CN100483172C - 投影光学系统，曝光装置以及设备的制造方法 - Google Patents

投影光学系统，曝光装置以及设备的制造方法 Download PDF

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Publication number
CN100483172C
CN100483172C CNB021466696A CN02146669A CN100483172C CN 100483172 C CN100483172 C CN 100483172C CN B021466696 A CNB021466696 A CN B021466696A CN 02146669 A CN02146669 A CN 02146669A CN 100483172 C CN100483172 C CN 100483172C
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CN
China
Prior art keywords
optical system
lens group
projection optical
mentioned
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB021466696A
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English (en)
Chinese (zh)
Other versions
CN1417610A (zh
Inventor
重松幸二
工藤慎太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
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Nikon Corp
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Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN1417610A publication Critical patent/CN1417610A/zh
Application granted granted Critical
Publication of CN100483172C publication Critical patent/CN100483172C/zh
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CNB021466696A 2001-11-05 2002-11-01 投影光学系统，曝光装置以及设备的制造方法 Expired - Fee Related CN100483172C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001339424 2001-11-05
JP339424/2001 2001-11-05
JP200695/2002 2002-07-10
JP2002200695A JP4228130B2 (ja) 2001-11-05 2002-07-10 投影光学系、露光装置及びデバイスの製造方法

Publications (2)

Publication Number Publication Date
CN1417610A CN1417610A (zh) 2003-05-14
CN100483172C true CN100483172C (zh) 2009-04-29

Family

ID=26624347

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB021466696A Expired - Fee Related CN100483172C (zh) 2001-11-05 2002-11-01 投影光学系统，曝光装置以及设备的制造方法

Country Status (4)

Country Link
JP (1) JP4228130B2 (enExample)
KR (1) KR20030038427A (enExample)
CN (1) CN100483172C (enExample)
TW (1) TW588223B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005017734A (ja) * 2003-06-26 2005-01-20 Nikon Corp 投影光学系、露光装置、およびデバイス製造方法
JP4779394B2 (ja) * 2005-03-23 2011-09-28 株式会社ニコン 投影光学系、露光装置、および露光方法
JP2010091751A (ja) 2008-10-07 2010-04-22 Canon Inc 投影光学系及び露光装置
CN102486569B (zh) * 2010-12-01 2014-06-18 上海微电子装备有限公司 一种投影物镜系统
CN103105666B (zh) * 2011-11-10 2015-04-15 上海微电子装备有限公司 一种曝光投影物镜
CN103364928B (zh) * 2012-03-31 2015-09-30 上海微电子装备有限公司 一种投影物镜光学系统
CN107664809B (zh) * 2016-07-29 2019-11-26 上海微电子装备（集团）股份有限公司 一种投影物镜

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3819048B2 (ja) * 1995-03-15 2006-09-06 株式会社ニコン 投影光学系及びそれを備えた露光装置並びに露光方法
JP3864399B2 (ja) * 1996-08-08 2006-12-27 株式会社ニコン 投影露光装置及び該投影露光装置に用いられる投影光学系並びにデバイス製造方法
JP2000056219A (ja) * 1998-08-11 2000-02-25 Nikon Corp 投影光学系
JP2001051193A (en) * 1999-06-03 2001-02-23 Nikon Corp Projection optical system projection exposing device provided with the system and manufacture of device

Also Published As

Publication number Publication date
TW588223B (en) 2004-05-21
CN1417610A (zh) 2003-05-14
JP4228130B2 (ja) 2009-02-25
KR20030038427A (ko) 2003-05-16
JP2003202494A (ja) 2003-07-18

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Granted publication date: 20090429

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