CH472668A - Setup with a multi-component piezo measuring cell - Google Patents

Setup with a multi-component piezo measuring cell

Info

Publication number
CH472668A
CH472668A CH1242367A CH1242367A CH472668A CH 472668 A CH472668 A CH 472668A CH 1242367 A CH1242367 A CH 1242367A CH 1242367 A CH1242367 A CH 1242367A CH 472668 A CH472668 A CH 472668A
Authority
CH
Switzerland
Prior art keywords
setup
measuring cell
component
component piezo
piezo measuring
Prior art date
Application number
CH1242367A
Other languages
German (de)
Inventor
Hans Dipl Ing Fischer
Conrad Dipl-Ing Sonderegg Hans
Techn Spescha Gelli Dr Sc
Original Assignee
Kistler Instrumente Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Instrumente Ag filed Critical Kistler Instrumente Ag
Priority to CH1242367A priority Critical patent/CH472668A/en
Priority to DE19681773551 priority patent/DE1773551C/en
Priority to GB1225799D priority patent/GB1225799A/en
Priority to AT644868A priority patent/AT291629B/en
Priority to US756173A priority patent/US3566163A/en
Publication of CH472668A publication Critical patent/CH472668A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Vibration Prevention Devices (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
CH1242367A 1967-09-05 1967-09-05 Setup with a multi-component piezo measuring cell CH472668A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1242367A CH472668A (en) 1967-09-05 1967-09-05 Setup with a multi-component piezo measuring cell
DE19681773551 DE1773551C (en) 1967-09-05 1968-06-01 Piezoelectric multi-component pressure transducer
GB1225799D GB1225799A (en) 1967-09-05 1968-06-19
AT644868A AT291629B (en) 1967-09-05 1968-07-05 Multi-component piezo measuring cell
US756173A US3566163A (en) 1967-09-05 1968-08-29 Multiple-component piezomeasuring cells

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1242367A CH472668A (en) 1967-09-05 1967-09-05 Setup with a multi-component piezo measuring cell

Publications (1)

Publication Number Publication Date
CH472668A true CH472668A (en) 1969-05-15

Family

ID=4382886

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1242367A CH472668A (en) 1967-09-05 1967-09-05 Setup with a multi-component piezo measuring cell

Country Status (4)

Country Link
US (1) US3566163A (en)
AT (1) AT291629B (en)
CH (1) CH472668A (en)
GB (1) GB1225799A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012867A1 (en) * 1978-12-22 1980-07-09 Kistler Instrumente AG Piezoelectric strain transducer
EP0083296A2 (en) * 1981-12-28 1983-07-06 DEUTSCHE FORSCHUNGSANSTALT FÜR LUFT- UND RAUMFAHRT e.V. Tail strut balance to determine the wind force on wind channel models
EP0116810A1 (en) * 1983-02-21 1984-08-29 Vibro-Meter Sa Dual accelerometer, method of manufacturing it and its application
US10677667B2 (en) 2015-06-05 2020-06-09 Kistler Holding, Ag Component transducer and multi-component transducer using such component transducer as well as use of such multi-component transducer

