JP6248709B2 - Force detection device and robot - Google Patents

Description

The present invention relates to a force sensor and robotic.

  In recent years, industrial robots have been introduced into production facilities such as factories for the purpose of improving production efficiency. Such an industrial robot includes an arm that can be driven in the direction of one axis or a plurality of axes, and an end effector such as a hand, a component inspection device, or a component transfer device, which is attached to the tip of the arm. Parts manufacturing work such as parts assembly work, parts processing work, parts transport work, parts inspection work, etc. can be executed.

  In such an industrial robot, for example, a force detection device is provided between the arm and the end effector. A force detection device used for an industrial robot includes, for example, a pair of substrates and a force transducer provided between the pair of substrates. In addition, a pressure is applied to the force transducer by a pressure bolt. When an external force is applied to the substrate, the pair of substrates are relatively displaced, and the force acting between the pair of substrates is detected by the force transducer. In addition, by applying a pressure to the force transducer, not only when an external force in a direction in which the pair of substrates approach each other is applied to the force detection device, but also in a direction in which the pair of substrates separate from each other. Even when an external force is applied, the force can be detected.

However, in the conventional force detection device, for example, a pair of substrates, pressurizing bolts, etc. are heated and thermally expanded by heat from a heat source such as an external motor, and the difference in thermal expansion between the substrate and the pressurizing bolts. Thus, the pressurization applied by the pressurization bolt varies, and the output of the force transducer changes. For this reason, the external force cannot be accurately measured.
To solve such a problem, the force detection device described in Patent Document 1 includes a platform (mounting plate) and two force measurement cells provided at both ends of the platform, as shown in FIGS. And a preload screw for applying pressure. In addition, the configuration such as the arrangement of the two force measurement cells cancels out an output signal due to a preload change caused by thermal expansion of a preload screw or the like.

JP-A-10-68665

However, in the force detection device described in Patent Document 1, an external force is transmitted to the pressure receiving surface of the force measurement cell from the position deviated from the pressure receiving surface via the platform. An external force acting on the detection device causes the platform to bend. Conversely, if the thickness of the platform is increased in order to increase the rigidity of the platform, the platform becomes too thick and the weight becomes heavy. It is also difficult to apply a pressurized pressure to the force measurement cell in a balanced manner.
An object of the present invention is to apply pressure in a balanced manner to the first element, to suppress measurement errors due to thermal expansion, or to suppress measurement errors due to thermal expansion while reducing the size of the apparatus. An object of the present invention is to provide a force detection device, a robot, an electronic component transport device, an electronic component inspection device, and a component processing device.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
(Application example 1)
A force detection device according to the present invention includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
In the visual recognition from the thickness direction of the first substrate, at least one pair of the fixing members is arranged with respect to the first element.

Thereby, in detecting the external force based on the signal output from the first element, by correcting the signal output from the first element based on the signal output from the second element, A noise component generated by thermal expansion included in the signal output from the first element can be removed or reduced. Thereby, measurement accuracy can be improved.
In addition, since at least one pair of fixing members is disposed with the first element interposed therebetween, the first substrate and the second substrate can be fixed in a balanced manner, and the first element is balanced. Pressure can be applied well.

(Application example 2)
In the force detection apparatus according to the present invention, it is preferable that the center of the first element is different from the center of the second element in the thickness direction of the first substrate.
Thereby, in a plan view of the first substrate, the portion to which the external force of the first substrate is applied, the portion to which the external force of the second substrate is applied, and the first element can be overlapped. Even if the thickness of the first substrate and the second substrate is reduced, it is possible to suppress the first substrate and the second substrate from being bent by an external force, thereby reducing the thickness of the device. Can be reduced in size and weight.

(Application example 3)
A force detection device according to the present invention includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
The center of the first element is different from the center of the second element in the thickness direction of the first substrate.

  Thereby, in detecting the external force based on the signal output from the first element, by correcting the signal output from the first element based on the signal output from the second element, A noise component generated by thermal expansion included in the signal output from the first element can be removed or reduced. Thereby, measurement accuracy can be improved.

  In addition, since the central axis of the first element is different from the central axis of the second element, the portion to which the external force of the first substrate is applied and the external force of the second substrate are applied in plan view of the first substrate. The first element and the first element can be overlapped, so that even if the thickness of the first substrate and the second substrate is reduced, the first substrate and the second substrate are bent by an external force. This can be suppressed, whereby the thickness of the device can be reduced, and miniaturization and weight reduction can be achieved.

(Application example 4)
In the force detection device according to the present invention, the direction of the pressure applied to the first element by the fixing member and the direction of the pressure applied to the second element are the same,
When an external force in the same direction as the pressure applied to the first element by the fixing member is applied to the first substrate, the first element and the second element reverse the external forces to each other. It is preferable to detect it as a directional force.
As a result, by taking the difference between the output of the first element and the output of the second element, the external force in the direction orthogonal to the first substrate is detected as a larger value than when the second element is not provided. Is done. On the other hand, by taking the difference between the output of the first element and the output of the second element, it is possible to compensate for the pressure fluctuation applied by the fixing member.

(Application example 5)
In the force detection device according to the present invention, the first substrate has a first attachment portion for attaching the first substrate to a first object,
The second substrate has a second attachment portion for attaching the second substrate to a second object,
In the projected image from the thickness direction of the first substrate, it is preferable that the shadow of the first mounting portion, the shadow of the second mounting portion, and the shadow of the first element overlap.

Since the external force is applied to the first mounting portion and the second mounting portion, the external force can be reliably detected by the first element.
Further, even if the thickness of the first substrate and the second substrate is reduced, it is possible to suppress the first substrate and the second substrate from being bent by an external force. It is possible to reduce the thickness, and to achieve a reduction in size and weight.

(Application example 6)
In the force detection device according to the present invention, the fixing member is a screw having a head,
The second element is preferably provided between the first substrate and the head.
Thereby, a 2nd element can be reliably clamped with a 1st board | substrate and a fixing member.

(Application example 7)
In the force detection device according to the present invention, it is preferable to have a detection unit that detects a corrected external force based on a signal output from the first element and a signal output from the second element.
Thereby, measurement accuracy can be improved.

(Application example 8)
In the force detection device according to the present invention, the detection unit includes a voltage obtained based on a signal output from the first element and a voltage obtained based on a signal output from the second element. It is preferable to detect the corrected external force by taking the difference.
Thereby, measurement accuracy can be improved.

(Application example 9)
The force detection device according to the present invention has a plurality of the first elements,
The first elements are preferably arranged at equiangular intervals in the circumferential direction of the first substrate or the second substrate.
Thereby, an external force can be detected without deviation, and a more accurate force detection can be performed. By having three or more first elements, six-axis forces, that is, translational force components (shearing forces) in the x, y, and z axis directions and rotational force components (moments) around the x, y, and z axes are provided. ) Can be detected.

(Application example 10)
A robot according to the present invention includes an arm,
An end effector provided on the arm;
A force detection device that is provided between the arm and the end effector and detects an external force applied to the end effector;
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
In visual recognition from the thickness direction of the first substrate, at least one pair of the fixing members is disposed with respect to the first element.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, the external force detected by the force detection device can be fed back to perform the operation more precisely. Further, the contact of the end effector with the obstacle can be detected by the external force detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the work can be executed more safely.

(Application Example 11)
A robot according to the present invention includes an arm,
An end effector provided on the arm;
A force detection device that is provided between the arm and the end effector and detects an external force applied to the end effector;
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
The center of the first element is different from the center of the second element in the thickness direction of the first substrate.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, the external force detected by the force detection device can be fed back to perform the operation more precisely. Further, the contact of the end effector with the obstacle can be detected by the external force detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the work can be executed more safely.

(Application Example 12)
An electronic component conveying apparatus according to the present invention includes a gripping unit that grips an electronic component,
A force detection device for detecting an external force applied to the gripping part,
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
In visual recognition from the thickness direction of the first substrate, at least one pair of the fixing members is disposed with respect to the first element.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, the external force detected by the force detection device can be fed back to perform the operation more precisely. In addition, contact of the grip portion with an obstacle can be detected by the external force detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the electronic component transport operation can be executed more safely.

(Application Example 13)
An electronic component conveying apparatus according to the present invention includes a gripping unit that grips an electronic component,
A force detection device for detecting an external force applied to the gripping part,
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
The center of the first element is different from the center of the second element in the thickness direction of the first substrate.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, the external force detected by the force detection device can be fed back to perform the operation more precisely. In addition, contact of the grip portion with an obstacle can be detected by the external force detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the electronic component transport operation can be executed more safely.

(Application Example 14)
An electronic component inspection apparatus according to the present invention includes a gripping unit for gripping an electronic component,
An inspection unit for inspecting the electronic component;
A force detection device for detecting an external force applied to the gripping part,
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
In the visual recognition from the thickness direction of the first substrate, at least one pair of the fixing members is arranged with respect to the first element.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, the external force detected by the force detection device can be fed back to perform the operation more precisely. In addition, contact of the grip portion with an obstacle can be detected by the external force detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that are difficult with conventional position control can be easily performed, and an electronic component inspection operation can be performed more safely.

(Application Example 15)
An electronic component inspection apparatus according to the present invention includes a gripping unit for gripping an electronic component,
An inspection unit for inspecting the electronic component;
A force detection device for detecting an external force applied to the gripping part,
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
The center of the first element is different from the center of the second element in the thickness direction of the first substrate.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, the external force detected by the force detection device can be fed back to perform the operation more precisely. In addition, contact of the grip portion with an obstacle can be detected by the external force detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that are difficult with conventional position control can be easily performed, and an electronic component inspection operation can be performed more safely.

