JP6477843B2 - Force detection device and robot - Google Patents

Description

  The present invention relates to a force detection device and a robot.

In recent years, industrial robots have been introduced into production facilities such as factories for the purpose of improving production efficiency. A typical example of such an industrial robot is a machine tool that performs machining on a base material such as an aluminum plate. Some machine tools have a built-in force detection device that detects a force on a base material when machining is performed (for example, see Patent Document 1).
In Patent Document 1, a piezoelectric element, a ceramic package having a concave portion for accommodating the piezoelectric element, and the piezoelectric element accommodated in the concave portion of the ceramic package are joined to the ceramic package so as to close the opening of the concave portion. A sensor element with a lid is described. The sensor element is sandwiched between two pressurizing plates.

In such a sensor element, when an external force is applied to the pressurizing plate, the external force is transmitted to the piezoelectric element through the ceramic package or the lid, and the piezoelectric element outputs a charge corresponding to the external force, and is applied based on the charge. The detected external force can be detected.
The sensor element is hermetically sealed by a ceramic package and a lid, and is shielded from the outside air. Thereby, the electric charge generated from the piezoelectric element is prevented from leaking to the outside due to moisture or the like.

Japanese Unexamined Patent Publication No. 2013-130431

However, the force detection device described in Patent Document 1 has a problem in that when the external force is repeatedly applied to the pressurizing plate, the ceramic package is repeatedly stressed and the ceramic package is damaged. Therefore, it has been difficult to use the force detection device stably over a long period of time.
In addition, in such a force detection device, when the sensor element is sandwiched between the pressurizing plates at the time of manufacture, there is also a problem that the ceramic package is damaged by the pressure applied by the pressurizing plate.
SUMMARY OF THE INVENTION An object of the present invention is to provide a force detection device and a robot that can reduce damage to a housing (package) that houses a piezoelectric element even when an external force is repeatedly applied.

Such an object is achieved by the present invention described below.
(Application example 1)
A force detection device according to the present invention includes a first base,
A second base;
A pressure detection unit including a piezoelectric element provided between the first base and the second base and outputting a signal according to an external force;
The pressure detector includes a first member having a portion in contact with the first base, a second member having a portion in contact with the second base, and a third member that connects the first member and the second member. And
A first longitudinal elastic modulus of at least a part of the first member is lower than a third longitudinal elastic modulus of the third member;
The second longitudinal elastic modulus of at least a part of the second member is lower than the third longitudinal elastic modulus of the third member.
Thereby, even if an external force is repeatedly applied to the 1st base and the 2nd base, the 1st member and the 2nd member can change according to the external force. For this reason, even when an external force is repeatedly applied, it is possible to reduce damage to the housing portion that houses the piezoelectric element.

(Application example 2)
In the force detection device according to the present invention, it is preferable that a difference between the first longitudinal elastic modulus and the second longitudinal elastic modulus is 1/10 or less of the first longitudinal elastic modulus.
Thereby, it is possible to avoid stress concentration on only one of the first member and the second member, and thus it is possible to more reliably reduce the damage to the housing portion that houses the piezoelectric element. .

(Application example 3)
In the force detection device according to the present invention, the constituent material of the first member and the constituent material of the second member are preferably the same.
Thereby, it is avoided that the applied external force is concentrated on one of the first member and the second member, and therefore, it is particularly effectively reduced that the housing portion for housing the piezoelectric element is unintentionally deformed or damaged. can do.

(Application example 4)
In the force detection device according to the present invention, the constituent material of the third member preferably includes ceramic.
As a result, the mechanical strength of the entire housing portion can be sufficiently ensured. Therefore, even if an external force is repeatedly applied, damage due to deformation of the housing portion is less likely to occur, and the piezoelectric element housed inside can be more reliably secured. Can be protected.

(Application example 5)
In the force detection device according to the present invention, it is preferable that the longitudinal elastic modulus of the first member is the first longitudinal elastic modulus.
Thereby, the first member can be composed of a single member and a single material, and the longitudinal elastic modulus (Young's modulus) and mechanical strength can be made uniform throughout the first member. Therefore, the first member can be more reliably reduced from being damaged by the applied external force, and the external force can be accurately transmitted by the piezoelectric element via the first member.

(Application example 6)
In the force detection device according to the present invention, it is preferable that the longitudinal elastic modulus of the second member is the second longitudinal elastic modulus.
Thereby, the 2nd member can be comprised with a single member and a single material, and can make uniform a longitudinal elastic modulus (Young's modulus) and mechanical strength over the whole 2nd member. Therefore, the second member can be more reliably reduced from being damaged by the applied external force, and the external force can be accurately transmitted by the piezoelectric element via the second member.

(Application example 7)
In the force detection device according to the present invention, it is preferable that the piezoelectric element includes a crystal.
As a result, the force detection device becomes a device that is not easily affected by fluctuations in temperature, and thus can detect the external force accurately.

(Application example 8)
In the force detection device according to the present invention, it is preferable that the piezoelectric element is located inside the pressure detection unit.
As a result, the piezoelectric element is sealed and shielded from the outside air, so that the output charge can be prevented from being unintentionally leaked by moisture or the like.

(Application example 9)
A robot according to the present invention includes an arm,
An end effector provided on the arm;
A force detection device that is provided between the arm and the end effector and detects an external force applied to the end effector;
The force detection device includes a first base, a second base, and a pressure detection unit that is provided between the first base and the second base and includes a piezoelectric element that outputs a signal according to an external force. Prepared,
The accommodating portion includes a first member having a portion in contact with the first base portion, a second member having a portion in contact with the second base portion, and a third member connecting the first member and the second member. Have
A first longitudinal elastic modulus of at least a part of the first member is lower than a third longitudinal elastic modulus of the third member;
The second longitudinal elastic modulus of at least a part of the second member is lower than the third longitudinal elastic modulus of the third member.
Thereby, even when an external force is repeatedly applied to the pressure detection unit, the robot can reduce the damage of the storage unit that stores the piezoelectric element. Therefore, according to such a robot, the external force is accurately detected, and the work by the end effector can be performed appropriately.

It is sectional drawing which shows 1st Embodiment of the force detection apparatus which concerns on this invention. It is a top view of the force detection apparatus shown in FIG. It is a circuit diagram which shows roughly the force detection apparatus shown in FIG. It is sectional drawing which shows schematically the electric charge output element with which the force detection apparatus shown in FIG. 1 is provided. It is the schematic which shows the action state of the force detected with the electric charge output element of the force detection apparatus shown in FIG. It is the figure seen from the arrow D direction in FIG. FIG. 2 is a partially enlarged detail view near a charge output element of the force detection device shown in FIG. 1. It is a figure which shows an example of the single arm robot using the force detection apparatus which concerns on this invention. It is a figure which shows an example of the multi-arm robot using the force detection apparatus which concerns on this invention. It is a figure which shows an example of the electronic component inspection apparatus and component conveyance apparatus using the force detection apparatus which concerns on this invention. It is a figure which shows one example of the electronic component conveying apparatus using the force detection apparatus which concerns on this invention. It is a figure which shows one example of the component processing apparatus using the force detection apparatus which concerns on this invention.

Hereinafter, preferred embodiments of the present invention will be described in detail.
1. FIG. 1 is a cross-sectional view showing a first embodiment of a force detection device according to the present invention, FIG. 2 is a plan view of the force detection device shown in FIG. 1, and FIG. 4 is a circuit diagram schematically showing the force detection device shown, FIG. 4 is a cross-sectional view schematically showing a charge output element included in the force detection device shown in FIG. 1, and FIG. 5 is a force detection shown in FIG. FIG. 6 is a schematic view showing an action state of a force detected by a charge output element of the device, FIG. 6 is a view seen from the direction of arrow D in FIG. 5, and FIG. 7 is a charge of the force detection device shown in FIG. It is a partial enlarged detail view near the output element.

In the following, the upper side in FIG. 1 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.
2 and 5 show an α axis, a β axis, and a γ axis as three axes orthogonal to each other. 1 and 4 show only the γ-axis among the above three axes. The direction parallel to the α (A) axis is “α (A) axis direction”, the direction parallel to the β (B) axis is “β (B) axis direction”, and the direction parallel to the γ (C) axis is “γ”. (C) Axial direction ". A plane defined by the α axis and the β axis is referred to as an “αβ plane”, a plane defined by the β axis and the γ axis is referred to as a “βγ plane”, and a plane defined by the α axis and the γ axis is referred to as “ It is called “αγ plane”. A direction parallel to the αA axis is referred to as “α direction”, a direction parallel to the β axis is referred to as “β direction”, and a direction parallel to the γ axis is referred to as “γ direction”. In the α direction, β direction, and γ direction, the arrow tip side is defined as “+ (positive) side” and the arrow base end side is defined as “− (negative) side”.

The force detection device 1 shown in FIG. 1 has an external force applied to the force detection device 1, that is, a six-axis force (a translational force component in the α, β, and γ axis directions and a rotational force component around the α, β, and γ axes). It has a function to detect.
The force detection device 1 includes a first base (base) 2, a second base (base) 3 that is disposed at a predetermined interval from the first base 2 and faces the first base 2, and a first base 2. The analog circuit board 4 housed (provided) between the first base part 2 and the second base part 3 and the analog circuit board 4 housed (provided) between the first base part 2 and the second base part 3 A digital circuit board 5 connected to the analog circuit board 4, a charge output element (piezoelectric element) 10 that outputs a signal according to an external force, and a package (accommodating part) 60 that accommodates the charge output element 10. Four sensor devices (pressure detectors) 6 and eight pressurizing bolts (fixing members) 71 are provided.

