CH472668A - Einrichtung mit einer Mehrkomponenten-Piezomesszelle - Google Patents

Einrichtung mit einer Mehrkomponenten-Piezomesszelle

Info

Publication number
CH472668A
CH472668A CH1242367A CH1242367A CH472668A CH 472668 A CH472668 A CH 472668A CH 1242367 A CH1242367 A CH 1242367A CH 1242367 A CH1242367 A CH 1242367A CH 472668 A CH472668 A CH 472668A
Authority
CH
Switzerland
Prior art keywords
setup
measuring cell
component
component piezo
piezo measuring
Prior art date
Application number
CH1242367A
Other languages
German (de)
English (en)
Inventor
Hans Dipl Ing Fischer
Conrad Dipl-Ing Sonderegg Hans
Techn Spescha Gelli Dr Sc
Original Assignee
Kistler Instrumente Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Instrumente Ag filed Critical Kistler Instrumente Ag
Priority to CH1242367A priority Critical patent/CH472668A/de
Priority to DE19681773551 priority patent/DE1773551C/de
Priority to GB1225799D priority patent/GB1225799A/en
Priority to AT644868A priority patent/AT291629B/de
Priority to US756173A priority patent/US3566163A/en
Publication of CH472668A publication Critical patent/CH472668A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Vibration Prevention Devices (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
CH1242367A 1967-09-05 1967-09-05 Einrichtung mit einer Mehrkomponenten-Piezomesszelle CH472668A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1242367A CH472668A (de) 1967-09-05 1967-09-05 Einrichtung mit einer Mehrkomponenten-Piezomesszelle
DE19681773551 DE1773551C (de) 1967-09-05 1968-06-01 Piezoelektrischer Mehrkomponenten Druckgeber
GB1225799D GB1225799A (enrdf_load_stackoverflow) 1967-09-05 1968-06-19
AT644868A AT291629B (de) 1967-09-05 1968-07-05 Mehrkomponenten-Piezomeßzelle
US756173A US3566163A (en) 1967-09-05 1968-08-29 Multiple-component piezomeasuring cells

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1242367A CH472668A (de) 1967-09-05 1967-09-05 Einrichtung mit einer Mehrkomponenten-Piezomesszelle

Publications (1)

Publication Number Publication Date
CH472668A true CH472668A (de) 1969-05-15

Family

ID=4382886

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1242367A CH472668A (de) 1967-09-05 1967-09-05 Einrichtung mit einer Mehrkomponenten-Piezomesszelle

Country Status (4)

Country Link
US (1) US3566163A (enrdf_load_stackoverflow)
AT (1) AT291629B (enrdf_load_stackoverflow)
CH (1) CH472668A (enrdf_load_stackoverflow)
GB (1) GB1225799A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012867A1 (de) * 1978-12-22 1980-07-09 Kistler Instrumente AG Piezoelektrischer Dehnungsaufnehmer
DE3151669A1 (de) * 1981-12-28 1983-07-14 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Heckstielwaage zur luftkraftbestimmung an windkanalmodellen
EP0116810A1 (de) * 1983-02-21 1984-08-29 Vibro-Meter Sa Duales Accelerometer, Verfahren zu dessen Herstellung und Anwendung desselben
US10677667B2 (en) 2015-06-05 2020-06-09 Kistler Holding, Ag Component transducer and multi-component transducer using such component transducer as well as use of such multi-component transducer

