but in the standby of the side in conveyance path 10.And when cushioning, as shown in Figure 3, at first, the first roller 17a rises, and lifts then under the state of pushing the end above the flexible film 1 with help roll 18 and by the flexible film 1 of conveyance.Further, wanting to prolong under the situation of buffer distance, as shown in Figure 4, from the side the second roller 17b is being inserted into flexible film 1 the part that is lifted, and the first roller 17a is moved along flexible film 1 conveyance direction.Thus, just can carry out the buffering of the both direction of top and conveyance direction, and can obtain the adjustment surplus (generation: ろ) of more buffer distance.And, according to the flexible film's 1 of first processing unit 11 and second processing unit 12 conveyance speed difference, control by 20 pairs of such buffer distances of control part.
In order to raise flexible film 1 like this, need push the top of flexible film 1 and make it push the unit towards some of top bending, help roll 18 is set for this reason.But, owing to being treated side above the flexible film 1, so help roll 18 is set at the end above the flexible film 1.
As this other example of pushing the unit, also can use shown in Figure 5 along flexible film 1 whole width blow out air or the air blast 21 of gas such as nitrogen.In this case, owing to do not contact, so effective for the situation that is difficult on flexible film 1, to obtain pressing part with the top of flexible film 1.In addition, as shown in Figure 6, also can and use help roll 18 and air blast 21.This situation to the bending of further guaranteeing flexible film 1 is effective.
Below, the flexible film's 1 that adopts the processing unit 100 that aforesaid way constitutes conveyance action is described.
The flexible film 1 who utilizes transport mechanism 13 to export along 10 conveyances of conveyance path from the conveying device (not shown) carries out predetermined process in first processing unit 11, then, carry out other predetermined processing in second processing unit 12.
Because under the situation that flexible film 1 conveyance speed is identical with conveyance speed in second processing unit 12 in first processing unit 11, can handle with certain conveyance speed at these processing units, therefore, there is no need to make buffer gear 14 actions, can under the state of Fig. 2, handle.
Under the situation of conveyance speed greater than the conveyance speed of second processing unit 12 of first processing unit 11, buffer gear 14 is moved in the instruction of sending according to control part 20.Particularly, in second processing unit 12, stop and handling under flexible film 1 the situation, as shown in Figure 3, utilize roller travel mechanism 19 (with reference to Fig. 1) that the first roller 17a is moved towards the top from the below in conveyance path 10, lift by the flexible film 1 of conveyance from the below, carry out flexible film 1 buffered then.
Under the not enough situation of the distance of utilizing the first roller 17a to cushion, roller travel mechanism 19 (with reference to Fig. 1) enters the second roller 17b as shown in Figure 4 from the side, and the first roller 17a is moved towards flexible film 1 conveyance direction, carry out the buffering of both direction, thereby prolong buffer distance.
Under the situation of conveyance speed less than the conveyance speed of second processing unit 12 of first processing unit 11, for example, after can adopting the processing in first processing unit 11, utilize the distance of buffer gear 14, in second processing unit, implement methods such as processing then flexible film's 1 buffering regulation.
So, utilize buffer gear 14, conveyance speed difference according to the flexible film 1 who produces between first processing unit 11 and second processing unit 12 cushions flexible film 1, therefore, under the state that stops because of vacuum treatment etc., implement to handle at any one processing unit, perhaps the processing time of two processing units (TACT) under the square one, not only can not shorten the time that stops flexible film's 1 conveyance as far as possible, and can shorten TAT.
In addition, the present invention is not limited to above-mentioned execution mode, and various distortion can be arranged.For example, in the above-described embodiment, be illustrated for the processing unit that has first processing unit 11 and second processing unit 12 and be located at the buffer gear 14 between them, but, this only is a minimum level, certainly, also can be suitable for for situation with the processing unit more than three.In this case, between each processing unit part or all is provided with buffer gear, handles the buffer distance of suitably adjusting these buffer gears according to each, like this, just can be under desirable state the conveyance flexible film, thereby can greatly shorten TAT.
In addition, buffer gear is not limited to the mechanism that roller is moved as described above, for example, thereby also can adopt the driving of the roller of adjusting transport mechanism to make other structure such as mechanism that the flexible film relaxes.
In addition, in the above-described embodiment, used roller conveying, but be not limited thereto as transport mechanism, for example, also can use utilize air float other transport mechanism such as conveyance or conveyer belt conveyance.
The utilizability of industry
The present invention is effective in the manufacture process of floppy disc etc. the flexible film being implemented the treating apparatus of a plurality of processing continuously.