Below, the structure of each part of the force detection apparatus 1 is explained in full detail.
In the following description, as shown in FIG. 2, among the four sensor devices 6, the sensor device 6 located on the right side in FIG. 2 is referred to as “sensor device 6 </ b> A”, and hereinafter “sensor” in order counterclockwise. These are referred to as “device 6B”, “sensor device 6C”, and “sensor device 6D”.

As shown in FIG. 1, the first base (base plate) 2 has a plate-like outer shape, and its planar shape forms a rounded quadrangle. The planar shape of the first base 2 is not limited to the illustrated one, and may be, for example, a circle or a polygon outside a rectangle.
The lower surface 221 of the first base 2 functions as an attachment surface (first attachment surface) for the robot (measurement target) when the force detection device 1 is used while being fixed to the robot, for example.
The first base portion 2 includes a bottom plate 22 and a wall portion 24 erected upward from the bottom plate 22.
The wall portion 24 has an “L” shape, and a convex portion 23 is formed on each of two surfaces facing outward. The top surface (first surface) 231 of each convex portion 23 is a plane perpendicular to the bottom plate 22. Moreover, the convex part 23 is provided with the internal thread 241 screwed together with the pressurizing bolt 71 mentioned later (refer FIG. 2).

As shown in FIG. 1, a second base (cover plate) 3 is arranged so as to face the first base 2 with a predetermined interval.
Similarly to the first base 2, the second base 3 has a plate-like outer shape. The planar shape of the second base portion 3 is preferably a shape corresponding to the planar shape of the first base portion 2. In this embodiment, the planar view shape of the second base portion 3 is the planar view of the first base portion 2. Like the shape, it has a square shape with rounded corners. The second base 3 is preferably large enough to include the first base 2.

An upper surface (second surface) 321 of the second base 3 is attached to an end effector (measurement target) attached to the robot when the force detection device 1 is used, for example, fixed to the robot (second attachment). Function as a surface). Further, the upper surface 321 of the second base 3 and the lower surface 221 of the first base 2 described above are parallel in a natural state where no external force is applied.
The second base 3 includes a top plate 32 and a side wall 33 that is formed at the edge of the top plate 32 and protrudes downward from the edge. An inner wall surface (second surface) 331 of the side wall 33 is a plane perpendicular to the top plate 32. The sensor device 6 is provided between the top surface 231 of the first base 2 and the inner wall surface 331 of the second base 3.

The first base 2 and the second base 3 are connected and fixed by a pressurizing bolt 71. As shown in FIG. 2, there are eight (a plurality) of the pressurizing bolts 71, and two of them are arranged on both sides of each sensor device 6. The number of pressurizing bolts 71 for one sensor device 6 is not limited to two, and may be three or more, for example.
Moreover, it does not specifically limit as a constituent material of the pressurization volt | bolt 71, For example, various resin materials, various metal materials, etc. can be used.
Thus, the first base 2 and the second base 3 connected by the pressurizing bolt 71 form a storage space for storing the sensor devices 6A to 6D, the analog circuit board 4, and the digital circuit board 5. The storage space has a circular or rounded square cross-sectional shape.

As shown in FIG. 1, an analog circuit board 4 connected to the sensor device 6 is provided between the first base 2 and the second base 3.
In the portion of the analog circuit board 4 where the sensor device 6 (specifically, the charge output element 10) is disposed, a hole 41 into which each convex portion 23 of the first base 2 is inserted is formed. The hole 41 is a through hole that penetrates the analog circuit board 4.

Further, as shown in FIG. 2, the analog circuit board 4 is provided with through holes through which the respective pressurizing bolts 71 pass, and a portion (through hole) of the analog circuit board 4 through which the pressurizing bolts 71 pass is provided. A pipe 43 made of an insulating material such as a resin material is fixed by fitting, for example.
As shown in FIG. 3, the analog circuit board 4 connected to the sensor device 6A includes a conversion output circuit 90a that converts the charge Qy1 output from the charge output element 10 of the sensor device 6A into a voltage Vy1, and a charge output. A conversion output circuit 90b that converts the charge Qz1 output from the element 10 into a voltage Vz1 and a conversion output circuit 90c that converts the charge Qx1 output from the charge output element 10 into a voltage Vx1 are provided.

  The analog circuit board 4 connected to the sensor device 6B includes the conversion output circuit 90a that converts the charge Qy2 output from the charge output element 10 of the sensor device 6B into the voltage Vy2, and the charge Qz2 output from the charge output element 10. A conversion output circuit 90b for converting to the voltage Vz2 and a conversion output circuit 90c for converting the charge Qx2 output from the charge output element 10 to the voltage Vx2 are provided.

  The analog circuit board 4 connected to the sensor device 6C includes a conversion output circuit 90a that converts the charge Qy3 output from the charge output element 10 of the sensor device 6C into a voltage Vy3, and the charge Qz3 output from the charge output element 10. A conversion output circuit 90b for converting to the voltage Vz3 and a conversion output circuit 90c for converting the charge Qx3 output from the charge output element 10 to the voltage Vx3 are provided.

  The analog circuit board 4 connected to the sensor device 6D includes a conversion output circuit 90a that converts the charge Qy4 output from the charge output element 10 of the sensor device 6D into a voltage Vy4, and the charge Qz4 output from the charge output element 10. A conversion output circuit 90b for converting to the voltage Vz4 and a conversion output circuit 90c for converting the charge Qx4 output from the charge output element 10 to the voltage Vx4 are provided.

  In addition, as shown in FIG. 1, the analog circuit board 4 is located between the first base 2 and the second base 3 at a position different from the position where the analog circuit board 4 is provided on the first base 2. A supported digital circuit board 5 connected to is provided. As shown in FIG. 3, the digital circuit board 5 includes an AD converter 401 connected to the conversion output circuits (conversion circuits) 90 a, 90 b, and 90 c and an arithmetic unit (arithmetic circuit) 402 connected to the AD converter 401. The external force detection circuit 40 is provided.

The components of the first base 2, the second base 3, and the analog circuit board 4 other than the elements and the wirings, the components of the digital circuit board 5 and the parts other than the wirings, For example, various resin materials and various metal materials can be used.
Moreover, although the 1st base 2 and the 2nd base 3 are respectively comprised by the member in which an external shape makes a plate shape, it is not limited to this, For example, one base is comprised by the member which makes a plate shape, The other base may be configured by a block-shaped member.

Next, the sensor device 6 will be described in detail.
[Sensor device]
As shown in FIGS. 1 and 2, the sensor device 6 </ b> A includes a top surface 231 of one convex portion 23 among the four convex portions 23 of the first base 2, and an inner wall surface 331 facing the top surface 231. It is pinched by. Similar to the sensor device 6A, the sensor device 6B is sandwiched between the top surface 231 of one convex portion 23 different from the above and the inner wall surface 331 facing the top surface 231. Further, the sensor device 6C is sandwiched between the top surface 231 of one convex portion 23 different from the above and the inner wall surface 331 facing the top surface 231. Further, the sensor device 6D is sandwiched between the top surface 231 of one convex portion 23 different from the above and the inner wall surface 331 facing the top surface 231.

  In the following, the direction in which the sensor devices 6A to 6D are sandwiched between the first base 2 and the second base 3 is referred to as “clamping direction SD”. Further, among the sensor devices 6A to 6D, the direction in which the sensor device 6A is clamped is the first clamping direction, the direction in which the sensor device 6B is clamped is the second clamping direction, and the direction in which the sensor device 6C is clamped. The third clamping direction and the direction in which the sensor device 6D is clamped may be referred to as a fourth clamping direction.

In this embodiment, as shown in FIG. 1, the sensor device 6 is provided on the second base 3 (side wall 33) side of the analog circuit board 4, but the sensor device 6 is provided on the analog circuit board 4. It may be provided on the first base 2 side.
As shown in FIG. 2, the sensor device 6 </ b> A and the sensor device 6 </ b> B and the sensor device 6 </ b> C and the sensor device 6 </ b> D are disposed symmetrically with respect to the central axis 271 along the β axis of the first base 2. That is, the sensor devices 6 </ b> A to 6 </ b> D are arranged at equiangular intervals around the center 272 of the first base 2. By arranging the sensor devices 6A to 6D in this way, it is possible to detect the external force without bias.

The arrangement of the sensor devices 6A to 6D is not limited to that shown in the drawing, but the sensor devices 6A to 6D are as far as possible from the center (center 272) of the second base 3 when viewed from the upper surface 321 of the second base 3. It is preferable that they are arranged at spaced positions. Thereby, the external force applied to the force detection apparatus 1 can be detected stably.
Moreover, in this embodiment, although sensor device 6A-6D is mounted in the state which all faced the same direction, direction of sensor device 6A-6D may each differ.
As shown in FIG. 1, the sensor device 6 arranged in this manner includes a charge output element 10 and a package 60 that houses the charge output element 10. In the present embodiment, the sensor devices 6A to 6D have the same configuration.

Hereinafter, the charge output element 10 included in the sensor device 6 will be described in detail. The package that houses the charge output element 10 will be described in detail later.
[Charge output element]
The charge output element 10 has a function of outputting a charge according to an external force applied to the force detection device 1, that is, an external force applied to at least one base of the first base 2 or the second base 3.

In addition, since each charge output element 10 with which the sensor devices 6A-6D are provided has the same configuration, one charge output element 10 will be mainly described.
As shown in FIG. 4, the charge output element 10 included in the sensor device 6 includes a ground electrode layer 11, a first sensor 12, a second sensor 13, and a third sensor 14.

