CN101063195A - 处理用加热炉或者类似装置 - Google Patents

处理用加热炉或者类似装置 Download PDF

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Publication number
CN101063195A
CN101063195A CNA2007101047077A CN200710104707A CN101063195A CN 101063195 A CN101063195 A CN 101063195A CN A2007101047077 A CNA2007101047077 A CN A2007101047077A CN 200710104707 A CN200710104707 A CN 200710104707A CN 101063195 A CN101063195 A CN 101063195A
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CN
China
Prior art keywords
process furnace
heating region
reactant gases
pressure
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007101047077A
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English (en)
Chinese (zh)
Inventor
L·朗万
P·茹阿诺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Landing Systems SAS
Original Assignee
Messier Bugatti SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Messier Bugatti SA filed Critical Messier Bugatti SA
Publication of CN101063195A publication Critical patent/CN101063195A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CNA2007101047077A 2006-04-25 2007-04-25 处理用加热炉或者类似装置 Pending CN101063195A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0651455 2006-04-25
FR0651455A FR2900226B1 (fr) 2006-04-25 2006-04-25 Four de traitement ou analogue

Publications (1)

Publication Number Publication Date
CN101063195A true CN101063195A (zh) 2007-10-31

Family

ID=37116170

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007101047077A Pending CN101063195A (zh) 2006-04-25 2007-04-25 处理用加热炉或者类似装置

Country Status (15)

Country Link
US (1) US20070256639A1 (https=)
EP (1) EP1849889A1 (https=)
JP (1) JP5567332B2 (https=)
KR (1) KR20080111154A (https=)
CN (1) CN101063195A (https=)
AU (1) AU2007242730B2 (https=)
BR (1) BRPI0711411A2 (https=)
CA (1) CA2649986A1 (https=)
FR (1) FR2900226B1 (https=)
IL (1) IL194837A0 (https=)
MX (1) MX2008013643A (https=)
RU (1) RU2421544C2 (https=)
TW (1) TW200746876A (https=)
UA (1) UA94098C2 (https=)
WO (1) WO2007122225A1 (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102374780A (zh) * 2010-08-12 2012-03-14 北京大方科技有限责任公司 一种平焰炉的结构设计方案
CN102889791A (zh) * 2012-09-27 2013-01-23 北京七星华创电子股份有限公司 炉体排风控制装置
WO2013139288A1 (zh) * 2012-03-21 2013-09-26 中微半导体设备(上海)有限公司 控制化学气相沉积腔室内的基底加热的装置及方法
CN105862013A (zh) * 2016-06-17 2016-08-17 南京大学 一种应用于小型mocvd系统的高温加热装置
CN109197927A (zh) * 2018-08-31 2019-01-15 李明守 一种基于物联网控制的食品智能烘烤系统
CN110242969A (zh) * 2019-05-23 2019-09-17 北京科技大学 一种焚硫炉
CN121023471A (zh) * 2025-10-29 2025-11-28 湖南顶立科技股份有限公司 一种用于cvd沉积设备的复合加热系统、协同控制方法及其在制备碳化钽涂层中的应用

