CN100452469C - 使用显微机械加工的超声换能器的镶嵌式阵列 - Google Patents

使用显微机械加工的超声换能器的镶嵌式阵列 Download PDF

Info

Publication number
CN100452469C
CN100452469C CNB200410008013XA CN200410008013A CN100452469C CN 100452469 C CN100452469 C CN 100452469C CN B200410008013X A CNB200410008013X A CN B200410008013XA CN 200410008013 A CN200410008013 A CN 200410008013A CN 100452469 C CN100452469 C CN 100452469C
Authority
CN
China
Prior art keywords
array
subelement
mut
switch
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB200410008013XA
Other languages
English (en)
Chinese (zh)
Other versions
CN1527414A (zh
Inventor
K·托梅纽斯
R·A·菲舍尔
D·M·米尔斯
R·G·沃德尼基
C·R·哈扎德
L·S·史密斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN1527414A publication Critical patent/CN1527414A/zh
Application granted granted Critical
Publication of CN100452469C publication Critical patent/CN100452469C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B81/00—Power-actuated vehicle locks
    • E05B81/54—Electrical circuits
    • E05B81/56—Control of actuators
    • E05B81/60—Control of actuators using pulse control, e.g. pulse-width modulation
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B83/00—Vehicle locks specially adapted for particular types of wing or vehicle
    • E05B83/16—Locks for luggage compartments, car boot lids or car bonnets
    • E05B83/18—Locks for luggage compartments, car boot lids or car bonnets for car boot lids or rear luggage compartments
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B77/00—Vehicle locks characterised by special functions or purposes
    • E05B77/44—Burglar prevention, e.g. protecting against opening by unauthorised tools
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2900/00—Application of doors, windows, wings or fittings thereof
    • E05Y2900/50—Application of doors, windows, wings or fittings thereof for vehicles
    • E05Y2900/53—Type of wing
    • E05Y2900/548—Trunk lids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CNB200410008013XA 2003-03-06 2004-03-05 使用显微机械加工的超声换能器的镶嵌式阵列 Expired - Fee Related CN100452469C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/383990 2003-03-06
US10/383,990 US6865140B2 (en) 2003-03-06 2003-03-06 Mosaic arrays using micromachined ultrasound transducers

Publications (2)

Publication Number Publication Date
CN1527414A CN1527414A (zh) 2004-09-08
CN100452469C true CN100452469C (zh) 2009-01-14

Family

ID=32869127

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB200410008013XA Expired - Fee Related CN100452469C (zh) 2003-03-06 2004-03-05 使用显微机械加工的超声换能器的镶嵌式阵列

Country Status (5)

Country Link
US (1) US6865140B2 (enExample)
JP (1) JP4293309B2 (enExample)
KR (1) KR101037819B1 (enExample)
CN (1) CN100452469C (enExample)
DE (1) DE102004011193A1 (enExample)

