CN101310368B - 电子器件、可印刷分散体及制备含电介质电子器件的方法 - Google Patents

电子器件、可印刷分散体及制备含电介质电子器件的方法 Download PDF

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Publication number
CN101310368B
CN101310368B CN2006800430658A CN200680043065A CN101310368B CN 101310368 B CN101310368 B CN 101310368B CN 2006800430658 A CN2006800430658 A CN 2006800430658A CN 200680043065 A CN200680043065 A CN 200680043065A CN 101310368 B CN101310368 B CN 101310368B
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dispersion
electronic device
group
curable compositions
following material
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CN101310368A (zh
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马克·E·纳皮耶腊拉
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02109Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02109Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02225Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H01L21/02288Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating printing, e.g. ink-jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/468Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/478Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a layer of composite material comprising interpenetrating or embedded materials, e.g. TiO2 particles in a polymer matrix
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/141Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Ceramic Capacitors (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
CN2006800430658A 2005-11-18 2006-11-14 电子器件、可印刷分散体及制备含电介质电子器件的方法 Expired - Fee Related CN101310368B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/282,923 2005-11-18
US11/282,923 US7498662B2 (en) 2005-11-18 2005-11-18 Dielectric media including surface-treated metal oxide particles
PCT/US2006/044055 WO2007061669A1 (en) 2005-11-18 2006-11-14 Dielectric media including surface-treated metal oxide particles

Publications (2)

Publication Number Publication Date
CN101310368A CN101310368A (zh) 2008-11-19
CN101310368B true CN101310368B (zh) 2011-08-31

Family

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Family Applications (1)

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CN2006800430658A Expired - Fee Related CN101310368B (zh) 2005-11-18 2006-11-14 电子器件、可印刷分散体及制备含电介质电子器件的方法

Country Status (5)

Country Link
US (1) US7498662B2 (OSRAM)
EP (1) EP1952429A1 (OSRAM)
JP (1) JP2009516393A (OSRAM)
CN (1) CN101310368B (OSRAM)
WO (1) WO2007061669A1 (OSRAM)

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Publication number Priority date Publication date Assignee Title
US7765265B1 (en) 2005-05-11 2010-07-27 Aol Inc. Identifying users sharing common characteristics
US20070146426A1 (en) * 2005-12-28 2007-06-28 Nelson Brian K All-inkjet printed thin film transistor
US8164087B2 (en) 2006-06-12 2012-04-24 Alcatel Lucent Organic semiconductor compositions with nanoparticles
US7879688B2 (en) * 2007-06-29 2011-02-01 3M Innovative Properties Company Methods for making electronic devices with a solution deposited gate dielectric
WO2009005972A1 (en) * 2007-06-29 2009-01-08 3M Innovative Properties Company Electronic devices having a solution deposited gate dielectric
US20090001356A1 (en) * 2007-06-29 2009-01-01 3M Innovative Properties Company Electronic devices having a solution deposited gate dielectric
TWI412125B (zh) * 2007-07-17 2013-10-11 Creator Technology Bv 電子元件及電子元件之製法
CN102124015B (zh) * 2008-05-30 2015-03-11 3M创新有限公司 甲硅烷基乙炔基并五苯化合物和组合物及其制备和使用方法
US8017471B2 (en) * 2008-08-06 2011-09-13 International Business Machines Corporation Structure and method of latchup robustness with placement of through wafer via within CMOS circuitry
KR101040320B1 (ko) * 2008-08-29 2011-06-10 고려대학교 산학협력단 절연막 및 절연막의 제조 방법
DE102009016659A1 (de) * 2008-09-23 2010-06-24 Siemens Aktiengesellschaft Ankergruppe für Monolagen organischer Verbindungen auf Metall und damit hergestelltes Bauelement auf Basis organischer Elektronik
US8920679B2 (en) 2009-05-29 2014-12-30 3M Innovative Properties Co. Fluorinated silylethynyl pentacene compounds and compositions and methods of making and using the same
DE102009037691A1 (de) * 2009-08-17 2011-03-03 Siemens Aktiengesellschaft Dielektrische Schutzschicht für eine selbstorganisierende Monolage (SAM)
GB2478843B (en) * 2010-03-17 2014-09-17 Secr Defence Improvements in dielectrics
JP6034613B2 (ja) * 2012-07-31 2016-11-30 第一工業製薬株式会社 無機化合物微粒子分散組成物の製造方法および無機化合物微粒子分散硬化物の製造方法
KR102570397B1 (ko) * 2016-05-11 2023-08-24 삼성디스플레이 주식회사 유기 박막 트랜지스터 및 그 제조 방법
CN107722557A (zh) * 2016-08-12 2018-02-23 深圳先进技术研究院 一种超薄电容材料及其制备方法

