CN100565195C - 图形不匀缺陷检查方法和装置 - Google Patents

图形不匀缺陷检查方法和装置 Download PDF

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Publication number
CN100565195C
CN100565195C CNB2005100637716A CN200510063771A CN100565195C CN 100565195 C CN100565195 C CN 100565195C CN B2005100637716 A CNB2005100637716 A CN B2005100637716A CN 200510063771 A CN200510063771 A CN 200510063771A CN 100565195 C CN100565195 C CN 100565195C
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CN
China
Prior art keywords
light
mentioned
pattern
photomask
unit
Prior art date
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Expired - Fee Related
Application number
CNB2005100637716A
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English (en)
Chinese (zh)
Other versions
CN1677097A (zh
Inventor
小林正明
原督
山口昇
石川雄大
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Hoya Corp
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Hoya Corp
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Filing date
Publication date
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Publication of CN1677097A publication Critical patent/CN1677097A/zh
Application granted granted Critical
Publication of CN100565195C publication Critical patent/CN100565195C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H39/00—Devices for locating or stimulating specific reflex points of the body for physical therapy, e.g. acupuncture
    • A61H39/04—Devices for pressing such points, e.g. Shiatsu or Acupressure
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H15/00—Massage by means of rollers, balls, e.g. inflatable, chains, or roller chains
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H15/00—Massage by means of rollers, balls, e.g. inflatable, chains, or roller chains
    • A61H2015/0007—Massage by means of rollers, balls, e.g. inflatable, chains, or roller chains with balls or rollers rotating about their own axis
    • A61H2015/0014—Massage by means of rollers, balls, e.g. inflatable, chains, or roller chains with balls or rollers rotating about their own axis cylinder-like, i.e. rollers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/01—Constructive details
    • A61H2201/0192—Specific means for adjusting dimensions
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/12—Driving means
    • A61H2201/1253—Driving means driven by a human being, e.g. hand driven
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2205/00—Devices for specific parts of the body
    • A61H2205/12—Feet
    • A61H2205/125—Foot reflex zones

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Rehabilitation Therapy (AREA)
  • Epidemiology (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Pain & Pain Management (AREA)
  • Physical Education & Sports Medicine (AREA)
  • Biochemistry (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
CNB2005100637716A 2004-03-31 2005-03-31 图形不匀缺陷检查方法和装置 Expired - Fee Related CN100565195C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004106462A JP2005291874A (ja) 2004-03-31 2004-03-31 パターンのムラ欠陥検査方法及び装置
JP2004106462 2004-03-31

Publications (2)

Publication Number Publication Date
CN1677097A CN1677097A (zh) 2005-10-05
CN100565195C true CN100565195C (zh) 2009-12-02

Family

ID=35049734

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005100637716A Expired - Fee Related CN100565195C (zh) 2004-03-31 2005-03-31 图形不匀缺陷检查方法和装置

Country Status (5)

Country Link
US (1) US20050220330A1 (enExample)
JP (1) JP2005291874A (enExample)
KR (1) KR20060045078A (enExample)
CN (1) CN100565195C (enExample)
TW (1) TWI266872B (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4583155B2 (ja) * 2004-12-13 2010-11-17 Ｈｏｙａ株式会社 欠陥検査方法及びシステム、並びにフォトマスクの製造方法
CN100565630C (zh) * 2006-01-04 2009-12-02 台湾薄膜电晶体液晶显示器产业协会 显示器多角度测量系统与方法
TWI354100B (en) * 2006-06-01 2011-12-11 Dainippon Screen Mfg Unevenness inspecting method, unevenness inspectin
JP4949928B2 (ja) * 2006-06-20 2012-06-13 Ｈｏｙａ株式会社 パターン欠陥検査方法、パターン欠陥検査装置、フォトマスク製品の製造方法、及び表示デバイス用基板の製造方法
KR101702887B1 (ko) * 2007-04-18 2017-02-06 마이크로닉 마이데이타 에이비 무라 검출 및 계측을 위한 방법 및 장치
US8228497B2 (en) * 2007-07-12 2012-07-24 Applied Materials Israel, Ltd. Method and system for evaluating an object that has a repetitive pattern
US20090199152A1 (en) * 2008-02-06 2009-08-06 Micronic Laser Systems Ab Methods and apparatuses for reducing mura effects in generated patterns
JP5178561B2 (ja) * 2009-02-06 2013-04-10 Ｈｏｙａ株式会社 パターン検査方法、パターン検査装置、フォトマスク製造方法、およびパターン転写方法
CN101592812B (zh) * 2009-06-23 2012-05-23 友达光电（苏州）有限公司 显示面板及其像素缺陷检查方法
WO2014140047A2 (en) 2013-03-12 2014-09-18 Micronic Mydata AB Method and device for writing photomasks with reduced mura errors
CN105143987B (zh) 2013-03-12 2017-10-20 麦克罗尼克迈达塔有限责任公司 机械制造的对准基准方法和对准系统
CN106536784B (zh) * 2014-06-06 2019-08-30 大日本印刷株式会社 蒸镀掩模及其前体、以及有机半导体元件的制造方法
CN104914133B (zh) * 2015-06-19 2017-12-22 合肥京东方光电科技有限公司 摩擦缺陷检测装置
CN105974731B (zh) * 2016-07-25 2020-01-03 京东方科技集团股份有限公司 一种压印板、检测方法及检测装置
CN107911602B (zh) * 2017-11-23 2020-05-05 武汉华星光电半导体显示技术有限公司 显示面板Mura的检测方法、检测装置及计算机可读存储介质
TWI672493B (zh) * 2018-03-07 2019-09-21 由田新技股份有限公司 用於檢測面板斑紋的光學檢測系統及其方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL100443A (en) * 1991-12-20 1995-03-30 Dotan Gideon Inspection system for detecting surface flaws
JP2001013085A (ja) * 1999-06-30 2001-01-19 Nidek Co Ltd 欠陥検査装置

Also Published As

Publication number Publication date
CN1677097A (zh) 2005-10-05
TW200612089A (en) 2006-04-16
JP2005291874A (ja) 2005-10-20
KR20060045078A (ko) 2006-05-16
US20050220330A1 (en) 2005-10-06
TWI266872B (en) 2006-11-21

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SE01 Entry into force of request for substantive examination
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Granted publication date: 20091202

Termination date: 20140331