JP2018077248A - Sensor device, sensor module, force detection device, and robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor device capable of stably maintaining a detection property of a sensor element stored in a package for a long period, a sensor module including the sensor device, a force detection device, and a robot.SOLUTION: A sensor device includes: a package 202 having a recess; a sensor element 214 which is disposed in the recess and which has a piezoelectric body; and a lid 204 which is bonded to the package 202 and which seals the recess of the package 202. The package 202 has a first cavity 931 with which a bottom part of the sensor element 214 engages on an inner bottom face of the recess. The lid 204 has a second cavity 932 with which an upper part of the sensor element 214 engages.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sensor device, a sensor module, a force detection device, and a robot.

  Conventionally, the thing of patent document 1 was known as a force sensor using a piezoelectric material. Patent Document 1 discloses a force sensor in which a signal electrode is sandwiched between crystal disks, which are piezoelectric materials, and a plurality of measurement elements sandwiched between metal cover disks are arranged in a metal ring by welding.

  FIG. 10 shows a conventional sensor device. As shown in FIG. 10, the sensor device 200 includes a sensor element 214 and a metal package 202 having a recess that accommodates the sensor element 214, and an upper surface (joint surface 224) that is the outer periphery of the opening 220 in the recess of the package 202. And a metal plate-like lid 204 that contacts the sensor element 214 and is entirely constituted.

The sensor element 214 sandwiches the detection electrode 218 with two crystal plates 216 having the same cut surface facing each other.
The upper surface of the crystal plate 216 serves as a contact surface 222 of the sensor element 214 and is in contact with the lid 204.

  On the other hand, a coaxial connector 206 is attached to the side surface of the package 202. The coaxial connector 206 has an outer peripheral portion 208 and a center conductor 210. Between them, an insulating resin 212 is filled, and the outer peripheral portion 208 and the central conductor 210 are electrically insulated. here. The outer peripheral portion 208 is short-circuited with the package 202 and the lid 204, and the center conductor 210 is electrically connected to the detection electrode 218.

  The sensor device 200 is sandwiched between pressurization plates (not shown) to apply a pressurization, and the lid 204 transmits a force (pressure) to the contact surface 222 of the sensor element 214. Then, the force (pressure) applied to the crystal plate 216 changes according to the external force applied to the pressurizing plate. Then, the quartz plate 216 outputs (induces) charges associated with the applied force to the detection electrode 218 by the piezoelectric effect. Therefore, the external force applied to the sensor device 200 is detected by monitoring the amount of change in the output charge due to the change in force (pressure) through the coaxial connector 206 with reference to the signal output in the case of only pressurization. Can do.

  Here, in the sensor device 200, the sensor element 214 is used by the lid 204 in a state where the inside of the package 202 is filled with dry air so that electric charges induced from the crystal plate 216 do not leak due to a decrease in insulation resistance caused by moisture or the like. Is sealed.

Japanese Unexamined Patent Publication No. Hei 4-231827

  The force sensor disclosed in Patent Document 1 has a structure in which a signal electrode is sandwiched between crystal disks and this crystal disk is sandwiched between metal cover disks. When this is attached to the metal ring by welding, there is a dimensional error in individual parts such as signal electrodes, which becomes unevenness in the welded portion, and there is a possibility that a gap is generated in the welding. Therefore, in a situation where the external environment is inferior, such as high humidity, there is a possibility that charge may leak due to moisture intrusion into the sensor element, and stable measurement may be difficult.

  In the conventional sensor device shown in FIG. 10, the height of the contact surface 222 of the sensor element 214 accommodated in the package 202 and the height of the joint surface 224 that is the outer periphery of the opening 220 of the concave portion of the package 202 coincide with each other. If you do not occur.

  FIG. 11 shows a schematic diagram of the sensor device of the prior art (contact surface height> joint surface height), and FIGS. 11A and 11B are a plan view and a cross-sectional view, respectively, before joining the lid. . 11C and 11D are a plan view and a cross-sectional view after the lid is joined. Here, for simplification, the quartz plate, the detection electrode, and the wiring and connector for taking out the signal to the outside of the package, which are the constituent elements of the sensor element 214, are not shown.

  As shown in FIGS. 11A and 11B, before joining the lid 204 to the package 202, the sensor element 214 is positioned and placed in the center of the recess of the package 202, and the package 202 is mounted thereon. The lid 204 is placed so as to cover the opening 220 of the recess. At this time, since the manufacturing variation is included in the height of the package 202 and the sensor element 214, a gap 600 may be formed between the lid 204 and the joint surface 224.

  Next, as shown in FIG. 12, the roller electrode 280 is pressed against the position (joint surface 224) where the lid 204 is connected to the package 202, and current is applied to the roller electrode 280 to seam weld the lid 204 and the package 202. Are joined and hermetically sealed.