  The first sensor 12 has a function of outputting a charge Qx (any one of the charges Qx1, Qx2, Qx3, and Qx4) according to an external force (shearing force). The second sensor 13 has a function of outputting a charge Qz (charges Qz1, Qz2, Qz3, Qz4) according to an external force (compression / tensile force). The third sensor 14 outputs a charge Qy (charges Qy1, Qy2, Qy3, Qy4) according to an external force (shearing force).

In the charge output element 10 included in the sensor device 6, the ground electrode layer 11 and the sensors 12, 13, and 14 are alternately stacked in parallel. Hereinafter, this stacked direction is referred to as “stacked direction LD”. This stacking direction LD is a direction orthogonal to the normal line NL _{2 of the} upper surface 321 (or the normal line NL _{1 of the} lower surface 221). The stacking direction LD is parallel to the sandwiching direction SD.
The shape of the charge output element 10 is not particularly limited, but in the present embodiment, the charge output element 10 has a quadrangular shape when viewed from the direction perpendicular to the inner wall surface 331 of each side wall 33. In addition, as another external shape of each electric charge output element 10, other polygons, such as a pentagon, circle, an ellipse, etc. are mentioned, for example.

Hereinafter, the ground electrode layer 11, the first sensor 12, the second sensor 13, and the third sensor 14 will be described in detail.
The ground electrode layer 11 is an electrode grounded to the ground (reference potential point). Although the material which comprises the ground electrode layer 11 is not specifically limited, For example, gold | metal | money, titanium, aluminum, copper, iron, or an alloy containing these is preferable. Among these, it is particularly preferable to use stainless steel which is an iron alloy. The ground electrode layer 11 made of stainless steel has excellent durability and corrosion resistance.

The first sensor 12 has an external force (shearing force) in the first detection direction orthogonal to the stacking direction LD (first clamping direction), that is, in the same direction as the direction of the normal line NL ₂ (normal line NL ₁ ). Accordingly, it has a function of outputting a charge Qx. That is, the first sensor 12 is configured to output a positive charge or a negative charge according to an external force.
The first sensor 12 includes a first piezoelectric layer (first detection plate) 121, a second piezoelectric layer (first detection plate) 123 provided to face the first piezoelectric layer 121, and The output electrode layer 122 is provided between the first piezoelectric layer 121 and the second piezoelectric layer 123.
The first piezoelectric layer 121 is composed of a Y-cut quartz plate and has an x-axis, a y-axis, and a z-axis that are crystal axes orthogonal to each other. The y axis is an axis along the thickness direction of the first piezoelectric layer 121, the x axis is an axis along the depth direction in FIG. 4, and the z axis is the vertical direction in FIG. Axis along.

In the following description, it is assumed that the tip side of each of the illustrated arrows is “+ (positive)” and the base end side is “− (negative)”. A direction parallel to the x-axis is referred to as an “x-axis direction”, a direction parallel to the y-axis is referred to as a “y-axis direction”, and a direction parallel to the z-axis is referred to as a “z-axis direction”. The same applies to a second piezoelectric layer 123, a third piezoelectric layer 131, a fourth piezoelectric layer 133, a fifth piezoelectric layer 141, and a sixth piezoelectric layer 143 described later.
The first piezoelectric layer 121 made of quartz has excellent characteristics such as a wide dynamic range, high rigidity, high natural frequency, and high load resistance. Further, the Y-cut quartz plate generates an electric charge with respect to an external force (shearing force) along the surface direction.

  When an external (shearing force) force along the positive direction of the x-axis is applied to the surface of the first piezoelectric layer 121, electric charges are induced in the first piezoelectric layer 121 due to the piezoelectric effect. Is done. As a result, positive charges gather near the surface of the first piezoelectric layer 121 on the output electrode layer 122 side, and negative charges gather near the surface of the first piezoelectric layer 121 on the ground electrode layer 11 side. Similarly, when an external force along the negative direction of the x-axis is applied to the surface of the first piezoelectric layer 121, negative charges are generated near the surface of the first piezoelectric layer 121 on the output electrode layer 122 side. As a result, positive charges are collected in the vicinity of the surface of the first piezoelectric layer 121 on the ground electrode layer 11 side.

The second piezoelectric layer 123 is also composed of a Y-cut quartz plate and has an x-axis, a y-axis, and a z-axis that are crystal axes orthogonal to each other. The y axis is an axis along the thickness direction of the second piezoelectric layer 123, the x axis is an axis along the depth direction in FIG. 4, and the z axis is the vertical direction in FIG. Axis along.
Similarly to the first piezoelectric layer 121, the second piezoelectric layer 123 made of quartz has excellent characteristics such as a wide dynamic range, high rigidity, high natural frequency, high load resistance, and the like. By being a cut quartz plate, an electric charge is generated with respect to an external force (shearing force) along the surface direction.

  When an external force (shearing force) along the positive direction of the x-axis is applied to the surface of the second piezoelectric layer 123, electric charges are induced in the second piezoelectric layer 123 due to the piezoelectric effect. The As a result, positive charges are collected in the vicinity of the surface of the second piezoelectric layer 123 on the output electrode layer 122 side, and negative charges are collected in the vicinity of the surface of the second piezoelectric layer 123 on the ground electrode layer 11 side. Similarly, when an external force along the negative direction of the x-axis is applied to the surface of the second piezoelectric layer 123, negative charges are generated near the surface of the second piezoelectric layer 123 on the output electrode layer 122 side. As a result, positive charges are collected near the surface of the second piezoelectric layer 123 on the ground electrode layer 11 side.

  The output electrode layer 122 has a function of outputting positive charges or negative charges generated in the first piezoelectric layer 121 and the second piezoelectric layer 123 as charges Qx. As described above, when an external force along the positive direction of the x-axis is applied to the surface of the first piezoelectric layer 121 or the surface of the second piezoelectric layer 123, a positive charge is present in the vicinity of the output electrode layer 122. Gather. As a result, a positive charge Qx is output from the output electrode layer 122. On the other hand, when an external force along the negative direction of the x axis is applied to the surface of the first piezoelectric layer 121 or the surface of the second piezoelectric layer 123, negative charges are collected in the vicinity of the output electrode layer 122. As a result, a negative charge Qx is output from the output electrode layer 122.

  The first sensor 12 includes the first piezoelectric layer 121 and the second piezoelectric layer 123 because the first piezoelectric layer 121 and the second piezoelectric layer 123 have the same structure. Compared with the case where only one of them and the output electrode layer 122 are configured, the positive charge or the negative charge collected near the output electrode layer 122 can be increased. As a result, the charge Qx output from the output electrode layer 122 can be increased. The same applies to the second sensor 13 and the third sensor 14 described later.

  In addition, the size of the output electrode layer 122 is preferably equal to or greater than the size of the first piezoelectric layer 121 and the second piezoelectric layer 123. When the output electrode layer 122 is smaller than the first piezoelectric layer 121 or the second piezoelectric layer 123, a part of the first piezoelectric layer 121 or the second piezoelectric layer 123 is connected to the output electrode layer 122. Do not touch. Therefore, some of the charges generated in the first piezoelectric layer 121 or the second piezoelectric layer 123 may not be output from the output electrode layer 122. As a result, the charge Qx output from the output electrode layer 122 decreases. The same applies to output electrode layers 132 and 142 described later.

The second sensor 13 has a function of outputting a charge Qz according to an external force (compression / tensile force). That is, the second sensor 13 is configured to output a positive charge according to the compressive force and output a negative charge according to the tensile force.
The second sensor 13 includes a third piezoelectric layer (third substrate) 131, a fourth piezoelectric layer (third substrate) 133 provided to face the third piezoelectric layer 131, The output electrode layer 132 is provided between the third piezoelectric layer 131 and the fourth piezoelectric layer 133.

The third piezoelectric layer 131 is composed of an X-cut quartz plate and has an x axis, a y axis, and a z axis that are orthogonal to each other. The x-axis is an axis along the thickness direction of the third piezoelectric layer 131, the y-axis is an axis along the vertical direction in FIG. 4, and the z-axis is the depth direction of the page in FIG. Axis along.
When a compressive force parallel to the x-axis is applied to the surface of the third piezoelectric layer 131, electric charges are induced in the third piezoelectric layer 131 due to the piezoelectric effect. As a result, positive charges gather near the surface of the third piezoelectric layer 131 on the output electrode layer 132 side, and negative charges gather near the surface of the third piezoelectric layer 131 on the ground electrode layer 11 side. Similarly, when a tensile force parallel to the x-axis is applied to the surface of the third piezoelectric layer 131, negative charges gather near the surface of the third piezoelectric layer 131 on the output electrode layer 132 side, Positive charges collect near the surface of the third piezoelectric layer 131 on the ground electrode layer 11 side.

The fourth piezoelectric layer 133 is also composed of an X-cut quartz plate and has an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The x-axis is an axis along the thickness direction of the fourth piezoelectric layer 133, the y-axis is an axis along the vertical direction in FIG. 4, and the z-axis is a depth direction in the drawing of FIG. Axis along.
When a compressive force parallel to the x-axis is applied to the surface of the fourth piezoelectric layer 133, electric charges are induced in the fourth piezoelectric layer 133 due to the piezoelectric effect. As a result, positive charges are collected in the vicinity of the surface of the fourth piezoelectric layer 133 on the output electrode layer 132 side, and negative charges are collected in the vicinity of the surface of the fourth piezoelectric layer 133 on the ground electrode layer 11 side. Similarly, when a tensile force parallel to the x-axis is applied to the surface of the fourth piezoelectric layer 133, negative charges gather near the surface of the fourth piezoelectric layer 133 on the output electrode layer 132 side, Positive charges are collected near the surface of the fourth piezoelectric layer 133 on the ground electrode layer 11 side.

