KR20050120697A - 상태 추정 결과에 기초한 샘플링 레이트 조정 - Google Patents
상태 추정 결과에 기초한 샘플링 레이트 조정 Download PDFInfo
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- KR20050120697A KR20050120697A KR1020057018826A KR20057018826A KR20050120697A KR 20050120697 A KR20050120697 A KR 20050120697A KR 1020057018826 A KR1020057018826 A KR 1020057018826A KR 20057018826 A KR20057018826 A KR 20057018826A KR 20050120697 A KR20050120697 A KR 20050120697A
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32077—Batch control system
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32078—Calculate process end time, form batch of workpieces and transport to process
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32096—Batch, recipe configuration for flexible batch control
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50065—Estimate trends from past measured values, correct before really out of tolerance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Drying Of Semiconductors (AREA)
- Feedback Control In General (AREA)
- General Factory Administration (AREA)
Abstract
Description
Claims (10)
- 하나 이상의 이전에 처리된 워크피스(workpiece)와 연관되는 측정 데이터를 수신하는 단계와;상기 측정 데이터의 적어도 일부에 기초하여 후차 공정 상태를 추정하는 단계와;상기 추정된 후차 공정 상태와 연관되는 에러 값을 결정하는 단계와;상기 추정된 후차 공정 상태에 기초하여 복수의 워크피스를 처리하는 단계와; 그리고상기 결정된 에러 값에 기초하여 측정될 상기 처리된 워크피스의 샘플링 프로토콜을 조정하는 단계를 포함하는 것을 특징으로 하는 방법.
- 제 1항에 있어서, 상기 후차 공정 상태를 추정하는 단계는 이전 상태 추정 및 상태 공간 모델에 기초하여 상기 후차 공정 상태를 추정하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 1항에 있어서, 상기 샘플링 프로토콜을 조정하는 단계는 측정될 상기 처리된 워크피스의 개수, 측정될 상기 처리된 워크피스 상에 형성된 피처(feature)의 개수, 및 측정될 피처의 타입 중 적어도 하나를 조정하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 3항에 있어서, 상기 에러 값을 결정하는 단계는 상기 추정된 후차 공정 상태와 연관되는 에러 분산을 결정하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 4항에 있어서, 상기 처리된 워크피스의 수를 조정하는 단계는 상기 에러 분산이 사전선택된 드레쉬홀드 값보다 큰 경우에 측정될 상기 처리된 워크피스의 개수를 증가시키며, 상기 에러 분산이 사전선택된 드레쉬홀드 값보다 작은 경우에 측정될 상기 처리된 워크피스의 개수를 감소시키는 것을 포함하는 것을 특징으로 하는 방법.
- 제 5항에 있어서, 각 복수의 공정 실행에 대한 에러 분산을 결정하는 단계를 더 포함하며, 상기 처리된 워크피스의 개수를 조정하는 단계는 상기 각 복수의 공정 실행에 대한 에러 분산이 상기 사전선택된 드레쉬홀드 값보다 작은 경우에 측정될 상기 처리된 워크피스의 개수를 감소시키는 것을 포함하는 것을 특징으로 하는 방법.
- 워크피스의 처리와 연관되는 측정 데이터를 수신하는 인터페이스와; 그리고상기 인터페이스에 통신으로 연결된 제어 유닛(155)을 포함하여 구성되며, 여기서 상기 제어 유닛(155)은:상기 측정 데이터의 적어도 일부에 기초하여 후차 공정 상태를 추정하며;상기 추정된 후차 공정 상태와 연관되는 에러 값을 결정하며;상기 추정된 후차 공정 상태에 기초하여 복수의 워크피스를 처리하며; 그리고상기 결정된 에러 값에 기초하여 측정될 상기 처리된 워크피스의 샘플링 프로토콜을 조정하는 것을 특징으로 하는 장치(120).
- 제 7항에 있어서, 상기 제어 유닛은 복수의 반도체 웨이퍼를 처리하며, 칼만 필터를 사용하여 상기 후차 공정 상태를 추정하고, 상기 제어 유닛은 이전의 상태 추정에 기초하여 상기 후차 공정 상태를 추정하는 것을 특징으로 하는 장치.
- 제 7항에 있어서, 상기 제어 유닛이 상기 에러 값을 결정하는 단계는 상기 추정된 후차 공정 상태와 연관되는 에러 분산을 결정하는 것을 포함하는 것을 특징으로 하는 장치.
- 제 9항에 있어서, 상기 제어 유닛은, 상기 에러 분산이 사전선택된 드레쉬홀드 값보다 큰 경우에 측정될 상기 처리된 워크피스의 개수의 증가, 및 상기 에러 분산이 사전선택된 드레쉬홀드 값보다 작은 경우에 측정될 상기 처리된 워크피스 개수의 감소 중 적어도 하나로 되는 것을 특징으로 하는 장치.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/406,675 | 2003-04-03 | ||
US10/406,675 US6766214B1 (en) | 2003-04-03 | 2003-04-03 | Adjusting a sampling rate based on state estimation results |
PCT/US2003/041177 WO2004095154A1 (en) | 2003-04-03 | 2003-12-22 | Adjusting a sampling rate based on state estimation results |
Publications (2)
Publication Number | Publication Date |
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KR20050120697A true KR20050120697A (ko) | 2005-12-22 |
KR101113203B1 KR101113203B1 (ko) | 2012-02-15 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020057018826A KR101113203B1 (ko) | 2003-04-03 | 2003-12-22 | 상태 추정 결과에 기초한 샘플링 레이트 조정 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6766214B1 (ko) |
JP (1) | JP4745668B2 (ko) |
KR (1) | KR101113203B1 (ko) |
CN (1) | CN100498615C (ko) |
AU (1) | AU2003300341A1 (ko) |
DE (1) | DE10394223B4 (ko) |
GB (1) | GB2416045B (ko) |
TW (1) | TWI330323B (ko) |
WO (1) | WO2004095154A1 (ko) |
Cited By (1)
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2003
- 2003-04-03 US US10/406,675 patent/US6766214B1/en not_active Expired - Lifetime
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- 2003-12-22 CN CNB2003801102197A patent/CN100498615C/zh not_active Expired - Lifetime
- 2003-12-22 GB GB0519909A patent/GB2416045B/en not_active Expired - Lifetime
- 2003-12-22 WO PCT/US2003/041177 patent/WO2004095154A1/en active Application Filing
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100724187B1 (ko) * | 2005-12-27 | 2007-05-31 | 동부일렉트로닉스 주식회사 | Apc 시스템에서 포토공정 cd 제어 방법 |
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CN1759358A (zh) | 2006-04-12 |
GB2416045A (en) | 2006-01-11 |
DE10394223B4 (de) | 2012-04-19 |
JP2006515114A (ja) | 2006-05-18 |
TW200424873A (en) | 2004-11-16 |
KR101113203B1 (ko) | 2012-02-15 |
US6766214B1 (en) | 2004-07-20 |
WO2004095154A1 (en) | 2004-11-04 |
TWI330323B (en) | 2010-09-11 |
JP4745668B2 (ja) | 2011-08-10 |
CN100498615C (zh) | 2009-06-10 |
GB2416045B (en) | 2006-08-09 |
AU2003300341A1 (en) | 2004-11-19 |
DE10394223T5 (de) | 2006-06-08 |
GB0519909D0 (en) | 2005-11-09 |
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