(Application Example 16)
A component processing apparatus according to the present invention is provided with a tool displacing unit for mounting a tool and displacing the tool,
A force detection device for detecting an external force applied to the tool,
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
In visual recognition from the first thickness direction, at least one pair of the fixing members is arranged with respect to the first element.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, by feeding back the external force detected by the force detection device, the component processing device can execute the component processing operation more precisely. Further, contact of the tool with an obstacle can be detected by an external force detected by the force detection device. Therefore, an emergency stop can be performed when an obstacle or the like comes into contact with the tool, and the component processing apparatus can execute a safer component processing operation.

(Application Example 17)
A component processing apparatus according to the present invention is provided with a tool displacing unit for mounting a tool and displacing the tool,
A force detection device for detecting an external force applied to the tool,
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
The center of the first element is different from the center of the second element in the thickness direction of the first substrate.

  Thereby, the same effect as the force detection device of the present invention can be obtained. Then, by feeding back the external force detected by the force detection device, the component processing device can execute the component processing operation more precisely. Further, contact of the tool with an obstacle can be detected by an external force detected by the force detection device. Therefore, an emergency stop can be performed when an obstacle or the like comes into contact with the tool, and the component processing apparatus can execute a safer component processing operation.

It is sectional drawing which shows 1st Embodiment of the force detection apparatus of this invention. It is a top view of the force detection apparatus shown in FIG. It is a circuit diagram which shows roughly the force detection apparatus shown in FIG. It is sectional drawing which shows schematically the 1st element of the force detection apparatus shown in FIG. It is sectional drawing which shows schematically the 2nd element of the force detection apparatus shown in FIG. It is a disassembled perspective view which shows 2nd Embodiment of the force detection apparatus of this invention. FIG. 7 is a circuit diagram schematically showing the force detection device shown in FIG. 6. It is a top view which shows 3rd Embodiment of the force detection apparatus of this invention. It is a top view which shows 4th Embodiment of the force detection apparatus of this invention. It is a figure which shows an example of the single arm robot using the force detection apparatus of this invention. It is a figure which shows an example of the multi-arm robot using the force detection apparatus of this invention. It is a figure which shows an example of the electronic component inspection apparatus and electronic component conveyance apparatus using the force detection apparatus of this invention. It is a figure which shows one example of the electronic component conveying apparatus using the force detection apparatus of this invention. It is a figure which shows one example of the component processing apparatus using the force detection apparatus of this invention. It is a figure which shows an example of the moving body using the force detection apparatus of this invention.

Hereinafter, a force detection device, a robot, an electronic component conveyance device, an electronic component inspection device, and a component processing device according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
<First Embodiment>
FIG. 1 is a cross-sectional view showing a first embodiment of the force detection device of the present invention. FIG. 2 is a plan view of the force detection device shown in FIG. FIG. 3 is a circuit diagram schematically showing the force detection device shown in FIG. 4 is a cross-sectional view schematically showing a first element of the force detection device shown in FIG. FIG. 5 is a cross-sectional view schematically showing a second element of the force detection device shown in FIG.

In the following, for convenience of explanation, the upper side in FIG. 1 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.
1 and 2 has a function of detecting an external force (including a moment), that is, three axes (α (X) axis, β (Y) axis, γ (Z) axis) orthogonal to each other. Has a function of detecting an external force applied along the line.

  The force detection device 1 includes a first substrate 2, a second substrate 3 that is disposed at a predetermined interval from the first substrate 2, and that faces the first substrate 2, the first substrate 2, and the first substrate 2. Between the first and second pressurizing bolts (screws) 71, which are fixing members for fixing the second board 3, and the first board 2 and the second board 3, and signals according to the applied external force. A pair of charge output elements (first elements) 10 to be output and provided between the first substrate 2 and each pressurizing bolt 71 and outputting a signal according to an applied external force (first element) 10 Second element) 10a, 10b.

  The shapes of the first substrate 2 and the second substrate 3 are not particularly limited, but in the present embodiment, the first substrate 2 and the second substrate 3 are viewed in plan (when viewed from the thickness direction), That is, when viewed from a direction perpendicular to the first substrate 2 and the second substrate 3, the outer shape thereof is a rectangle (square). Examples of the other outer shape in plan view of the first substrate 2 and the second substrate 3 include other polygons such as a pentagon, a circle, an ellipse, and the like. Moreover, it does not specifically limit as a constituent material of the 1st board | substrate 2 and the 2nd board | substrate 3, respectively, For example, various resin materials, various metal materials, etc. can be used. Note that either the first substrate 2 or the second substrate 3 may be a substrate on which a force is applied, but in the present embodiment, the first substrate 2 is described as a substrate on which a force is applied.

Further, the position of the charge output element 10 on the first substrate 2 and the second substrate 3 is not particularly limited, but in the present embodiment, the charge output element 10 has the first output in the plan view of the first substrate 2. The substrate 2 and the second substrate 3 are arranged at the center.
Further, a fastening portion (first attachment portion) 23 for attaching the first substrate 2 to the first object is provided at the center portion of the first substrate 2 in plan view. Similarly, a fastening portion (second attachment portion) 33 for attaching the second substrate 3 to the second object is provided at the center of the second substrate 3 in plan view. As a specific example of the first object and the second object, for example, when the force detection device 1 is installed between an arm and an end effector of a robot, one of the arm and the end effector is the first object. The other object is the second object. The external force is applied from the first object and the second object to the first substrate 2 and the second substrate 3 around the fastening portions 23 and 33. The fastening portions 23 and 33 are not particularly limited, and examples thereof include a female screw. In this case, the first board 2 and the second board are formed by screwing a male screw into the female screw. 3 are attached to the first object and the second object, respectively. As described above, when the force detection device 1 is attached to the first object and the second object, the first substrate 2 and the second substrate 3 can be easily and quickly processed without special processing. In addition, the attaching operation can be performed.

In addition, the first substrate 2 and the second substrate 3 are fixed by two pressurizing bolts 71. The “fixation” by the pressurizing bolts 71 means that the two fixing objects are mutually fixed. It is performed while allowing a predetermined amount of movement. Specifically, the first substrate 2 and the second substrate 3 are fixed by the two pressurizing bolts 71 while allowing a predetermined amount of movement in the surface direction of the first substrate 2 to be allowed. . This also applies to other embodiments.
Each pressurizing bolt 71 has a head portion 715 at the base end portion and a male screw 716 at the outer peripheral portion of the tip end portion. Then, two holes 25 into which the two pressurizing bolts 71 are inserted are formed in the first substrate 2, and the second substrate 3 is screwed with the male threads 716 of the two pressurizing bolts 71. Two female screws 35 are formed.

  Each pressurizing bolt 71 is arranged so that its head 715 is on the first substrate 2 side, and is inserted from the hole 25 formed in the first substrate 2, and its male screw 716 is the second screw 716. Screwed into a female screw 35 formed on the substrate 3. Further, the head portion 715 of each pressurizing bolt 71 is located on the second substrate 3 side with respect to the surface of the first substrate 2, that is, sinks into the hole 25. Then, a pressure in the Z-axis direction (see FIG. 4) having a predetermined magnitude, that is, a pressurization, is applied to the charge output element 10 via the first substrate 2 and the second substrate 3 by each pressurizing bolt 71. Is added. As a result, it is possible to detect both forward and reverse forces in the Z-axis direction. In addition, the magnitude | size of the said pressurization is not specifically limited, It sets suitably.

Further, the position of each pressurizing bolt 71 is not particularly limited, but in the present embodiment, each pressurizing bolt 71 is in a plan view of the first substrate 2 (when viewed from the thickness direction), and the charge output element 10. It is arranged so as to face each other. Thereby, the first substrate 2 and the second substrate 3 can be fixed with good balance, and the charge output element 10 can be pressurized with good balance. The number of pressurizing bolts 71 is not limited to two, and may be three or more, for example.
The constituent material of each pressurizing bolt 71 is not particularly limited, and various resin materials, various metal materials, and the like can be used, for example.

  As described above, the charge output element 10 is sandwiched between the first substrate 2 and the second substrate 3 at the center thereof. Although the shape of the charge output element 10 is not particularly limited, in the present embodiment, the external shape of the charge output element 10 is a square (quadrangle) in a plan view of the first substrate 2. Examples of the other external shape of the charge output element 10 in a plan view include other polygons such as a pentagon, a circle, and an ellipse.

  In addition, the shape of the charge output elements 10a and 10b is not particularly limited, but in this embodiment, the external shape of the charge output elements 10a and 10b is that of the pressurizing bolt 71 in the plan view of the first substrate 2. It has a shape corresponding to the head 715, that is, a circular shape. Specifically, the charge output elements 10 a and 10 b have an annular shape in a plan view of the first substrate 2. Examples of the other outer shape of the charge output elements 10a and 10b in a plan view include a polygon such as a quadrangle and a pentagon, and an ellipse.

  Each of the charge output elements 10 a and 10 b is disposed between the first substrate 2 and the head 715 of each pressurizing bolt 71, and is sandwiched between the first substrate 2 and the pressurizing bolt 71. Thus, the Z-axis direction pressurization having the same size as that of the charge output element 10 is distributed and applied to the charge output elements 10 a and 10 b by the pressurizing bolts 71. That is, the direction of the pressure applied to the charge output element 10 by the pressurizing bolt 71 is the same as the direction of the pressure applied to the charge output elements 10a and 10b, and the magnitude thereof is also the same.