Families Citing this family (165)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7313053B2 (en) * 2003-03-06 2007-12-25 General Electric Company Method and apparatus for controlling scanning of mosaic sensor array
US7353056B2 (en) * 2003-03-06 2008-04-01 General Electric Company Optimized switching configurations for reconfigurable arrays of sensor elements
US7257051B2 (en) 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US7443765B2 (en) * 2003-03-06 2008-10-28 General Electric Company Reconfigurable linear sensor arrays for reduced channel count
US7280435B2 (en) * 2003-03-06 2007-10-09 General Electric Company Switching circuitry for reconfigurable arrays of sensor elements
US6918877B2 (en) * 2003-08-05 2005-07-19 Siemens Medical Solutions Usa, Inc. Method and system for reducing undesirable cross talk in diagnostic ultrasound arrays
JP4688213B2 (ja) * 2003-10-02 2011-05-25 株式会社日立メディコ 超音波探触子、超音波撮像装置および超音波撮像方法
WO2005046443A2 (en) * 2003-11-07 2005-05-26 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7612483B2 (en) * 2004-02-27 2009-11-03 Georgia Tech Research Corporation Harmonic cMUT devices and fabrication methods
US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
US20080294050A1 (en) * 2004-07-08 2008-11-27 Ryuichi Shinomura Ultrasonic Imaging Apparatus
US7300403B2 (en) * 2004-07-20 2007-11-27 Angelsen Bjoern A J Wide aperture array design with constrained outer probe dimension
KR100689876B1 (ko) 2004-12-20 2007-03-09 삼성전자주식회사 초음파 변환 재생방법에 의한 음향재생 스크린
US7293462B2 (en) * 2005-01-04 2007-11-13 General Electric Company Isolation of short-circuited sensor cells for high-reliability operation of sensor array
CN101160098B (zh) 2005-05-09 2011-01-05 株式会社日立医药 超声波诊断装置
EP1883956A4 (en) * 2005-05-18 2011-03-23 Kolo Technologies Inc BY-THE-WAFER CONNECTION
CA2607918A1 (en) 2005-05-18 2006-11-23 Kolo Technologies, Inc. Micro-electro-mechanical transducers
JP4790315B2 (ja) * 2005-05-31 2011-10-12 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子
US7589456B2 (en) * 2005-06-14 2009-09-15 Siemens Medical Solutions Usa, Inc. Digital capacitive membrane transducer
CN101558552B (zh) * 2005-06-17 2017-05-31 科隆科技公司 具有绝缘延伸部的微机电换能器
JP4991722B2 (ja) * 2005-08-08 2012-08-01 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 超音波トランスデューサアレイ
US8477983B2 (en) * 2005-08-23 2013-07-02 Analog Devices, Inc. Multi-microphone system
JP4880275B2 (ja) * 2005-10-03 2012-02-22 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子装置
US7723900B2 (en) * 2005-10-28 2010-05-25 Pcb Motor Aps Electro-mechanical wave device
US7872399B2 (en) 2005-11-11 2011-01-18 Hitachi Medical Corporation Ultrasonic probe and ultrasonic diagnosis apparatus
WO2007058056A1 (ja) 2005-11-18 2007-05-24 Hitachi Medical Corporation 超音波診断装置、超音波診断装置の較正方法
JP4839099B2 (ja) * 2006-03-03 2011-12-14 オリンパスメディカルシステムズ株式会社 マイクロマシンプロセスにより製造された超音波振動子、超音波振動子装置、その体腔内超音波診断装置、及びその制御方法
JP4804961B2 (ja) * 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 超音波振動子及びそれを搭載した体腔内超音波診断装置
WO2007115283A2 (en) * 2006-04-04 2007-10-11 Kolo Technologies, Inc. Modulation in micromachined ultrasonic transducers
JP2009539537A (ja) * 2006-06-14 2009-11-19 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 経皮ドラッグデリバリー（ｄｒｕｇｄｅｌｉｖｅｒｙ）装置及びそのような装置の作動方法
US7874991B2 (en) * 2006-06-23 2011-01-25 Teratech Corporation Ultrasound 3D imaging system
JP5241091B2 (ja) * 2006-10-13 2013-07-17 日本電波工業株式会社 超音波探触子
EP2088932B1 (en) 2006-10-25 2020-04-08 Maui Imaging, Inc. Method and apparatus to produce ultrasonic images using multiple apertures
JP4931611B2 (ja) * 2007-01-16 2012-05-16 株式会社日立メディコ 超音波撮像装置
US20080242979A1 (en) * 2007-03-30 2008-10-02 Rayette Ann Fisher Combined X-ray detector and ultrasound imager
US7824335B2 (en) * 2007-04-26 2010-11-02 General Electric Company Reconfigurable array with multi-level transmitters
WO2008136198A1 (ja) * 2007-04-27 2008-11-13 Hitachi, Ltd. 超音波トランスデューサ及び超音波撮像装置
US7892176B2 (en) * 2007-05-02 2011-02-22 General Electric Company Monitoring or imaging system with interconnect structure for large area sensor array
US20080315331A1 (en) * 2007-06-25 2008-12-25 Robert Gideon Wodnicki Ultrasound system with through via interconnect structure
US10226234B2 (en) 2011-12-01 2019-03-12 Maui Imaging, Inc. Motion detection using ping-based and multiple aperture doppler ultrasound
US9282945B2 (en) 2009-04-14 2016-03-15 Maui Imaging, Inc. Calibration of ultrasound probes
US20090182233A1 (en) * 2008-01-10 2009-07-16 Robert Gideon Wodnicki Ultrasound System With Integrated Control Switches
US20090182229A1 (en) * 2008-01-10 2009-07-16 Robert Gideon Wodnicki UltraSound System With Highly Integrated ASIC Architecture
GB2459866B (en) * 2008-05-07 2011-08-31 Wolfson Microelectronics Plc Mems transducer
US7898905B2 (en) * 2008-07-28 2011-03-01 General Electric Company Reconfigurable array with locally determined switch configuration
US12102479B2 (en) 2008-09-15 2024-10-01 Teratech Corporation Ultrasound 3D imaging system
US20120179044A1 (en) 2009-09-30 2012-07-12 Alice Chiang Ultrasound 3d imaging system
US10080544B2 (en) 2008-09-15 2018-09-25 Teratech Corporation Ultrasound 3D imaging system
US8176787B2 (en) * 2008-12-17 2012-05-15 General Electric Company Systems and methods for operating a two-dimensional transducer array
JP5578810B2 (ja) 2009-06-19 2014-08-27 キヤノン株式会社 静電容量型の電気機械変換装置
US20110028845A1 (en) 2009-07-31 2011-02-03 Bruno Hans Haider Reconfigurable Ultrasound Array with Low Noise CW Processing
US8345508B2 (en) * 2009-09-20 2013-01-01 General Electric Company Large area modular sensor array assembly and method for making the same
US20110160591A1 (en) * 2009-12-30 2011-06-30 General Electric Company Fetal heart rate monitor with wide search area
EP2536339B1 (en) 2010-02-18 2024-05-15 Maui Imaging, Inc. Point source transmission and speed-of-sound correction using multi-aperture ultrasound imaging
JPWO2011105269A1 (ja) 2010-02-26 2013-06-20 株式会社日立メディコ 超音波探触子とそれを用いた超音波撮像装置
JP2011193978A (ja) 2010-03-18 2011-10-06 Canon Inc 静電容量型電気機械変換装置の駆動装置及び駆動方法
CN102573654B (zh) * 2010-08-06 2014-12-10 奥林巴斯医疗株式会社 超声波诊断装置
JP5178791B2 (ja) * 2010-08-23 2013-04-10 オリンパス株式会社 静電容量型超音波振動子
US8409102B2 (en) 2010-08-31 2013-04-02 General Electric Company Multi-focus ultrasound system and method
EP3563768A3 (en) 2010-10-13 2020-02-12 Maui Imaging, Inc. Concave ultrasound transducers and 3d arrays
WO2012051305A2 (en) 2010-10-13 2012-04-19 Mau Imaging, Inc. Multiple aperture probe internal apparatus and cable assemblies
JP5574936B2 (ja) * 2010-12-07 2014-08-20 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 超音波プローブ及び超音波診断装置
US8498178B2 (en) * 2010-12-23 2013-07-30 Analog Devices, Inc. Acoustic transducer chip
US8622752B2 (en) * 2011-04-13 2014-01-07 Teradyne, Inc. Probe-card interposer constructed using hexagonal modules
US9310485B2 (en) 2011-05-12 2016-04-12 Georgia Tech Research Corporation Compact, energy-efficient ultrasound imaging probes using CMUT arrays with integrated electronics
JP2015503404A (ja) 2011-12-29 2015-02-02 マウイ イマギング，インコーポレーテッド 任意経路のｍモード超音波イメージング
EP2816958B1 (en) 2012-02-21 2020-03-25 Maui Imaging, Inc. Determining material stiffness using multiple aperture ultrasound
IN2014DN07243A (enExample) 2012-03-26 2015-04-24 Maui Imaging Inc
US8742646B2 (en) 2012-03-29 2014-06-03 General Electric Company Ultrasound acoustic assemblies and methods of manufacture
US9454954B2 (en) 2012-05-01 2016-09-27 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
US9061320B2 (en) 2012-05-01 2015-06-23 Fujifilm Dimatix, Inc. Ultra wide bandwidth piezoelectric transducer arrays
US8767512B2 (en) * 2012-05-01 2014-07-01 Fujifilm Dimatix, Inc. Multi-frequency ultra wide bandwidth transducer
CN104379268B (zh) * 2012-05-31 2017-02-22 皇家飞利浦有限公司 晶片及其制造方法
US20140031693A1 (en) 2012-07-26 2014-01-30 Interson Corporation Portable ultrasonic imaging probe including transducer array
EP2883079B1 (en) 2012-08-10 2017-09-27 Maui Imaging, Inc. Calibration of multiple aperture ultrasound probes
KR102176319B1 (ko) 2012-08-21 2020-11-09 마우이 이미징, 인코포레이티드 초음파 이미징 시스템 메모리 아키텍처
CN103676827A (zh) 2012-09-06 2014-03-26 Ip音乐集团有限公司 用于远程控制音频设备的系统和方法
US9660170B2 (en) 2012-10-26 2017-05-23 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
US9289188B2 (en) 2012-12-03 2016-03-22 Liposonix, Inc. Ultrasonic transducer
DE102013101097A1 (de) * 2013-02-04 2014-08-21 Ge Sensing & Inspection Technologies Gmbh Verfahren zur Kontaktierung eines Ultraschallwandlers; Ultraschallwandlerkomponente mit kontaktiertem Ultraschallwandler zur Verwendung in einem Ultraschallprüfkopf; Ultraschallprüfkopf und Vorrichtung zur zerstörungsfreien Prüfung eines Prüflings mittels Ultraschall
US9499392B2 (en) 2013-02-05 2016-11-22 Butterfly Network, Inc. CMOS ultrasonic transducers and related apparatus and methods
US9958420B2 (en) * 2013-02-06 2018-05-01 Bwxt Technical Services Group, Inc. Synthetic data collection method for full matrix capture using an ultrasound array
TWI623081B (zh) 2013-03-15 2018-05-01 蝴蝶網路公司 互補式金屬氧化物半導體（ｃｍｏｓ）超音波換能器以及用於形成其之方法
CA2903479C (en) 2013-03-15 2023-10-10 Butterfly Network, Inc. Monolithic ultrasonic imaging devices, systems and methods
US9667889B2 (en) 2013-04-03 2017-05-30 Butterfly Network, Inc. Portable electronic devices with integrated imaging capabilities
JP6234073B2 (ja) * 2013-06-07 2017-11-22 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
EP3024594A2 (en) 2013-07-23 2016-06-01 Butterfly Network Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
US9883848B2 (en) 2013-09-13 2018-02-06 Maui Imaging, Inc. Ultrasound imaging using apparent point-source transmit transducer
KR102077741B1 (ko) * 2013-10-23 2020-02-14 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
KR101613413B1 (ko) * 2013-12-09 2016-04-19 삼성메디슨 주식회사 초음파 프로브 및 그 제조방법
JP6482558B2 (ja) 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置
JP6265758B2 (ja) * 2014-01-27 2018-01-24 キヤノン株式会社 静電容量型トランスデューサ
CN106659464B (zh) 2014-04-18 2020-03-20 蝴蝶网络有限公司 互补金属氧化物半导体(cmos)晶片中的超声换能器及相关装置和方法
CN106461767B (zh) 2014-04-18 2019-05-28 蝴蝶网络有限公司 单衬底超声成像装置的架构、相关设备和方法
TWI671059B (zh) 2014-04-18 2019-09-11 美商蝴蝶網路公司 超音波成像壓縮方法和設備
CN103976743A (zh) * 2014-05-27 2014-08-13 江西科技师范大学 基于cMUT环形阵列的微型光声传感器
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
EP3169449B1 (en) * 2014-07-16 2018-03-21 Koninklijke Philips N.V. Tiled cmut dies with pitch uniformity
KR102617888B1 (ko) 2014-08-18 2023-12-22 마우이 이미징, 인코포레이티드 네트워크-기반 초음파 이미징 시스템
WO2016139087A1 (en) * 2015-03-03 2016-09-09 Koninklijke Philips N.V. A cmut array comprising an acoustic window layer
US9506790B2 (en) * 2015-03-24 2016-11-29 Daniel Measurement And Control, Inc. Transducer mini-horn array for ultrasonic flow meter
KR102681141B1 (ko) 2015-03-30 2024-07-02 마우이 이미징, 인코포레이티드 오브젝트 모션을 검출하기 위한 초음파 이미징 시스템들 및 방법들
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
WO2017132517A1 (en) 2016-01-27 2017-08-03 Maui Imaging, Inc. Ultrasound imaging with sparse array probes
US10325915B2 (en) 2016-05-04 2019-06-18 Invensense, Inc. Two-dimensional array of CMOS control elements
US10315222B2 (en) 2016-05-04 2019-06-11 Invensense, Inc. Two-dimensional array of CMOS control elements
US10445547B2 (en) 2016-05-04 2019-10-15 Invensense, Inc. Device mountable packaging of ultrasonic transducers
US10656255B2 (en) 2016-05-04 2020-05-19 Invensense, Inc. Piezoelectric micromachined ultrasonic transducer (PMUT)
US10670716B2 (en) * 2016-05-04 2020-06-02 Invensense, Inc. Operating a two-dimensional array of ultrasonic transducers
US10408797B2 (en) 2016-05-10 2019-09-10 Invensense, Inc. Sensing device with a temperature sensor
US10562070B2 (en) 2016-05-10 2020-02-18 Invensense, Inc. Receive operation of an ultrasonic sensor
US10539539B2 (en) * 2016-05-10 2020-01-21 Invensense, Inc. Operation of an ultrasonic sensor
US10632500B2 (en) 2016-05-10 2020-04-28 Invensense, Inc. Ultrasonic transducer with a non-uniform membrane
US10441975B2 (en) 2016-05-10 2019-10-15 Invensense, Inc. Supplemental sensor modes and systems for ultrasonic transducers
US11673165B2 (en) 2016-05-10 2023-06-13 Invensense, Inc. Ultrasonic transducer operable in a surface acoustic wave (SAW) mode
US10706835B2 (en) 2016-05-10 2020-07-07 Invensense, Inc. Transmit beamforming of a two-dimensional array of ultrasonic transducers
US10600403B2 (en) 2016-05-10 2020-03-24 Invensense, Inc. Transmit operation of an ultrasonic sensor
US10452887B2 (en) 2016-05-10 2019-10-22 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
US10816650B2 (en) 2016-05-27 2020-10-27 Interson Corporation Ultrasonic imaging probe including composite aperture receiving array
WO2018035669A1 (en) * 2016-08-22 2018-03-01 Goertek. Inc Capacitive mems microphone and electronic apparatus
US10196261B2 (en) 2017-03-08 2019-02-05 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
WO2018178772A2 (en) * 2017-03-28 2018-10-04 Nanofone Ltd. High performance sealed-gap capacitive microphone
US10891461B2 (en) 2017-05-22 2021-01-12 Invensense, Inc. Live fingerprint detection utilizing an integrated ultrasound and infrared sensor
US10474862B2 (en) 2017-06-01 2019-11-12 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10512936B2 (en) 2017-06-21 2019-12-24 Butterfly Network, Inc. Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
US10643052B2 (en) 2017-06-28 2020-05-05 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10936841B2 (en) 2017-12-01 2021-03-02 Invensense, Inc. Darkfield tracking
US10984209B2 (en) 2017-12-01 2021-04-20 Invensense, Inc. Darkfield modeling
US10997388B2 (en) 2017-12-01 2021-05-04 Invensense, Inc. Darkfield contamination detection
WO2019135204A1 (en) * 2018-01-08 2019-07-11 Nanofone Limited High performance sealed-gap capacitive microphone with various gap geometries
US11151355B2 (en) 2018-01-24 2021-10-19 Invensense, Inc. Generation of an estimated fingerprint
US10755067B2 (en) 2018-03-22 2020-08-25 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
US10656007B2 (en) * 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US10780498B2 (en) 2018-08-22 2020-09-22 General Electric Company Porous tools and methods of making the same
US11619527B2 (en) 2018-10-01 2023-04-04 Micro Motion, Inc. Ultrasonic transducer with a sealed 3D-printed mini-horn array
US11717265B2 (en) 2018-11-30 2023-08-08 General Electric Company Methods and systems for an acoustic attenuating material
US10936843B2 (en) 2018-12-28 2021-03-02 Invensense, Inc. Segmented image acquisition
CN109433570B (zh) * 2019-01-07 2023-06-16 中国科学院声学研究所北海研究站 一种多面体球形换能器及其制作方法
US11188735B2 (en) 2019-06-24 2021-11-30 Invensense, Inc. Fake finger detection using ridge features
US11216681B2 (en) 2019-06-25 2022-01-04 Invensense, Inc. Fake finger detection based on transient features
US11176345B2 (en) 2019-07-17 2021-11-16 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11216632B2 (en) 2019-07-17 2022-01-04 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11232549B2 (en) 2019-08-23 2022-01-25 Invensense, Inc. Adapting a quality threshold for a fingerprint image
US11392789B2 (en) 2019-10-21 2022-07-19 Invensense, Inc. Fingerprint authentication using a synthetic enrollment image
CN115551650A (zh) 2020-03-09 2022-12-30 应美盛公司 具有非均匀厚度的接触层的超声指纹传感器
US11243300B2 (en) 2020-03-10 2022-02-08 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor
EP3900846A1 (en) * 2020-04-21 2021-10-27 Koninklijke Philips N.V. Acoustic imaging probe with a transducer element
US11328165B2 (en) 2020-04-24 2022-05-10 Invensense, Inc. Pressure-based activation of fingerprint spoof detection
US11995909B2 (en) 2020-07-17 2024-05-28 Tdk Corporation Multipath reflection correction
US12174295B2 (en) 2020-08-07 2024-12-24 Tdk Corporation Acoustic multipath correction
US20220043993A1 (en) * 2020-08-07 2022-02-10 Tdk Corporation Ultrasonic sensor with receive beamforming
CN113245175A (zh) * 2021-06-21 2021-08-13 苏州晶方半导体科技股份有限公司 压电微机械超声换能器及其制作方法
JP7598118B2 (ja) * 2021-07-16 2024-12-11 硅系半導体科技有限公司 音響素子集積回路、プローブ及び診断装置
US12416807B2 (en) 2021-08-20 2025-09-16 Tdk Corporation Retinal projection display system
US12260050B2 (en) 2021-08-25 2025-03-25 Tdk Corporation Differential receive at an ultrasonic transducer
CN113560158B (zh) * 2021-08-27 2022-06-10 南京声息芯影科技有限公司 压电微机械超声换能器、阵列芯片及制造方法
JP7553054B2 (ja) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 音響誘導型半導体素子及び音響素子集積回路
KR102752861B1 (ko) * 2021-12-22 2025-01-15 (주)무티 초음파 테라피의 하이브리드 빔포밍 장치 및 그 동작방법
CN114441647B (zh) * 2022-01-25 2023-06-27 天津大学 基于组合微元的聚焦宽频带电容式微机械换能器阵列
DE102023200560A1 (de) * 2023-01-25 2024-07-25 Robert Bosch Gesellschaft mit beschränkter Haftung Antriebsschaltung zum Betreiben einer mikroelektroakustischen Wandlervorrichtung und Verfahren zum Betreiben einer mikroelektroakustischen Wandlervorrichtung mittels einer Antriebsschaltung
CN120110182B (zh) * 2025-05-07 2025-09-16 比亚迪股份有限公司 用于车载充电机的功率模块、车载充电机及车辆