Citations (2)

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Publication number Priority date Publication date Assignee Title
US6432526B1 (en) * 1999-05-27 2002-08-13 3M Innovative Properties Company Nanosize metal oxide particles for producing transparent metal oxide colloids and ceramers
US6924971B2 (en) * 2001-02-08 2005-08-02 Hitachi, Ltd. High dielectric constant composite material and multilayer wiring board using the same

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GB9927431D0 (en) * 1999-11-22 2000-01-19 Ciba Sc Holding Ag Casting resin and process for the fabrication of resin molds
AU781584B2 (en) * 1999-12-21 2005-06-02 Flexenable Limited Solution processed devices
EP1195417B1 (de) * 2000-10-05 2009-10-14 Evonik Degussa GmbH Siliciumorganische Nanokapseln
EP1393122B1 (en) * 2001-05-15 2018-03-28 E Ink Corporation Electrophoretic particles
US20040180988A1 (en) * 2003-03-11 2004-09-16 Bernius Mark T. High dielectric constant composites
US7098525B2 (en) * 2003-05-08 2006-08-29 3M Innovative Properties Company Organic polymers, electronic devices, and methods
DE60326121D1 (de) 2003-05-20 2009-03-26 Dsm Ip Assets Bv Verfahren zur Herstellung von Nanostrukturierten Oberflächenbeschichtungen, deren Beschichtungen und Gegenständen enthaltend die Beschichtung
US20050095448A1 (en) * 2003-11-04 2005-05-05 Katz Howard E. Layer incorporating particles with a high dielectric constant

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6432526B1 (en) * 1999-05-27 2002-08-13 3M Innovative Properties Company Nanosize metal oxide particles for producing transparent metal oxide colloids and ceramers
US6924971B2 (en) * 2001-02-08 2005-08-02 Hitachi, Ltd. High dielectric constant composite material and multilayer wiring board using the same

Non-Patent Citations (4)

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Title
Ashok Maliakal et al..Inorganic Oxide Core, Polymer Shell Nanocomposite as aHigh K Gate Dielectric for Flexible Electronics Applications.J.AM.CHEM.SOC.127 42.2005,127(42),14655-14662.
Ashok Maliakal et al..Inorganic Oxide Core, Polymer Shell Nanocomposite as aHigh K Gate Dielectric for Flexible Electronics Applications.J.AM.CHEM.SOC.127 42.2005,127(42),14655-14662. *
J.Y.Lee,et al.Electrophoretic response of poly(methyl methacrylate)coatedTiO2 nanoparticles.Synthetic Metals153.2005,153221-224.
J.Y.Lee,et al.Electrophoretic response of poly(methyl methacrylate)coatedTiO2 nanoparticles.Synthetic Metals153.2005,153221-224. *

Also Published As

Publication number Publication date
US7498662B2 (en) 2009-03-03
WO2007061669A1 (en) 2007-05-31
JP2009516393A (ja) 2009-04-16
CN101310368A (zh) 2008-11-19
US20070114516A1 (en) 2007-05-24
EP1952429A1 (en) 2008-08-06

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Granted publication date: 20110831

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