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101178046B1 (ko) * 2009-03-23 2012-08-29 한국실리콘주식회사 폴리실리콘 제조용 화학기상증착 반응기
WO2013055921A1 (en) * 2011-10-12 2013-04-18 Integrated Photovoltaic, Inc. Deposition system
FR2993044B1 (fr) * 2012-07-04 2014-08-08 Herakles Dispositif de chargement et installation pour la densification de preformes poreuses tronconiques et empilables
FR2993555B1 (fr) * 2012-07-19 2015-02-20 Herakles Installation d'infiltration chimique en phase vapeur a haute capacite de chargement
CN107151779B (zh) * 2017-05-27 2019-04-16 西华大学 渗氮可控的零污染离子氮化装置
CN115094402B (zh) * 2022-06-24 2023-04-11 清华大学 一种立式双温区-双通道化学气相沉积设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE393967B (sv) * 1974-11-29 1977-05-31 Sateko Oy Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket
FR2594119B1 (fr) * 1986-02-10 1988-06-03 Europ Propulsion Installation pour l'infiltration chimique en phase vapeur d'un materiau refractaire autre que le carbone
US5062386A (en) * 1987-07-27 1991-11-05 Epitaxy Systems, Inc. Induction heated pancake epitaxial reactor
JPH07108836B2 (ja) * 1991-02-01 1995-11-22 株式会社日本生産技術研究所 減圧ｃｖｄ装置
US5536918A (en) * 1991-08-16 1996-07-16 Tokyo Electron Sagami Kabushiki Kaisha Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers
JPH05214540A (ja) * 1992-02-05 1993-08-24 Hitachi Ltd Ｃｖｄ反応のモニタ方法
KR100251873B1 (ko) * 1993-01-21 2000-04-15 마쓰바 구니유키 종형 열처리 장치
FR2714076B1 (fr) * 1993-12-16 1996-03-15 Europ Propulsion Procédé de densification de substrats poreux par infiltration chimique en phase vapeur de carbure de silicium.
RU2173354C2 (ru) * 1994-11-16 2001-09-10 З Би.эФ. Гудрич Кампэни Способ и устройство инфильтрации газовой фазы химического вещества и химического осаждения из газовой фазы (варианты), изделие, получаемое этим способом, устройство для подачи первого газа-реагента в печь для инфильтрации и осаждения из газовой фазы и фрикционный диск
WO2000049199A1 (en) * 1999-02-19 2000-08-24 Gt Equipment Technologies Inc. Method and apparatus for chemical vapor deposition of polysilicon
US6228174B1 (en) * 1999-03-26 2001-05-08 Ichiro Takahashi Heat treatment system using ring-shaped radiation heater elements
CA2386382A1 (en) * 2000-02-18 2001-08-23 G.T. Equipment Technologies, Inc. Method and apparatus for chemical vapor deposition of polysilicon
US7220312B2 (en) * 2002-03-13 2007-05-22 Micron Technology, Inc. Methods for treating semiconductor substrates
JP4263024B2 (ja) * 2003-06-05 2009-05-13 株式会社ヒューモラボラトリー 炭素薄膜の製造方法および製造装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102374780A (zh) * 2010-08-12 2012-03-14 北京大方科技有限责任公司 一种平焰炉的结构设计方案
WO2013139288A1 (zh) * 2012-03-21 2013-09-26 中微半导体设备(上海)有限公司 控制化学气相沉积腔室内的基底加热的装置及方法
US9851151B2 (en) 2012-03-21 2017-12-26 Advanced Micro-Fabrication Equipment Inc, Shanghai Apparatus and method for controlling heating of base within chemical vapour deposition chamber
US10281215B2 (en) 2012-03-21 2019-05-07 Advanced Micro-Fabrication Equipment Inc, Shanghai Apparatus and method for controlling heating of base within chemical vapour deposition chamber
CN102889791A (zh) * 2012-09-27 2013-01-23 北京七星华创电子股份有限公司 炉体排风控制装置
CN105862013A (zh) * 2016-06-17 2016-08-17 南京大学 一种应用于小型mocvd系统的高温加热装置
CN105862013B (zh) * 2016-06-17 2018-07-06 南京大学 一种应用于小型mocvd系统的高温加热装置
CN109197927A (zh) * 2018-08-31 2019-01-15 李明守 一种基于物联网控制的食品智能烘烤系统
CN110242969A (zh) * 2019-05-23 2019-09-17 北京科技大学 一种焚硫炉
CN121023471A (zh) * 2025-10-29 2025-11-28 湖南顶立科技股份有限公司 一种用于cvd沉积设备的复合加热系统、协同控制方法及其在制备碳化钽涂层中的应用
CN121023471B (zh) * 2025-10-29 2026-02-13 湖南顶立科技股份有限公司 一种用于cvd沉积设备的复合加热系统、协同控制方法及其在制备碳化钽涂层中的应用

Also Published As

Publication number Publication date
AU2007242730A1 (en) 2007-11-01
RU2008143663A (ru) 2010-05-27
WO2007122225A1 (en) 2007-11-01
IL194837A0 (en) 2009-08-03
RU2421544C2 (ru) 2011-06-20
EP1849889A1 (en) 2007-10-31
JP5567332B2 (ja) 2014-08-06
TW200746876A (en) 2007-12-16
FR2900226B1 (fr) 2017-09-29
UA94098C2 (ru) 2011-04-11
CA2649986A1 (en) 2007-11-01
US20070256639A1 (en) 2007-11-08
JP2009534541A (ja) 2009-09-24
FR2900226A1 (fr) 2007-10-26
BRPI0711411A2 (pt) 2011-11-01
KR20080111154A (ko) 2008-12-22
MX2008013643A (es) 2008-11-10
AU2007242730B2 (en) 2012-02-23

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: MESSIER-BUGATTI-DOWTY, INC.

Free format text: FORMER OWNER: MESSIER-BUGATTI, INC.

Effective date: 20120627

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20120627

Address after: France Velizi Vee Laku Bly

Applicant after: Messier-Bugatti-Dowty

Address before: France Ji veraku Willie Bly

Applicant before: Messier Bugatti

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20071031