CH696993A5 - Antriebseinheit. - Google Patents
Antriebseinheit. Download PDFInfo
- Publication number
- CH696993A5 CH696993A5 CH01066/04A CH10662004A CH696993A5 CH 696993 A5 CH696993 A5 CH 696993A5 CH 01066/04 A CH01066/04 A CH 01066/04A CH 10662004 A CH10662004 A CH 10662004A CH 696993 A5 CH696993 A5 CH 696993A5
- Authority
- CH
- Switzerland
- Prior art keywords
- arms
- drive unit
- unit according
- arm
- resonator
- Prior art date
Links
- 230000033001 locomotion Effects 0.000 title claims abstract description 86
- 230000003287 optical effect Effects 0.000 title description 4
- 230000010355 oscillation Effects 0.000 claims abstract description 21
- 230000005284 excitation Effects 0.000 claims description 67
- 238000005452 bending Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005755 formation reaction Methods 0.000 description 4
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- 239000002356 single layer Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
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- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
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- 230000007704 transition Effects 0.000 description 2
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- 229910000906 Bronze Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910001329 Terfenol-D Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
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- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
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- 230000001419 dependent effect Effects 0.000 description 1
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- 230000003628 erosive effect Effects 0.000 description 1
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- 230000010354 integration Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- 230000036316 preload Effects 0.000 description 1
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- 238000007493 shaping process Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 210000000689 upper leg Anatomy 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
- G02B7/005—Motorised alignment
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (11)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH01066/04A CH696993A5 (de) | 2004-06-24 | 2004-06-24 | Antriebseinheit. |
| EP09007383A EP2200102B1 (de) | 2004-06-24 | 2005-06-21 | Antriebseinheit |
| EP05750589A EP1761999B1 (de) | 2004-06-24 | 2005-06-21 | Antriebseinheit |
| HK07113605.3A HK1109247B (en) | 2004-06-24 | 2005-06-21 | Drive unit |
| CN2005800286224A CN101019301B (zh) | 2004-06-24 | 2005-06-21 | 驱动单元 |
| PCT/CH2005/000343 WO2006000118A1 (de) | 2004-06-24 | 2005-06-21 | Antriebseinheit |
| JP2007516936A JP4690398B2 (ja) | 2004-06-24 | 2005-06-21 | 駆動装置 |
| KR1020077001542A KR101175823B1 (ko) | 2004-06-24 | 2005-06-21 | 구동 유닛 |
