CN101262986B - 不等连杆scara臂 - Google Patents

不等连杆scara臂 Download PDF

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Publication number
CN101262986B
CN101262986B CN200680033040XA CN200680033040A CN101262986B CN 101262986 B CN101262986 B CN 101262986B CN 200680033040X A CN200680033040X A CN 200680033040XA CN 200680033040 A CN200680033040 A CN 200680033040A CN 101262986 B CN101262986 B CN 101262986B
Authority
CN
China
Prior art keywords
substrate
forearm
upper arm
district
transport apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200680033040XA
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English (en)
Chinese (zh)
Other versions
CN101262986A (zh
Inventor
R·T·卡夫尼
D·马丁
U·吉尔克里斯特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Borucos automation USA Co.,Ltd.
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of CN101262986A publication Critical patent/CN101262986A/zh
Application granted granted Critical
Publication of CN101262986B publication Critical patent/CN101262986B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
CN200680033040XA 2005-07-11 2006-07-10 不等连杆scara臂 Active CN101262986B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/179,762 2005-07-11
US11/179,762 US9248568B2 (en) 2005-07-11 2005-07-11 Unequal link SCARA arm
PCT/US2006/026584 WO2007008702A2 (fr) 2005-07-11 2006-07-10 Bras scara pourvu d'une piece de liaison inegale

Publications (2)

Publication Number Publication Date
CN101262986A CN101262986A (zh) 2008-09-10
CN101262986B true CN101262986B (zh) 2012-11-14

Family

ID=37637788

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200680033040XA Active CN101262986B (zh) 2005-07-11 2006-07-10 不等连杆scara臂

Country Status (7)

Country Link
US (3) US9248568B2 (fr)
EP (2) EP3241655A1 (fr)
JP (1) JP5186368B2 (fr)
KR (2) KR20080036072A (fr)
CN (1) CN101262986B (fr)
TW (1) TWI426987B (fr)
WO (1) WO2007008702A2 (fr)