  When the lid 204 is seam welded, the sensor element 214 and the lid 204 are displaced due to vibrations in the conveying process and the force pressed by the roller electrode 280, and the lid is fixed to the package 202 as shown in FIG. 11C. Often, 204 was joined in a misalignment in plan view. In such a case, as shown in FIG. 11 (d), on the joint surface 224 of the lid 204 and the package 202, the location where the distance between the inside of the package and the outside is joined only a small distance (joint insufficient region 270). Is formed. Since the stress resistance is low in the insufficient bonding region 270, in the sensor device 200 to which force is repeatedly applied, the bonding between the lid 204 and the package 202 is repeatedly broken due to fatigue, the hermetic seal is broken, and the reliability is lowered. There was a fear.

  On the other hand, when the contact surface of the package 202 and the sensor element 214 or the contact surface of the sensor element 214 and the lid 204 is bonded with an adhesive in order to prevent displacement of the sensor element 214 and the lid 204 during seam welding, When the adhesive layer thickness is decreased in the long term due to the creep phenomenon, there is a problem that the pressurization is lowered and the force detection characteristic is changed or the force detection is impossible. For this reason, bonding the contact surface between the package 202 and the sensor element 214 and the contact surface between the sensor element 214 and the lid 204 with an adhesive is not preferable in terms of the characteristics and reliability of the sensor device.

  Therefore, the present invention pays attention to the above-mentioned problems, and has a structure capable of stably manufacturing a package that is unlikely to deteriorate, whereby the sensor device that can stably maintain the detection characteristics of the sensor element accommodated in the package for a long period of time. An object of the present invention is to provide a sensor module, a force detection device, and a robot.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.

  Application Example 1 A sensor device according to this application example includes a first member having a recess, a sensor element disposed in the recess and having a piezoelectric body, and joined to the first member, and the recess of the first member. A second member that seals the sensor element, wherein the first member has a first recess portion into which a bottom portion of the sensor element is fitted on an inner bottom surface of the recess, and the second member includes the sensor. It has the 2nd hollow part which the upper part of an element fits, It is characterized by the above-mentioned.

  According to this application example, the sensor element is positioned with respect to the first member in a state in which the sensor element is fitted into the first depression, and the second element is in a state in which the second depression is fitted into the sensor element. Since the member is positioned, the first member and the second member are indirectly positioned via the sensor element, and the first member and the second member are joined without displacement. As a result, the distance between the inside and the outside of the package at the joint surface between the first member and the second member can be stably and sufficiently secured, so that the detection characteristics of the sensor element accommodated in the first member can be maintained over a long period of time. The sensor device can be maintained stably.

  Application Example 2 In the sensor device according to the application example, the sensor element includes a first contact surface that the first member contacts, and a second contact surface that the second member contacts, The first member includes a first flat portion having a flat surface in contact with the first contact surface, and the second member includes a second flat portion having a flat surface in contact with the second contact surface. It is characterized by that.

  According to this application example, the first member and the sensor element are in direct contact with the first flat portion and the first contact surface, and the second member and the sensor element are in direct contact with each other with the second flat portion and the second contact surface. Since there is no member that causes creep in the transmission path, there is no reduction in the pressurization due to the creep phenomenon, and thereby the sensor device that can stably maintain the detection characteristics of the sensor element accommodated in the first member for a long period of time. It becomes.

Application Example 3 In the sensor device according to the application example described above, the normal direction of the sensor element is a Z-axis direction, and directions orthogonal to the Z-axis direction and orthogonal to each other are an X-axis direction and a Y-axis direction, respectively. The sensor element includes: a first sensor element that detects the force in the X-axis direction; a second sensor element that detects the force in the Y-axis direction; and a third sensor element that detects the force in the Z-axis direction. At least one of them is provided.
According to this application example, a force in an arbitrary direction can be detected according to the purpose of use.

  Application Example 4 A sensor module according to this application example includes a first member having a recess, a sensor element disposed in the recess and having a piezoelectric body, and joined to the first member, and the recess of the first member. A second member that seals, a first plate that contacts the first member, a second plate that contacts the second member, and a fastening portion that fastens the first plate and the second plate The sensor element has a first contact surface that contacts the first member and a second contact surface that contacts the second member, and the first member is disposed on the inner bottom surface of the recess. The first contact surface has a first recess portion into which the second contact surface is fitted, and the second member has a second recess portion with which the second contact surface is fitted.

  According to this application example, for the same reason as in Application Example 1, the sensor module can stably maintain the detection characteristics of the sensor element accommodated in the first member for a long period of time.

Application Example 5 A force detection device according to this application example includes the sensor device described above.
According to this application example, for the same reason as in application example 1, the force detection device can stably maintain the detection characteristics of the sensor element accommodated in the first member for a long period of time.

  Application Example 6 A force detection device according to this application example includes a first member having a recess, a sensor element disposed in the recess and having a piezoelectric body, and joined to the first member. A second member that seals the recess; and an electronic circuit that is electrically connected to the sensor element, wherein the sensor element is in contact with the first contact surface that contacts the first member. A second contact surface, and the first member has a first recess portion into which the first contact surface fits on an inner bottom surface of the concave portion, and the second member includes the second contact surface. It has the 2nd hollow part which a contact surface fits, It is characterized by the above-mentioned.

