CN101127296B - 用于气流测量的方法及装置 - Google Patents

用于气流测量的方法及装置 Download PDF

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Publication number
CN101127296B
CN101127296B CN2007101404553A CN200710140455A CN101127296B CN 101127296 B CN101127296 B CN 101127296B CN 2007101404553 A CN2007101404553 A CN 2007101404553A CN 200710140455 A CN200710140455 A CN 200710140455A CN 101127296 B CN101127296 B CN 101127296B
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China
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gas
flow
sense line
air
process chamber
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Chinese (zh)
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CN101127296A (zh
Inventor
贾里德·阿曼德·李
埃兹拉·罗伯特·古德
张春雷
詹姆斯·帕特里克·克鲁斯
理查德·查尔斯·福韦尔
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Applied Materials Inc
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Applied Materials Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
CN2007101404553A 2006-08-14 2007-08-14 用于气流测量的方法及装置 Active CN101127296B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US82234506P 2006-08-14 2006-08-14
US60/822,345 2006-08-14
US11/833,623 US7743670B2 (en) 2006-08-14 2007-08-03 Method and apparatus for gas flow measurement
US11/833,623 2007-08-03

Publications (2)

Publication Number Publication Date
CN101127296A CN101127296A (zh) 2008-02-20
CN101127296B true CN101127296B (zh) 2010-06-09

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CN2007101404553A Active CN101127296B (zh) 2006-08-14 2007-08-14 用于气流测量的方法及装置

Country Status (6)

Country Link
US (2) US7743670B2 (enExample)
EP (1) EP1890117A1 (enExample)
JP (1) JP2008089575A (enExample)
KR (3) KR20080015374A (enExample)
CN (1) CN101127296B (enExample)
TW (1) TW200820320A (enExample)

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US8074677B2 (en) * 2007-02-26 2011-12-13 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
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EP3597251B1 (en) 2008-06-05 2023-04-26 ResMed Pty Ltd Treatment of respiratory conditions
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DE102009018401A1 (de) * 2009-04-22 2010-10-28 Airbus Deutschland Gmbh System und Verfahren zum Kühlen eines Raums in einem Fahrzeug
CN101872729B (zh) * 2010-05-28 2012-02-29 日月光封装测试(上海)有限公司 打线设备及其保护气体自动切换系统与方法
CN102288262A (zh) * 2011-05-04 2011-12-21 中国航空工业集团公司西安飞机设计研究所 一种散热器冷边风量现场校验方法
US9772629B2 (en) 2011-09-29 2017-09-26 Applied Materials, Inc. Methods for monitoring a flow controller coupled to a process chamber
US9644796B2 (en) * 2011-09-29 2017-05-09 Applied Materials, Inc. Methods for in-situ calibration of a flow controller
JP5433660B2 (ja) * 2011-10-12 2014-03-05 Ｃｋｄ株式会社 ガス流量監視システム
JP5809012B2 (ja) * 2011-10-14 2015-11-10 株式会社堀場エステック 流量制御装置、流量測定機構、又は、当該流量測定機構を備えた流量制御装置に用いられる診断装置及び診断用プログラム
JP6094277B2 (ja) * 2013-03-13 2017-03-15 三浦工業株式会社 ボイラ負荷分析装置
US9429247B2 (en) 2013-03-13 2016-08-30 Applied Materials, Inc. Acoustically-monitored semiconductor substrate processing systems and methods
US9910448B2 (en) 2013-03-14 2018-03-06 Christopher Max Horwitz Pressure-based gas flow controller with dynamic self-calibration
CN104750125B (zh) * 2013-12-31 2017-10-24 北京北方华创微电子装备有限公司 一种质量流量控制器的校准方法及装置
GB2557670B (en) * 2016-12-15 2020-04-15 Thermo Fisher Scient Bremen Gmbh Improved gas flow control
US10031004B2 (en) 2016-12-15 2018-07-24 Mks Instruments, Inc. Methods and apparatus for wide range mass flow verification
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
CN107958838B (zh) * 2017-11-08 2020-08-04 上海华力微电子有限公司 一种根据射频时数改善一体化刻蚀工艺面内均匀性的方法
KR101915535B1 (ko) 2017-11-24 2018-11-06 주식회사 센트리 가스측정장치
US11718912B2 (en) 2019-07-30 2023-08-08 Applied Materials, Inc. Methods and apparatus for calibrating concentration sensors for precursor delivery
CN112563105B (zh) * 2019-09-10 2023-11-03 中微半导体设备(上海)股份有限公司 等离子体处理装置中实现气体流量验证的系统及方法
US11761083B2 (en) 2019-09-19 2023-09-19 Applied Materials, Inc. Methods for controlling a flow pulse shape
EP3940288A1 (en) * 2020-06-25 2022-01-19 Romet Limited A method and system of monitoring a meter set using a sensor
CN114623904B (zh) * 2022-03-14 2023-07-25 中公高远(北京)汽车检测技术有限公司 一种气体流量计的校准装置和方法
US12264950B2 (en) * 2022-03-23 2025-04-01 Mks Instruments, Inc. Method and apparatus for mass flow verification
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Also Published As

Publication number Publication date
KR20130100085A (ko) 2013-09-09
US7743670B2 (en) 2010-06-29
US20080035202A1 (en) 2008-02-14
KR20100091931A (ko) 2010-08-19
US7975558B2 (en) 2011-07-12
KR20080015374A (ko) 2008-02-19
US20100251828A1 (en) 2010-10-07
JP2008089575A (ja) 2008-04-17
TW200820320A (en) 2008-05-01
CN101127296A (zh) 2008-02-20
KR101434869B1 (ko) 2014-09-02
EP1890117A1 (en) 2008-02-20

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