  The output electrode layer 132 has a function of outputting positive charges or negative charges generated in the third piezoelectric layer 131 and the fourth piezoelectric layer 133 as charges Qz. As described above, when a compressive force parallel to the x-axis is applied to the surface of the third piezoelectric layer 131 or the surface of the fourth piezoelectric layer 133, positive charges are collected in the vicinity of the output electrode layer 132. . As a result, a positive charge Qz is output from the output electrode layer 132. On the other hand, when a tensile force parallel to the x axis is applied to the surface of the third piezoelectric layer 131 or the surface of the fourth piezoelectric layer 133, negative charges are collected in the vicinity of the output electrode layer 132. As a result, a negative charge Qz is output from the output electrode layer 132.

The third sensor 14 is orthogonal to the stacking direction LD (second clamping direction), and has a second detection direction that intersects the first detection direction of the external force that acts when the first sensor 12 outputs the charge Qx. It has a function of outputting a charge Qx according to an external force (shearing force). That is, the third sensor 14 is configured to output a positive charge or a negative charge according to an external force.
The third sensor 14 includes a fifth piezoelectric layer (second detection plate) 141, a sixth piezoelectric layer (second detection plate) 143 provided to face the fifth piezoelectric layer 141, and The output electrode layer 142 is provided between the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143.

The fifth piezoelectric layer 141 is composed of a Y-cut quartz plate and has an x-axis, a y-axis, and a z-axis that are crystal axes orthogonal to each other. The y-axis is an axis along the thickness direction of the fifth piezoelectric layer 141, the x-axis is an axis along the vertical direction in FIG. 4, and the z-axis is a depth direction in the drawing of FIG. Axis along.
The fifth piezoelectric layer 141 made of quartz has excellent characteristics such as a wide dynamic range, high rigidity, high natural frequency, and high load resistance. Further, the Y-cut quartz plate generates an electric charge with respect to an external force (shearing force) along the surface direction.

  When an external force along the positive direction of the x axis is applied to the surface of the fifth piezoelectric layer 141, electric charges are induced in the fifth piezoelectric layer 141 by the piezoelectric effect. As a result, positive charges gather near the surface of the fifth piezoelectric layer 141 on the output electrode layer 142 side, and negative charges gather near the surface of the fifth piezoelectric layer 141 on the ground electrode layer 11 side. Similarly, when an external force along the negative x-axis direction is applied to the surface of the fifth piezoelectric layer 141, negative charges are generated near the surface of the fifth piezoelectric layer 141 on the output electrode layer 142 side. As a result, positive charges are collected in the vicinity of the surface of the fifth piezoelectric layer 141 on the ground electrode layer 11 side.

The sixth piezoelectric layer 143 is also composed of a Y-cut quartz plate and has an x-axis, a y-axis, and a z-axis that are crystal axes orthogonal to each other. The y-axis is an axis along the thickness direction of the second piezoelectric layer 123, the x-axis is an axis along the vertical direction in FIG. 4, and the z-axis is a depth direction in the drawing of FIG. Axis along.
Similarly to the fifth piezoelectric layer 141, the sixth piezoelectric layer 143 made of quartz also has excellent characteristics such as a wide dynamic range, high rigidity, high natural frequency, and high load resistance. By being a cut quartz plate, an electric charge is generated with respect to an external force (shearing force) along the surface direction.

  When an external force along the positive direction of the x-axis is applied to the surface of the sixth piezoelectric layer 143, electric charges are induced in the sixth piezoelectric layer 143 due to the piezoelectric effect. As a result, positive charges are collected in the vicinity of the surface of the sixth piezoelectric layer 143 on the output electrode layer 142 side, and negative charges are collected in the vicinity of the surface of the sixth piezoelectric layer 143 on the ground electrode layer 11 side. Similarly, when an external force along the negative x-axis direction is applied to the surface of the sixth piezoelectric layer 143, negative charges are generated near the surface of the sixth piezoelectric layer 143 on the output electrode layer 142 side. The positive charges are collected near the surface of the sixth piezoelectric layer 143 on the side of the ground electrode layer 11.

  In the charge output element 10, the x-axis of the first piezoelectric layer 121 and the second piezoelectric layer 123, and the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143 when viewed from the stacking direction LD. The x-axis of each intersects. Further, when viewed from the stacking direction LD, each z axis of the first piezoelectric layer 121 and the second piezoelectric layer 123, and each z axis of the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143. And intersect.

  The output electrode layer 142 has a function of outputting positive charges or negative charges generated in the fifth piezoelectric layer 141 and the sixth piezoelectric layer 143 as charges Qy. As described above, when an external force along the positive direction of the x axis is applied to the surface of the fifth piezoelectric layer 141 or the surface of the sixth piezoelectric layer 143, a positive charge is generated in the vicinity of the output electrode layer 142. Gather. As a result, positive charge Qy is output from the output electrode layer 142. On the other hand, when an external force along the negative x-axis direction is applied to the surface of the fifth piezoelectric layer 141 or the surface of the sixth piezoelectric layer 143, negative charges are collected in the vicinity of the output electrode layer 142. As a result, a negative charge Qy is output from the output electrode layer 142.

  As described above, in the charge output element 10, the first sensor 12, the second sensor 13, and the third sensor 14 are stacked so that the force detection directions of the sensors are orthogonal to each other. Thereby, each sensor can induce an electric charge according to force components orthogonal to each other. Therefore, the charge output element 10 can output three charges Qx, Qy, and Qz according to each external force along the x axis, the y axis, and the z axis.

  Further, as described above, the charge output element 10 can output the charge Qz, but the force detection device 1 preferably does not use the charge Qz when obtaining each external force. That is, the force detection device 1 is preferably used as a device that detects a shearing force without detecting compression or tensile force. Thereby, the noise component resulting from the temperature change of the force detection apparatus 1 can be reduced.

  Here, as a reason why it is preferable not to use the charge Qz at the time of detecting an external force, a case where the force detection device 1 is used for an industrial robot having an arm to which an end effector is attached will be described as an example. In this case, the first base 2 or the second base 3 is heated and thermally expanded and deformed by heat transfer from a heat source such as a motor provided in the arm or the end effector. Due to this deformation, the pressure applied to the charge output element 10 changes from a predetermined value. This is because the change in the pressure applied to the charge output element 10 is included as a noise component due to the temperature change of the force detection device 1 to the extent that the charge Qz is significantly affected.

For this reason, the charge output element 10 detects only the charges Qx and Qy generated by applying a shearing force without using the charge Qz generated by applying a compression or tensile force. It can be made less susceptible to fluctuations.
The output charge Qz is used for adjusting the pressurization by the pressurization bolt 71, for example.

In the present embodiment, the piezoelectric layers described above (the first piezoelectric layer 121, the second piezoelectric layer 123, the third piezoelectric layer 131, the fourth piezoelectric layer 133, and the fifth piezoelectric layer). The body layer 141 and the sixth piezoelectric layer 143) are all configured using quartz, but each piezoelectric layer may be configured using a piezoelectric material other than quartz. Examples of piezoelectric materials other than quartz include topaz, barium titanate, lead titanate, lead zirconate titanate (PZT: Pb (Zr, Ti) O ₃ ), lithium niobate, lithium tantalate, and the like. However, each piezoelectric layer preferably has a configuration using quartz. This is because the piezoelectric layer made of quartz has excellent characteristics such as a wide dynamic range, high rigidity, high natural frequency, and high load resistance.
As described above, the first base 2 and the second base 3 are fixed by the pressurizing bolt 71.

  The fixing with the pressurizing bolt 71 is carried out in such a manner that the pressurizing bolt 71 is protruded from the side wall 33 side of the second base portion 3 with the sensor devices 6 disposed between the top surface 231 and the inner wall surface 331. The male screw (not shown) of the pressurizing bolt 71 is screwed into a female screw 241 formed on the first base 2. In this way, the charge output element 10 is applied with a predetermined pressure, that is, a pressurized pressure, by the first base 2 and the second base 3 together with the package 60 that houses the charge output element 10.

  The first base 2 and the second base 3 are fixed by two pressurizing bolts 71 so that a predetermined amount of displacement (movement) is possible. By fixing the first base 2 and the second base 3 so that a predetermined amount can be displaced from each other, an external force (shearing force) is applied to the force detection device 1 so that a shearing force is applied to the charge output element 10. When acting, the frictional force between the layers constituting the charge output element 10 is surely generated, so that the charge can be reliably detected. Further, the pressurizing direction by each pressurizing bolt 71 is a direction parallel to the stacking direction LD.

  As shown in FIG. 5, in the charge output element 10 having such a configuration, the stacking direction LD is inclined at an inclination angle ε with respect to the α axis. Specifically, the x axis of the first sensor 12 and the z axis of the third sensor 14 are inclined at an inclination angle ε with respect to the α axis. Therefore, in the present embodiment, the α axis is a bisector that bisects the angle formed by the charge output element 10 of the sensor device 6A and the charge output element 10 of the sensor device 6B.