  According to this application example, for the same reason as in application example 1, the force detection device can stably maintain the detection characteristics of the sensor element accommodated in the first member for a long period of time.

  Application Example 7 A robot according to this application example includes the force detection device described above.

  According to this application example, the robot can stably maintain the detection characteristics of the sensor element accommodated in the first member for a long period of time for the same reason as in Application Example 1.

  Application Example 8 A robot according to this application example is a robot including a main body portion, an arm portion connected to the main body portion, and a hand portion connected to the arm portion, and the arm portion and the hand A sensor device at a connection portion with the first portion, the sensor device being bonded to the first member having a concave portion, a sensor element having a piezoelectric body disposed in the concave portion, and the first member, A second member that seals the concave portion of the member, and the sensor element has a first contact surface that contacts the first member, and a second contact surface that contacts the second member, The first member has a first dent portion into which the first contact surface is fitted on the inner bottom surface of the recess, and the second member is a second dent portion into which the second contact surface is fitted. It is characterized by having.

  According to this application example, for the same reason as in application example 1, the detection characteristics of the sensor element accommodated in the first member are stably maintained for a long time, and the external force applied to the arm portion and the hand portion is increased. It becomes a robot that can be detected.

It is a schematic diagram of the sensor device of 1st Embodiment, (a) is a top view, (b) is the sectional view on the AA line of the same figure (a). Sectional drawing of the modification of the lid of this embodiment. Sectional drawing of the sensor device of 2nd Embodiment. The top view of the sensor device of a 2nd embodiment (a lid is omitted). The top view of the package base of 2nd Embodiment. The schematic diagram of the sensor element of 2nd Embodiment. Sectional drawing of the sensor module of 3rd Embodiment. The schematic diagram of the force detection apparatus of 4th Embodiment. The schematic diagram of the robot carrying the force detection apparatus of 5th Embodiment. The schematic diagram of the sensor device of a prior art. It is a schematic diagram of the sensor device of a prior art, (a) is a top view before joining a lid to a package, (b) is the BB sectional drawing of the same figure (a), (c) is a lid packaged The top view after joining to (c), CC sectional view taken on the line of the same figure (c). The schematic diagram at the time of seam welding of the sensor device of a prior art.

  Hereinafter, the present invention will be described in detail with reference to embodiments shown in the drawings. However, as long as there is no specific description, the component, kind, combination, shape, relative arrangement, and the like described in this embodiment are merely illustrative examples rather than the main point of limiting the scope of the present invention.

(First embodiment)
FIG. 1 shows a schematic diagram of the sensor device of the first embodiment, FIG. 1 (a) is a plan view, and FIG. 1 (b) is a cross-sectional view taken along line AA of FIG. 1 (a). FIG. 2 is a cross-sectional view of a modified example of the lid of the present embodiment. Since the basic configuration of the sensor device 1 of the first embodiment is common to the sensor device 200 of the prior art, the same components are denoted by the same reference numerals, and the description thereof is omitted unless necessary.

  The sensor device 1 of the present embodiment is mainly configured by a package (first member) 202, a sensor element 214, and a lid (second member) 204. The package 202 has a recess, and a first recess 931 into which the bottom of the sensor element 214 is fitted is formed on the inner bottom surface of the recess. The lid 204 is formed with a second recess 932 into which the upper part of the sensor element 214 is fitted.

  The bottom of the sensor element 214 is placed in the first recess 931. On the sensor element 214, the lid 204 is placed in a state where the second depression 932 is fitted on the upper part of the sensor element 214 and covers the opening 220 in the recess of the package 202. The lid 204 is bonded to the bonding surface 224 of the package 202 at the periphery. The package 202 has a package structure having a recess, and is mainly made of metal, ceramic, or the like. Although not shown here, an electrode for taking out the output of the sensor element 214 to the outside of the package, Wiring, connectors, etc. are provided as appropriate.

  The lid 204 to be joined to the package 202 is formed of a metal such as stainless steel or Kovar (or ceramic as will be described later), and as shown in FIG. 1, the second recess 932 is formed by pressing or the like from a flat thin plate. It may have a punched shape, or as shown in FIG. 2 (a), the second depression 932 is cut to make it thinner than the other parts, or as shown in FIG. 2 (b) Alternatively, only the periphery of the second dent 932 may be formed from a thin plate by pressing or the like.

  The sensor device 1 of this embodiment is assembled as follows. First, the sensor element 214 is placed in the first recess 931 in the recess of the package 202. Here, since the flat part of the first recess 931 is formed to be 10 μm to 300 μm larger than the outer dimension of the bottom surface of the sensor element, for example, the bottom part of the sensor element is easily fitted and does not rattle. Next, the second depression 932 of the lid 204 is fitted into the upper part of the sensor element 214. Here, since the flat portion of the second depression 932 is formed to be 10 μm to 300 μm larger than the outer dimension of the upper surface of the sensor element 214, for example, it is easily fitted on the upper part of the sensor element 214 and does not rattle. Finally, seam welding is performed to join the package 202 and the lid 204 in this state. By doing so, the package 202 as the first member and the lid 204 as the second member are indirectly positioned via the sensor element 214 and do not rattle, so vibrations during the seam welding conveyance process In addition, the sensor element 214 and the lid 204 are not displaced by the force pressed by the roller electrode. Therefore, since the distance between the periphery of the lid 204 and the inside and outside of the package 202 at the joint surface 224 of the package 202 can be stably and sufficiently secured, the detection characteristics of the sensor element 214 accommodated in the package 202 can be improved for a long time. Can be maintained stably over a long period of time.