As for the external force, when an external force in a direction orthogonal to the first substrate 2, that is, an external force in the Z-axis direction is applied to the first substrate 2 (charge is applied to the first substrate 2 by the pressurizing bolt 71. When an external force in the same direction as the pressure applied to the output element 10 is applied), the charge output element 10 and the charge output elements 10a and 10b detect the external forces as forces in opposite directions.
As a result, by taking the difference between the output of the charge output element 10 and the output of the charge output elements 10a and 10b, the external force in the Z-axis direction is approximately twice the value when the charge output elements 10a and 10b are not provided. Detected as On the other hand, by taking the difference between the output of the charge output element 10 and the output of the charge output elements 10a and 10b, when each pressurizing bolt 71, the first substrate 2, the second substrate 3, etc. are thermally expanded, etc. It is possible to compensate for fluctuations in the pressurization applied by the pressurization bolt 71.

  Here, in the thickness direction of the first substrate 2, the center of the charge output element 10 is different from the centers of the charge output elements 10a and 10b. That is, the central axis of the charge output elements 10a and 10b in the direction orthogonal to the first substrate 2 is different from the central axis of the charge output elements 10 in the direction orthogonal to the first substrate 2. Specifically, the charge output elements 10 a and 10 b are arranged so as to face each other with the charge output element 10 in the plan view of the first substrate 2.

  In addition, the fastening portion 23, the fastening portion 33, and the charge output element 10 overlap each other in a plan view of the first substrate 2. That is, in the projection image from the thickness direction of the first substrate 2, the shadow of the fastening portion 23, the shadow of the fastening portion 33, and the shadow of the charge output element 10 overlap. Specifically, the central axis of the fastening portion 23 in the direction orthogonal to the first substrate 2, the central axis of the fastening portion 33 in the direction orthogonal to the first substrate 2, and the first substrate of the charge output element 10. 2 and the central axis in the direction perpendicular to the same.

Thereby, even if the thickness of the 1st board | substrate 2 and the 2nd board | substrate 3 is made thin, it can suppress that the 1st board | substrate 2 and the 2nd board | substrate 3 bend by external force, thereby The thickness of the device can be reduced, and the size and weight can be reduced.
As in the present embodiment, by arranging the charge output elements 10a and 10b in the vicinity of the charge output element 10, the pressure applied by each pressurizing bolt 71 to the charge output element 10 varies due to the thermal expansion and the like. The fluctuation can be approximated by the thermal expansion or the like of the pressurization applied by each pressurizing bolt 71 to the charge output elements 10a and 10b.

  3, the force detection device 1 includes a conversion output circuit 90a that converts the charge Qx1 output from the charge output element 10 into a voltage Vx1, and a conversion output circuit 90b that converts the charge Qz1 into a voltage Vz1. And a conversion output circuit 90c for converting the charge Qy1 into the voltage Vy1. Further, the force detection device 1 includes a conversion output circuit 90b that converts the charge Qz11 output from the charge output element 10a into a voltage Vz11, and a conversion output circuit 90b that converts the charge Qz12 output from the charge output element 10b into a voltage Vz12. And. The force detection device 1 also includes an external force detection circuit 40 that detects the applied external force. Each of these circuits may be provided outside the first substrate 2 and the first substrate 2, for example, and provided between the first substrate 2 and the first substrate 2. Also good.

<Charge output element (first element, second element)>
First, the charge output element (first element) 10 will be described.
The charge output element 10 has three charges Qx corresponding to each of external forces applied (received) along three axes (α (X) axis, β (Y) axis, γ (Z) axis) orthogonal to each other. , Qy, and Qz are output.

As shown in FIG. 4, the charge output element 10 outputs the charge Qy according to the four ground electrode layers 11 grounded to the ground (reference potential point) and the external force (shearing force) parallel to the β axis. 1 sensor 12, a second sensor 13 that outputs a charge Qz according to an external force (compression / tensile force) parallel to the γ-axis, and a charge Qx according to an external force (shearing force) parallel to the α-axis The ground electrode layer 11 and the sensors 12, 13, and 14 are alternately stacked. In FIG. 4, the lamination direction of the ground electrode layer 11 and the sensors 12, 13, and 14 is defined as the γ-axis direction, and the directions orthogonal to and orthogonal to the γ-axis direction are defined as the α-axis direction and the β-axis direction, respectively.
In the illustrated configuration, the first sensor 12, the second sensor 13, and the third sensor 14 are stacked in this order from the lower side in FIG. 4, but the present invention is not limited to this. The stacking order of the sensors 12, 13, and 14 is arbitrary.

  The ground electrode layer 11 is an electrode grounded to the ground (reference potential point). Although the material which comprises the ground electrode layer 11 is not specifically limited, For example, gold | metal | money, titanium, aluminum, chromium, nickel, copper, iron, or an alloy containing these is preferable. Among these, it is particularly preferable to use stainless steel which is an iron alloy. The ground electrode layer 11 made of stainless steel has excellent durability and corrosion resistance.

The first sensor 12 has a function of outputting a charge Qy according to an external force (shearing force) applied (received) along the β axis. The first sensor 12 is configured to output a positive charge according to an external force applied along the positive direction of the β axis and to output a negative charge according to an external force applied along the negative direction of the β axis. Has been.
The first sensor 12 is provided with a first piezoelectric layer 121 having a first crystal axis CA1 and a first piezoelectric layer 121 facing the first piezoelectric layer 121 and having a second crystal axis CA2. A body layer 123 is provided between the first piezoelectric layer 121 and the second piezoelectric layer 123 and has an output electrode layer 122 that outputs a charge Q.

  The first piezoelectric layer 121 is composed of a piezoelectric body having a first crystal axis CA1 oriented in the negative direction of the β axis. When an external force along the positive direction of the β axis is applied to the surface of the first piezoelectric layer 121, electric charges are induced in the first piezoelectric layer 121 due to the piezoelectric effect. As a result, positive charges gather near the surface of the first piezoelectric layer 121 on the output electrode layer 122 side, and negative charges gather near the surface of the first piezoelectric layer 121 on the ground electrode layer 11 side. Similarly, when an external force along the negative direction of the β axis is applied to the surface of the first piezoelectric layer 121, negative charges are generated near the surface of the first piezoelectric layer 121 on the output electrode layer 122 side. As a result, positive charges are collected in the vicinity of the surface of the first piezoelectric layer 121 on the ground electrode layer 11 side.

  The second piezoelectric layer 123 is composed of a piezoelectric body having a second crystal axis CA2 oriented in the positive direction of the β axis. When an external force along the positive direction of the β axis is applied to the surface of the second piezoelectric layer 123, electric charges are induced in the second piezoelectric layer 123 due to the piezoelectric effect. As a result, positive charges are collected in the vicinity of the surface of the second piezoelectric layer 123 on the output electrode layer 122 side, and negative charges are collected in the vicinity of the surface of the second piezoelectric layer 123 on the ground electrode layer 11 side. Similarly, when an external force along the negative direction of the β axis is applied to the surface of the second piezoelectric layer 123, negative charges are generated near the surface of the second piezoelectric layer 123 on the output electrode layer 122 side. As a result, positive charges are collected near the surface of the second piezoelectric layer 123 on the ground electrode layer 11 side.

  Thus, the first crystal axis CA1 of the first piezoelectric layer 121 is oriented in the direction opposite to the direction of the second crystal axis CA2 of the second piezoelectric layer 123. As a result, in comparison with the case where the first sensor 12 is configured by only one of the first piezoelectric layer 121 and the second piezoelectric layer 123 and the output electrode layer 122, the output electrode layer 122 is closer to the vicinity. The collected positive or negative charge can be increased. As a result, the charge Q output from the output electrode layer 122 can be increased.

The constituent materials of the first piezoelectric layer 121 and the second piezoelectric layer 123 are quartz, topaz, langasite (La ₃ Ga ₅ SiO ₁₄ ), barium titanate, lead titanate, zirconate titanate. Lead (PZT: Pb (Zr, Ti) O ₃ ), lithium niobate, lithium tantalate, and the like can be given. Of these, quartz is particularly preferable. This is because the piezoelectric layer made of quartz has excellent characteristics such as a wide dynamic range, high rigidity, high natural frequency, and high load resistance. Further, like the first piezoelectric layer 121 and the second piezoelectric layer 123, a piezoelectric layer that generates an electric charge with respect to an external force (shearing force) along the surface direction of the layer is configured by a Y-cut crystal. be able to.

  The output electrode layer 122 has a function of outputting positive charges or negative charges generated in the first piezoelectric layer 121 and the second piezoelectric layer 123 as charges Qy. As described above, when an external force along the positive direction of the β axis is applied to the surface of the first piezoelectric layer 121 or the surface of the second piezoelectric layer 123, a positive charge is present in the vicinity of the output electrode layer 122. Gather. As a result, positive charge Qy is output from the output electrode layer 122. On the other hand, when an external force along the negative direction of the β axis is applied to the surface of the first piezoelectric layer 121 or the surface of the second piezoelectric layer 123, negative charges are collected in the vicinity of the output electrode layer 122. As a result, a negative charge Qy is output from the output electrode layer 122.