  As shown in FIG. 6, each charge output element 10 has an angle η of 0 ° ≦ η <, where η is an angle formed by the x-axis of the first sensor 12 and the bottom plate 22 of the first base 2. It is allowed to tilt to the extent that 90 ° is satisfied. 6 is a view seen from the direction of arrow D in FIG. 5. The charge output element 10 when tilted at an angle η with respect to the α axis (the lower surface 221 of the bottom plate 22) is a virtual line (two-dot chain line). ).

Next, the conversion output circuit 90a, the conversion output circuit 90b, and the conversion output circuit 90c included in each analog circuit board 4 will be described in detail.
[Conversion output circuit]
As shown in FIG. 3, each conversion output circuit 90c converts any one of the charges Qx1 to Qx4 (charge Qx) into any one of the voltages Vx1 to Vx4 (typically referred to as “voltage Vx”). The circuit 90b converts any one of the charges Qz1 to Qz4 (charge Qz) into one of the voltages Vz1 to Vz4 (typically referred to as “voltage Vzy”), and each conversion output circuit 90a converts any of the charges Qy1 to Qy4. Or (charge Qy) is converted into one of voltages Vy1 to Vy4 (typically referred to as “voltage Vy”).

Hereinafter, the configuration and the like of the conversion output circuits 90a, 90b, and 90c will be described in detail. Since the conversion output circuits 90a, 90b, and 90c have the same configuration, the conversion output circuit 90c will be representatively described below. .
As shown in FIG. 3, the conversion output circuit 90c has a function of converting the charge Qx output from the charge output element 10 into a voltage Vx and outputting the voltage Vx. The conversion output circuit 90 c includes an operational amplifier 91, a capacitor 92, and a switching element 93. The first input terminal (minus input) of the operational amplifier 91 is connected to the output electrode layer 122 of the charge output element 10, and the second input terminal (plus input) of the operational amplifier 91 is grounded to the ground (reference potential point). ing. The output terminal of the operational amplifier 91 is connected to the external force detection circuit 40. The capacitor 92 is connected between the first input terminal and the output terminal of the operational amplifier 91. The switching element 93 is connected between the first input terminal and the output terminal of the operational amplifier 91, and is connected in parallel with the capacitor 92. The switching element 93 is connected to a drive circuit (not shown), and the switching element 93 performs a switching operation in accordance with an on / off signal from the drive circuit.

  When the switching element 93 is off, the charge Qx output from the charge output element 10 is stored in the capacitor 92 having the capacitance C1, and is output to the external force detection circuit 40 as the voltage Vx. Next, when the switching element 93 is turned on, both terminals of the capacitor 92 are short-circuited. As a result, the charge Qx stored in the capacitor 92 is discharged to 0 coulomb, and the voltage V output to the external force detection circuit 40 is 0 volt. When the switching element 93 is turned on, the conversion output circuit 90c is reset. Note that the voltage Vx output from the ideal conversion output circuit 90 c is proportional to the amount of charge Qx output from the charge output element 10.

  The switching element 93 is, for example, a MOSFET (Metal Oxide Semiconductor Field Effect Transistor), a semiconductor switch, a MEMS switch, or the like. Since such a switch is smaller and lighter than a mechanical switch (mechanical switch), it is advantageous for reducing the size and weight of the force detection device 1. Hereinafter, a case where a MOSFET is used as the switching element 93 will be described as a representative example. As shown in FIG. 3, such a switch is mounted on the conversion output circuit 90 c and the conversion output circuits 90 a and 90 b, but can also be mounted on the AD converter 401.

  The switching element 93 has a drain electrode, a source electrode, and a gate electrode. One of the drain electrode and the source electrode of the switching element 93 is connected to the first input terminal of the operational amplifier 91, and the other of the drain electrode and the source electrode is connected to the output terminal of the operational amplifier 91. The gate electrode of the switching element 93 is connected to a drive circuit (not shown).

  The same drive circuit may be connected to the switching element 93 of each of the conversion output circuits 90a, 90b, and 90c, or different drive circuits may be connected to each other. Each of the switching elements 93 receives an on / off signal that is all synchronized from the drive circuit. As a result, the operations of the switching elements 93 of the conversion output circuits 90a, 90b, and 90c are synchronized. That is, the on / off timings of the switching elements 93 of the conversion output circuits 90a, 90b, and 90c coincide with each other.

Next, the external force detection circuit 40 provided in the digital circuit board 5 will be described in detail.
[External force detection circuit]
The external force detection circuit 40 includes voltages Vy1, Vy2, Vy3, and Vy4 output from each conversion output circuit 90a, voltages Vz1, Vz2, Vz3, and Vz4 output from each conversion output circuit 90b, and each conversion output circuit 90c. Based on the output voltages Vx1, Vx2, Vx3, and Vx4, it has a function of detecting the applied external force.
The external force detection circuit 40 includes an AD converter 401 connected to the conversion output circuits (conversion circuits) 90 a, 90 b, and 90 c, and an arithmetic unit (arithmetic circuit) 402 connected to the AD converter 401.

The AD converter 401 has a function of converting the voltages Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, and Vz4 from analog signals to digital signals. The voltages Vx 1, Vy 1, Vz 1, Vx 2, Vy 2, Vz 2, Vx 3, Vy 3, Vz 3, Vx 4, Vy 4, Vz 4 that are digitally converted by the AD converter 401 are input to the arithmetic unit 402.
The arithmetic unit 402 performs various processes such as correction for eliminating the difference in sensitivity between the conversion output circuits 90a, 90b, and 90c on the digitally converted voltages Vx, Vy, and Vz. The arithmetic unit 402 outputs three signals proportional to the accumulated amounts of the charges Qx, Qy, and Qz output from the charge output element 10.

<Force detection in the α-axis, β-axis, and γ-axis directions (force detection method)>
As described above, the charge output element 10 includes a stacking direction LD and the clamping direction SD is parallel to the first base portion 2 (the bottom plate 22), and to be perpendicular to the normal line NL ₂ of the upper surface 321 It is in an installed state (see FIG. 1).
The α-axis direction force F _A , the β-axis direction force F _B, and the γ-axis direction force F _C can be expressed by the following equations (1), (2), and (3), respectively. “Fx _1-1 ” in the formulas (1) to (3) is a force applied in the x-axis direction of the first sensor 12 (first detection plate) of the sensor device 6A, that is, a charge Qx1 (first output). ), And “fx _1-2 ” is obtained from the force applied in the x-axis direction of the third sensor 14 (second detection plate), that is, the charge Qy1 (second output). It is power. “Fx _2-1 ” is a force (third output) applied in the x-axis direction of the first sensor 12 (first detection plate) of the sensor device 6B, that is, a force obtained from the charge Qx2. , “Fx _2-2 ” is a force applied in the x-axis direction of the third sensor 14 (second detection plate), that is, a force obtained from the charge Qy2 (fourth output).

F _A = fx _1-1 · cosη · cosε−fx _1-2 · sinη · cosε
-Fx _2-1 · cos η · cos ε + fx _2-2 · sin η · cos ε (1)
F _B = −fx _1-1 · cosη · sinε + fx _1-2 · sinη · sinε
−fx ₂₋₁ · cosη · sinε + fx ₂₋₂ · sinη · sinε (2)
F _C = −fx _1-1 · sin η−fx _1-2 · cos η−fx _2-1 · sin η
-Fx _2-2 · cosη (3)

For example, in the case of the force detection device 1 configured as shown in FIGS. 1 and 2, ε is 45 ° and η is 0 °. Substituting 45 ° for ε and substituting 0 ° for η in the equations (1) to (3), the forces F _{A to} F _C are respectively
F _A = fx _1-1 / √2-fx _2-1 / √2
F _B = −fx _1-1 / √2-fx _2-1 / √2
F _C = −fx _1-2 −fx _2-2
It becomes.

As described above, in the force detection device 1, when detecting the forces F _{A to} F _C , the second sensor 13 (charge Qz) that is easily affected by temperature fluctuations, that is, noise is easily used, is used. Detection can be performed. Therefore, the force detection device 1 is less affected by temperature fluctuations, and is a device reduced to, for example, 1/20 or less of the conventional force detection device. As a result, the force detection device 1 can accurately and stably detect the forces F _A to F even under an environment where the temperature change is severe.
Note that the translational forces F _{A to} F _C and the rotational forces M _{A to} M _C of the entire force detection device 1 in the embodiment are calculated based on the charges from the charge output elements 10. In this embodiment, four charge output elements 10 are provided. However, if at least three charge output elements 10 are provided, the rotational forces M _{A to} M _C can be calculated.

  Moreover, the force detection apparatus 1 having such a configuration has a total weight lighter than 1 kg. Thereby, since the load concerning the wrist to which the weight of the force detection device 1 is attached can be reduced and the capacity of the actuator that drives the wrist can be reduced, the wrist can be designed to be small. Furthermore, the weight of the force detection device 1 is lighter than 20% of the maximum capacity that the robot arm can carry. Thereby, control of the robot arm to which the weight of the force detection device 1 is attached can be facilitated.

Further, the present invention is characterized by the structure of the package 60 that houses the charge output element 10 as described above. Hereinafter, the package 60 will be described in detail.
FIG. 7 is an enlarged longitudinal sectional view of the sensor device 6. In FIG. 7, the analog circuit board 4 is not shown. For convenience of explanation, the upper side in FIG. 7 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.