  The sensor device 1 of the present embodiment is sandwiched from the normal direction of the contact surface 222 of the sensor element 214 by, for example, pressurization plates 82 (FIG. 7) and 92 (FIG. 8) described later, and pressurization is applied. The bottom of the first recess 931 of the package 202 is a flat surface (first flat portion 933), is in surface contact with the bottom surface (first contact surface) of the sensor element 214, and the second of the lid 204 The bottom of the hollow portion 932 is a flat surface (second flat portion 934), and is in surface contact with the upper surface (second contact surface) of the sensor element 214. These contact surfaces are in direct contact with no adhesive or the like, and there is no member that causes creep in the pressure transmission path, so that a decrease in pressure due to a creep phenomenon does not occur. As a result, the detection characteristics of the sensor elements housed in the package can be stably maintained over a long period of time.

(Second Embodiment)
3 shows a cross-sectional view of the sensor device of the second embodiment, FIG. 4 shows a plan view of the sensor device of the second embodiment (with the lid omitted), and FIG. 5 shows the package base of the present embodiment. A plan view is shown. Here, FIG. 3 corresponds to a cross-sectional view taken along line AA of FIGS. 4 and 5. In addition, the sensor device 10 of the second embodiment is a device that detects forces in the directions of three orthogonal axes, and has the same operational effects as the sensor device 1 of the first embodiment.

  The sensor device 10 of the present embodiment is mainly configured by a package 12 (first member), a sensor element 42, and a lid 34 (second member). And the package 12 has a recessed part, and the 1st hollow part 931 in which the bottom part of the sensor element 42 fits is formed in the inner bottom face of the recessed part. The lid 34 is formed with a second recess 932 into which the upper part of the sensor element 42 is fitted. The bottom portion of the sensor element 42 is placed in the first recess portion 931, and the lid 42 is placed on the sensor element 42 with the second recess portion 932 fitted on the sensor element 42. Is mounted and covers the opening 30 of the recess of the package 12. The lid 42 is bonded to the bonding surface 32 of the package 12 at the peripheral edge.

  The sensor device 10 of the present embodiment is sandwiched from the normal direction (γ-axis direction of FIG. 6) of the contact surface 44 of the sensor element 42 by pressurizing plates 82 (FIG. 7) and 92 (FIG. 8) described later. , Pressurization is applied.

  The package 12 is made of an insulating material such as ceramic. The package 12 includes a package base 14 having a rectangular flat plate shape (other shapes such as a circle may be used) in a plan view as viewed in the depth direction of the recess of the package 12 and on which the sensor element 42 is disposed. The package 12 has a ring-shaped side wall member 24 arranged on the package base 14 so as to surround the sensor element 42 so that the outer shape has the same shape as the package base 14 in a plan view (FIG. 4). Have.

  As shown in FIG. 5, the ground electrode 16 connected to the sensor element 42 is disposed at the center of the upper surface of the package base 14. In addition, side electrodes 20A, 20B, 20C, and 20D are disposed at corners (four places) that are corners of the side surface of the package base. The side electrodes 20A, 20B, 20C, and 20D are connected to an electronic circuit (not shown) that detects the output of the sensor device 10, for example, via a wire.

  As shown in FIGS. 3, 4, and 5, connection electrodes 18 </ b> A, 18 </ b> B, 18 </ b> C, and 18 </ b> D are disposed on the upper surface of the package base 14. The connection electrodes 18A, 18B, 18C, and 18D are arranged so as to be connected to the side electrodes 20A, 20B, 20C, and 20D, respectively, and one ends thereof are arranged at positions that are corners of the package base 14, respectively. On the other hand, the other ends of the connection electrodes 18A, 18B, and 18C are arranged at positions near the ground electrode 16. The other end of the connection electrode 18 </ b> D is connected to the ground electrode 16 through the through electrode 29.

  As shown in FIG. 3 and FIG. 4, the side wall member 24 is laminated at a position on the periphery of the package base 14. The side wall member 24 is disposed so as to cover the connection electrodes 18A, 18B, 18C, and 18D. However, since the side wall member 24 is a rectangular ring-shaped member, the other end side of the connection electrodes 18A, 18B, 18C, and 18D is exposed inside the side wall member 24, and the ground electrode 16 is also exposed. It is laminated on the base 14. Therefore, the side wall member 24 forms the opening 30 of the recess of the package 12.