  The width of the output electrode layer 122 is preferably equal to or greater than the width of the first piezoelectric layer 121 and the second piezoelectric layer 123. When the width of the output electrode layer 122 is narrower than that of the first piezoelectric layer 121 or the second piezoelectric layer 123, a part of the first piezoelectric layer 121 or the second piezoelectric layer 123 is the output electrode layer. No contact with 122. Therefore, some of the charges generated in the first piezoelectric layer 121 or the second piezoelectric layer 123 may not be output from the output electrode layer 122. As a result, the charge Qy output from the output electrode layer 122 decreases. The same applies to output electrode layers 132 and 142 described later.

The second sensor 13 has a function of outputting a charge Qz according to an external force (compression / tensile force) applied (received) along the γ axis. The second sensor 13 is configured to output a positive charge according to a compressive force parallel to the γ axis and to output a negative charge according to a tensile force parallel to the γ axis.
The second sensor 13 is provided with a third piezoelectric layer 131 having a third crystal axis CA3 and a third piezoelectric layer 131 facing the third piezoelectric layer 131 and having a fourth crystal axis CA4. There is an output electrode layer 132 that is provided between the body layer 133, the third piezoelectric layer 131, and the fourth piezoelectric layer 133 and outputs a charge Qz.

  The third piezoelectric layer 131 is composed of a piezoelectric body having a third crystal axis CA3 oriented in the positive direction of the γ axis. When a compressive force parallel to the γ-axis is applied to the surface of the third piezoelectric layer 131, electric charges are induced in the third piezoelectric layer 131 due to the piezoelectric effect. As a result, positive charges gather near the surface of the third piezoelectric layer 131 on the output electrode layer 132 side, and negative charges gather near the surface of the third piezoelectric layer 131 on the ground electrode layer 11 side. Similarly, when a tensile force parallel to the γ-axis is applied to the surface of the third piezoelectric layer 131, negative charges gather near the surface of the third piezoelectric layer 131 on the output electrode layer 132 side, Positive charges collect near the surface of the third piezoelectric layer 131 on the ground electrode layer 11 side.

  The fourth piezoelectric layer 133 is composed of a piezoelectric body having a fourth crystal axis CA4 oriented in the negative direction of the γ axis. When a compressive force parallel to the γ-axis is applied to the surface of the fourth piezoelectric layer 133, charges are induced in the fourth piezoelectric layer 133 due to the piezoelectric effect. As a result, positive charges are collected in the vicinity of the surface of the fourth piezoelectric layer 133 on the output electrode layer 132 side, and negative charges are collected in the vicinity of the surface of the fourth piezoelectric layer 133 on the ground electrode layer 11 side. Similarly, when a tensile force parallel to the γ-axis is applied to the surface of the fourth piezoelectric layer 133, negative charges gather near the surface of the fourth piezoelectric layer 133 on the output electrode layer 132 side, Positive charges are collected near the surface of the fourth piezoelectric layer 133 on the ground electrode layer 11 side.

  As the constituent material of the third piezoelectric layer 131 and the fourth piezoelectric layer 133, the same constituent material as that of the first piezoelectric layer 121 and the second piezoelectric layer 123 can be used. In addition, like the third piezoelectric layer 131 and the fourth piezoelectric layer 133, the piezoelectric layer that generates an electric charge with respect to an external force (compression / tensile force) perpendicular to the surface direction of the layer is made of X-cut quartz. Can be configured.

  The output electrode layer 132 has a function of outputting positive charges or negative charges generated in the third piezoelectric layer 131 and the fourth piezoelectric layer 133 as charges Qz. As described above, when a compressive force parallel to the γ axis is applied to the surface of the third piezoelectric layer 131 or the surface of the fourth piezoelectric layer 133, positive charges are collected in the vicinity of the output electrode layer 132. . As a result, a positive charge Qz is output from the output electrode layer 132. On the other hand, when a tensile force parallel to the γ axis is applied to the surface of the third piezoelectric layer 131 or the surface of the fourth piezoelectric layer 133, negative charges are collected in the vicinity of the output electrode layer 132. As a result, a negative charge Qz is output from the output electrode layer 132.

The third sensor 14 has a function of outputting a charge Qx according to an external force (shearing force) applied (received) along the α axis. The third sensor 14 is configured to output a positive charge according to an external force applied along the positive direction of the α axis and to output a negative charge according to an external force applied along the negative direction of the α axis. Has been.
The third sensor 14 is provided to face the fifth piezoelectric layer 141 having the fifth crystal axis CA5 and the fifth piezoelectric layer 141, and the sixth piezoelectric layer having the sixth crystal axis CA6. It has an output electrode layer 142 that is provided between the body layer 143, the fifth piezoelectric layer 141, and the sixth piezoelectric layer 143, and outputs a charge Qx.

  The fifth piezoelectric layer 141 is composed of a piezoelectric body having a fifth crystal axis CA5 oriented in the negative direction of the α axis. When an external force along the positive direction of the α axis is applied to the surface of the fifth piezoelectric layer 141, electric charges are induced in the fifth piezoelectric layer 141 by the piezoelectric effect. As a result, positive charges gather near the surface of the fifth piezoelectric layer 141 on the output electrode layer 142 side, and negative charges gather near the surface of the fifth piezoelectric layer 141 on the ground electrode layer 11 side. Similarly, when an external force along the negative direction of the α axis is applied to the surface of the fifth piezoelectric layer 141, negative charges are generated near the surface of the fifth piezoelectric layer 141 on the output electrode layer 142 side. As a result, positive charges are collected in the vicinity of the surface of the fifth piezoelectric layer 141 on the ground electrode layer 11 side.

  The sixth piezoelectric layer 143 is composed of a piezoelectric body having a sixth crystal axis CA6 oriented in the positive direction of the α axis. When an external force along the positive direction of the α axis is applied to the surface of the sixth piezoelectric layer 143, electric charges are induced in the sixth piezoelectric layer 143 by the piezoelectric effect. As a result, positive charges are collected in the vicinity of the surface of the sixth piezoelectric layer 143 on the output electrode layer 142 side, and negative charges are collected in the vicinity of the surface of the sixth piezoelectric layer 143 on the ground electrode layer 11 side. Similarly, when an external force along the negative direction of the α axis is applied to the surface of the sixth piezoelectric layer 143, negative charges are generated near the surface of the sixth piezoelectric layer 143 on the output electrode layer 142 side. The positive charges are collected near the surface of the sixth piezoelectric layer 143 on the side of the ground electrode layer 11.

  As the constituent materials of the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143, the same constituent materials as those of the first piezoelectric layer 121 and the second piezoelectric layer 123 can be used. Further, like the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143, the piezoelectric layer that generates an electric charge with respect to an external force (shearing force) along the surface direction of the layer is the first piezoelectric layer. Similarly to 121 and the second piezoelectric layer 123, it can be composed of Y-cut quartz.

  The output electrode layer 142 has a function of outputting positive charges or negative charges generated in the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143 as the charge Qx. As described above, when an external force along the positive direction of the α axis is applied to the surface of the fifth piezoelectric layer 141 or the surface of the sixth piezoelectric layer 143, a positive charge is generated in the vicinity of the output electrode layer 142. Gather. As a result, a positive charge Qx is output from the output electrode layer 142. On the other hand, when an external force along the negative direction of the α axis is applied to the surface of the fifth piezoelectric layer 141 or the surface of the sixth piezoelectric layer 143, negative charges are collected in the vicinity of the output electrode layer 142. As a result, a negative charge Qx is output from the output electrode layer 142.

  Thus, the first sensor 12, the second sensor 13, and the third sensor 14 are stacked so that the force detection directions of the sensors are orthogonal to each other. Thereby, each sensor can induce an electric charge according to force components orthogonal to each other. Therefore, the charge output element 10 outputs three charges Qx, Qy, and Qz according to each of external forces along the three axes (α (X) axis, β (Y) axis, γ (Z) axis). Can do.

Next, the charge output elements (second elements) 10a and 10b will be described.
The charge output element (second element) 10a and the charge output element (second element) 10b are the same. As shown in FIG. 5, the charge output elements 10 a and 10 b have a structure in which the first sensor 12 and the third sensor 14 are omitted from the charge output element 10. The charge output elements 10a and 10b are external forces applied along the γ (Z) axis of three axes orthogonal to each other, that is, a pressurizing force applied to the charge output elements 10, 10a and 10b by the pressurizing bolt 71. It has a function of outputting the charge Qz according to the external force in the same direction as the direction.
The charge output elements 10a and 10b may be the same as the charge output element 10.

<Conversion output circuit>
Conversion output circuits 90 a, 90 b, and 90 c are connected to the charge output element 10. The conversion output circuit 90a has a function of converting the charge Qx1 output from the charge output element 10 into a voltage Vx1. The conversion output circuit 90b has a function of converting the charge Qz1 output from the charge output element 10 into a voltage Vz1. The conversion output circuit 90c has a function of converting the charge Qy1 output from the charge output element 10 into a voltage Vy1. Since the conversion output circuits 90a, 90b, and 90c are the same, the conversion output circuit 90c will be typically described below.