[package]
As shown in FIG. 7, the package 60 connects a bottom plate member (first member) 61, a lid member (second member) 62 disposed opposite to the bottom plate member 61, and the bottom plate member 61 and the lid member 62. And a side wall member (third member) 67. By such a package 60, the charge output element 10 is hermetically sealed and cut off from the outside air, so that the output charge is prevented from being unintentionally leaked by moisture or the like.
The bottom plate member 61 has a flat plate shape and is provided in contact with the top surface 231 of the convex portion 23 of the first base 2. The bottom plate member 61 has a function of transmitting an external force applied to the first base 2 to the charge output element 10.

The plan view shape of the bottom plate member 61 is a shape corresponding to the top surface 231 of the convex portion 23, and is formed so that the plane area is slightly larger than the area of the top surface 231. Accordingly, the outer edge portion 611 of the bottom plate member 61 protrudes from the convex portion 23 toward the side in a state where the sensor device 6 is fixed between the first base portion 2 and the second base portion 3.
The plane area of the bottom plate member 61 is preferably large enough to contain the charge output element 10 as shown in FIG. 7, but it may be smaller than the charge output element 10 or the same size. It may be.

Further, in the present embodiment, the planar view shape of the bottom plate member 61 is a quadrangle, but may be a polygon other than the quadrangle, a circle, an ellipse, or the like. Moreover, the corner | angular part of the baseplate member 61 may be roundish, and may be notched diagonally.
A side wall member 67 having a quadrangular cylindrical shape is joined to the outer edge portion 611 of the bottom plate member 61. The side wall member 67 and the bottom plate member 61 define a recess 65, and the charge output element 10 is disposed in the recess 65 so as to be separated from the inner wall surface of the side wall member 67.

The side wall member 67 is joined to the bottom plate member 61, and the upper side portion 672 having a through hole provided on the lower side portion 671 and having a transverse area larger than the transverse area of the through hole of the lower side portion 671. And have. Therefore, in a state where the lower part 671 and the upper part 672 are joined, a part of the upper surface of the lower part 671 is exposed in the through hole of the upper part 672.
On the inner wall surface of the lower side portion 671, a step portion 673 formed by increasing the cross-sectional area of the through hole in the middle of the height direction is provided. The bottom plate member 61 is joined to the stepped portion 673 so as to be separated from the inner wall surface of the side wall member 67 (lower side portion 671).

  In addition, four terminals 66 are provided at predetermined positions of the lower portion 671 across the upper surface, outer wall surface, and lower surface of the lower portion 671. The upper portion 662 of the terminal 66 is exposed in the through hole (concave portion 65) of the upper portion 672, and is joined to the connection portion 64 at the upper portion 662. As a result, the terminal 66 is electrically connected to the charge output element 10 via the connection portion 64. The lower portion 661 of the terminal 66 is exposed to the outside from the lower surface of the side wall member 67, and is joined to the analog circuit board 4 via a wiring (not shown).

  The terminal 66 only needs to have conductivity. For example, the terminal 66 is configured by laminating each film of nickel, gold, silver, copper, or the like on a metallized layer (underlayer) such as chromium or tungsten. Can do. Moreover, although the connection part 64 can be formed with conductive pastes, such as Ag paste, Cu paste, Au paste, etc., since it is easy to obtain and is excellent in handleability, it forms with Ag paste. It is preferable.

A lid member 62 is joined to the upper surface of the side wall member 67 (upper portion 672) via a sealing 63 made of, for example, gold, titanium, aluminum, copper, iron, or an alloy containing these. Yes.
The lid member 62 is provided in contact with the second base portion 3 and has a function of transmitting an external force applied to the second base portion 3 to the charge output element 10.

  The lid member 62 is formed to have a plate-like shape as a whole by bending (or bending) a flat plate-like member so that the central portion 625 protrudes from the outer peripheral portion 626 toward the second base portion 3. Has been. With such a configuration, the central portion 625 of the lid member 62 is in contact with the inner wall surface 331 of the second base 3. In addition, although the planar view shape of the center part 625 is not specifically limited, In this embodiment, it has comprised the shape corresponding to the planar view shape of the electric charge output element 10, ie, the rectangle.

The thicknesses of the bottom plate member 61 and the lid member 62 may be different or the same.
In the package 60 having such a configuration, the longitudinal elastic modulus (first longitudinal elastic modulus) of at least a part of the bottom plate member 61 and the longitudinal elastic modulus (second longitudinal elastic modulus) of at least a part of the lid member 62 are respectively It is lower than the longitudinal elastic modulus (third longitudinal elastic modulus) of the side wall member 67.

  For this reason, the bottom plate member 61 and the lid member 62 are more easily elastically deformed than the side wall member 67 when stress is applied. Therefore, even if the external force is repeatedly applied to the first base portion 2 and the second base portion 3, the bottom plate member 61 and the lid member 62 can be deformed according to the external force. Therefore, it is possible to reduce the damage of the bottom plate member 61 and the lid member 62, and thus the force detection device 1 is excellent in reliability over a long period of time. Further, when the sensor device 6 is fixed between the first base portion 2 and the second base portion 3 with the pressurizing bolt 71, more pressure than necessary is applied to the bottom plate member 61 and the lid member 62 by tightening the pressurizing bolt 71. However, it is possible to reduce the damage of the bottom plate member 61 and the lid member 62.

  Further, as described above, the charge output element 10 and the bottom plate member 61 are provided apart from the inner wall surface of the side wall member 67. For this reason, even when the charge output element 10 and the bottom plate member 61 are deformed, contact with the side wall member 67 can be avoided. Thereby, damage to the charge output element 10 and the bottom plate member 61 can also be reduced. From this point of view, the force detection device 1 is excellent in reliability over a long period of time.

  Further, only a part of the bottom plate member 61 (particularly, only a part in contact with the convex portion 23) may have the first longitudinal elastic modulus, but may have the first longitudinal elastic modulus over the whole. preferable. As a result, the bottom plate member 61 can be composed of a single member and a single material, and the longitudinal elastic modulus and the mechanical strength can be made uniform over the entire bottom plate member 61. For this reason, the bottom plate member 61 is more reliably reduced from being damaged by the external force applied to the first base portion 2, and the external force can be accurately transmitted to the charge output element 10 via the bottom plate member 61. .

  A part of the lid member 62 (particularly, only the central portion 625) may have the second longitudinal elastic modulus, but preferably has the second longitudinal elastic modulus over the entirety. As a result, the lid member 62 can be composed of a single member and a single material, and the longitudinal elastic modulus and the mechanical strength can be made uniform throughout the lid member 62. In particular, the lid member 62 has a shape (dish shape) in which the central portion 625 and the outer peripheral portion 626 are connected by an inclined portion. Therefore, if the lid member 62 is formed of a single member and a single material, the lid member 62 is joined to each other. A sudden change in mechanical strength at the portion can be reduced. For this reason, the lid member 62 can be more reliably reduced from being damaged by the external force applied to the second base 3 and can be accurately transmitted to the charge output element 10 via the lid member 62. .

  The difference between the first longitudinal elastic modulus and the second longitudinal elastic modulus is preferably 1/10 or less of the first longitudinal elastic modulus, more preferably 1/20 or less, and 30 minutes. More preferably, it is 1 or less. Thereby, it is possible to avoid stress concentration on only one of the bottom plate member 61 and the lid member 62. Therefore, it is possible to more reliably reduce the damage to the bottom plate member 61 and the lid member 62 by dispersing the external force applied to the first base 2 and the second base 3.

  Specifically, the first longitudinal elastic modulus is preferably 50 GPa or more and 300 GPa or less, more preferably 100 GPa or more and 250 GPa or less, and further preferably 120 GPa or more and 200 GPa or less. If the first longitudinal elastic modulus is within the above range, the bottom plate member 61 has moderate rigidity and efficiently elastically deforms. For this reason, even if the external force is repeatedly applied to the 1st base 2, the baseplate member 61 can deform | transform more effectively according to the external force. Therefore, the bottom plate member 61 can be more reliably reduced from being damaged by the external force applied to the first base 2, and the external force can be accurately transmitted to the charge output element 10 through the bottom plate member 61.

  The second longitudinal elastic modulus is preferably 50 GPa or more and 300 GPa or less, more preferably 100 GPa or more and 250 GPa or less, and further preferably 120 GPa or more and 200 GPa or less. When the second longitudinal elastic modulus is within the above range, the lid member 62 has an appropriate rigidity and efficiently elastically deforms. For this reason, even if the external force is repeatedly applied to the second base 3, the lid member 62 can be more accurately deformed according to the external force. Therefore, the lid member 62 is more reliably reduced from being damaged by the external force applied to the second base portion 3, and the external force can be accurately transmitted to the charge output element 10 via the lid member 62.

The third longitudinal elastic modulus is preferably 200 GPa or more and 500 GPa or less, more preferably 250 GPa or more and 480 GPa or less, and further preferably 300 GPa or more and 450 GPa or less. If the third longitudinal elastic modulus is within the above range, the side wall member 67 has sufficient rigidity, so that the mechanical strength of the entire package 60 can be sufficiently secured. For this reason, even if an external force is repeatedly applied, damage due to deformation of the package 60 is less likely to occur, and the charge output element 10 accommodated therein can be more reliably protected.
The third longitudinal elastic modulus refers to the longitudinal elastic modulus of the entire side wall member 67 including a plurality of members.

  The thermal expansion coefficients of the bottom plate member 61, the lid member 62, and the side wall member 67 are as close as possible to the thermal expansion coefficients of the piezoelectric layers 121, 123, 131, 133, 141, and 143 included in the charge output element 10, respectively. Is preferred. Thus, even when the piezoelectric layers 121, 123, 131, 133, 141, and 143 are expanded or contracted due to temperature changes, the bottom plate member 61, the lid member 62, and the side wall member 67 are approximately the same as the piezoelectric layers. Will expand or contract. Therefore, the piezoelectric layers 121, 123, 131, 133, 141, and 143 are further reduced from the occurrence of compressive stress or tensile stress due to the difference in the degree of thermal deformation between the bottom plate member 61, the lid member 62, and the side wall member 67. can do. Therefore, it is possible to further reduce the output of unnecessary charges due to temperature changes, and thus the force detection device 1 can perform more accurate force detection.

In the present embodiment, the piezoelectric layers 121, 123, 131, 133, 141, and 143 are made of quartz, and the thermal expansion coefficient from 25 ° C. to 200 ° C. in the x-axis direction is 13.4 × 10 ⁻⁶ (1 / K), the thermal expansion coefficient from 25 ° C. to 200 ° C. in the y-axis direction is 13.4 × 10 ⁻⁶ (1 / K), and the thermal expansion coefficient from 25 ° C. to 200 ° C. in the z-axis direction is 7.8 × 10 ^{− 6} (1 / K).

Therefore, when the piezoelectric layers 121, 123, 131, 133, 141, and 143 are made of quartz, the constituent materials of the bottom plate member 61, the lid member 62, and the side wall member 67 are respectively 25 ° C. to 200 ° C. A material having a thermal expansion coefficient of 1 × 10 ⁻⁶ (1 / K) or more and 1 × 10 ⁻⁷ (1 / K) or less is preferable, and 3 × 10 ⁻⁶ (1 / K) or more and 9 × 10 ^{− 6} (1 / K) or less is more preferable. As a result, the piezoelectric layers 121, 123, 131, 133, 141, and 143 are subject to compressive stress or tensile stress due to differences in the degree of thermal deformation between the bottom plate member 61, the lid member 62, and the side wall member 67. It can be further reduced.

The constituent material of the bottom plate member 61 and the constituent material of the lid member 62 may be the same or different, but are preferably the same. Thereby, the longitudinal elastic coefficient and thermal expansion coefficient of the bottom plate member 61 and the lid member 62 can be made substantially equal. For this reason, it can further reduce effectively that the baseplate member 61 and the cover member 62 are damaged by the applied external force. Further, it is more effectively reduced that compressive stress or tensile stress is generated in the piezoelectric layers 121, 123, 131, 133, 141, and 143 due to the difference in the degree of thermal deformation between the bottom plate member 61 and the lid member 62. You can also Further, since the constituent material of the bottom plate member 61 and the constituent material of the lid member 62 are the same, for example, the material properties such as the transverse elastic modulus and the hardness can be made substantially equal. Thereby, it is avoided that the applied external force concentrates on one of the bottom plate member 61 and the lid member 62, and it is possible to particularly effectively reduce the unintentional deformation or breakage.
Here, in this specification, the same constituent material is not only a material whose composition ratio is completely the same, but even if the composition ratio is slightly different, the characteristics (longitudinal elastic modulus and thermal expansion coefficient) are almost the same. Includes equal materials.

  Examples of the constituent material of the bottom plate member 61 and the lid member 62 that satisfy the above conditions include various metal materials such as stainless steel, Kovar, copper, iron, carbon steel, and titanium. Kovar is preferred. Thereby, the bottom plate member 61 has a relatively high rigidity and is appropriately elastically deformed when stress is applied. For this reason, the bottom plate member 61 can accurately transmit the external force applied to the first base 2 to the charge output element 10, and can further reduce the damage caused by the external force. Kovar is also preferable from the viewpoint of excellent molding processability.

The thermal expansion coefficient of Kovar from 25 ° C. to 200 ° C. is 5.2 × 10 ⁻⁶ (1 / K), which is close to the thermal expansion coefficient of quartz. Therefore, as in the present embodiment, when the piezoelectric layers 121, 123, 131, 133, 141, and 143 included in the charge output element 10 are made of quartz, each piezoelectric layer 121, 123, 131, It is possible to particularly effectively suppress the occurrence of compressive stress or tensile stress in 133, 141, 143 due to the difference in the degree of thermal deformation between the bottom plate member 61 and the lid member 62.

On the other hand, the constituent material of the side wall member 67 that satisfies the above conditions is not particularly limited, but is preferably an insulating material, for example, oxide-based ceramics such as alumina and zirconia, and carbide-based materials such as silicon carbide. It is more preferable to include various ceramics such as ceramics and nitride-based ceramics such as silicon nitride, and it is more preferable to include various ceramics as a main component. Ceramics have moderate rigidity and excellent insulation. Therefore, damage due to deformation of the package 60 is unlikely to occur, the charge output element 10 accommodated in the package 60 can be more reliably protected, and a short circuit between the terminals 66 can be more reliably avoided. Further, the processing accuracy of the side wall member 67 can be further increased.
Moreover, as a constituent material of the side wall member 67, it is preferable that the ceramic has a thermal expansion coefficient satisfying the above range as a main component. Thereby, it is possible to further reduce the occurrence of compressive stress or tensile stress in the piezoelectric layers 121, 123, 131, 133, 141, and 143 due to the difference in the degree of thermal deformation from the side wall member 67.

  In the present embodiment, the first member of the housing portion (package) is a bottom plate member, the second member is a lid member, and the third member is a side wall member. A member located between the piezoelectric element and the first base and in a region where the piezoelectric element and the first base overlap with each other when viewed from the thickness direction of the force detection device. The second member refers to a member located between the piezoelectric element and the second base and in a region where the piezoelectric element and the second base overlap when viewed from the thickness direction of the force detection device. The third member refers to a member connecting the first member and the second member, and is preferably provided without contacting the piezoelectric element (charge output element), the first base, and the second base. Refers to a member.

2. Single Arm Robot Next, a single arm robot which is an embodiment of the robot according to the present invention will be described with reference to FIG.
FIG. 8 is a diagram showing an example of a single-arm robot using the force detection device according to the present invention. The single-arm robot 500 of FIG. 8 includes a base 510, an arm 520, an end effector 530 provided on the distal end side of the arm 520, and a force detection device 1 provided between the arm 520 and the end effector 530. Have In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.
The base 510 has a function of accommodating an actuator (not shown) that generates power for rotating the arm 520, a control unit (not shown) that controls the actuator, and the like. The base 510 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage.

  The arm 520 includes a first arm element 521, a second arm element 522, a third arm element 523, a fourth arm element 524, and a fifth arm element 525, and rotates adjacent arms. It is configured by linking freely. The arm 520 is driven by being rotated or bent in a compound manner around the connecting portion of each arm element under the control of the control unit.

The end effector 530 has a function of gripping an object. The end effector 530 has a first finger 531 and a second finger 532. After the end effector 530 reaches a predetermined operating position by driving the arm 520, the object can be gripped by adjusting the distance between the first finger 531 and the second finger 532.
The end effector 530 is a hand here, but the present invention is not limited to this. Other examples of the end effector include, for example, a component inspection device, a component transport device, a component processing device, a component assembly device, and a measuring instrument. The same applies to the end effectors in other embodiments.

The force detection device 1 has a function of detecting an external force applied to the end effector 530. By feeding back the force detected by the force detection device 1 to the control unit of the base 510, the single-arm robot 500 can perform more precise work. Further, the single arm robot 500 can detect contact of the end effector 530 with an obstacle or the like by the force detected by the force detection device 1. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that have been difficult with conventional position control can be easily performed, and the single-arm robot 500 can perform the operation more safely.
In the illustrated configuration, the arm 520 includes a total of five arm elements, but the present invention is not limited to this. When the arm 520 is constituted by one arm element, when constituted by 2 to 4 arm elements, and when constituted by 6 or more arm elements, it is within the scope of the present invention. .

3. Next, based on FIG. 9, a multi-arm robot which is an embodiment of the robot according to the present invention will be described.
FIG. 9 is a diagram showing an example of a multi-arm robot using the force detection device according to the present invention. 9 includes a base 610, a first arm 620, a second arm 630, a first end effector 640a provided on the distal end side of the first arm 620, a second arm 620, and a second end effector 640a. A second end effector 640b provided on the distal end side of the arm 630, and between the first arm 620 and the first end effector 640a and between the second arm 630 and the second end effector 640b. A force detection device 1 is provided. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.
The base 610 has a function of accommodating an actuator (not shown) that generates power for rotating the first arm 620 and the second arm 630, a control unit (not shown) that controls the actuator, and the like. Have. The base 610 is fixed on, for example, a floor, a wall, a ceiling, or a movable carriage.

  The 1st arm 620 is comprised by connecting the 1st arm element 621 and the 2nd arm element 622 so that rotation is possible. The second arm 630 is configured by rotatably connecting the first arm element 631 and the second arm element 632. The first arm 620 and the second arm 630 are driven by being complexly rotated or bent around the connecting portion of each arm element under the control of the control unit.

  The first and second end effectors 640a and 640b have a function of gripping an object. The first end effector 640a has a first finger 641a and a second finger 642a. The second end effector 640b has a first finger 641b and a second finger 642b. After the first end effector 640a reaches a predetermined operating position by driving the first arm 620, the object is grasped by adjusting the distance between the first finger 641a and the second finger 642a. Can do. Similarly, after the second end effector 640b reaches a predetermined operating position by driving the second arm 630, the distance between the first finger 641b and the second finger 642b is adjusted to thereby adjust the object. It can be gripped.