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697790A (en) * 1970-12-02 1972-10-10 William T Flint Transducers having piezoelectric struts
CH587475A5 (enrdf_load_stackoverflow) * 1975-09-26 1977-04-29 Kistler Instrumente Ag
US4088907A (en) * 1976-10-29 1978-05-09 Westinghouse Electric Corp. Piezoelectric acoustic emission instrumentation
DE3110280A1 (de) * 1981-03-17 1982-09-30 Siemens AG, 1000 Berlin und 8000 München "ultraschallaufnehmer"
JPS59108244U (ja) * 1983-01-10 1984-07-21 日産自動車株式会社 座金型圧力センサ
US4620438A (en) * 1983-12-15 1986-11-04 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4767960A (en) * 1983-12-15 1988-08-30 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4567395A (en) * 1984-10-26 1986-01-28 Texas Instruments Incorporated Piezoelectric pressure transmitter for an internal combustion engine
US4645965A (en) * 1984-10-26 1987-02-24 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4590400A (en) * 1984-10-26 1986-05-20 Texas Instruments Incorporated Piezoelectric cylinder pressure transmitter
US4570097A (en) * 1984-10-26 1986-02-11 Texas Instruments Incorporated Electrical connections for a piezoelectric pressure transmitter for an internal combustion engine
US4620446A (en) * 1984-12-31 1986-11-04 Bruel & Kjaer Instruments, Inc. Acceleration responsive transducers
US4797369A (en) * 1985-04-05 1989-01-10 International Technidyne Corp. Method and apparatus for detecting a blood clot
US4671147A (en) * 1985-05-30 1987-06-09 General Electric Company Instrumented tool holder
ATE65319T1 (de) * 1986-11-07 1991-08-15 Kristal Instr Ag Mehrkomponenten-dynamometer.
EP0266452A1 (de) * 1986-11-07 1988-05-11 Kristal Instrumente AG Piezoelektrisches Aufnehmerelement
US4835436A (en) * 1988-03-21 1989-05-30 Lew Hyok S Piezoelectric impulse sensor
DE3911875C2 (de) * 1988-04-13 1994-10-06 Mitsubishi Electric Corp Beschleunigungssensor
DE3877563D1 (de) * 1988-05-18 1993-02-25 Kistler Instrumente Ag Kraftaufnehmer zum einbau in messplattformen.
JP2508321B2 (ja) * 1989-12-04 1996-06-19 日本電気株式会社 圧電アクチュエ―タおよびその製造方法
US5341687A (en) * 1992-11-16 1994-08-30 The Goodyear Tire & Rubber Company 3-dimensional pressure sensor
GB2282450B (en) * 1993-09-29 1997-03-26 Roke Manor Research Improvements in or relating to accelerometers
DE19549339C1 (de) * 1995-04-07 1996-10-24 Europ Transonic Windtunnel Modellträger für Windkanalmodelle
US5714687A (en) 1995-10-31 1998-02-03 Dunegan; Harold L. Transducer for measuring acoustic emission events
US6173613B1 (en) 1996-04-30 2001-01-16 Harold L. Dunegan Measuring crack growth by acoustic emission
WO1998001297A1 (en) * 1996-07-09 1998-01-15 Panex Corporation Quartz construction
US6031317A (en) * 1997-09-17 2000-02-29 Aeptec Microsystems, Inc. Piezoelecric shock sensor
US6626029B2 (en) 1999-01-08 2003-09-30 Harold L. Dunegan Apparatus and methods for measuring surface roughness
US7546774B2 (en) * 2005-06-10 2009-06-16 Kistler Holding, Ag Pressure sensor with active and passive acceleration compensation
US8074524B2 (en) * 2006-05-04 2011-12-13 Kistler Holding, Ag Piezoelectric measuring element with transverse effect and sensor comprising such a measuring element
DE102006049079A1 (de) * 2006-10-13 2008-04-17 Robert Bosch Gmbh Druckmesseinrichtung
WO2009016030A1 (de) * 2007-07-27 2009-02-05 Piezocryst Advanced Sensorics Gmbh Kraftsensor
US8460221B2 (en) * 2009-08-20 2013-06-11 Krypton Systems LLC Ultra-sonic and vibratory treatment devices and methods
JP5742415B2 (ja) * 2011-04-14 2015-07-01 セイコーエプソン株式会社 センサーデバイス、力検出装置およびロボット
JP5866891B2 (ja) * 2011-09-06 2016-02-24 セイコーエプソン株式会社 力センサー、力検出装置、ロボットハンド、およびロボット
JP5866907B2 (ja) * 2011-09-16 2016-02-24 セイコーエプソン株式会社 力センサー、力検出装置、ロボットハンド、ロボット、および力センサーの製造方法
JP2013101020A (ja) * 2011-11-08 2013-05-23 Seiko Epson Corp センサー素子、力検出装置およびロボット