  Further, as shown in FIG. 3, a metallized layer 26 is disposed on the upper surface of the side wall member 24, and this becomes a bonding surface 32 of the package 12 (side wall member 24). As shown in FIGS. 3 and 4, a penetrating electrode 28 that penetrates the side wall member 24 in the height direction is disposed at a position facing the connection electrode 18 </ b> D of the side wall member 24, and the metallized 26, the connection electrode 18 </ b> D, Are electrically connected through the through electrode 28.

  The ground electrode 16 and the connection electrodes 18A, 18B, 18C, and 18D are formed of a metal having conductivity, and the metallized 26 can be formed of the same material as the ground electrode 16 and the like.

  As shown in FIG. 3, the lid 34 is electrically connected to the connection electrode 18 </ b> D through the metallization 26 and the through electrode 28. In addition, the process of joining the lid 34 of the sensor device 10 of 2nd Embodiment is the same as that of 1st Embodiment.

As shown in FIG. 3, the sensor element 42 is formed of, for example, quartz, lead zirconate titanate (PZT: Pb (Zr, Ti) O ₃ ), lithium niobate, lithium tantalate, or the like having piezoelectricity. In this embodiment, a quartz plate is used as the piezoelectric body. And the sensor element 42 is laminated | stacked in order of the 1st sensor element 46, the 3rd sensor element 58, and the 2nd sensor element 52 from the top. The first sensor element 46 is formed such that the first crystal plates 48A and 48B sandwich the first detection electrode 50, and the second sensor element 52 is configured such that the second crystal plates 54A and 54B sandwich the second detection electrode 56. The third sensor element 58 is formed such that the third crystal plates 60A and 60B sandwich the third detection electrode 62 therebetween.

  A first ground electrode 64 is disposed between the first sensor element 46 (first crystal plate 48B) and the third sensor element 58 (third crystal plate 60A), and the third sensor element 58 (third crystal element 58). A second ground electrode 66 is disposed between the plate 60B) and the second sensor element 52 (second crystal plate 54A). Further, the upper surface of the first sensor element 46 (first crystal plate 48A) is a contact surface 44 of the sensor element 42, and is in contact with the force transmission portion 36 of the lid 34 and is grounded. The lower surface of the second sensor element 52 (second crystal plate 54B) is grounded by being connected to the ground electrode 16.

  As shown in FIG. 4, the first detection electrode 50, the second detection electrode 56, the third detection electrode 62, the first ground electrode 64, and the second ground electrode 66 are partially formed from the first to third crystal plates. They are arranged so as to protrude. The first detection electrode 50 is connected to the exposed portion (the other end side) of the connection electrode 18A by the conductive wire 68A, and the second detection electrode 56 is connected to the exposed portion (the other end side) of the connection electrode 18B by the wire 68B. The third detection electrode 62 is connected to the exposed portion (the other end side) of the connection electrode 18C by a wire 68C. The first ground electrode 64 and the second ground electrode 66 are connected to the exposed portion (the other end side) of the connection electrode 18D by wires 68D and 68E, respectively.

  By the above connection, the side electrode 20A is electrically connected to the first detection electrode 50 via the connection electrode 18A and the wire 68A. The side electrode 20B is electrically connected to the second detection electrode 56 via the connection electrode 18B and the wire 68B. The side electrode 20C is electrically connected to the third detection electrode 62 via the connection electrode 18C and the wire 68C.

  The side electrode 20D is electrically connected to the ground electrode 16 via the connection electrode 18D and the through electrode 29. Further, the side electrode 20D is electrically connected to the first ground electrode 64 via a wire 68D connected to the connection electrode 18D, and is electrically connected to the second ground electrode 66 via a wire 68E connected to the connection electrode 18D. Then, it is electrically connected to the lid 34 through the through electrode 28 and the metallized 26 connected to the connection electrode 18D.

  As the materials for the various electrodes described above, a simple substance or an alloy such as gold, titanium, aluminum, copper, or iron can be used. For example, stainless steel can be used as the iron alloy, and it is preferably used because of its excellent durability and corrosion resistance.

  FIG. 6 shows a schematic diagram of the sensor element of the present embodiment. In the present embodiment, the force transmission unit 36 applies not only to the force in the direction parallel to the normal direction (γ axis) of the contact surface 44 of the sensor element 42 but also to the force in the surface direction of the contact surface 44, that is, the γ axis. Forces in two directions (α axis and β axis) that are orthogonal and orthogonal to each other can be transmitted to the contact surface 44. The sensor element 42 (the first sensor element 46, the second sensor element 52, and the third sensor element 58) can detect forces parallel to the α axis, the β axis, and the γ axis, as will be described later.

  In the first sensor element 46, the first crystal plates 48A and 48B are formed of Y-cut crystal plates, and the X direction, which is the crystal orientation for generating the piezoelectric effect, is normal to the first crystal plates 48A and 48B (FIG. 6). The crystal orientation is perpendicular to the direction parallel to the γ-axis. The first crystal plates 48A and 48B are arranged so that the X directions are opposite to each other. Furthermore, the first crystal plates 48A and 48B are arranged so that the X direction is parallel to the α axis of the space orthogonal coordinates.

