CN100505207C - 基片检查装置中的多用途平台 - Google Patents

基片检查装置中的多用途平台 Download PDF

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Publication number
CN100505207C
CN100505207C CNB2003101001003A CN200310100100A CN100505207C CN 100505207 C CN100505207 C CN 100505207C CN B2003101001003 A CNB2003101001003 A CN B2003101001003A CN 200310100100 A CN200310100100 A CN 200310100100A CN 100505207 C CN100505207 C CN 100505207C
Authority
CN
China
Prior art keywords
guide
substrate
fixture
movable plate
framework
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2003101001003A
Other languages
English (en)
Chinese (zh)
Other versions
CN1576827A (zh
Inventor
沈在信
李东仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DE&T Co Ltd
Original Assignee
DE&T Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DE&T Co Ltd filed Critical DE&T Co Ltd
Publication of CN1576827A publication Critical patent/CN1576827A/zh
Application granted granted Critical
Publication of CN100505207C publication Critical patent/CN100505207C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CNB2003101001003A 2003-07-02 2003-10-08 基片检查装置中的多用途平台 Expired - Fee Related CN100505207C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2003-0044608A KR100530982B1 (ko) 2003-07-02 2003-07-02 기판 검사장치용 멀티 스테이지
KR1020030044608 2003-07-02

Publications (2)

Publication Number Publication Date
CN1576827A CN1576827A (zh) 2005-02-09
CN100505207C true CN100505207C (zh) 2009-06-24

Family

ID=34587783

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2003101001003A Expired - Fee Related CN100505207C (zh) 2003-07-02 2003-10-08 基片检查装置中的多用途平台

Country Status (3)

Country Link
KR (1) KR100530982B1 (ko)
CN (1) CN100505207C (ko)
TW (1) TWI226098B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100670288B1 (ko) * 2005-02-05 2007-01-16 삼성에스디아이 주식회사 기판 고정용 지그장치, 이를 구비한 누설전류 측정장치,및 누설전류 측정방법
KR100654808B1 (ko) * 2005-07-01 2006-12-08 삼성전자주식회사 패널지지장치
KR100686100B1 (ko) * 2005-07-20 2007-02-26 엘지전자 주식회사 이동통신기기용 액정표시장치의 충격 테스트용 지그
KR101290743B1 (ko) * 2011-10-07 2013-07-29 삼성중공업 주식회사 곡가공용 부재고정장치
CN103399020A (zh) * 2013-07-24 2013-11-20 惠晶显示科技（苏州）有限公司 玻璃检验装置
KR102007907B1 (ko) 2016-07-26 2019-08-06 에이피시스템 주식회사 피처리물 지지 장치, 피처리물 처리 장치 및 피처리물 처리 방법
KR102184167B1 (ko) * 2020-04-29 2020-11-27 가온솔루션 주식회사 검사장비용 워크 스테이지

Also Published As

Publication number Publication date
TW200503142A (en) 2005-01-16
KR100530982B1 (ko) 2005-11-28
TWI226098B (en) 2005-01-01
CN1576827A (zh) 2005-02-09
KR20050004434A (ko) 2005-01-12

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090624

Termination date: 20111008