Claims (10)

1. processing unit, it is to being implemented the processing unit of a plurality of processing by the flexible film of conveyance continuously successively, it is characterized in that, comprising:
The continuous described flexible film's of conveyance transport mechanism;
Described flexible film is implemented first first processing unit of handling;
Described flexible film is implemented second second processing unit of handling; With
In described first processing unit and described second processing unit any stops described flexible film and when it is handled, or the processing time of described first processing unit and described second processing unit is not simultaneously, carries out the buffer gear of described flexible film's buffering according to the described flexible film's who produces between described first processing unit and described second processing unit conveyance speed difference.
2. processing unit as claimed in claim 1 is characterized in that:
The mobile roller that described buffer gear has the described flexible film in the conveyance rolled and can be provided with movably moves the mobile described flexible film's of carrying out of roller buffering by this.
3. processing unit as claimed in claim 2 is characterized in that:
Described mobile roller has first roller and second roller, moves by making them, cushions described flexible film at both direction.
4. as claim 2 or 3 described processing unit, it is characterized in that:
Described buffer gear has pushes described flexible film's the unit of pushing when utilizing described mobile roller to cushion described flexible film.
5. processing unit as claimed in claim 4 is characterized in that:
The described unit of pushing has the help roll that is provided with in the mode of pushing the part of described flexible film's bending when utilizing described mobile roller to cushion.
6. processing unit as claimed in claim 4 is characterized in that:
The described unit of pushing has when utilizing described mobile roller to cushion air blast to the part blow gas of described flexible film's bending.
7. as claim 2 or 3 described processing unit, it is characterized in that:
Make the roller travel mechanism that described mobile roller moves and control the control part that described roller travel mechanism controls described flexible film's buffer distance thereby described buffer gear also has.
8. as each described processing unit in the claim 1~3, it is characterized in that:
Described transport mechanism has: roller, be provided with a plurality ofly along the conveyance path, and and described flexible film moves thereon; With the driving mechanism that makes one or more rotation driving in the described roller.
9. processing unit as claimed in claim 3 is characterized in that:
Utilize described first roller to lift described flexible film, insert described second roller in described flexible film's the part that is lifted, and described first roller is moved along described flexible film's conveyance direction, thus, on both direction, described flexible film is cushioned.
10. transport method, it is the transport method in the processing unit, described processing unit has to be implemented first first processing unit of handling and described flexible film is implemented second second processing unit of handling the flexible film, be used for handling and described second processing implemented described first continuously successively by the flexible film of conveyance continuously, described transport method is characterised in that:
In described first processing unit and described second processing unit any stops described flexible film and when it is handled, or the processing time of described first processing unit and described second processing unit is not simultaneously, carries out described flexible film's buffering according to the described flexible film's who produces between described first processing unit and described second processing unit conveyance speed difference.
CN2008101102312A 2007-06-21 2008-06-18 Processing device and conveying method Expired - Fee Related CN101329994B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007163764 2007-06-21
JP2007163764A JP4680239B2 (en) 2007-06-21 2007-06-21 Processing apparatus and transfer method
JP2007-163764 2007-06-21

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Publication Number Publication Date
CN101329994A CN101329994A (en) 2008-12-24
CN101329994B true CN101329994B (en) 2011-01-12

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JP (1) JP4680239B2 (en)
KR (1) KR20080112969A (en)
CN (1) CN101329994B (en)
TW (1) TW200911667A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110135405A1 (en) * 2009-12-04 2011-06-09 Akira Miyaji Roller apparatus and transportation apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265871A (en) * 1985-09-17 1987-03-25 Fuji Photo Film Co Ltd Connecting method for continuous web feed and intermittent web feed
JPH0774062B2 (en) * 1987-09-09 1995-08-09 ウシオ電機株式会社 Roll film feeder
JPH0342456A (en) * 1989-07-05 1991-02-22 Ishikawajima Harima Heavy Ind Co Ltd Noncontact type looper device for belt-shaped object
JP4239369B2 (en) * 2000-06-28 2009-03-18 株式会社村田製作所 Web meandering control device and ceramic green sheet manufacturing equipment using this meandering control device

Also Published As

Publication number Publication date
CN101329994A (en) 2008-12-24
JP4680239B2 (en) 2011-05-11
JP2009001376A (en) 2009-01-08
KR20080112969A (en) 2008-12-26
TW200911667A (en) 2009-03-16

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