  The conversion output circuit 90c has a function of converting the charge Qy1 output from the charge output element 10 into the voltage Vy1 and outputting the voltage Vy1. The conversion output circuit 90 c includes an operational amplifier 91, a capacitor 92, and a switching element 93. The first input terminal (minus input) of the operational amplifier 91 is connected to the output electrode layer 122 of the charge output element 10, and the second input terminal (plus input) of the operational amplifier 91 is grounded to the ground (reference potential point). ing. The output terminal of the operational amplifier 91 is connected to the external force detection circuit 40. The capacitor 92 is connected between the first input terminal and the output terminal of the operational amplifier 91. The switching element 93 is connected between the first input terminal and the output terminal of the operational amplifier 91, and is connected in parallel with the capacitor 92. The switching element 93 is connected to a drive circuit (not shown), and the switching element 93 performs a switching operation in accordance with an on / off signal from the drive circuit.

  When the switching element 93 is off, the charge Qy1 output from the charge output element 10 is stored in the capacitor 92 having the capacitance C1, and is output to the external force detection circuit 40 as the voltage Vy1. Next, when the switching element 93 is turned on, both terminals of the capacitor 92 are short-circuited. As a result, the electric charge Qy1 stored in the capacitor 92 is discharged to 0 coulomb, and the voltage V output to the external force detection circuit 40 is 0 volt. When the switching element 93 is turned on, the conversion output circuit 90c is reset. The voltage Vy1 output from the ideal conversion output circuit 90c is proportional to the accumulated amount of the charge Qy1 output from the charge output element 10.

  The switching element 93 is a semiconductor switching element such as a MOSFET (Metal Oxide Semiconductor Field Effect Transistor), for example. Since the semiconductor switching element is smaller and lighter than the mechanical switch, it is advantageous for reducing the size and weight of the force detection device 1. Hereinafter, a case where a MOSFET is used as the switching element 93 will be described as a representative example.

  The switching element 93 has a drain electrode, a source electrode, and a gate electrode. One of the drain electrode and the source electrode of the switching element 93 is connected to the first input terminal of the operational amplifier 91, and the other of the drain electrode and the source electrode is connected to the output terminal of the operational amplifier 91. The gate electrode of the switching element 93 is connected to a drive circuit (not shown).

  The same drive circuit may be connected to the switching element 93 of each of the conversion output circuits 90a, 90b, and 90c, or different drive circuits may be connected to each other. Each of the switching elements 93 receives an on / off signal that is all synchronized from the drive circuit. As a result, the operations of the switching elements 93 of the conversion output circuits 90a, 90b, and 90c are synchronized. That is, the on / off timings of the switching elements 93 of the conversion output circuits 90a, 90b, and 90c coincide with each other.

  Further, a conversion output circuit 90b is connected to each of the charge output elements 10a and 10b. The conversion output circuit 90b connected to the charge output element 10a has a function of converting the charge Qz11 output from the charge output element 10a into a voltage Vz11. The conversion output circuit 90b connected to the charge output element 10b has a function of converting the charge Qz12 output from the charge output element 10b into a voltage Vz12. Since each conversion output circuit 90b has been described above, the description thereof is omitted.

<External force detection circuit>
The external force detection circuit 40 includes a voltage Vx1 output from the conversion output circuit 90a connected to the charge output element 10, a voltage Vz1 output from the conversion output circuit 90b, a voltage Vy1 output from the conversion output circuit 90c, A function of detecting an applied external force based on the voltage Vz11 output from the conversion output circuit 90b connected to the charge output element 10a and the voltage Vz12 output from the conversion output circuit 90b connected to the charge output element 10b. Have The external force detection circuit 40 includes conversion output circuits 90a, 90b, 90c for the charge output element 10, a conversion output circuit 90b for the charge output element 10a, an AD converter 401 connected to the conversion output circuit 90b for the charge output element 10b, and an AD converter. And a calculation unit (detection unit) 402 connected to 401.

The AD converter 401 has a function of converting the voltages Vx1, Vy1, Vz1, Vz11, and Vz12 from analog signals to digital signals. The voltages Vx1, Vy1, Vz1, Vz11, and Vz12 digitally converted by the AD converter 401 are input to the arithmetic unit 402.
That is, when an external force is applied in which the relative positions of the first substrate 2 and the second substrate 3 are shifted in the α (X) axis direction, the AD converter 401 outputs the voltage Vx1. Similarly, when an external force is applied in which the relative positions of the first substrate 2 and the second substrate 3 are shifted from each other in the β (Y) axis direction, the AD converter 401 outputs the voltage Vy1. Further, when an external force is applied in which the relative positions of the first substrate 2 and the second substrate 3 are shifted in the γ (Z) axis direction, the AD converter 401 outputs voltages Vz1, Vz11, and Vz12.
The computing unit 402 performs correction based on the digitally converted voltages Vx1, Vy1, Vz1, Vz11, and Vz12, and translates the translational force component Fx in the x-axis direction, the translational force component Fy in the y-axis direction, and the translation in the z-axis direction. It has a function of calculating the force component Fz. Each force component can be obtained by the following equation.

Fx = Vx1
Fy = Vy1
Fz = Vz1- (Vz11 + Vz12)
Thus, the force detection device 1 can detect a triaxial force.
As described above, when obtaining Fz, correction is performed (compensated) by taking the difference between the voltage Vz1 and the voltage (Vz11 + Vz12). That is, the corrected external force is detected. As a result, all or part of the error component due to thermal expansion included in the voltage Vz1 is removed from the voltage Vz1. The correction includes not only the case where the error component is completely removed but also the case where the error component is reduced.

  As described above, according to the force detection device 1, when detecting the external force based on the signal output from the charge output element 10, the signal output from the charge output element 10 is output from the charge output element 10a. By correcting based on the received signal, an error component caused by thermal expansion included in the signal output from the charge output element 10 can be removed or reduced. Thereby, measurement accuracy can be improved.

In addition, since at least one pair of pressurizing bolts 71 is disposed with the charge output element 10 in between, the first substrate 2 and the second substrate 3 can be fixed in a well-balanced manner, and the charge output can be performed. Pressure can be applied to the element 10 in a well-balanced manner.
Moreover, since the fastening portion 23, the fastening portion 33, and the charge output element 10 overlap in a plan view of the first substrate 2, due to the external force acting on the first substrate 2 and the second substrate 3, The bending of the first substrate 2 and the second substrate 3 can be suppressed, whereby the thickness of the first substrate 2 and the second substrate 3 can be reduced, and the size of the apparatus can be reduced. And weight reduction can be achieved.

Second Embodiment
FIG. 6 is an exploded perspective view showing a second embodiment of the force detection device of the present invention. FIG. 7 is a circuit diagram schematically showing the force detection device shown in FIG.
Hereinafter, the second embodiment will be described with a focus on the differences from the first embodiment described above, and the description of the same matters will be omitted.

The force detection device 1 according to the second embodiment shown in FIG. 6 has a function of detecting external force (including moment), that is, six-axis force (x, y, translational force component (shear force) in the z-axis direction and x, It has a function of detecting a rotational force component (moment) around the y and z axes.
As shown in FIG. 6, the force detection device 1 includes four charge output elements 10, four pairs of charge output elements 10 a and 10 b, and eight pressurizing bolts 71. The position of each charge output element 10 is not particularly limited, but in this embodiment, each charge output element 10 is arranged on the outer periphery of the first substrate 2 and the second substrate 3 with the first substrate 2 and the second substrate 3. The two substrates 3 are arranged at equiangular intervals (90 ° intervals) along the circumferential direction of the substrate 3. Thereby, an external force can be detected without deviation. And a six-axis force can be detected. In the present embodiment, all the charge output elements 10 face the same direction, but the present invention is not limited to this.

  Further, the position of each pressurizing bolt 71 is not particularly limited, but in the present embodiment, each pressurizing bolt 71 is arranged on the outer periphery of the first substrate 2 and the second substrate 3, Arranged along the circumferential direction of the second substrate 3. The pressurizing bolts 71 are arranged so as to face each other with the corresponding charge output elements 10 in the plan view of the first substrate 2. Therefore, in a plan view of the first substrate 2, the pair of charge output elements 10 a and 10 b are arranged to face one charge output element 10 with the charge output element 10 in between.

The force detection device 1 has a circuit board 4 provided between the first board 2 and the second board 3, and each charge output element 10 is mounted on the circuit board 4. . Further, the charge output elements 10a and 10b are electrically connected to the circuit board by wiring not shown. The circuit board 4 has eight holes 41 through which the eight pressurizing bolts 71 are inserted.
Each charge output element 10 is disposed on the surface of the circuit board 4 on the first substrate 2 side. Each charge output element 10 may be disposed on the surface of the circuit board 4 on the second substrate 3 side.

  In addition, the shapes of the first substrate 2, the second substrate 3, and the circuit substrate 4 are not particularly limited, but in the present embodiment, the planes of the first substrate 2, the second substrate 3, and the circuit substrate 4 are used. Visually, the outer shape is circular. Examples of the other outer shape of the first substrate 2, the second substrate 3, and the circuit substrate 4 in a plan view include a polygon such as a quadrangle and a pentagon, and an ellipse. Moreover, it does not specifically limit as a constituent material of parts other than each element and each wiring of the circuit board 4, For example, various resin materials etc. can be used.

