CN101323396A - 基板吸附装置和基板搬送装置以及外观检查装置 - Google Patents
基板吸附装置和基板搬送装置以及外观检查装置 Download PDFInfo
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- CN101323396A CN101323396A CNA2008101089197A CN200810108919A CN101323396A CN 101323396 A CN101323396 A CN 101323396A CN A2008101089197 A CNA2008101089197 A CN A2008101089197A CN 200810108919 A CN200810108919 A CN 200810108919A CN 101323396 A CN101323396 A CN 101323396A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007153922A JP2008302487A (ja) | 2007-06-11 | 2007-06-11 | 基板吸着装置及び基板搬送装置並びに外観検査装置 |
JP2007153922 | 2007-06-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101323396A true CN101323396A (zh) | 2008-12-17 |
Family
ID=40187135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2008101089197A Pending CN101323396A (zh) | 2007-06-11 | 2008-06-06 | 基板吸附装置和基板搬送装置以及外观检查装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2008302487A (ja) |
KR (1) | KR20080108904A (ja) |
CN (1) | CN101323396A (ja) |
TW (1) | TW200906695A (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102666323A (zh) * | 2009-11-26 | 2012-09-12 | 株式会社尼康 | 基板处理装置以及显示元件的制造方法 |
TWI480216B (zh) * | 2011-11-14 | 2015-04-11 | Kawasaki Heavy Ind Ltd | Sheet conveyance system |
CN105091779A (zh) * | 2014-04-30 | 2015-11-25 | 平田机工株式会社 | 工件形状测定系统及控制方法 |
CN106927258A (zh) * | 2017-01-26 | 2017-07-07 | 江苏东旭亿泰智能装备有限公司 | 一种用于玻璃基板的传送装置及其传送方法 |
CN108136596A (zh) * | 2015-08-26 | 2018-06-08 | 伯克希尔格雷股份有限公司 | 提供用于末端执行器的真空阀组件的系统和方法 |
CN108202339A (zh) * | 2016-12-20 | 2018-06-26 | 亚智科技股份有限公司 | 吸取基板的方法与吸取装置 |
CN108238447A (zh) * | 2018-01-16 | 2018-07-03 | 京东方科技集团股份有限公司 | 传输系统 |
CN109071129A (zh) * | 2016-03-31 | 2018-12-21 | 科福罗有限公司 | 具有真空轮的输送系统 |
CN110625540A (zh) * | 2014-05-03 | 2019-12-31 | 株式会社半导体能源研究所 | 薄膜状部件支撑设备 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI465313B (zh) * | 2009-04-07 | 2014-12-21 | Kromax Internat Corp | 非接觸式定位平臺與定位方法 |
KR101309144B1 (ko) * | 2011-01-10 | 2013-09-17 | 엘아이지에이디피 주식회사 | 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치 |
KR102099882B1 (ko) * | 2012-12-27 | 2020-04-13 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
CN104058257B (zh) * | 2013-03-22 | 2017-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 晶片的辅助取片机构、取片系统及取片方法 |
CN105058401A (zh) * | 2015-08-07 | 2015-11-18 | 天津联欣盈塑胶科技有限公司 | 一种夹取塑料产品的机械手 |
CN105397828B (zh) * | 2015-11-27 | 2017-03-29 | 大连理工大学 | 一种用于管桩端板加工的大尺寸变直径机器人夹具 |
CN105428290B (zh) * | 2015-12-23 | 2018-06-29 | 上海华虹宏力半导体制造有限公司 | 晶圆传输装置及其真空吸附机械手 |
WO2022202396A1 (ja) * | 2021-03-25 | 2022-09-29 | 東京エレクトロン株式会社 | 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム |
TW202306651A (zh) * | 2021-03-31 | 2023-02-16 | 日商東京威力科創股份有限公司 | 基板搬送裝置、塗佈處理裝置及基板搬送方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101055911B1 (ko) * | 2003-05-06 | 2011-08-10 | 올림푸스 가부시키가이샤 | 기판 흡착 장치 |
-
2007
- 2007-06-11 JP JP2007153922A patent/JP2008302487A/ja active Pending
-
2008
- 2008-06-04 KR KR1020080052407A patent/KR20080108904A/ko not_active Application Discontinuation
- 2008-06-06 CN CNA2008101089197A patent/CN101323396A/zh active Pending
- 2008-06-10 TW TW097121524A patent/TW200906695A/zh unknown
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102666323A (zh) * | 2009-11-26 | 2012-09-12 | 株式会社尼康 | 基板处理装置以及显示元件的制造方法 |
CN102666323B (zh) * | 2009-11-26 | 2015-06-03 | 株式会社尼康 | 基板处理装置以及显示元件的制造方法 |
TWI480216B (zh) * | 2011-11-14 | 2015-04-11 | Kawasaki Heavy Ind Ltd | Sheet conveyance system |
CN105091779A (zh) * | 2014-04-30 | 2015-11-25 | 平田机工株式会社 | 工件形状测定系统及控制方法 |
CN110625540A (zh) * | 2014-05-03 | 2019-12-31 | 株式会社半导体能源研究所 | 薄膜状部件支撑设备 |
CN108136596A (zh) * | 2015-08-26 | 2018-06-08 | 伯克希尔格雷股份有限公司 | 提供用于末端执行器的真空阀组件的系统和方法 |
CN108136596B (zh) * | 2015-08-26 | 2021-08-24 | 伯克希尔格雷股份有限公司 | 提供用于末端执行器的真空阀组件的系统和方法 |
US11185996B2 (en) | 2015-08-26 | 2021-11-30 | Berkshire Grey, Inc. | Systems and methods for providing vacuum valve assemblies for end effectors |
US11660763B2 (en) | 2015-08-26 | 2023-05-30 | Berkshire Grey Operating Company, Inc. | Systems and methods for providing vacuum valve assemblies for end effectors |
CN109071129A (zh) * | 2016-03-31 | 2018-12-21 | 科福罗有限公司 | 具有真空轮的输送系统 |
CN108202339A (zh) * | 2016-12-20 | 2018-06-26 | 亚智科技股份有限公司 | 吸取基板的方法与吸取装置 |
CN106927258A (zh) * | 2017-01-26 | 2017-07-07 | 江苏东旭亿泰智能装备有限公司 | 一种用于玻璃基板的传送装置及其传送方法 |
CN108238447A (zh) * | 2018-01-16 | 2018-07-03 | 京东方科技集团股份有限公司 | 传输系统 |
Also Published As
Publication number | Publication date |
---|---|
JP2008302487A (ja) | 2008-12-18 |
TW200906695A (en) | 2009-02-16 |
KR20080108904A (ko) | 2008-12-16 |
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Application publication date: 20081217 |