| DE502005007466T DE502005007466D1 (de) | 2004-06-24 | 2005-06-21 | Antriebseinheit |
| US11/643,297 US7429812B2 (en) | 2004-06-24 | 2006-12-21 | Drive unit |
| JP2008159279A JP4700084B2 (ja) | 2004-06-24 | 2008-06-18 | 駆動装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH01066/04A CH696993A5 (de) | 2004-06-24 | 2004-06-24 | Antriebseinheit. |
| CH21672004 | 2004-12-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH696993A5 true CH696993A5 (de) | 2008-02-29 |
Family
ID=34970098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH01066/04A CH696993A5 (de) | 2004-06-24 | 2004-06-24 | Antriebseinheit. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7429812B2 (https=) |
| EP (2) | EP2200102B1 (https=) |
| JP (2) | JP4690398B2 (https=) |
| KR (1) | KR101175823B1 (https=) |
| CN (1) | CN101019301B (https=) |
| CH (1) | CH696993A5 (https=) |
| DE (1) | DE502005007466D1 (https=) |
| WO (1) | WO2006000118A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013012539B4 (de) * | 2012-08-03 | 2014-11-27 | Faurecia Sièges d'Automobile | Fahrzeugsitz mit motorisch einstellbarem Abschnitt, sowie elektonische Steuereinheit für einen Fahrzeugsitz |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005077669A (ja) | 2003-08-29 | 2005-03-24 | Canon Inc | 画像形成装置 |
| FI118215B (fi) | 2005-09-27 | 2007-08-31 | Kone Corp | Hissijärjestelmä |
| DE102006004194B3 (de) * | 2006-01-27 | 2007-05-31 | Ief Werner Gmbh | Elektromechanischer Antrieb mit Piezomotor |
| WO2007093074A2 (de) * | 2006-02-16 | 2007-08-23 | Nanoswys Sa | Kraftumsetzer |
| DE102007005041B4 (de) * | 2007-01-26 | 2011-09-22 | Elliptec Resonant Actuator Ag | Piezomotor mit Federungseinrichtung |
| CH699707A2 (de) * | 2008-10-10 | 2010-04-15 | Creaholic Sa | Miniaturisierte angetriebene lagerungsvorrichtung. |
| JP5426897B2 (ja) * | 2009-02-24 | 2014-02-26 | 太平洋セメント株式会社 | 駆動装置 |
| JP5835212B2 (ja) * | 2010-03-31 | 2015-12-24 | 株式会社ニコン | モータ装置、モータ装置の製造方法及びロボット装置 |
| DE102011109590A1 (de) * | 2011-08-05 | 2013-02-07 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Drehantrieb für eine Welle |
| JP6084061B2 (ja) * | 2013-02-15 | 2017-02-22 | 並木精密宝石株式会社 | 振動アクチュエータ |
| US9479031B2 (en) * | 2013-03-08 | 2016-10-25 | Mts Sensor Technologie Gmbh & Co. Kg | Tubular linear motor with magnetostrictive sensor |
| DE102013212053A1 (de) * | 2013-06-25 | 2015-01-08 | Robert Bosch Gmbh | Leiterplatte mit einem schwingungsentkoppelten elektronischen Bauelement |
| WO2015079736A1 (ja) * | 2013-11-27 | 2015-06-04 | 株式会社村田製作所 | 駆動装置 |
| CN103701359B (zh) * | 2013-12-09 | 2015-09-16 | 浙江大学 | 一种基于压电堆的压电振动冲击的旋转电机 |
| CH709292A3 (de) * | 2014-02-20 | 2015-10-15 | Miniswys Sa | Positioniervorrichtung für einen Bildstabilisator. |
| JP6543951B2 (ja) | 2015-02-18 | 2019-07-17 | セイコーエプソン株式会社 | 圧電駆動装置、ロボット、及び、それらの駆動方法 |
| WO2016187211A1 (en) * | 2015-05-19 | 2016-11-24 | The Regents Of The University Of California | Dna structured linear actuator |