  7, the circuit board 4 includes a conversion output circuit 90a that converts the charge Qx1 output from the corresponding charge output element 10 into a voltage Vx1, and a conversion output circuit 90b that converts the charge Qz1 into a voltage Vz1. A conversion output circuit 90c that converts the charge Qy1 into the voltage Vy1, a conversion output circuit 90a that converts the charge Qx2 into the voltage Vx2, a conversion output circuit 90b that converts the charge Qz2 into the voltage Vz2, and a charge Qy2 into the voltage Vy2. A conversion output circuit 90c for converting, a conversion output circuit 90a for converting the charge Qx3 into the voltage Vx3, a conversion output circuit 90b for converting the charge Qz3 into the voltage Vz3, a conversion output circuit 90c for converting the charge Qy3 into the voltage Vy3, A conversion output circuit 90a that converts the charge Qx4 into the voltage Vx4, and a conversion output circuit 90b that converts the charge Qz4 into the voltage Vz4. And a converter output circuit 90c for converting an electric charge Qy4 voltage Vy4.

Further, the circuit board 4 includes a conversion output circuit 90b that converts the charge Qz11 output from the corresponding charge output element 10a into the voltage Vz11, a conversion output circuit 90b that converts the charge Qz21 into the voltage Vz21, and the charge Qz31 into the voltage Vz31. And a conversion output circuit 90b for converting the charge Qz41 into the voltage Vz41.
The circuit board 4 also includes a conversion output circuit 90b that converts the charge Qz12 output from the corresponding charge output element 10b into the voltage Vz12, a conversion output circuit 90b that converts the charge Qz22 into the voltage Vz22, and the charge Qz32 into the voltage Vz32. And a conversion output circuit 90b for converting the charge Qz42 into a voltage Vz42.
The circuit board 4 includes an external force detection circuit 40 that detects the applied external force.

  Note that the number of charge output elements 10 is not limited to four, and may be two, three, or five or more, for example. However, the number of charge output elements 10 is preferably plural, and more preferably three or more. The force detection device 1 can detect a six-axis force as long as it has at least three charge output elements 10. When the number of charge output elements 10 is three, the number of charge output elements 10 is small, so that the force detection device 1 can be reduced in weight. Further, when the number of charge output elements 10 is four as shown in the figure, the six-axis force can be obtained by a very simple calculation described later, so that the calculation unit 402 can be simplified.

<Conversion output circuit>
As shown in FIG. 7, conversion output circuits 90a, 90b, 90c are connected to each charge output element 10, respectively. A conversion output circuit 90b is connected to each of the charge output elements 10a and 10b. Since each of the conversion output circuits 90a, 90b, and 90c is the same as the conversion output circuits 90a, 90b, and 90c of the first embodiment described above, description thereof is omitted.

<External force detection circuit>
The external force detection circuit 40 includes voltages Vx1, Vx2, Vx3, and Vx4 output from each conversion output circuit 90a, and voltages Vz1, Vz2, Vz3, Vz4, Vz11, Vz12, Vz21, and Vz22 output from each conversion output circuit 90b. , Vz31, Vz32, Vz41, Vz42, and voltages Vy1, Vy2, Vy3, Vy4 output from the respective conversion output circuits 90c, and a function of detecting the applied external force. The voltage corresponding to each charge output element 10, each charge output element 10a, and each charge output element 10b is shown in parentheses in FIG.

  The AD converter 401 converts the voltages Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4, Vz11, Vz12, Vz21, Vz22, Vz31, Vz32, Vz41, Vz42 from analog signals. It has a function to convert to a signal. The voltages Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4, Vz11, Vz12, Vz21, Vz22, Vz31, Vz32, Vz41, Vz42, which are digitally converted by the AD converter 401, Input to the calculation unit 402.

  That is, when an external force is applied in which the relative positions of the first substrate 2 and the second substrate 3 are shifted in the α (X) axis direction, the AD converter 401 outputs the voltages Vx1, Vx2, Vx3, and Vx4. Similarly, when an external force is applied in which the relative positions of the first substrate 2 and the second substrate 3 are shifted in the β (Y) axis direction, the AD converter 401 outputs voltages Vy1, Vy2, Vy3, and Vy4. . In addition, when an external force is applied in which the relative positions of the first substrate 2 and the second substrate 3 are shifted in the γ (Z) axis direction, the AD converter 401 causes the voltages Vz1, Vz2, Vz3, Vz4, Vz11, and Vz12. , Vz21, Vz22, Vz31, Vz32, Vz41, Vz42 are output.

The first substrate 2 and the second substrate 3 are capable of relative displacement rotating around the x axis, relative displacement rotating around the y axis, and relative displacement rotating around the z axis. Can be transmitted to the charge output elements 10, 10a, 10b.
The arithmetic unit 402 converts the digitally converted voltages Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4, Vz11, Vz12, Vz21, Vz22, Vz31, Vz32, Vz41, Vz42. Based on the correction, the translational force component Fx in the x-axis direction, the translational force component Fy in the y-axis direction, the translational force component Fz in the z-axis direction, the rotational force component Mx around the x-axis, and the rotational force component around the y-axis It has a function of calculating the rotational force component Mz around the My and z axes. Each force component can be obtained by the following equation.

Fx = Vx1 + Vx2 + Vx3 + Vx4
Fy = Vy1 + Vy2 + Vy3 + Vy4
Fz = Vz1- (Vz11 + Vz12) + Vz2- (Vz21 + Vz22) + Vz3- (Vz31 + Vz32) + Vz4- (Vz41 + Vz42)
Mx = [− {Vz2− (Vz21 + Vz22)} + {Vz4− (Vz41 + Vz42)}] × R
My = [− {Vz1− (Vz11 + Vz12)} + {Vz3− (Vz31 + Vz32)}] × R
Mz = (Vx2-Vx4 + Vy1-Vy3) * R
Here, R is a constant.
Thus, the force detection device 1 can detect six-axis forces.

  As described above, when obtaining Fz, the difference between the voltage Vz1 and the voltage (Vz11 + Vz12), the difference between the voltage Vz2 and the voltage (Vz21 + Vz22), the difference between the voltage Vz3 and the voltage (Vz31 + Vz32), the voltage Vz4 and the voltage (Vz41 + Vz42). Correction is performed (compensated) by taking the difference from each other. That is, the corrected external force is detected. As a result, all or a part of error components due to thermal expansion included in the voltage Vz1, the voltage Vz2, the voltage Vz3, and the voltage Vz4 are removed from the voltage Vz1, the voltage Vz2, the voltage Vz3, and the voltage Vz4.

Similarly, when obtaining Mx, correction is performed (compensated) by taking the difference between the voltage Vz2 and the voltage (Vz21 + Vz22) and the difference between the voltage Vz4 and the voltage (Vz41 + Vz42), respectively. Similarly, when obtaining My, correction is performed (compensated) by taking the difference between the voltage Vz1 and the voltage (Vz11 + Vz12) and the difference between the voltage Vz3 and the voltage (Vz31 + Vz32), respectively. As a result, all or part of the error components due to thermal expansion included in the voltages Vz1 and Vz3 are removed from the voltages Vz1 and Vz3.
According to the force detection device 1, the same effect as that of the first embodiment described above can be obtained.

<Third Embodiment>
FIG. 8 is a plan view showing a third embodiment of the force detection device of the present invention.
Hereinafter, the third embodiment will be described with a focus on differences from the second embodiment described above, and description of similar matters will be omitted.
As shown in FIG. 8, the force detection device 1 of the third embodiment has four charge output elements (first elements) 10 and one charge output element (second element) 10a. Then, correction is performed using the detection result of the one charge output element 10a. Thereby, the number of parts can be reduced, and the configuration can be simplified.

Moreover, each force component can be calculated | required with the following formula | equation.
Fx = Vx1 + Vx2 + Vx3 + Vx4
Fy = Vy1 + Vy2 + Vy3 + Vy4
Fz = Vz1 + Vz2 + Vz3) + Vz4- (Vz11 × N)
Mx = [− {Vz2− (Vz11 × 2)} + {Vz4− (Vz11 × 2)}] × R
My = [− {Vz1− (Vz11 × 2)} + {Vz3− (Vz11 × 2)}] × R
Mz = (Vx2-Vx4 + Vy1-Vy3) * R
Here, R is a constant.
N is the number of pressurizing bolts, and is “8” in the illustrated configuration.
According to the force detection device 1, the same effect as that of the second embodiment described above can be obtained.

<Fourth embodiment>
FIG. 9 is a plan view showing a fourth embodiment of the force detection device of the present invention.
Hereinafter, the fourth embodiment will be described with a focus on differences from the second embodiment described above, and description of similar matters will be omitted.
As shown in FIG. 9, in the force detection device 1 of the fourth embodiment, only one charge output element 10 a is provided for one charge output element 10. Thereby, compared with 2nd Embodiment, a number of parts can be reduced and a structure can be simplified. In addition, the measurement accuracy can be increased as compared with the third embodiment.

Moreover, each force component can be calculated | required with the following formula | equation.
Fx = Vx1 + Vx2 + Vx3 + Vx4
Fy = Vy1 + Vy2 + Vy3 + Vy4
Fz = Vz1− (Vz11 × 2) + Vz2− (Vz21 × 2) + Vz3− (Vz31 × 2) + Vz4− (Vz41 × 2)
Mx = [-{Vz2- (Vz21 * 2)} + {Vz4- (Vz41 * 2)}] * R
My = [-{Vz1- (Vz11 * 2)} + {Vz3- (Vz31 * 2)}] * R
Mz = (Vx2-Vx4 + Vy1-Vy3) * R
Here, R is a constant.
According to the force detection device 1, the same effect as that of the second embodiment described above can be obtained.