  In the second sensor element 52, the second crystal plates 54A and 54B are formed of Y-cut crystal plates, and the X direction is perpendicular to the normal line (the direction parallel to the γ axis) of the second crystal plates 54A and 54B. The crystal orientation is as follows. The second crystal plates 54A and 54B are arranged so that the X directions are opposite to each other. Further, the second crystal plates 54A and 54B are arranged so that the X direction is parallel to the β-axis of the space orthogonal coordinates.

  In the third sensor element 58, the third crystal plates 60A and 60B are formed by X-cut crystal plates, and the X direction is parallel to the normal line (the direction parallel to the γ axis) of the third crystal plates 60A and 60B. The crystal orientation is as follows. The third crystal plates 60A and 60B are arranged so that the X directions are opposite to each other. Furthermore, the third crystal plates 60A and 60B are arranged so that the X direction is parallel to the γ-axis of the space orthogonal coordinates.

  As shown in FIG. 6, the sensor element 42 of the present embodiment has a direction parallel to the γ-axis of the space orthogonal coordinates as the height direction of the sensor device 10. Then, as will be described later, the pressurizing plates 82 (FIG. 7) and 92 (FIG. 8) are sandwiched from the direction of the γ-axis to apply the pressure, and the sensor element 42 is subjected to γ via the lid 34 (force transmitting portion 36). Pressure is applied from a direction parallel to the axis. As a result, the third crystal plates 60A and 60B receive pressure (compression force) from the X direction, so that charge is induced by the piezoelectric effect, and charge (Fz signal) is output to the third detection electrode 62.

  In the above configuration, when an external force that shifts the relative positions of the two pressurizing plates in a direction parallel to the α axis is applied, the external force in a direction parallel to the α axis is applied to the sensor element 42 via the force transmission unit 36. Is added. Then, since the first quartz plates 48A and 48B receive external force (shearing force) from the X direction, charges are induced by the piezoelectric effect, and charges (Fx signal) are output to the first detection electrode 50.

  In addition, when an external force is applied in which the relative positions of the two pressurizing plates are shifted in a direction parallel to the β axis, an external force in a direction parallel to the β axis is applied to the sensor element 42 via the force transmission unit 36. The Then, since the second crystal plates 54A and 54B receive external force (shearing force) from the X direction, electric charges are induced by the piezoelectric effect, and electric charges (Fy signals) are output to the second detection electrodes 56.

  Further, when an external force is applied in which the relative positions of the two pressurizing plates are shifted in a direction parallel to the γ axis, an external force in a direction parallel to the γ axis is applied to the sensor element 42 via the force transmission unit 36. The Then, since the third crystal plates 60A and 60B receive an external force (compression force or tensile force) from the X direction, the amount of charge induced by the piezoelectric effect changes, and the charge output to the third detection electrode 62 ( The magnitude of the (Fz signal) changes.

  Therefore, the sensor device 10 of the present embodiment has a charge (Fx signal) output to the first detection electrode 50 via the side electrode 20A and a charge (Fx signal) output to the second detection electrode 56 via the side electrode 20B. Fy signal) and electric charge (Fz signal) output to the third detection electrode 62 via the side electrode 20C can be monitored, respectively, and an α axis (X axis described later), β axis (described later) It is possible to detect external forces (Fx, Fy, Fz) in a direction parallel to the Y axis (described later) and the γ axis (Z axis described later). The sensor element 42 has a laminated structure of the first sensor element 46, the second sensor element 52, and the third sensor element 58, but may be configured to use at least one of them. Further, the first sensor element 46, the second sensor element 52, and the third sensor element 58 are not necessarily stacked, and each sensor element is accommodated in the package 12 in parallel, and the upper surface (contact surface) of each sensor element is The force transmission unit 36 may be contacted.

(Third embodiment)
FIG. 7 shows a cross-sectional view of the sensor module of the present embodiment. The sensor module 80 of the present embodiment includes the sensor device 10 of the second embodiment (or the sensor device 1 of the first embodiment) sandwiched between the pressurizing plates 82 and fastens the pressurizing plates 82 to each other by a fastening portion. The device 10 is configured to apply a pressure.

  The pressurizing plate 82 includes a first plate 82 a that contacts the package 12 and a second plate 82 b that contacts the lid 34 (force transmission unit 36). And a fastening part is comprised by the fastening bolt 84a and the fastening nut 84b. Further, the first plate 82a and the second plate 82b are formed with bolt holes 86a through which the fastening bolts 84a are inserted, and a counterbore 86b for receiving the heads of the fastening bolts 84a and the fastening nuts 84b is formed in communication with the bolt holes 86a. Has been.

  Here, in a state where the sensor device 10 is sandwiched between the first plate 82a and the second plate 82b, the fastening bolt 84a is inserted into the bolt hole 86a and bolted by the fastening bolt 84a and the fastening nut 84b. Then, the sensor device 10 receives pressure from the fastening direction by receiving the force in the direction in which the first plate 82a and the second plate 82b approach each other, and the lid 34 (force transmission) constituting the sensor device 10 is thereby received. The portion 36) applies a pressure to the contact surface 44 of the sensor element 42.