| CN105141174B (zh) * | 2015-09-07 | 2017-10-31 | 南京航空航天大学 | 一种贴片式驻波旋转型压电作动器 |
| CN105141101B (zh) * | 2015-09-28 | 2018-04-20 | 北京航空航天大学 | 一种基于电磁原理的梁式微驱动器 |
| EP3468028A1 (en) * | 2017-10-04 | 2019-04-10 | miniswys SA | Piezoelectric drive unit |
| EP3537591B1 (fr) | 2018-03-09 | 2020-11-18 | ETA SA Manufacture Horlogère Suisse | Moteur piezoelectrique rotatif a precontrainte axiale |
| EP3537232B1 (fr) * | 2018-03-09 | 2025-11-19 | ETA SA Manufacture Horlogère Suisse | Moteur piezoélectrique rotatif pour disque |
| EP3537595A1 (fr) | 2018-03-09 | 2019-09-11 | ETA SA Manufacture Horlogère Suisse | Moteur piezoélectrique linéaire à course allongée |
| EP3537593B1 (fr) * | 2018-03-09 | 2024-04-24 | ETA SA Manufacture Horlogère Suisse | Dispositif de rotation d'une roue dentée |
| EP3537594A1 (fr) | 2018-03-09 | 2019-09-11 | ETA SA Manufacture Horlogère Suisse | Moteur piezoelectrique rotatif a precontrainte radiale |
| CN108880323B (zh) * | 2018-06-15 | 2019-08-06 | 福建工程学院 | 一种转速转矩可变的压电电机及其使用方法 |
| US12158633B2 (en) * | 2018-08-13 | 2024-12-03 | Miniswys S.A. | Lens driving device, camera module, and camera-mounted device |
| CN111258057A (zh) * | 2018-11-30 | 2020-06-09 | 成都理想境界科技有限公司 | 一种扫描驱动器及光纤扫描器 |
| EP3928423B1 (en) * | 2019-02-22 | 2025-10-01 | Acuvi AB | Electromechanical motor and tunable filter comprising an electromechanical motor |
| EP3736965A1 (en) | 2019-05-10 | 2020-11-11 | Miniswys Sa | Drive unit and method for operating a drive unit |
| US12197033B2 (en) | 2019-05-10 | 2025-01-14 | Miniswys S.A. | Lens driving device, camera module, and camera-mounted device |
| EP3966923A1 (en) * | 2019-05-10 | 2022-03-16 | Miniswys Sa | Drive unit and method for operating a drive unit |
| JP7294897B2 (ja) * | 2019-06-07 | 2023-06-20 | ミニスイス・ソシエテ・アノニム | レンズ駆動装置、カメラモジュール、及びカメラ搭載装置 |
| EP3787178A1 (en) * | 2019-08-30 | 2021-03-03 | Miniswys Sa | Piezoelectric drive unit |
| CN112492130B (zh) * | 2019-09-12 | 2021-10-01 | 华为技术有限公司 | 摄像模组及移动终端 |
| CN110601597B (zh) * | 2019-09-24 | 2022-07-15 | 太原科技大学 | 一种双模态复合型尺蠖超声波电机 |
| WO2021117404A1 (ja) | 2019-12-13 | 2021-06-17 | ミニスイス・ソシエテ・アノニム | 駆動ユニットの動作方法及びコントローラー |
| EP3836390A1 (en) | 2019-12-13 | 2021-06-16 | Miniswys Sa | Method for operating a drive unit and drive unit |
| CN111181490B (zh) * | 2020-01-02 | 2022-02-11 | 西安交通大学 | 一种基于超谐同步技术的硅微谐振式倍频器 |
| CN118091877A (zh) | 2020-03-30 | 2024-05-28 | 三美电机株式会社 | 光学元件驱动装置、摄像机模块及摄像机搭载装置 |
| JP7526283B2 (ja) * | 2020-04-16 | 2024-07-31 | ミニスイス・ソシエテ・アノニム | 駆動ユニット |
| US12500531B2 (en) | 2020-04-16 | 2025-12-16 | Miniswys Sa | Drive unit with at least two oscillating arms |
| WO2021210365A1 (ja) | 2020-04-17 | 2021-10-21 | ミツミ電機株式会社 | 光学素子駆動装置、カメラモジュールおよびカメラ搭載装置 |
| CN114079401A (zh) | 2020-08-17 | 2022-02-22 | 华为技术有限公司 | 驱动组件、马达及终端 |
