CN101183219B - 碱显影型的糊剂组合物 - Google Patents

碱显影型的糊剂组合物 Download PDF

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Publication number
CN101183219B
CN101183219B CN2007101872572A CN200710187257A CN101183219B CN 101183219 B CN101183219 B CN 101183219B CN 2007101872572 A CN2007101872572 A CN 2007101872572A CN 200710187257 A CN200710187257 A CN 200710187257A CN 101183219 B CN101183219 B CN 101183219B
Authority
CN
China
Prior art keywords
pattern
paste composition
overlay film
alkali developable
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007101872572A
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English (en)
Chinese (zh)
Other versions
CN101183219A (zh
Inventor
佐佐木正树
伊藤信人
有马圣夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Holdings Co Ltd
Original Assignee
Taiyo Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Holdings Co Ltd filed Critical Taiyo Holdings Co Ltd
Publication of CN101183219A publication Critical patent/CN101183219A/zh
Application granted granted Critical
Publication of CN101183219B publication Critical patent/CN101183219B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
CN2007101872572A 2006-11-15 2007-11-15 碱显影型的糊剂组合物 Expired - Fee Related CN101183219B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006309104 2006-11-15
JP2006-309104 2006-11-15
JP2006309104 2006-11-15
JP2006309103 2006-11-15
JP2006-309103 2006-11-15
JP2006309103 2006-11-15

Publications (2)

Publication Number Publication Date
CN101183219A CN101183219A (zh) 2008-05-21
CN101183219B true CN101183219B (zh) 2012-07-04

Family

ID=39606234

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101872572A Expired - Fee Related CN101183219B (zh) 2006-11-15 2007-11-15 碱显影型的糊剂组合物

Country Status (4)

Country Link
JP (1) JP5183161B2 (ja)
KR (1) KR20080044184A (ja)
CN (1) CN101183219B (ja)
TW (1) TW200844660A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5236557B2 (ja) * 2009-03-31 2013-07-17 太陽ホールディングス株式会社 レーザーを用いたパターン形成方法
JP5561989B2 (ja) * 2009-10-02 2014-07-30 太陽ホールディングス株式会社 レーザーを用いたパターン形成方法
KR101277020B1 (ko) * 2010-09-30 2013-06-24 다이요 홀딩스 가부시키가이샤 감광성 도전 페이스트
JP5825963B2 (ja) * 2011-09-30 2015-12-02 太陽ホールディングス株式会社 感光性導電性樹脂組成物、感光性導電性ペーストおよび導電体パターン
JP6058890B2 (ja) * 2012-01-11 2017-01-11 株式会社Adeka 硬化性樹脂組成物

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1726434A (zh) * 2002-12-16 2006-01-25 昭和电工株式会社 滤色片黑色矩阵光阻组合物
CN1779568A (zh) * 2003-11-27 2006-05-31 太阳油墨制造株式会社 固化性树脂组合物、其固化物以及印刷电路板

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000338322A (ja) * 1999-05-26 2000-12-08 Mitsubishi Chemicals Corp カラーフィルター用光重合性組成物およびカラーフィルター
JP4489566B2 (ja) * 2003-11-27 2010-06-23 太陽インキ製造株式会社 硬化性樹脂組成物、その硬化物、およびプリント配線板
JP4830310B2 (ja) * 2004-02-23 2011-12-07 三菱化学株式会社 オキシムエステル系化合物、光重合性組成物及びこれを用いたカラーフィルター
JP4556479B2 (ja) * 2004-04-27 2010-10-06 Jsr株式会社 着色層形成用感放射線性組成物、カラーフィルタおよび液晶表示パネル
JP2006268027A (ja) * 2005-02-23 2006-10-05 Jsr Corp プラズマディスプレイパネルの製造方法および転写フィルム
JP4253306B2 (ja) * 2005-03-01 2009-04-08 太陽インキ製造株式会社 感光性ペースト及びそれを用いて形成した焼成物パターン
JP2006309157A (ja) * 2005-04-01 2006-11-09 Jsr Corp 感放射線性樹脂組成物、それから形成された突起およびスペーサー、ならびにそれらを具備する液晶表示素子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1726434A (zh) * 2002-12-16 2006-01-25 昭和电工株式会社 滤色片黑色矩阵光阻组合物
CN1779568A (zh) * 2003-11-27 2006-05-31 太阳油墨制造株式会社 固化性树脂组合物、其固化物以及印刷电路板

Also Published As

Publication number Publication date
TW200844660A (en) 2008-11-16
JP5183161B2 (ja) 2013-04-17
JP2008146042A (ja) 2008-06-26
KR20080044184A (ko) 2008-05-20
CN101183219A (zh) 2008-05-21

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Granted publication date: 20120704