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US3697790A (en) * 1970-12-02 1972-10-10 William T Flint Transducers having piezoelectric struts
CH587475A5 (en) * 1975-09-26 1977-04-29 Kistler Instrumente Ag
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DE3110280A1 (en) * 1981-03-17 1982-09-30 Siemens AG, 1000 Berlin und 8000 München Ultrasonic pick-up
JPS59108244U (en) * 1983-01-10 1984-07-21 日産自動車株式会社 Washer type pressure sensor
US4620438A (en) * 1983-12-15 1986-11-04 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4767960A (en) * 1983-12-15 1988-08-30 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4590400A (en) * 1984-10-26 1986-05-20 Texas Instruments Incorporated Piezoelectric cylinder pressure transmitter
US4645965A (en) * 1984-10-26 1987-02-24 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
US4570097A (en) * 1984-10-26 1986-02-11 Texas Instruments Incorporated Electrical connections for a piezoelectric pressure transmitter for an internal combustion engine
US4567395A (en) * 1984-10-26 1986-01-28 Texas Instruments Incorporated Piezoelectric pressure transmitter for an internal combustion engine
US4620446A (en) * 1984-12-31 1986-11-04 Bruel & Kjaer Instruments, Inc. Acceleration responsive transducers
US4797369A (en) * 1985-04-05 1989-01-10 International Technidyne Corp. Method and apparatus for detecting a blood clot
US4671147A (en) * 1985-05-30 1987-06-09 General Electric Company Instrumented tool holder
EP0266452A1 (en) * 1986-11-07 1988-05-11 Kristal Instrumente AG Piezoelectric transducer
DE3680341D1 (en) * 1986-11-07 1991-08-22 Kristal Instr Ag MULTI-COMPONENT DYNAMOMETER.
US4835436A (en) * 1988-03-21 1989-05-30 Lew Hyok S Piezoelectric impulse sensor
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DE3877563D1 (en) * 1988-05-18 1993-02-25 Kistler Instrumente Ag Force transducers for installation in measuring platforms.
JP2508321B2 (en) * 1989-12-04 1996-06-19 日本電気株式会社 Piezoelectric actuator and manufacturing method thereof
US5341687A (en) * 1992-11-16 1994-08-30 The Goodyear Tire & Rubber Company 3-dimensional pressure sensor
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US5714687A (en) * 1995-10-31 1998-02-03 Dunegan; Harold L. Transducer for measuring acoustic emission events
US6173613B1 (en) 1996-04-30 2001-01-16 Harold L. Dunegan Measuring crack growth by acoustic emission
WO1998001297A1 (en) * 1996-07-09 1998-01-15 Panex Corporation Quartz construction
US6031317A (en) * 1997-09-17 2000-02-29 Aeptec Microsystems, Inc. Piezoelecric shock sensor
US6626029B2 (en) 1999-01-08 2003-09-30 Harold L. Dunegan Apparatus and methods for measuring surface roughness
WO2006131015A2 (en) * 2005-06-10 2006-12-14 Kistler Holding Ag Pressure sensor with active and passive acceleration compensation
EP2013597B1 (en) * 2006-05-04 2010-04-21 Kistler Holding AG Piezoelectric measuring element with transverse effect and sensor comprising such a measuring element
DE102006049079A1 (en) * 2006-10-13 2008-04-17 Robert Bosch Gmbh Pressure measuring device
WO2009016030A1 (en) * 2007-07-27 2009-02-05 Piezocryst Advanced Sensorics Gmbh Force sensor
US8460221B2 (en) * 2009-08-20 2013-06-11 Krypton Systems LLC Ultra-sonic and vibratory treatment devices and methods
JP5742415B2 (en) * 2011-04-14 2015-07-01 セイコーエプソン株式会社 Sensor device, force detection device and robot
JP5866891B2 (en) * 2011-09-06 2016-02-24 セイコーエプソン株式会社 Force sensor, force detection device, robot hand, and robot
JP5866907B2 (en) * 2011-09-16 2016-02-24 セイコーエプソン株式会社 Force sensor, force detection device, robot hand, robot, and method of manufacturing force sensor
JP2013101020A (en) * 2011-11-08 2013-05-23 Seiko Epson Corp Sensor element, force detection device and robot
CN102519634B (en) * 2011-12-12 2014-04-09 济南大学 Piezoelectric film force sensor
JP5887911B2 (en) * 2011-12-20 2016-03-16 セイコーエプソン株式会社 Sensor module, force detection device, robot
JP5880936B2 (en) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 Sensor device, sensor module, force detection device, and robot
JP5880935B2 (en) 2011-12-20 2016-03-09 セイコーエプソン株式会社 Sensor device, sensor module, robot, and manufacturing method of sensor device
JP5880934B2 (en) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 Sensor device, sensor module, force detection device, robot
JP2013160669A (en) * 2012-02-07 2013-08-19 Seiko Epson Corp Sensor device, sensor module, force detector, and robot
JP5895615B2 (en) * 2012-03-09 2016-03-30 セイコーエプソン株式会社 Sensor module, force detection device and robot
JP5942574B2 (en) * 2012-05-10 2016-06-29 セイコーエプソン株式会社 Force detection element, force detection module, force detection unit and robot
JP5942590B2 (en) * 2012-05-23 2016-06-29 セイコーエプソン株式会社 Force detection element, force detection module, force detection unit and robot
CH706635A1 (en) * 2012-06-20 2013-12-31 Kistler Holding Ag Measuring element, measuring element and measuring device for measuring a force and use of such a measuring body.
JP6051678B2 (en) 2012-08-22 2016-12-27 セイコーエプソン株式会社 Sensor device, sensor module, force detection device and robot
WO2014034640A1 (en) * 2012-08-29 2014-03-06 シチズンファインテックミヨタ株式会社 Combustion pressure sensor
JP6069329B2 (en) * 2012-08-30 2017-02-01 シチズンファインデバイス株式会社 Pressure detection device
GB2505737B (en) * 2013-04-15 2016-04-06 Rolls Royce Plc Dual channel accelerometer and method of manufacturing the same
JP6210296B2 (en) * 2013-10-31 2017-10-11 セイコーエプソン株式会社 Force detection device, robot, electronic component transport device, electronic component inspection device, and component processing device
JP6183161B2 (en) * 2013-10-31 2017-08-23 セイコーエプソン株式会社 Sensor element, force detection device, robot, electronic component transfer device, electronic component inspection device, and component processing device
JP2015087292A (en) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 Sensor element, force detection device, robot, electronic component conveyance device, electronic component inspection device, and component processing device
JP6217321B2 (en) * 2013-10-31 2017-10-25 セイコーエプソン株式会社 Sensor element, force detection device, robot, electronic component transfer device, electronic component inspection device, and component processing device
JP6217320B2 (en) * 2013-10-31 2017-10-25 セイコーエプソン株式会社 Sensor element, force detection device, robot, electronic component transfer device, electronic component inspection device, and component processing device
JP6176059B2 (en) * 2013-10-31 2017-08-09 セイコーエプソン株式会社 Sensor element, force detection device, robot, electronic component transfer device, electronic component inspection device, and component processing device
JP6232943B2 (en) * 2013-11-05 2017-11-22 セイコーエプソン株式会社 Force detection device, robot, and electronic component transfer device
CN104614118B (en) * 2013-11-05 2019-01-11 精工爱普生株式会社 Force checking device, robot and electronic component handling apparatus
JP6232942B2 (en) * 2013-11-05 2017-11-22 セイコーエプソン株式会社 Force detection device, robot, and electronic component transfer device
JP6248709B2 (en) * 2014-03-04 2017-12-20 セイコーエプソン株式会社 Force detection device and robot
JP2015169593A (en) * 2014-03-10 2015-09-28 セイコーエプソン株式会社 Force detection device, robot, and component processing device
US20190242768A1 (en) * 2016-10-17 2019-08-08 Kistler Holding Ag Force and Moment Sensor, Force Transducer Module for Such a Force and Moment Sensor and Robot Comprising Such a Force and Moment Sensor
JP2019012012A (en) * 2017-06-30 2019-01-24 セイコーエプソン株式会社 Force detection device and robot
JP6432647B2 (en) * 2017-07-10 2018-12-05 セイコーエプソン株式会社 Sensor element, force detection device and robot
JP2018077248A (en) * 2018-01-10 2018-05-17 セイコーエプソン株式会社 Sensor device, sensor module, force detection device, and robot
AT520901B1 (en) 2018-01-24 2019-11-15 Avl List Gmbh Measuring device and method for determining a force and / or a torque on a torque transmitting shaft

