CN100498615C - 根据状态估算结果调整采样率的方法 - Google Patents

根据状态估算结果调整采样率的方法 Download PDF

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Publication number
CN100498615C
CN100498615C CNB2003801102197A CN200380110219A CN100498615C CN 100498615 C CN100498615 C CN 100498615C CN B2003801102197 A CNB2003801102197 A CN B2003801102197A CN 200380110219 A CN200380110219 A CN 200380110219A CN 100498615 C CN100498615 C CN 100498615C
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processing
state
workpiece
measured
subsequent treatment
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CN1759358A (zh
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J·王
B·K·卡森
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Advanced Micro Devices Inc
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Advanced Micro Devices Inc
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32077—Batch control system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32078—Calculate process end time, form batch of workpieces and transport to process
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32096—Batch, recipe configuration for flexible batch control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50065—Estimate trends from past measured values, correct before really out of tolerance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Drying Of Semiconductors (AREA)
  • Feedback Control In General (AREA)
  • General Factory Administration (AREA)
CNB2003801102197A 2003-04-03 2003-12-22 根据状态估算结果调整采样率的方法 Expired - Lifetime CN100498615C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/406,675 2003-04-03
US10/406,675 US6766214B1 (en) 2003-04-03 2003-04-03 Adjusting a sampling rate based on state estimation results

Publications (2)

Publication Number Publication Date
CN1759358A CN1759358A (zh) 2006-04-12
CN100498615C true CN100498615C (zh) 2009-06-10

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Country Link
US (1) US6766214B1 (enExample)
JP (1) JP4745668B2 (enExample)
KR (1) KR101113203B1 (enExample)
CN (1) CN100498615C (enExample)
AU (1) AU2003300341A1 (enExample)
DE (1) DE10394223B4 (enExample)
GB (1) GB2416045B (enExample)
TW (1) TWI330323B (enExample)
WO (1) WO2004095154A1 (enExample)

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US7257502B1 (en) * 2006-02-28 2007-08-14 Advanced Micro Devices, Inc. Determining metrology sampling decisions based on fabrication simulation
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US7933666B2 (en) * 2006-11-10 2011-04-26 Rockwell Automation Technologies, Inc. Adjustable data collection rate for embedded historians
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JP5634864B2 (ja) 2007-05-30 2014-12-03 ケーエルエー−テンカー・コーポレーションＫｌａ−Ｔｅｎｃｏｒ Ｃｏｒｐｏｒａｔｉｏｎ リソグラフィック・プロセスに於ける、プロセス制御方法およびプロセス制御装置
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US7962440B2 (en) * 2007-09-27 2011-06-14 Rockwell Automation Technologies, Inc. Adaptive industrial systems via embedded historian data
US7809656B2 (en) * 2007-09-27 2010-10-05 Rockwell Automation Technologies, Inc. Microhistorians as proxies for data transfer
US7882218B2 (en) * 2007-09-27 2011-02-01 Rockwell Automation Technologies, Inc. Platform independent historian
US20090089671A1 (en) * 2007-09-28 2009-04-02 Rockwell Automation Technologies, Inc. Programmable controller programming with embedded macro capability
JP2009224374A (ja) * 2008-03-13 2009-10-01 Oki Semiconductor Co Ltd Ｐｅｂ装置及びその制御方法
CN101872714B (zh) * 2009-04-24 2012-06-20 中芯国际集成电路制造(上海)有限公司 晶圆在线检测方法及系统
NL2004887A (en) * 2009-06-24 2010-12-27 Asml Netherlands Bv Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method.
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TWI607825B (zh) * 2016-11-29 2017-12-11 財團法人工業技術研究院 自動化加工程式切削力優化系統及方法
EP3709110A1 (de) * 2019-03-14 2020-09-16 GKN Sinter Metals Engineering GmbH Verfahren zur steuerung eines produktionsprozesses zur herstellung von bauteilen
EP3783448B1 (de) * 2019-08-19 2025-10-22 GKN Sinter Metals Engineering GmbH Verfahren zur prüfung eines produktionsprozesses zur herstellung von bauteilen
EP3848767B1 (de) * 2020-01-13 2023-11-01 Hexagon Technology Center GmbH Verfahren zur qualitätskontrolle von werkstücken sowie koordinatenmessgerät und computerprogramm
CN114305368B (zh) * 2020-09-27 2025-05-20 深圳海翼智新科技有限公司 心率监测方法、装置及设备

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Publication number Publication date
CN1759358A (zh) 2006-04-12
DE10394223B4 (de) 2012-04-19
US6766214B1 (en) 2004-07-20
GB2416045B (en) 2006-08-09
KR20050120697A (ko) 2005-12-22
GB2416045A (en) 2006-01-11
JP2006515114A (ja) 2006-05-18
WO2004095154A1 (en) 2004-11-04
AU2003300341A1 (en) 2004-11-19
DE10394223T5 (de) 2006-06-08
KR101113203B1 (ko) 2012-02-15
TWI330323B (en) 2010-09-11
TW200424873A (en) 2004-11-16
GB0519909D0 (en) 2005-11-09
JP4745668B2 (ja) 2011-08-10

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