| CN112165273B (zh) * | 2020-09-24 | 2021-11-30 | 南京工程学院 | 基于同向偏心约束和斜压电陶瓷的耦合模态型超声波电机 |
| DE102020126863A1 (de) * | 2020-10-13 | 2022-04-14 | Physik Instrumente (PI) GmbH & Co KG | Stellvorrichtung und verfahren zu deren montage |
| KR20230106599A (ko) * | 2020-11-13 | 2023-07-13 | 미쓰미덴기가부시기가이샤 | 구동 유닛, 렌즈 구동 장치, 카메라 모듈 및 카메라 탑재 장치 |
| CN119291880A (zh) * | 2020-11-24 | 2025-01-10 | 三美电机株式会社 | 光学元件驱动装置、摄像机模块及摄像机搭载装置 |
| CN116547602A (zh) * | 2020-11-30 | 2023-08-04 | 三美电机株式会社 | 光学致动器、摄像机模块及摄像机搭载装置 |
| CN114915704B (zh) * | 2021-02-09 | 2023-04-21 | 宁波舜宇光电信息有限公司 | 套筒组件、摄像模组及其运行方法和移动电子设备 |
| CN115037849B (zh) * | 2021-03-04 | 2023-06-09 | 宁波舜宇光电信息有限公司 | 感光组件、摄像模组、移动电子设备以及光学防抖方法 |
| CN113131786B (zh) * | 2021-04-08 | 2023-02-24 | 合肥工业大学 | 一种旋转压电马达 |
| WO2022218989A1 (en) * | 2021-04-15 | 2022-10-20 | Miniswys Sa | Oscillating drive element and drive unit |
| EP4075661A1 (en) * | 2021-04-15 | 2022-10-19 | Miniswys Sa | Oscillating drive element and drive unit |
| DE102021116325B3 (de) | 2021-06-24 | 2022-09-29 | Physik Instrumente (PI) GmbH & Co KG | Elektromechanischer Antrieb mit ebenem Versteifungskörper |
| JP2023043037A (ja) * | 2021-09-15 | 2023-03-28 | エスゼット ディージェイアイ テクノロジー カンパニー リミテッド | 超音波モータ |
| DE102021130298A1 (de) | 2021-11-19 | 2023-05-25 | Physik Instrumente (PI) GmbH & Co KG | Ultraschallantrieb |
| CN116683789A (zh) * | 2022-02-22 | 2023-09-01 | 新思考电机有限公司 | 压电超声波马达、光学构件驱动装置、照相机装置及电子设备 |
| DE102022112809A1 (de) * | 2022-05-20 | 2023-11-23 | Physik Instrumente (PI) GmbH & Co KG | Antriebsvorrichtung, Antriebssystem, Stellsystem und Antriebsmotor |
| EP4311097A1 (en) | 2022-07-22 | 2024-01-24 | Miniswys Sa | Shock resistant drive unit |
| JP7648922B2 (ja) | 2023-03-10 | 2025-03-19 | ミツミ電機株式会社 | 駆動装置、光学素子駆動装置、カメラモジュール及びカメラ搭載装置 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU773715A1 (ru) * | 1979-04-12 | 1980-10-23 | Предприятие П/Я А-3593 | Устройство дл транспортировани носител записи |
| JPS6074982A (ja) * | 1983-09-30 | 1985-04-27 | Hitachi Maxell Ltd | 強力音叉を用いたリニアモ−タ |
| JPH06101941B2 (ja) * | 1986-05-09 | 1994-12-12 | 株式会社村田製作所 | リニア駆動モ−タ |
| JPH03120694U (https=) * | 1990-03-19 | 1991-12-11 | ||
| DE4326479C2 (de) * | 1993-08-06 | 2000-09-28 | Daimler Chrysler Ag | Aktuator für ein bewegbares Element |
| JPH0880069A (ja) * | 1994-09-06 | 1996-03-22 | Hitachi Ltd | 駆動装置 |
| RU2101840C1 (ru) * | 1996-06-10 | 1998-01-10 | Санкт-Петербургская государственная академия аэрокосмического приборостроения | Шаговый двигатель |
| JP3190634B2 (ja) | 1999-01-05 | 2001-07-23 | セイコーインスツルメンツ株式会社 | 圧電アクチュエータおよび圧電アクチュエータの駆動方法並びに圧電アクチュエータの駆動方法をコンピュータに実行させるプログラムを格納した、コンピュータが読取可能な記憶媒体 |
| AU5653699A (en) * | 1999-09-20 | 2001-04-24 | Nikon Corporation | Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices |
| DE50014572D1 (de) | 1999-11-29 | 2007-09-27 | Miniswys Sa | Piezoelektrischer antrieb |