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US3320580A (en) * 1963-02-27 1967-05-16 Alan O Sykes Multipurpose piezoelectric transducer system
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012867A1 (en) * 1978-12-22 1980-07-09 Kistler Instrumente AG Piezoelectric strain transducer
EP0083296A2 (en) * 1981-12-28 1983-07-06 DEUTSCHE FORSCHUNGSANSTALT FÜR LUFT- UND RAUMFAHRT e.V. Tail strut balance to determine the wind force on wind channel models
DE3151669A1 (en) * 1981-12-28 1983-07-14 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln REAR SLEEVE SCALE FOR DETERMINING AIR FORCE ON WIND CHANNEL MODELS
EP0083296B1 (en) * 1981-12-28 1987-11-19 Deutsche Forschungsanstalt für Luft- und Raumfahrt e.V. Tail strut balance to determine the wind force on wind channel models
EP0116810A1 (en) * 1983-02-21 1984-08-29 Vibro-Meter Sa Dual accelerometer, method of manufacturing it and its application
US10677667B2 (en) 2015-06-05 2020-06-09 Kistler Holding, Ag Component transducer and multi-component transducer using such component transducer as well as use of such multi-component transducer

Also Published As

Publication number Publication date
GB1225799A (en) 1971-03-24
DE1773551A1 (en) 1971-07-29
US3566163A (en) 1971-02-23
DE1773551B2 (en) 1972-07-06
AT291629B (en) 1971-07-26

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Legal Events

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