CN100453702C - 等离子体处理装置及其部件和部件的寿命检测方法 - Google Patents
等离子体处理装置及其部件和部件的寿命检测方法 Download PDFInfo
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- CN100453702C CN100453702C CNB2006100082257A CN200610008225A CN100453702C CN 100453702 C CN100453702 C CN 100453702C CN B2006100082257 A CNB2006100082257 A CN B2006100082257A CN 200610008225 A CN200610008225 A CN 200610008225A CN 100453702 C CN100453702 C CN 100453702C
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005040870A JP4409459B2 (ja) | 2005-02-17 | 2005-02-17 | プラズマ処理装置およびその部品と部品の寿命検出方法 |
JP2005040870 | 2005-02-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1821448A CN1821448A (zh) | 2006-08-23 |
CN100453702C true CN100453702C (zh) | 2009-01-21 |
Family
ID=36923013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100082257A Expired - Fee Related CN100453702C (zh) | 2005-02-17 | 2006-02-16 | 等离子体处理装置及其部件和部件的寿命检测方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4409459B2 (ja) |
CN (1) | CN100453702C (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101087514B1 (ko) * | 2006-09-11 | 2011-11-28 | 가부시키가이샤 알박 | 드라이 에칭 방법 |
KR101124795B1 (ko) * | 2008-03-28 | 2012-03-23 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리장치, 챔버내 부품 및 챔버내 부품의 수명 검출 방법 |
JP2009245988A (ja) * | 2008-03-28 | 2009-10-22 | Tokyo Electron Ltd | プラズマ処理装置、チャンバ内部品及びチャンバ内部品の寿命検出方法 |
JP2012009659A (ja) * | 2010-06-25 | 2012-01-12 | Panasonic Corp | ドライエッチング装置及びそれに使用される隔壁カバー部 |
JP5630319B2 (ja) * | 2011-02-23 | 2014-11-26 | 三菱マテリアル株式会社 | プラズマ処理装置用部品及び識別表示の刻印方法 |
JP2013016532A (ja) * | 2011-06-30 | 2013-01-24 | Tokyo Electron Ltd | シリコン製部品の製造方法及びエッチング処理装置用のシリコン製部品 |
JP6311255B2 (ja) * | 2013-09-26 | 2018-04-18 | 株式会社ジェイテクト | 軸受、及び軸受の製造方法、並びに軸受の管理方法 |
US10041868B2 (en) * | 2015-01-28 | 2018-08-07 | Lam Research Corporation | Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber |
US10651097B2 (en) | 2018-08-30 | 2020-05-12 | Lam Research Corporation | Using identifiers to map edge ring part numbers onto slot numbers |
US20240145281A1 (en) * | 2022-10-27 | 2024-05-02 | Applied Materials, Inc. | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4936608A (en) * | 1987-08-27 | 1990-06-26 | Daimler-Benz Ag | Marking of industrial products or individual parts thereof |
US6176434B1 (en) * | 1998-04-17 | 2001-01-23 | Forensic Technology Wai Inc. | Method and structure for identifying solid objects having a dynamic surface |
CN1432071A (zh) * | 2000-03-27 | 2003-07-23 | 应用材料有限公司 | 加工配套元件部件及其使用方法 |
US20040055489A1 (en) * | 2002-09-19 | 2004-03-25 | William Burrow | Printing rolls having wear indicators and methods for determining wear of printing and anilox rolls and sleeves |
US20040125360A1 (en) * | 2002-12-31 | 2004-07-01 | Tokyo Electron Limited | Monitoring erosion of system components by optical emission |
US6837966B2 (en) * | 2002-09-30 | 2005-01-04 | Tokyo Electron Limeted | Method and apparatus for an improved baffle plate in a plasma processing system |
-
2005
- 2005-02-17 JP JP2005040870A patent/JP4409459B2/ja not_active Expired - Fee Related
-
2006
- 2006-02-16 CN CNB2006100082257A patent/CN100453702C/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4936608A (en) * | 1987-08-27 | 1990-06-26 | Daimler-Benz Ag | Marking of industrial products or individual parts thereof |
US6176434B1 (en) * | 1998-04-17 | 2001-01-23 | Forensic Technology Wai Inc. | Method and structure for identifying solid objects having a dynamic surface |
CN1432071A (zh) * | 2000-03-27 | 2003-07-23 | 应用材料有限公司 | 加工配套元件部件及其使用方法 |
US20040055489A1 (en) * | 2002-09-19 | 2004-03-25 | William Burrow | Printing rolls having wear indicators and methods for determining wear of printing and anilox rolls and sleeves |
US6837966B2 (en) * | 2002-09-30 | 2005-01-04 | Tokyo Electron Limeted | Method and apparatus for an improved baffle plate in a plasma processing system |
US20040125360A1 (en) * | 2002-12-31 | 2004-07-01 | Tokyo Electron Limited | Monitoring erosion of system components by optical emission |
Also Published As
Publication number | Publication date |
---|---|
CN1821448A (zh) | 2006-08-23 |
JP4409459B2 (ja) | 2010-02-03 |
JP2006228966A (ja) | 2006-08-31 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090121 Termination date: 20160216 |
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CF01 | Termination of patent right due to non-payment of annual fee |