| US6870304B2 (en) * | 2000-03-23 | 2005-03-22 | Elliptec Resonant Actuator Ag | Vibratory motors and methods of making and using same |
| JP2002101676A (ja) | 2000-09-25 | 2002-04-05 | Minolta Co Ltd | アクチュエータ |
| DE10113660A1 (de) * | 2001-03-21 | 2002-09-26 | Koninkl Philips Electronics Nv | Piezoelektrischer Antrieb |
| AU2002304947A1 (en) | 2001-06-06 | 2002-12-16 | Creaholic Sa | Piezoelectric drive |
| JP4033643B2 (ja) * | 2001-06-18 | 2008-01-16 | 日本碍子株式会社 | 圧電／電歪デバイスおよびその製造方法 |
| EP1438754B1 (de) | 2001-10-22 | 2005-12-28 | miniswys SA | Piezoelektrischer antrieb |
| GB0128591D0 (en) * | 2001-11-29 | 2002-01-23 | 1 Ltd | Mounting system |
| KR100991643B1 (ko) | 2002-03-15 | 2010-11-04 | 미니스뷔스 에스에이 | 압전 모터 및 그 구동방법 |
| JP4574206B2 (ja) * | 2003-04-25 | 2010-11-04 | キヤノン株式会社 | 駆動装置、それを用いた露光装置、デバイスの製造方法 |
-
2004
- 2004-06-24 CH CH01066/04A patent/CH696993A5/de not_active IP Right Cessation
-
2005
- 2005-06-21 WO PCT/CH2005/000343 patent/WO2006000118A1/de not_active Ceased
- 2005-06-21 EP EP09007383A patent/EP2200102B1/de not_active Expired - Lifetime
- 2005-06-21 EP EP05750589A patent/EP1761999B1/de not_active Expired - Lifetime
- 2005-06-21 JP JP2007516936A patent/JP4690398B2/ja not_active Expired - Lifetime
- 2005-06-21 CN CN2005800286224A patent/CN101019301B/zh not_active Expired - Lifetime
- 2005-06-21 KR KR1020077001542A patent/KR101175823B1/ko not_active Expired - Fee Related
- 2005-06-21 DE DE502005007466T patent/DE502005007466D1/de not_active Expired - Lifetime
-
2006
- 2006-12-21 US US11/643,297 patent/US7429812B2/en not_active Expired - Lifetime
-
2008
- 2008-06-18 JP JP2008159279A patent/JP4700084B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013012539B4 (de) * | 2012-08-03 | 2014-11-27 | Faurecia Sièges d'Automobile | Fahrzeugsitz mit motorisch einstellbarem Abschnitt, sowie elektonische Steuereinheit für einen Fahrzeugsitz |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4690398B2 (ja) | 2011-06-01 |
| DE502005007466D1 (de) | 2009-07-23 |
| US7429812B2 (en) | 2008-09-30 |
| JP4700084B2 (ja) | 2011-06-15 |
| WO2006000118A1 (de) | 2006-01-05 |
| EP2200102B1 (de) | 2012-06-20 |
| EP1761999A1 (de) | 2007-03-14 |
| EP1761999B1 (de) | 2009-06-10 |
| CN101019301B (zh) | 2011-07-06 |
| EP2200102A1 (de) | 2010-06-23 |
| JP2008503995A (ja) | 2008-02-07 |
| US20070164635A1 (en) | 2007-07-19 |
| KR20070072851A (ko) | 2007-07-06 |
| KR101175823B1 (ko) | 2012-08-24 |
| JP2008220171A (ja) | 2008-09-18 |
| HK1109247A1 (en) | 2008-05-30 |
| CN101019301A (zh) | 2007-08-15 |
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| Date | Code | Title | Description |
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| PUE | Assignment |
Owner name: MINISWYS SA Free format text: CREAHOLIC S.A.#ZENTRALSTRASSE 115#2502 BIEL/BIENNE (CH) -TRANSFER TO- MINISWYS SA#ZENTRALSTRASSE 115#2503 BIEL (CH) |
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| PL | Patent ceased |