CH655423GA3 - - Google Patents

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Publication number
CH655423GA3
CH655423GA3 CH73084A CH73084A CH655423GA3 CH 655423G A3 CH655423G A3 CH 655423GA3 CH 73084 A CH73084 A CH 73084A CH 73084 A CH73084 A CH 73084A CH 655423G A3 CH655423G A3 CH 655423GA3
Authority
CH
Switzerland
Prior art keywords
tuning fork
plates
pedestal
conductive track
seals
Prior art date
Application number
CH73084A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to CH73084A priority Critical patent/CH655423GA3/fr
Priority to US06/696,366 priority patent/US4652787A/en
Priority to EP85101537A priority patent/EP0156146B1/fr
Priority to DE8585101537T priority patent/DE3564521D1/de
Priority to JP60025357A priority patent/JPS60187117A/ja
Publication of CH655423GA3 publication Critical patent/CH655423GA3/fr

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063—Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
CH73084A 1984-02-15 1984-02-15 CH655423GA3 (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH73084A CH655423GA3 (fi) 1984-02-15 1984-02-15
US06/696,366 US4652787A (en) 1984-02-15 1985-01-30 Piezoelectric oscillator
EP85101537A EP0156146B1 (fr) 1984-02-15 1985-02-13 Oscillateur piézo-électrique
DE8585101537T DE3564521D1 (en) 1984-02-15 1985-02-13 Piezoelectric oscillator
JP60025357A JPS60187117A (ja) 1984-02-15 1985-02-14 圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH73084A CH655423GA3 (fi) 1984-02-15 1984-02-15

Publications (1)

Publication Number Publication Date
CH655423GA3 true CH655423GA3 (fi) 1986-04-30

Family

ID=4193846

Family Applications (1)

Application Number Title Priority Date Filing Date
CH73084A CH655423GA3 (fi) 1984-02-15 1984-02-15

Country Status (5)

Country Link
US (1) US4652787A (fi)
EP (1) EP0156146B1 (fi)
JP (1) JPS60187117A (fi)
CH (1) CH655423GA3 (fi)
DE (1) DE3564521D1 (fi)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196812A (ja) * 1984-10-17 1986-05-15 Murata Mfg Co Ltd 電子部品
US4639631A (en) * 1985-07-01 1987-01-27 Motorola, Inc. Electrostatically sealed piezoelectric device
JP3091766B2 (ja) * 1990-02-14 2000-09-25 エンデブコ・コーポレーション 表面取付け型圧電セラミツク式加速度計及びその製造方法
US5369862A (en) * 1990-02-26 1994-12-06 Murata Manufacturing Co., Ltd. Method of producing a piezoelectric device
JP2601016B2 (ja) * 1990-11-17 1997-04-16 株式会社村田製作所 圧電共振子の製造方法
DE69310031T2 (de) * 1992-06-23 1997-10-09 Matsushita Electric Ind Co Ltd Quartzgerät und Verfahren zur Herstellung
JPH06291587A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 圧電振動子
EP0596522A1 (en) * 1992-11-06 1994-05-11 AVANCE TECHNOLOGY, Inc. High frequency crystal resonator
US6182508B1 (en) * 1996-12-18 2001-02-06 Denso Corporation Structure of angular rate sensor
US6960870B2 (en) * 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
US6976295B2 (en) * 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device
JP4547788B2 (ja) * 2000-03-15 2010-09-22 セイコーエプソン株式会社 圧電振動子のパッケージ構造
WO2003017364A1 (fr) * 2001-08-17 2003-02-27 Citizen Watch Co., Ltd. Dispositif electronique et son procede de realisation
JP3646258B2 (ja) * 2001-10-31 2005-05-11 有限会社ピエデック技術研究所 水晶ユニットとその製造方法
JP2004080221A (ja) * 2002-08-13 2004-03-11 Fujitsu Media Device Kk 弾性波デバイス及びその製造方法
JP4329492B2 (ja) * 2003-10-28 2009-09-09 セイコーエプソン株式会社 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4690146B2 (ja) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 水晶振動子、発振器及び電子機器
KR100878410B1 (ko) * 2007-07-11 2009-01-13 삼성전기주식회사 수정 진동자 제조방법
US8446079B2 (en) * 2008-05-23 2013-05-21 Statek Corporation Piezoelectric resonator with vibration isolation
TWI513668B (zh) * 2009-02-23 2015-12-21 Seiko Instr Inc 玻璃密封型封裝的製造方法及玻璃基板
JP5421690B2 (ja) * 2009-08-12 2014-02-19 セイコーインスツル株式会社 パッケージの製造方法
JP5479874B2 (ja) * 2009-12-10 2014-04-23 セイコーインスツル株式会社 パッケージの製造方法及びパッケージ
JP2011142374A (ja) * 2010-01-05 2011-07-21 Seiko Epson Corp 圧電デバイス、圧電デバイスの製造方法
JP5325151B2 (ja) * 2010-03-31 2013-10-23 日本電波工業株式会社 水晶デバイス、及びその製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3073975A (en) * 1958-12-23 1963-01-15 Rca Corp Crystal unit
FR2336806A1 (fr) * 1975-12-26 1977-07-22 Seiko Instr & Electronics Vibreur piezo-electrique
GB2002955A (en) * 1977-07-19 1979-02-28 Matsushima Kogyo Kk Piezo-electric oscillator assembly
FR2461404A1 (fr) * 1979-07-06 1981-01-30 Ebauchesfabrik Eta Ag Resonateur piezo-electrique et son procede de fabrication
FR2482784A1 (fr) * 1980-05-14 1981-11-20 Ebauchesfabrik Eta Ag Procede de realisation de boitiers pour composant electronique
JPS5710513A (en) * 1980-06-23 1982-01-20 Citizen Watch Co Ltd Airtight sealing method for quartz oscillator