  As described above, the side electrodes 20A, 20B, 20C, and 20D are connected to an electronic circuit (not shown) that receives a signal from the sensor device 10. Therefore, when an external force is applied to the pressurizing plate 82, the external force is transmitted to the contact surface 44 via the force transmission unit 36, and the force received by the contact surface 44 changes, and thereby a signal output from the sensor device 10. Output changes. Therefore, the force (including its direction) applied to the sensor module 80 can be detected by monitoring the amount of change in the output of the signal based on the output of the signal in the case of only pressurization. An electronic circuit (not shown) is embedded at a position of the first plate 82a facing the sensor device 10, and the side electrodes 20A, 20B, 20C, and 20D of the sensor device 10 are extended to the lower surface of the package 12, and the electronic circuit. The mounting electrode (not shown) on the (not shown) and the portion of the side electrode extending to the lower surface of the package 12 may be connected by soldering or the like.

(Fourth embodiment)
FIG. 8 shows the force detection device of this embodiment. The force detection device 90 of this embodiment has a configuration in which four sensor devices 10 are sandwiched between two pressurizing plates 92. An electronic circuit (not shown) that is electrically connected to the sensor device 10 via a wire or the like is disposed. In the force detection device 90, the four sensor devices 10 are all sandwiched between the pressurizing plates 92 in a state where they are directed in the same direction, and pressurization is applied. For example, in the sensor device 10, the detection axis of the first sensor element 46 (FIG. 6) is oriented in a direction parallel to Fx, the detection axis of the second sensor element 52 (FIG. 6) is oriented in a direction parallel to Fy, In this state, the detection axes of the three sensor elements 58 (FIG. 6) are oriented in a direction parallel to Fz.

  Here, when the force which the relative position of the pressurizing plate 92 shift | deviates mutually to Fx direction, the sensor device 10 detects the force of Fx1, Fx2, Fx3, and Fx4, respectively. In addition, when the relative position of the pressurizing plate 92 receives a force that shifts in the Fy direction, the sensor device 10 detects the forces of Fy1, Fy2, Fy3, and Fy4, respectively. Furthermore, when the relative position of the pressurizing plate 92 receives a force deviating from each other in the Fz direction, the sensor device 10 detects the forces of Fz1, Fz2, Fz3, and Fz4, respectively. Further, the pressurizing plates 92 are displaced relative to each other in the direction of rotation about the X axis (Mx), displaced relative to each other in the direction of rotation about the Y axis (My), and directions of rotation about the Z axis (Mz). Relative displacement is possible, and the accompanying force can be transmitted to the sensor device 10.

  Therefore, in the force detection device 90, the rotational force Mx is set to a direction parallel to the forces Fx, Fy, Fz, and Fx orthogonal to each other, and the rotational force My and Fz is set to be parallel to the direction parallel to Fy. The rotational force Mz whose direction is the rotation axis can be obtained as follows.

  Here, a and b are constants. Therefore, the force detection device 90 according to the present embodiment can detect forces from all three dimensions (forces in the six-axis direction) and can hermetically seal the sensor element 42 accommodated in the package 12 over a long period of time. The force detection device 90 can be stably realized.

(Fifth embodiment)
FIG. 9 shows a robot equipped with the force detection device of this embodiment. As shown in FIG. 9, the robot 100 includes a main body 102, an arm 104, a robot hand 116, and the like. The main body 102 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage. The arm unit 104 is provided so as to be movable with respect to the main body unit 102. The main body unit 102 has an actuator (not shown) that generates power for rotating the arm unit 104 and a control for controlling the actuator. Etc. (not shown) are incorporated.

  The arm unit 104 includes a first frame 106, a second frame 108, a third frame 110, a fourth frame 112, and a fifth frame 114. The first frame 106 is connected to the main body 102 so as to be rotatable or bendable via a rotating and bending shaft. The second frame 108 is connected to the first frame 106 and the third frame 110 via a rotating and bending shaft. The third frame 110 is connected to the second frame 108 and the fourth frame 112 via a rotating and bending shaft. The fourth frame 112 is connected to the third frame 110 and the fifth frame 114 via a rotating and bending shaft. The fifth frame 114 is connected to the fourth frame 112 via a rotating and bending shaft. The arm unit 104 is driven by each frame being rotated or bent in a compound manner around each rotation / bending axis under the control of the control unit.

  A robot hand unit 116 is attached to the tip of the fifth frame 114, and the robot hand 120 capable of grasping an object is connected via a robot hand connection unit 118 having a built-in motor (not shown) that rotates. Connected to the fifth frame 114.

  In addition to the motor, the robot hand connection unit 118 incorporates the aforementioned force detection device 90 (FIG. 8). When the robot hand unit 116 is moved to a predetermined operation position by the control of the control unit, the obstacle is detected. The contact with the object or the contact with the object by the operation command beyond the predetermined position is detected as a force by the force detection device 90 and fed back to the control unit of the robot 100 to execute the avoidance operation.