CN102519634B (zh) * 2011-12-12 2014-04-09 济南大学 一种压电薄膜力传感器
JP5880935B2 (ja) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、ロボット、センサーデバイスの製造方法
JP5887911B2 (ja) * 2011-12-20 2016-03-16 セイコーエプソン株式会社 センサーモジュール、力検出装置、ロボット
JP5880934B2 (ja) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置、ロボット
JP5880936B2 (ja) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置及びロボット
JP2013160669A (ja) * 2012-02-07 2013-08-19 Seiko Epson Corp センサーデバイス、センサーモジュール、力検出装置及びロボット
JP5895615B2 (ja) * 2012-03-09 2016-03-30 セイコーエプソン株式会社 センサーモジュール、力検出装置及びロボット
JP5942574B2 (ja) * 2012-05-10 2016-06-29 セイコーエプソン株式会社 力検出素子、力検出モジュール、力検出ユニットおよびロボット
JP5942590B2 (ja) * 2012-05-23 2016-06-29 セイコーエプソン株式会社 力検出素子、力検出モジュール、力検出ユニットおよびロボット
CH706635A1 (de) * 2012-06-20 2013-12-31 Kistler Holding Ag Messelement, Messkörper und Messanordnung zum Messen einer Kraft und Verwendung eines solchen Messkörpers.
JP6051678B2 (ja) * 2012-08-22 2016-12-27 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置およびロボット
JP6231984B2 (ja) * 2012-08-29 2017-11-15 シチズンファインデバイス株式会社 燃焼圧センサ
WO2014034641A1 (ja) * 2012-08-30 2014-03-06 シチズンファインテックミヨタ株式会社 圧力検出装置
GB2505737B (en) * 2013-04-15 2016-04-06 Rolls Royce Plc Dual channel accelerometer and method of manufacturing the same
JP6217320B2 (ja) * 2013-10-31 2017-10-25 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP6183161B2 (ja) * 2013-10-31 2017-08-23 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP6210296B2 (ja) * 2013-10-31 2017-10-11 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP6217321B2 (ja) * 2013-10-31 2017-10-25 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP2015087292A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP6176059B2 (ja) * 2013-10-31 2017-08-09 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP6232943B2 (ja) * 2013-11-05 2017-11-22 セイコーエプソン株式会社 力検出装置、ロボットおよび電子部品搬送装置
JP6232942B2 (ja) * 2013-11-05 2017-11-22 セイコーエプソン株式会社 力検出装置、ロボットおよび電子部品搬送装置
CN110057484B (zh) 2013-11-05 2021-05-04 精工爱普生株式会社 力检测装置、机器人以及电子部件输送装置
JP6248709B2 (ja) * 2014-03-04 2017-12-20 セイコーエプソン株式会社 力検出装置およびロボット
JP2015169593A (ja) * 2014-03-10 2015-09-28 セイコーエプソン株式会社 力検出装置、ロボットおよび部品加工装置
EP3526565A1 (de) * 2016-10-17 2019-08-21 Kistler Holding AG Kraft- und momentensensor, kraftaufnehmermodul für einen solchen kraft- und momentensensor und roboter mit einem solchen kraft- und momentensensor
JP2019012012A (ja) * 2017-06-30 2019-01-24 セイコーエプソン株式会社 力検出装置およびロボット
JP6432647B2 (ja) * 2017-07-10 2018-12-05 セイコーエプソン株式会社 センサー素子、力検出装置およびロボット
JP2018077248A (ja) * 2018-01-10 2018-05-17 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置およびロボット
AT520901B1 (de) 2018-01-24 2019-11-15 Avl List Gmbh Messvorrichtung und Verfahren zur Bestimmung einer Kraft und/oder eines Drehmoments an einer drehmomentübertragenden Welle

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012867A1 (de) * 1978-12-22 1980-07-09 Kistler Instrumente AG Piezoelektrischer Dehnungsaufnehmer
DE3151669A1 (de) * 1981-12-28 1983-07-14 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Heckstielwaage zur luftkraftbestimmung an windkanalmodellen
EP0083296B1 (de) * 1981-12-28 1987-11-19 Deutsche Forschungsanstalt für Luft- und Raumfahrt e.V. Heckstielwaage zur Luftkraftbestimmung an Windkanalmodellen
EP0116810A1 (de) * 1983-02-21 1984-08-29 Vibro-Meter Sa Duales Accelerometer, Verfahren zu dessen Herstellung und Anwendung desselben
US10677667B2 (en) 2015-06-05 2020-06-09 Kistler Holding, Ag Component transducer and multi-component transducer using such component transducer as well as use of such multi-component transducer

Also Published As

Publication number Publication date
DE1773551B2 (de) 1972-07-06
DE1773551A1 (de) 1971-07-29
US3566163A (en) 1971-02-23
AT291629B (de) 1971-07-26
GB1225799A (enrdf_load_stackoverflow) 1971-03-24

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