TWI226098B - Multi-purpose stage in substrate inspection apparatus - Google Patents

Multi-purpose stage in substrate inspection apparatus Download PDF

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Publication number
TWI226098B
TWI226098B TW092127110A TW92127110A TWI226098B TW I226098 B TWI226098 B TW I226098B TW 092127110 A TW092127110 A TW 092127110A TW 92127110 A TW92127110 A TW 92127110A TW I226098 B TWI226098 B TW I226098B
Authority
TW
Taiwan
Prior art keywords
substrate
guide
item
scope
device described
Prior art date
Application number
TW092127110A
Other languages
English (en)
Chinese (zh)
Other versions
TW200503142A (en
Inventor
Jae-Sin Sim
Dong-In Lee
Original Assignee
De & T Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De & T Co Ltd filed Critical De & T Co Ltd
Application granted granted Critical
Publication of TWI226098B publication Critical patent/TWI226098B/zh
Publication of TW200503142A publication Critical patent/TW200503142A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW092127110A 2003-07-02 2003-09-30 Multi-purpose stage in substrate inspection apparatus TWI226098B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0044608A KR100530982B1 (ko) 2003-07-02 2003-07-02 기판 검사장치용 멀티 스테이지

Publications (2)

Publication Number Publication Date
TWI226098B true TWI226098B (en) 2005-01-01
TW200503142A TW200503142A (en) 2005-01-16

Family

ID=34587783

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092127110A TWI226098B (en) 2003-07-02 2003-09-30 Multi-purpose stage in substrate inspection apparatus

Country Status (3)

Country Link
KR (1) KR100530982B1 (ko)
CN (1) CN100505207C (ko)
TW (1) TWI226098B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100670288B1 (ko) * 2005-02-05 2007-01-16 삼성에스디아이 주식회사 기판 고정용 지그장치, 이를 구비한 누설전류 측정장치,및 누설전류 측정방법
KR100654808B1 (ko) * 2005-07-01 2006-12-08 삼성전자주식회사 패널지지장치
KR100686100B1 (ko) * 2005-07-20 2007-02-26 엘지전자 주식회사 이동통신기기용 액정표시장치의 충격 테스트용 지그
KR101290743B1 (ko) * 2011-10-07 2013-07-29 삼성중공업 주식회사 곡가공용 부재고정장치
CN103399020A (zh) * 2013-07-24 2013-11-20 惠晶显示科技（苏州）有限公司 玻璃检验装置
KR102007907B1 (ko) 2016-07-26 2019-08-06 에이피시스템 주식회사 피처리물 지지 장치, 피처리물 처리 장치 및 피처리물 처리 방법
KR102184167B1 (ko) * 2020-04-29 2020-11-27 가온솔루션 주식회사 검사장비용 워크 스테이지

Also Published As

Publication number Publication date
TW200503142A (en) 2005-01-16
KR100530982B1 (ko) 2005-11-28
CN1576827A (zh) 2005-02-09
KR20050004434A (ko) 2005-01-12
CN100505207C (zh) 2009-06-24

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees