CN100405003C - 条纹计测装置的变换系数校正方法和装置及条纹计测装置 - Google Patents

条纹计测装置的变换系数校正方法和装置及条纹计测装置 Download PDF

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CN100405003C
CN100405003C CNB2006100682006A CN200610068200A CN100405003C CN 100405003 C CN100405003 C CN 100405003C CN B2006100682006 A CNB2006100682006 A CN B2006100682006A CN 200610068200 A CN200610068200 A CN 200610068200A CN 100405003 C CN100405003 C CN 100405003C
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CN1841007A (zh
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葛宗涛
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Fujinon Corp
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CNB2006100682006A 2005-03-31 2006-03-16 条纹计测装置的变换系数校正方法和装置及条纹计测装置 Expired - Fee Related CN100405003C (zh)

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JP2005102934A JP4786923B2 (ja) 2005-03-31 2005-03-31 縞計測装置の変換係数較正方法および装置ならびに該変換係数較正装置を備えた縞計測装置
JP2005102934 2005-03-31

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CN100405003C true CN100405003C (zh) 2008-07-23

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008102051A (ja) * 2006-10-20 2008-05-01 Fujinon Corp 干渉計角度感度較正方法
JP4924042B2 (ja) * 2007-01-11 2012-04-25 オムロン株式会社 三次元形状計測装置及びその校正方法、プログラム、並びにコンピュータ読み取り可能な記録媒体
JP4802134B2 (ja) * 2007-03-29 2011-10-26 富士フイルム株式会社 姿勢変化測定方法および装置
JP4922905B2 (ja) * 2007-12-05 2012-04-25 富士フイルム株式会社 回転中心線の位置変動測定方法および装置
DE602008004330D1 (de) * 2008-07-04 2011-02-17 Sick Ivp Aktiebolag Kalibrierung eines Profilmesssystems
JP5208681B2 (ja) * 2008-11-06 2013-06-12 株式会社ミツトヨ 斜入射干渉計における測定感度の校正方法
JP5439224B2 (ja) * 2010-02-25 2014-03-12 株式会社ミツトヨ 基準器およびそれを用いた検査方法
EP3182062B1 (de) * 2015-12-14 2021-09-22 Haag-Streit Ag Kalibrierung eines interferometers
JP7650597B2 (ja) * 2021-06-15 2025-03-25 株式会社ディスコ 測定治具、動作精度測定システム、及び動作精度測定方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2545151Y2 (ja) * 1991-12-25 1997-08-25 オリンパス光学工業株式会社 顕微鏡用カメラのデータ写し込み装置
JP2004069585A (ja) * 2002-08-08 2004-03-04 Fuji Photo Optical Co Ltd 平行度測定方法
JP2004191221A (ja) * 2002-12-12 2004-07-08 Seiko Precision Inc 角度検出装置及びそれを備えたプロジェクタ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19618140A1 (de) * 1996-05-06 1997-11-13 Fraunhofer Ges Forschung 3D-Meßanordnung zur Ganzkörpererfassung und Einmessung einer entsprechenden Meßanordnung
JP4610117B2 (ja) * 2001-03-29 2011-01-12 富士フイルム株式会社 フーリエ変換縞解析方法および装置
JP4149853B2 (ja) * 2003-06-02 2008-09-17 株式会社山武 ３次元計測装置及び３次元計測方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2545151Y2 (ja) * 1991-12-25 1997-08-25 オリンパス光学工業株式会社 顕微鏡用カメラのデータ写し込み装置
JP2004069585A (ja) * 2002-08-08 2004-03-04 Fuji Photo Optical Co Ltd 平行度測定方法
JP2004191221A (ja) * 2002-12-12 2004-07-08 Seiko Precision Inc 角度検出装置及びそれを備えたプロジェクタ

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JP2006284304A (ja) 2006-10-19
JP4786923B2 (ja) 2011-10-05
CN1841007A (zh) 2006-10-04

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