<Embodiment of single arm robot>
Next, based on FIG. 10, a single-arm robot which is an embodiment of the robot of the present invention will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.
FIG. 10 is a diagram showing an example of a single-arm robot using the force detection device of the present invention. 10 includes a base 510, an arm 520, an end effector 530 provided on the distal end side of the arm 520, and a force detection device 100 provided between the arm 520 and the end effector 530. Have In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.

The base 510 has a function of accommodating an actuator (not shown) that generates power for rotating the arm 520, a control unit (not shown) that controls the actuator, and the like. The base 510 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage.
The arm 520 includes a first arm element 521, a second arm element 522, a third arm element 523, a fourth arm element 524, and a fifth arm element 525, and rotates adjacent arms. It is configured by linking freely. The arm 520 is driven by being rotated or bent in a compound manner around the connecting portion of each arm element under the control of the control unit.

The end effector 530 has a function of gripping an object. The end effector 530 has a first finger 531 and a second finger 532. After the end effector 530 reaches the predetermined operating position by driving the arm 520, the object can be gripped by adjusting the distance between the first finger 531 and the second finger 532.
The end effector 530 is a hand here, but the present invention is not limited to this. Other examples of the end effector include, for example, a component inspection device, a component transport device, a component processing device, a component assembly device, and a measuring instrument. The same applies to the end effectors in other embodiments.

The force detection device 100 has a function of detecting an external force applied to the end effector 530. By feeding back the force detected by the force detection device 100 to the control unit of the base 510, the single-arm robot 500 can perform more precise work. Further, the single-arm robot 500 can detect contact of the end effector 530 with an obstacle by the force detected by the force detection device 100. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the single-arm robot 500 can perform work more safely.
In the illustrated configuration, the arm 520 includes a total of five arm elements, but the present invention is not limited to this. When the arm 520 is constituted by one arm element, when constituted by 2 to 4 arm elements, and when constituted by 6 or more arm elements, it is within the scope of the present invention. .

<Embodiment of double-arm robot>
Next, based on FIG. 11, a multi-arm robot which is an embodiment of the robot of the present invention will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.
FIG. 11 is a diagram showing an example of a multi-arm robot using the force detection device of the present invention. The multi-arm robot 600 of FIG. 11 includes a base 610, a first arm 620, a second arm 630, a first end effector 640a provided on the distal end side of the first arm 620, and a second A second end effector 640b provided on the distal end side of the arm 630, and between the first arm 620 and the first end effector 640a and between the second arm 630 and the second end effector 640b. A force detecting device 100. In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.

The base 610 has a function of accommodating an actuator (not shown) that generates power for rotating the first arm 620 and the second arm 630, a control unit (not shown) that controls the actuator, and the like. Have. The base 610 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage.
The 1st arm 620 is comprised by connecting the 1st arm element 621 and the 2nd arm element 622 so that rotation is possible. The second arm 630 is configured by rotatably connecting the first arm element 631 and the second arm element 632. The first arm 620 and the second arm 630 are driven by being complexly rotated or bent around the connecting portion of each arm element under the control of the control unit.

  The first and second end effectors 640a and 640b have a function of gripping an object. The first end effector 640a has a first finger 641a and a second finger 642a. The second end effector 640b has a first finger 641b and a second finger 642b. After the first end effector 640a reaches a predetermined operating position by driving the first arm 620, the object is grasped by adjusting the distance between the first finger 641a and the second finger 642a. Can do. Similarly, after the second end effector 640b reaches a predetermined operation position by driving the second arm 630, the distance between the first finger 641b and the second finger 642b is adjusted to thereby adjust the object. It can be gripped.

The force detection device 100 has a function of detecting an external force applied to the first and second end effectors 640a and 640b. By feeding back the force detected by the force detection device 100 to the control unit of the base 610, the multi-arm robot 600 can perform the operation more precisely. Further, the multi-arm robot 600 can detect contact of the first and second end effectors 640a and 640b with an obstacle by the force detected by the force detection device 100. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that have been difficult with conventional position control can be easily performed, and the multi-arm robot 600 can perform the operation more safely.
In the illustrated configuration, there are a total of two arms, but the present invention is not limited to this. The case where the multi-arm robot 600 has three or more arms is also within the scope of the present invention.

<Embodiments of Electronic Component Inspection Device and Electronic Component Transfer Device>
Next, based on FIG. 12 and FIG. 13, an electronic component inspection apparatus and an electronic component transport apparatus that are embodiments of the present invention will be described. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.
FIG. 12 is a diagram showing an example of an electronic component inspection device and an electronic component transport device using the force detection device of the present invention. FIG. 13 is a diagram illustrating an example of an electronic component transport apparatus using the force detection device of the present invention.

  An electronic component inspection apparatus 700 in FIG. 12 includes a base 710 and a support base 720 provided upright on the side surface of the base 710. On the upper surface of the base 710, an upstream stage 712u on which the electronic component 711 to be inspected is placed and transported, and a downstream stage 712d on which the inspected electronic component 711 is placed and transported are provided. ing. Further, between the upstream stage 712u and the downstream stage 712d, an imaging device 713 for confirming the posture of the electronic component 711, and an inspection table 714 on which the electronic component 711 is set for inspecting electrical characteristics. And are provided. Examples of the electronic component 711 include semiconductors, semiconductor wafers, display devices such as CLD and OLED, crystal devices, various sensors, inkjet heads, various MEMS devices, and the like.

  Further, the support base 720 is provided with a Y stage 731 that can move in a direction (Y direction) parallel to the upstream stage 712u and the downstream stage 712d of the base 710. An arm portion 732 is extended in a direction (X direction) toward 710. An X stage 733 is provided on the side surface of the arm 732 so as to be movable in the X direction. In addition, the X stage 733 is provided with an imaging camera 734 and an electronic component transfer device 740 incorporating a Z stage movable in the vertical direction (Z direction). In addition, a gripping portion 741 that grips the electronic component 711 is provided on the front end side of the electronic component transport apparatus 740. Further, a force detection device 100 is provided between the tip of the electronic component transport device 740 and the gripping portion 741. Further, on the front side of the base 710, a control device 750 for controlling the overall operation of the electronic component inspection device 700 is provided. In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.

  The electronic component inspection apparatus 700 inspects the electronic component 711 as follows. First, the electronic component 711 to be inspected is placed on the upstream stage 712u and moved to the vicinity of the inspection table 714. Next, the Y stage 731 and the X stage 733 are moved to move the electronic component transport device 740 to a position immediately above the electronic component 711 placed on the upstream stage 712u. At this time, the position of the electronic component 711 can be confirmed using the imaging camera 734. Then, when the electronic component transport device 740 is lowered using the Z stage built in the electronic component transport device 740 and the electronic component 711 is gripped by the gripping portion 741, the electronic component transport device 740 is directly placed on the imaging device 713. The position of the electronic component 711 is confirmed using the imaging device 713. Next, the attitude of the electronic component 711 is adjusted using a fine adjustment mechanism built in the electronic component transport apparatus 740. Then, after moving the electronic component transport device 740 to above the inspection table 714, the Z stage built in the electronic component transport device 740 is moved to set the electronic component 711 on the inspection table 714. Since the attitude of the electronic component 711 is adjusted using the fine adjustment mechanism in the electronic component conveying apparatus 740, the electronic component 711 can be set at the correct position on the inspection table 714. Next, after the electrical characteristic inspection of the electronic component 711 is completed using the inspection table 714, the electronic component 711 is picked up from the inspection table 714, the Y stage 731 and the X stage 733 are moved, and the upper stage 712d is moved. The electronic component conveying device 740 is moved to the position, and the electronic component 711 is placed on the downstream stage 712d. Finally, the downstream stage 712d is moved to transport the electronic component 711 that has been inspected to a predetermined position.

  FIG. 13 is a diagram illustrating an electronic component transport device 740 including the force detection device 100. The electronic component transport device 740 includes a gripping portion 741, a six-axis force detection device 100 connected to the gripping portion 741, a rotation shaft 742 connected to the gripping portion 741 via the six-axis force detection device 100, and a rotation shaft. A fine adjustment plate 743 is rotatably attached to 742. The fine adjustment plate 743 is movable in the X direction and the Y direction while being guided by a guide mechanism (not shown).

  Further, a piezoelectric motor 744θ for rotation direction is mounted toward the end surface of the rotation shaft 742, and a driving convex portion (not shown) of the piezoelectric motor 744θ is pressed against the end surface of the rotation shaft 742. Therefore, by operating the piezoelectric motor 744θ, the rotation shaft 742 (and the gripping portion 741) can be rotated by an arbitrary angle in the θ direction. Further, a piezoelectric motor 744 x for X direction and a piezoelectric motor 744 y for Y direction are provided toward the fine adjustment plate 743, and each drive convex portion (not shown) is a surface of the fine adjustment plate 743. It is pressed against. For this reason, by operating the piezoelectric motor 744x, the fine adjustment plate 743 (and the gripper 741) can be moved by an arbitrary distance in the X direction. Similarly, the fine adjustment can be performed by operating the piezoelectric motor 744y. The plate 743 (and the gripping portion 741) can be moved by an arbitrary distance in the Y direction.

  Further, the force detection device 100 has a function of detecting an external force applied to the grip portion 741. By feeding back the force detected by the force detection device 100 to the control device 750, the electronic component transport device 740 and the electronic component inspection device 700 can perform work more precisely. Further, the contact of the gripping portion 741 with an obstacle can be detected by the force detected by the force detection device 100. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that were difficult with conventional position control can be easily performed, and the electronic component transport device 740 and the electronic component inspection device 700 can perform safer work. is there.