  By using such a robot 100, it is possible to easily perform an obstacle avoidance operation, an object damage avoidance operation, etc., which cannot be dealt with by conventional position control, and obtain a robot 100 capable of safe and detailed work. Can do. Furthermore, the robot 100 can stably detect a highly accurate force even with a small amount of displacement. Further, the present invention is not limited to this embodiment, and can be applied to a double-arm robot.

  DESCRIPTION OF SYMBOLS 1 ... Sensor device, 10 ... Sensor device, 12 ... Package, 14 ... Package base, 16 ... Ground electrode, 18A, 18B, 18C, 18D ... Connection electrode, 20A, 20B, 20C, 20D ... Side electrode, 24 ... Side wall member , 26 ... Metallized, 28, 29 ... Through electrode, 30 ... Opening, 32 ... Bonding surface, 34 ... Lid, 36 ... Force transmission part, 42 ... Sensor element, 44 ... Contact surface, 46 ... First sensor element, 48A 48B ... first crystal plate, 50 ... first detection electrode, 52 ... second sensor element, 54A, 54B ... second crystal plate, 56 ... second detection electrode, 58 ... third sensor element, 60A, 60B ... first. 3 quartz plates, 62 ... third detection electrode, 64 ... first ground electrode, 66 ... second ground electrode, 68A, 68B, 68C, 68D, 68E ... wire, 80 ... sensor module 82: Pressurizing plate, 82a: First plate, 82b: Second plate, 84a: Fastening bolt, 84b: Fastening nut, 86a ... Bolt hole, 86b: Counterbore, 90 ... Force detecting device, 92 ... Pressurizing plate, 100 ... Robot, 102 ... Body part, 104 ... Arm part, 106 ... First frame, 108 ... Second frame, 110 ... Third frame, 112 ... Fourth frame, 114 ... Fifth frame, 116 ... Robot hand part, 118 DESCRIPTION OF SYMBOLS ... Robot hand connection part, 120 ... Robot hand, 200 ... Sensor device, 202 ... Package, 204 ... Lid, 206 ... Coaxial connector, 208 ... Outer peripheral part, 210 ... Center conductor, 212 ... Insulating resin, 214 ... Sensor element, 216: Crystal plate, 218 ... Detection electrode, 220 ... Opening, 222 ... Contact surface, 224 ... Bonding surface, 2 0 ... junction missing area, 600 ... clearance, 931 ... first recess portion, 932 ... second recess.

Claims (8)

A first member having a recess;
A sensor element disposed in the recess and having a piezoelectric body;
A second member joined to the first member and sealing the recess of the first member,
The first member is
A first indentation part into which the bottom part of the sensor element is fitted on the inner bottom surface of the concave part;
The second member is
A sensor device comprising: a second recess portion into which an upper portion of the sensor element is fitted. The sensor element includes a first contact surface with which the first member contacts;
A second contact surface with which the second member contacts,
The first member is
A first flat portion having a flat surface in contact with the first contact surface;
The second member is
The sensor device according to claim 1, further comprising a second flat portion having a flat surface in contact with the second contact surface. When the normal direction of the second contact surface of the sensor element is the Z-axis direction, and the directions orthogonal to the Z-axis direction and orthogonal to each other are the X-axis direction and the Y-axis direction,
The sensor element is
At least one of the first sensor element that detects the force in the X-axis direction, the second sensor element that detects the force in the Y-axis direction, and the third sensor element that detects the force in the Z-axis direction. The sensor device according to claim 1, further comprising: A first member having a recess;
A sensor element disposed in the recess and having a piezoelectric body;
A second member joined to the first member and sealing the recess of the first member;
A first plate in contact with the first member;
A second plate in contact with the second member;
A fastening portion for fastening the first plate and the second plate,
The sensor element includes a first contact surface with which the first member contacts;
A second contact surface with which the second member contacts,
The first member has a first recess portion into which the first contact surface is fitted to an inner bottom surface of the recess,
The sensor module, wherein the second member has a second recess portion into which the second contact surface is fitted.   A force detection apparatus comprising the sensor device according to claim 1. A first member having a recess;
A sensor element disposed in the recess and having a piezoelectric body;
A second member joined to the first member and sealing the recess of the first member;
An electronic circuit electrically connected to the sensor element,
The sensor element includes a first contact surface with which the first member contacts;
A second contact surface with which the second member contacts,
The first member has a first recess portion into which the first contact surface is fitted to an inner bottom surface of the recess,
The second member includes a second recess portion into which the second contact surface is fitted.   A robot comprising the force detection device according to claim 5. The main body,
An arm portion connected to the main body portion;
A hand unit connected to the arm unit,
It has a sensor device in the connection part between the arm part and the hand part,
The sensor device is
A first member having a recess;
A sensor element disposed in the recess and having a piezoelectric body;
A second member joined to the first member and sealing the recess of the first member,
The sensor element includes a first contact surface with which the first member contacts;
A second contact surface with which the second member contacts,
The first member has a first recess portion into which the first contact surface is fitted to an inner bottom surface of the recess,
The robot according to claim 2, wherein the second member has a second recess portion into which the second contact surface is fitted.

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