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5596222A (en) * 1994-08-12 1997-01-21 The Charles Stark Draper Laboratory, Inc. Wafer of transducer chips
US5870351A (en) * 1994-10-21 1999-02-09 The Board Of Trustees Of The Leland Stanford Junior University Broadband microfabriated ultrasonic transducer and method of fabrication
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5982709A (en) * 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
WO2003001843A2 (en) * 2001-06-26 2003-01-03 Koninklijke Philips Electronics N.V. Variable multi-dimensional apodization control for ultrasonic transducers
WO2003011749A2 (en) * 2001-07-31 2003-02-13 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (mut) array
US6643901B1 (en) * 2000-11-01 2003-11-11 Ppg Industries Ohio, Inc. Loom beams

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2553521B1 (fr) 1983-10-18 1986-04-11 Cgr Ultrasonic Sonde d'echographie, procede de fabrication de cette sonde et appareil d'echographie incorporant une telle sonde
US4641680A (en) * 1985-08-23 1987-02-10 Process And Cryongenic Services, Inc. Waste solvent receptacle
US5146435A (en) 1989-12-04 1992-09-08 The Charles Stark Draper Laboratory, Inc. Acoustic transducer
AU6953994A (en) 1993-06-04 1995-01-03 Regents Of The University Of California, The Microfabricated acoustic source and receiver
US5452268A (en) 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response
DE19643893A1 (de) 1996-10-30 1998-05-07 Siemens Ag Ultraschallwandler in Oberflächen-Mikromechanik
JPH11326295A (ja) 1998-05-13 1999-11-26 Sumitomo Metal Ind Ltd 超音波検査装置
GB9815992D0 (en) 1998-07-23 1998-09-23 Secr Defence Improvements in and relating to microchemical devices
US6292435B1 (en) 1999-05-11 2001-09-18 Agilent Technologies, Inc. Circuit and method for exciting a micro-machined transducer to have low second order harmonic transmit energy
US6381197B1 (en) 1999-05-11 2002-04-30 Bernard J Savord Aperture control and apodization in a micro-machined ultrasonic transducer
US6246158B1 (en) 1999-06-24 2001-06-12 Sensant Corporation Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same
JP2001050939A (ja) 1999-08-16 2001-02-23 Sumitomo Metal Ind Ltd 超音波検査装置
US6461299B1 (en) 1999-12-22 2002-10-08 Acuson Corporation Medical diagnostic ultrasound system and method for harmonic imaging with an electrostatic transducer
US6384516B1 (en) 2000-01-21 2002-05-07 Atl Ultrasound, Inc. Hex packed two dimensional ultrasonic transducer arrays
US6503204B1 (en) * 2000-03-31 2003-01-07 Acuson Corporation Two-dimensional ultrasonic transducer array having transducer elements in a non-rectangular or hexagonal grid for medical diagnostic ultrasonic imaging and ultrasound imaging system using same
JP4090664B2 (ja) 2000-04-07 2008-05-28 株式会社日立メディコ 超音波診断装置
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5596222A (en) * 1994-08-12 1997-01-21 The Charles Stark Draper Laboratory, Inc. Wafer of transducer chips
US5870351A (en) * 1994-10-21 1999-02-09 The Board Of Trustees Of The Leland Stanford Junior University Broadband microfabriated ultrasonic transducer and method of fabrication
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US6004832A (en) * 1994-10-21 1999-12-21 The Board Of Trustees Of The Leland Stanford Junior University Method of fabricating an electrostatic ultrasonic transducer
US5982709A (en) * 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
US6643901B1 (en) * 2000-11-01 2003-11-11 Ppg Industries Ohio, Inc. Loom beams
WO2003001843A2 (en) * 2001-06-26 2003-01-03 Koninklijke Philips Electronics N.V. Variable multi-dimensional apodization control for ultrasonic transducers
WO2003011749A2 (en) * 2001-07-31 2003-02-13 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (mut) array