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JP4098338B2 (ja) 2006-07-20 2008-06-11 川崎重工業株式会社 ウェハ移載装置および基板移載装置
WO2008144664A1 (fr) * 2007-05-18 2008-11-27 Brooks Automation, Inc. Système de transport de substrats compact comprenant un robot de transfert rapide
TWI474418B (zh) * 2007-05-18 2015-02-21 Brooks Automation Inc 基板運送裝置、基板運送系統及運送基板之方法
KR100919215B1 (ko) * 2007-09-06 2009-09-28 세메스 주식회사 엔드 이펙터 및 이를 갖는 로봇 암 장치
DE102008026295A1 (de) * 2008-06-02 2009-12-03 Manz Automation Ag Gelenkarmroboter
JP5339874B2 (ja) * 2008-12-02 2013-11-13 タツモ株式会社 ロボット装置及びその制御方法
JP5620172B2 (ja) * 2010-07-16 2014-11-05 キヤノンアネルバ株式会社 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法
JP5395271B2 (ja) * 2010-08-17 2014-01-22 キヤノンアネルバ株式会社 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
JP2011161629A (ja) * 2011-06-03 2011-08-25 Kawasaki Heavy Ind Ltd 基板搬送ロボット
US9076829B2 (en) * 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
DK2812163T3 (da) * 2012-02-08 2020-05-11 Vanrx Pharmasystems Inc Ledforbundet armapparat og system
JP2013016843A (ja) * 2012-09-10 2013-01-24 Kawasaki Heavy Ind Ltd 基板搬送ロボット、基板搬送装置および半導体処理設備
US9149936B2 (en) * 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
KR102528833B1 (ko) * 2013-01-18 2023-05-04 퍼시몬 테크놀로지스 코포레이션 로봇, 전자 장치 처리 시스템, 기판 이송 방법
WO2015116674A1 (fr) * 2014-01-28 2015-08-06 Brooks Automation, Inc. Appareil de transport de substrats
US10384338B2 (en) * 2014-03-25 2019-08-20 Cardinal Gibbons High School Robotic vehicle having extendable mandible structure
US10269606B2 (en) * 2014-05-05 2019-04-23 Persimmon Technologies Corporation Two-link arm trajectory
JP6474971B2 (ja) * 2014-07-03 2019-02-27 株式会社ダイヘン ワーク搬送装置
US11691268B2 (en) * 2015-03-12 2023-07-04 Persimmon Technologies Corporation Robot having a variable transmission ratio
WO2016172003A1 (fr) * 2015-04-20 2016-10-27 Applied Materials, Inc. Mécanisme de chauffage de plaquette de chambre tampon et robot de support
US11584000B2 (en) * 2015-07-16 2023-02-21 Persimmon Technologies Corporation Robot arm with unequal link lengths and variable non-linear wrist orientation
EP3128291B1 (fr) 2015-08-03 2023-10-04 Hexagon Technology Center GmbH Machine de mesure de coordonnées avec tête de sonde guidée par l'entraînement d'une courroie
US9929034B2 (en) * 2015-09-03 2018-03-27 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer device
JP6027661B2 (ja) * 2015-09-30 2016-11-16 川崎重工業株式会社 基板搬送ロボット
JP6492271B2 (ja) * 2016-04-08 2019-04-03 株式会社安川電機 搬送システムおよびロボット
JP2017017355A (ja) * 2016-10-14 2017-01-19 川崎重工業株式会社 基板搬送ロボット
JP2018152609A (ja) * 2018-06-22 2018-09-27 川崎重工業株式会社 基板搬送ロボット
CN113226662A (zh) * 2018-12-28 2021-08-06 川崎重工业株式会社 机器人控制装置、机器人系统以及机器人控制方法
CN113939384B (zh) 2019-02-14 2024-05-14 柿子技术公司 磁性导向物料搬运机器人
WO2020185841A1 (fr) * 2019-03-11 2020-09-17 Persimmon Technologies Corporation Bras de robot ayant deux effecteurs terminaux asymétriques
US11413744B2 (en) 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof
CN114683245A (zh) * 2020-12-31 2022-07-01 广东美的制冷设备有限公司 一种水平多关节机器人
CN114620447B (zh) * 2022-04-26 2024-01-26 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 基片转移装置

Citations (2)

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US5534761A (en) * 1991-05-21 1996-07-09 Crippa; Ugo Mechanism for movements of prefixed path, referable as of elliptical shape
US5611655A (en) * 1993-04-23 1997-03-18 Tokyo Electron Limited Vacuum process apparatus and vacuum processing method

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US5534761A (en) * 1991-05-21 1996-07-09 Crippa; Ugo Mechanism for movements of prefixed path, referable as of elliptical shape
US5611655A (en) * 1993-04-23 1997-03-18 Tokyo Electron Limited Vacuum process apparatus and vacuum processing method

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Also Published As

Publication number Publication date
KR20080036072A (ko) 2008-04-24
KR101519642B1 (ko) 2015-05-12
US20160221183A1 (en) 2016-08-04
TWI426987B (zh) 2014-02-21
US20070020082A1 (en) 2007-01-25
JP2009503811A (ja) 2009-01-29
US9248568B2 (en) 2016-02-02
CN101262986A (zh) 2008-09-10
EP1904276A2 (fr) 2008-04-02
EP3241655A1 (fr) 2017-11-08
US10406679B2 (en) 2019-09-10
KR20130116371A (ko) 2013-10-23
US20200001451A1 (en) 2020-01-02
EP1904276A4 (fr) 2009-01-28
JP5186368B2 (ja) 2013-04-17
WO2007008702A3 (fr) 2007-12-13
TW200720035A (en) 2007-06-01
WO2007008702A2 (fr) 2007-01-18

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20220310

Address after: Massachusetts

Patentee after: Borucos automation USA Co.,Ltd.

Address before: Massachusetts

Patentee before: Borukos automation Holding Co.,Ltd.

Effective date of registration: 20220310

Address after: Massachusetts

Patentee after: Borukos automation Holding Co.,Ltd.

Address before: Massachusetts

Patentee before: BROOKS AUTOMATION, Inc.

TR01 Transfer of patent right