<Embodiment of component processing apparatus>
Next, an embodiment of the component processing apparatus of the present invention will be described based on FIG. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.
FIG. 14 is a diagram showing an example of a component processing apparatus using the force detection device of the present invention. The component processing apparatus 800 of FIG. 14 is attached to a base 810, a support column 820 that is erected on the upper surface of the base 810, a feed mechanism 830 that is provided on a side surface of the support column 820, and a feed mechanism 830 that can be moved up and down. A tool displacement unit 840, a force detection device 100 connected to the tool displacement unit 840, and a tool 850 attached to the tool displacement unit 840 via the force detection device 1. In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.

  The base 810 is a base for mounting and fixing the workpiece 860. The column 820 is a column for fixing the feed mechanism 830. The feed mechanism 830 has a function of moving the tool displacement portion 840 up and down. The feed mechanism 830 includes a feed motor 831 and a guide 832 that raises and lowers the tool displacement portion 840 based on an output from the feed motor 831. The tool displacement unit 840 has a function of imparting displacement such as rotation and vibration to the tool 850. The tool displacement portion 840 includes a displacement motor 841, a tool attachment portion 843 provided at the tip of a main shaft (not shown) connected to the displacement motor 841, and a holder attached to the tool displacement portion 840 and holding the main shaft. Part 842. The tool 850 is attached to the tool attachment portion 843 of the tool displacement portion 840 via the force detection device 1 and is used for machining the workpiece 860 in accordance with the displacement given from the tool displacement portion 840. The tool 850 is not particularly limited, and is, for example, a wrench, a Phillips screwdriver, a flat-blade screwdriver, a cutter, a circular saw, a nipper, a cone, a drill, or a milling cutter.

  The force detection device 100 has a function of detecting an external force applied to the tool 850. By feeding back the external force detected by the force detection device 1 to the feed motor 831 and the displacement motor 841, the component processing device 800 can execute the component processing operation more precisely. Further, the contact of the tool 850 with an obstacle or the like can be detected by an external force detected by the force detection device 100. Therefore, an emergency stop can be performed when an obstacle or the like comes in contact with the tool 850, and the component processing apparatus 800 can execute a safer component processing operation.

<Embodiment of moving body>
Next, an embodiment of the moving body of the present invention will be described based on FIG. Hereinafter, the present embodiment will be described with a focus on differences from the above-described embodiments, and description of similar matters will be omitted.
FIG. 15 is a diagram showing an example of a moving object using the force detection device of the present invention. The moving body 900 of FIG. 15 can move by the applied power. The moving body 900 is not particularly limited, and is, for example, a vehicle such as an automobile, a motorcycle, an airplane, a ship, or a train, a robot such as a bipedal walking robot, or a wheeled robot.

The moving body 900 detects a main body 910 (for example, a vehicle casing, a robot main body, etc.), a power unit 920 that supplies power for moving the main body 910, and an external force generated by the movement of the main body 910. It has the force detection apparatus 100 of this invention and the control part 930. In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.
When the main body 910 is moved by the power supplied from the power unit 920, vibration, acceleration, and the like are generated with the movement. The force detection device 100 detects an external force due to vibration, acceleration, or the like that occurs with movement. The external force detected by the force detection device 100 is transmitted to the control unit 930. The control unit 930 can execute control such as posture control, vibration control, and acceleration control by controlling the power unit 920 and the like according to the external force transmitted from the force detection device 100.
As described above, the force detection device, the robot, the electronic component transport device, the electronic component inspection device, and the component processing device according to the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and each unit The configuration of can be replaced with any configuration having the same function. In addition, any other component may be added to the present invention.

In addition, the present invention may be a combination of any two or more configurations (features) of the embodiment.
Moreover, in the said embodiment, although the pressurization volt | bolt (screw) was used as a fixing member, in this invention, it is not limited to this.
In the above embodiment, a device using a piezoelectric body is used as an element for outputting a signal in accordance with an external force. However, in the present invention, if the output changes depending on the applied external force, this element may be used. In addition, the thing using a pressure sensitive conductor etc. is mentioned, for example.

In addition, the robot of the present invention is not limited to an arm type robot (robot arm) as long as it has an arm, but is another type of robot such as a scalar robot, a legged walking (running) robot, or the like. Also good.
In addition, the force detection device of the present invention is not limited to a robot, an electronic component transfer device, an electronic component inspection device, and a component processing device, but other devices such as other transfer devices, other inspection devices, vibrometers, and accelerometers. It can also be applied to measuring devices such as gravimeters, dynamometers, seismometers, inclinometers, and input devices.

  DESCRIPTION OF SYMBOLS 1,100 ... Force detection apparatus 2 ... 1st board | substrate 23 ... Fastening part 25 ... Hole 3 ... 2nd board | substrate 33 ... Fastening part 35 ... Female screw 4 ... Circuit board 40 ... External force detection circuit 401 ... AD converter 402 ... Calculation Portion 41 ... Hole 71 ... Pressure bolt 715 ... Head 716 ... Male screw 90a, 90b, 90c ... Conversion output circuit 91 ... Operational amplifier 92 ... Capacitor 93 ... Switching element 10, 10a, 10b ... Charge output element (element) 11 ... Ground electrode layer 12 ... first sensor 121 ... first piezoelectric layer 122 ... output electrode layer 123 ... second piezoelectric layer 13 ... second sensor 131 ... third piezoelectric layer 132 ... output electrode layer 133 ... fourth piezoelectric layer 14 ... third sensor 141 ... fifth piezoelectric layer 142 ... output electrode layer 143 ... sixth piezoelectric layer 500 ... single Robot 510 ... Base 520 ... Arm 521 ... First arm element 522 ... Second arm element 523 ... Third arm element 524 ... Fourth arm element 525 ... Fifth arm element 530 ... End effector 531 ... First 1 finger 532 ... 2nd finger 600 ... double-arm robot 610 ... base 620 ... 1st arm 621 ... 1st arm element 622 ... 2nd arm element 630 ... 2nd arm 631 ... 1st arm Element 632 ... second arm element 640a ... first end effector 641a ... first finger 642a ... second finger 640b ... second end effector 641b ... first finger 642b ... second finger 700 ... electronic component Inspection device 710 ... Base 711 ... Electronic component 712u ... Upstream stage 712d ... Downstream stage 713 ... Shooting Device 714 ... Inspection table 720 ... Support table 731 ... Y stage 732 ... Arm part 733 ... X stage 734 ... Imaging camera 740 ... Electronic component transfer device 741 ... Gripping part 742 ... Rotating shaft 743 ... Fine adjustment plate 744x, 744y, 744θ ... Piezoelectric motor 750 ... Control device 800 ... Part processing device 810 ... Base 820 ... Pole 830 ... Feed mechanism 831 ... Feeding motor 832 ... Guide 840 ... Tool displacement portion 841 ... Displacement motor 842 ... Holding portion 843 ... Tool mounting portion 850 ... Tool 860 ... Work piece 900 ... Moving body 910 ... Main body 920 ... Power part 930 ... Control part CA1 ... First crystal axis CA2 ... Second crystal axis CA3 ... Third crystal axis CA4 ... Fourth crystal axis CA5 ... fifth crystal axis CA6 ... sixth crystal axis

Claims (9)

A first substrate;
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
The force detection device according to claim 1, wherein at least one pair of the fixing members are arranged with respect to the first element when viewed from the thickness direction of the first substrate.   The force detection device according to claim 1, wherein a center of the first element is different from a center of the second element in a thickness direction of the first substrate. The direction of pressure applied to the first element by the fixing member and the direction of pressure applied to the second element are the same;
When an external force in the same direction as the pressure applied to the first element by the fixing member is applied to the first substrate, the first element and the second element reverse the external forces to each other. force detection apparatus according to claim 1 or 2 for detecting the direction of the force. The first substrate has a first attachment portion for attaching the first substrate to a first object,
The second substrate has a second attachment portion for attaching the second substrate to a second object,
The shadow of the first mounting portion, the shadow of the second mounting portion, and the shadow of the first element overlap in a projected image from the thickness direction of the first substrate. force detection device according to any one of 3. The fixing member is a screw having a head;
The second element, the force detecting apparatus according to any one of claims 1 provided 4 between the first substrate and the head. On the basis of the first signal outputted from the signal and the second element is outputted from the device, the force detection according to any one of claims 1 to 5 having a detector for detecting the corrected external force apparatus. The detection unit corrects the external force by taking a difference between the voltage obtained based on the signal output from the first element and the voltage obtained based on the signal output from the second element. The force detection device according to claim 6 , wherein the force is detected. A plurality of the first elements;
Wherein each of the first element, the first substrate or the circumferential direction of the second substrate, the force detecting apparatus according to any one of claims 1 to 7 are arranged at equal angular intervals. Arm,
An end effector provided on the arm;
A force detection device that is provided between the arm and the end effector and detects an external force applied to the end effector;
The force detection device includes a first substrate,
A second substrate;
A first element that outputs a signal in response to an external force;
A fixing member that sandwiches the first element provided between the first substrate and the second substrate and applies pressure to the first element;
A second element that is provided between the first substrate and the fixing member, and outputs a signal according to an external force component in the same direction as the direction of pressure applied to the first element by the fixing member; With
A robot characterized in that at least one pair of the fixing members is arranged with respect to the first element when viewed from the thickness direction of the first substrate.

Images