Also Published As

Publication number Publication date
US6865140B2 (en) 2005-03-08
DE102004011193A1 (de) 2004-09-16
KR101037819B1 (ko) 2011-05-30
CN1527414A (zh) 2004-09-08
JP2004274756A (ja) 2004-09-30
US20040174773A1 (en) 2004-09-09
JP4293309B2 (ja) 2009-07-08
KR20040078894A (ko) 2004-09-13

Similar Documents

Publication Publication Date Title
CN100452469C (zh) 使用显微机械加工的超声换能器的镶嵌式阵列
US7443765B2 (en) Reconfigurable linear sensor arrays for reduced channel count
JP5155662B2 (ja) センサ素子の再構成可能なアレイのためのスイッチング回路
US7257051B2 (en) Integrated interface electronics for reconfigurable sensor array
US7775979B2 (en) Transmit and receive interface array for highly integrated ultrasound scanner
JP5114216B2 (ja) センサ素子の再構成可能なアレイのための最適化スイッチング構成
JP5400477B2 (ja) 超音波トランスデューサアレイの要素を動的に再構成する方法、スイッチネットワーク及び、超音波システム
US9454954B2 (en) Ultra wide bandwidth transducer with dual electrode
US20090182233A1 (en) Ultrasound System With Integrated Control Switches
US20090182229A1 (en) UltraSound System With Highly Integrated ASIC Architecture
EP1593115A1 (en) Microfabricated ultrasonic transducers with bias polarity beam profile control
JP2006122659A (ja) モザイクセンサ配列走査の制御方法及びデバイス
JP2008264534A (ja) 超音波システム用の送受波回路
Liu et al. Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic imager
CN100515342C (zh) 多图形变换器阵列和使用方法
JP2008228873A (ja) 超音波探触子及び超音波診断装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090114

Termination date: 20160305

CF01 Termination of patent right due to non-payment of annual fee