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478693A (en) * 1977-12-05 1979-06-22 Matsushima Kogyo Co Ltd Crystal vibrator
JPS5513553A (en) * 1978-07-14 1980-01-30 Matsushima Kogyo Co Ltd Crystal vibrator
CH629358GA3 (en) * 1979-05-17 1982-04-30 Piezoelectric resonator
JPS6127138Y2 (fi) * 1980-06-30 1986-08-13
US4405875A (en) * 1980-07-24 1983-09-20 Kiyoshi Nagai Hermetically sealed flat-type piezo-electric oscillator assembly
JPS57115013A (en) * 1981-01-09 1982-07-17 Citizen Watch Co Ltd Case for quartz oscillator
CH643980B (fr) * 1981-04-02 Ebauchesfabrik Eta Ag Oscillateur piezo-electrique et procede pour sa fabrication.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3073975A (en) * 1958-12-23 1963-01-15 Rca Corp Crystal unit
FR2336806A1 (fr) * 1975-12-26 1977-07-22 Seiko Instr & Electronics Vibreur piezo-electrique
GB2002955A (en) * 1977-07-19 1979-02-28 Matsushima Kogyo Kk Piezo-electric oscillator assembly
FR2461404A1 (fr) * 1979-07-06 1981-01-30 Ebauchesfabrik Eta Ag Resonateur piezo-electrique et son procede de fabrication
FR2482784A1 (fr) * 1980-05-14 1981-11-20 Ebauchesfabrik Eta Ag Procede de realisation de boitiers pour composant electronique
JPS5710513A (en) * 1980-06-23 1982-01-20 Citizen Watch Co Ltd Airtight sealing method for quartz oscillator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENTS ABSTRACTS OF JAPAN, vol. 6, no. 72, (E-105)(950), 7 mai 1982, & JP - A - 57 10 513 (CITIZEN TOKEI K.K.)(20-01-1982). *

Also Published As

Publication number Publication date
US4652787A (en) 1987-03-24
EP0156146A1 (fr) 1985-10-02
JPS60187117A (ja) 1985-09-24
DE3564521D1 (en) 1988-09-22
EP0156146B1 (fr) 1988-08-17

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