CH621714A5 - - Google Patents

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Publication number
CH621714A5
CH621714A5 CH717776A CH717776A CH621714A5 CH 621714 A5 CH621714 A5 CH 621714A5 CH 717776 A CH717776 A CH 717776A CH 717776 A CH717776 A CH 717776A CH 621714 A5 CH621714 A5 CH 621714A5
Authority
CH
Switzerland
Prior art keywords
vacuum
heating
foils
walls
temperature
Prior art date
Application number
CH717776A
Other languages
German (de)
English (en)
Inventor
Otto Dr Winkler
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Priority to CH717776A priority Critical patent/CH621714A5/de
Priority to NL7608390A priority patent/NL7608390A/nl
Priority to DE19772714371 priority patent/DE2714371A1/de
Priority to GB16186/77A priority patent/GB1562350A/en
Priority to FR7714338A priority patent/FR2354392A2/fr
Priority to US06/010,166 priority patent/US4306515A/en
Publication of CH621714A5 publication Critical patent/CH621714A5/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
CH717776A 1976-06-08 1976-06-08 CH621714A5 (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH717776A CH621714A5 (nl) 1976-06-08 1976-06-08
NL7608390A NL7608390A (nl) 1976-06-08 1976-07-28 Vacuuminstallatie voor het behandelen van materiaal, in het bijzonder vacuumopdamp- installatie.
DE19772714371 DE2714371A1 (de) 1976-06-08 1977-03-31 Vakuumanlage zum behandeln eines gutes, insbesondere vakuumaufdampfanlage
GB16186/77A GB1562350A (en) 1976-06-08 1977-04-19 Vacuum plants
FR7714338A FR2354392A2 (fr) 1976-06-08 1977-05-11 Installation pour le traitement sous vide d'un produit, notamment pour l'evaporation sous vide
US06/010,166 US4306515A (en) 1976-06-08 1979-02-07 Vacuum-deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH717776A CH621714A5 (nl) 1976-06-08 1976-06-08

Publications (1)

Publication Number Publication Date
CH621714A5 true CH621714A5 (nl) 1981-02-27

Family

ID=4321100

Family Applications (1)

Application Number Title Priority Date Filing Date
CH717776A CH621714A5 (nl) 1976-06-08 1976-06-08

Country Status (6)

Country Link
US (1) US4306515A (nl)
CH (1) CH621714A5 (nl)
DE (1) DE2714371A1 (nl)
FR (1) FR2354392A2 (nl)
GB (1) GB1562350A (nl)
NL (1) NL7608390A (nl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH634606A5 (de) * 1977-10-20 1983-02-15 Balzers Hochvakuum Verfahren zur erzeugung von hochvakuum zur durchfuehrung von beschichtungsprozessen.
US4970986A (en) * 1989-08-03 1990-11-20 General Electric Company Apparatus for synthetic diamond deposition including spring-tensioned filaments
JP2998903B2 (ja) * 1990-11-14 2000-01-17 東京エレクトロン株式会社 熱処理装置
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US20070137653A1 (en) * 2000-03-13 2007-06-21 Wood Thomas J Ventilation interface for sleep apnea therapy
US7518880B1 (en) 2006-02-08 2009-04-14 Bi-Link Shielding arrangement for electronic device
US20100257732A1 (en) * 2009-04-14 2010-10-14 Ziberna Frank J Shielding Arrangement for Electronic Device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2239452A (en) * 1937-03-13 1941-04-22 Robley C Williams Method and apparatus for producing semitransparent coatings
FR878682A (fr) * 1941-01-28 1943-01-27 Licentia Gmbh Dispositif pour produire des couches métalliques par vaporisation thermique
US2398382A (en) * 1942-11-17 1946-04-16 Dean A Lyon Method for coating optical elements
US2727167A (en) * 1952-04-18 1955-12-13 Westinghouse Electric Corp Ion pump
US3095494A (en) * 1960-02-25 1963-06-25 New York Air Brake Co Ultra high vacuum device
US3324825A (en) * 1964-11-25 1967-06-13 Mhd Res Inc Glow discharge reactor
FR1427137A (fr) * 1964-12-17 1966-02-04 Sedimmec Dispositif de dégazage pour installation de vide ou d'ultra-vide
NL6706895A (nl) * 1967-02-23 1968-08-26
US3678889A (en) * 1970-02-06 1972-07-25 Tokyo Shibaura Electric Co Reflector assembly for reflecting the vapors of high temperature volatile materials
CH519588A (de) * 1970-02-13 1972-02-29 Berghaus Elektrophysik Anst Verfahren zur Bearbeitung eines Werkstückes mittels einer Glimmentladung und Apparatur zur Durchführung des Verfahrens
US3862397A (en) * 1972-03-24 1975-01-21 Applied Materials Tech Cool wall radiantly heated reactor

Also Published As

Publication number Publication date
US4306515A (en) 1981-12-22
GB1562350A (en) 1980-03-12
DE2714371A1 (de) 1977-12-22
NL7608390A (nl) 1977-12-12
FR2354392A2 (fr) 1978-01-06

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Date Code Title Description
PL Patent ceased