The force detection device 1 has a function of detecting an external force applied to the first and second end effectors 640a and 640b. By feeding back the force detected by the force detection device 1 to the control unit of the base 610, the multi-arm robot 600 can perform the operation more precisely. The multi-arm robot 600 can detect contact of the first and second end effectors 640a and 640b with an obstacle by the force detected by the force detection device 1. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that have been difficult with conventional position control can be easily performed, and the multi-arm robot 600 can perform the operation more safely.
In the illustrated configuration, there are a total of two arms, but the present invention is not limited to this. The case where the multi-arm robot 600 has three or more arms is also within the scope of the present invention.

4). Next, an electronic component inspection device and an electronic component conveyance device provided with the force detection device of the present invention will be described with reference to FIGS. 10 and 11.
FIG. 10 is a diagram showing an example of an electronic component inspection device and a component conveying device using the force detection device according to the present invention. FIG. 11 is a diagram illustrating an example of an electronic component transport device using the force detection device according to the present invention.

  The electronic component inspection apparatus 700 of FIG. 10 includes a base 710 and a support base 720 provided upright on the side surface of the base 710. On the upper surface of the base 710, an upstream stage 712u on which the electronic component 711 to be inspected is placed and transported, and a downstream stage 712d on which the inspected electronic component 711 is placed and transported are provided. ing. Further, between the upstream stage 712u and the downstream stage 712d, an imaging device 713 for confirming the posture of the electronic component 711, and an inspection table 714 on which the electronic component 711 is set for inspecting electrical characteristics. And are provided. Examples of the electronic component 711 include semiconductors, semiconductor wafers, display devices such as CLD and OLED, crystal devices, various sensors, inkjet heads, various MEMS devices, and the like.

  Further, the support base 720 is provided with a Y stage 731 that can move in a direction (Y direction) parallel to the upstream stage 712u and the downstream stage 712d of the base 710. An arm portion 732 is extended in a direction (X direction) toward 710. An X stage 733 is provided on the side surface of the arm 732 so as to be movable in the X direction. In addition, the X stage 733 is provided with an imaging camera 734 and an electronic component transfer device 740 incorporating a Z stage movable in the vertical direction (Z direction). In addition, a gripping portion 741 that grips the electronic component 711 is provided on the front end side of the electronic component transport apparatus 740. Further, the force detection device 1 is provided between the tip of the electronic component transport device 740 and the grip portion 741. Further, on the front side of the base 710, a control device 750 for controlling the overall operation of the electronic component inspection device 700 is provided. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

  The electronic component inspection apparatus 700 inspects the electronic component 711 as follows. First, the electronic component 711 to be inspected is placed on the upstream stage 712u and moved to the vicinity of the inspection table 714. Next, the Y stage 731 and the X stage 733 are moved to move the electronic component transport device 740 to a position immediately above the electronic component 711 placed on the upstream stage 712u. At this time, the position of the electronic component 711 can be confirmed using the imaging camera 734. Then, when the electronic component transport device 740 is lowered using the Z stage built in the electronic component transport device 740 and the electronic component 711 is gripped by the gripping portion 741, the electronic component transport device 740 is directly placed on the imaging device 713. The position of the electronic component 711 is confirmed using the imaging device 713. Next, the attitude of the electronic component 711 is adjusted using a fine adjustment mechanism built in the electronic component transport apparatus 740. Then, after moving the electronic component transport device 740 to above the inspection table 714, the Z stage built in the electronic component transport device 740 is moved to set the electronic component 711 on the inspection table 714. Since the attitude of the electronic component 711 is adjusted using the fine adjustment mechanism in the electronic component conveying apparatus 740, the electronic component 711 can be set at the correct position on the inspection table 714. Next, after the electrical characteristic inspection of the electronic component 711 is completed using the inspection table 714, the electronic component 711 is picked up from the inspection table 714, the Y stage 731 and the X stage 733 are moved, and the upper stage 712d is moved. The electronic component conveying device 740 is moved to the position, and the electronic component 711 is placed on the downstream stage 712d. Finally, the downstream stage 712d is moved to transport the electronic component 711 that has been inspected to a predetermined position.

  FIG. 11 is a diagram illustrating an electronic component transport device 740 including the force detection device 1. The electronic component transport device 740 includes a gripping portion 741, a six-axis force detection device 1 connected to the gripping portion 741, a rotating shaft 742 connected to the gripping portion 741 via the six-axis force detection device 1, A fine adjustment plate 743 is rotatably attached to the rotation shaft 742. The fine adjustment plate 743 is movable in the X direction and the Y direction while being guided by a guide mechanism (not shown).

  Further, a piezoelectric motor 744θ for rotation direction is mounted toward the end surface of the rotation shaft 742, and a driving convex portion (not shown) of the piezoelectric motor 744θ is pressed against the end surface of the rotation shaft 742. Therefore, by operating the piezoelectric motor 744θ, the rotation shaft 742 (and the gripping portion 741) can be rotated by an arbitrary angle in the θ direction. Further, a piezoelectric motor 744 x for X direction and a piezoelectric motor 744 y for Y direction are provided toward the fine adjustment plate 743, and each drive convex portion (not shown) is a surface of the fine adjustment plate 743. It is pressed against. For this reason, by operating the piezoelectric motor 744x, the fine adjustment plate 743 (and the gripper 741) can be moved by an arbitrary distance in the X direction. Similarly, the fine adjustment can be performed by operating the piezoelectric motor 744y. The plate 743 (and the gripping portion 741) can be moved by an arbitrary distance in the Y direction.

  Further, the force detection device 1 has a function of detecting an external force applied to the grip portion 741. By feeding back the force detected by the force detection device 1 to the control device 750, the electronic component transport device 740 and the electronic component inspection device 700 can perform work more precisely. Further, the contact of the gripping portion 741 with an obstacle can be detected by the force detected by the force detection device 1. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that are difficult with conventional position control can be easily performed, and the electronic component transport device 740 and the electronic component inspection device 700 can perform safer work. is there.

5. Next, an embodiment of a component processing apparatus provided with the force detection device of the present invention will be described with reference to FIG.
FIG. 12 is a diagram showing an example of a component processing apparatus using the force detection device according to the present invention. The component processing apparatus 800 in FIG. 12 is attached to a base 810, a support column 820 that is erected on the upper surface of the base 810, a feed mechanism 830 that is provided on the side surface of the support column 820, and a feed mechanism 830 that can be moved up and down. A tool displacement unit 840, a force detection device 1 connected to the tool displacement unit 840, and a tool 850 attached to the tool displacement unit 840 via the force detection device 1. In addition, as the force detection apparatus 1, the thing similar to each embodiment mentioned above is used.

  The base 810 is a base for mounting and fixing the workpiece 860. The column 820 is a column for fixing the feed mechanism 830. The feed mechanism 830 has a function of moving the tool displacement portion 840 up and down. The feed mechanism 830 includes a feed motor 831 and a guide 832 that raises and lowers the tool displacement portion 840 based on an output from the feed motor 831. The tool displacement unit 840 has a function of imparting displacement such as rotation and vibration to the tool 850. The tool displacement portion 840 includes a displacement motor 841, a tool attachment portion 843 provided at the tip of a main shaft (not shown) connected to the displacement motor 841, and a holder attached to the tool displacement portion 840 and holding the main shaft. Part 842. The tool 850 is attached to the tool attachment portion 843 of the tool displacement portion 840 via the force detection device 1 and is used for machining the workpiece 860 in accordance with the displacement given from the tool displacement portion 840. The tool 850 is not particularly limited, and is, for example, a wrench, a Phillips screwdriver, a flat-blade screwdriver, a cutter, a circular saw, a nipper, a cone, a drill, or a milling cutter.

The force detection device 1 has a function of detecting an external force applied to the tool 850. By feeding back the external force detected by the force detection device 1 to the feed motor 831 and the displacement motor 841, the component processing device 800 can execute the component processing operation more precisely. Further, the contact of the tool 850 with an obstacle or the like can be detected by the external force detected by the force detection device 1. Therefore, an emergency stop can be performed when an obstacle or the like comes in contact with the tool 850, and the component processing apparatus 800 can execute a safer component processing operation.
As described above, the force detection device and the robot of the present invention have been described with respect to the illustrated embodiment. However, the present invention is not limited to this, and each unit constituting the force detection device and the robot has the same function. It can be replaced with any configuration that can be exhibited. Moreover, arbitrary components may be added.

Further, the force detection device and the robot of the present invention may be a combination of any two or more configurations (features) of the above embodiments.
In the force detection device of the present invention, four charge output elements are provided, but the number of charge output elements is not limited to this. For example, the number of charge output elements may be one, two, three, or five or more.

Further, in the present invention, instead of the pressurizing bolt, for example, one having no function of applying pressurization to the element may be used, or a fixing method other than the bolt may be adopted.
In addition, the robot of the present invention is not limited to an arm type robot (robot arm) as long as it has an arm, but is another type of robot such as a scalar robot, a legged walking (running) robot, or the like. Also good.

  The force detection device of the present invention is not limited to a robot, an electronic component transport device, an electronic component inspection device, and a component processing device, but other devices such as other transport devices, other inspection devices, automobiles, motorcycles, Also applicable to vehicles such as airplanes, ships, trains, bipedal walking robots, wheeled robots, etc., measuring devices such as vibration meters, accelerometers, gravimeters, dynamometers, seismometers, inclinometers, and input devices can do.

DESCRIPTION OF SYMBOLS 1 ... Force detection apparatus 2 ... 1st base 22 ... Bottom plate 23 ... Convex part 221 ... Lower surface (1st surface) 231 ... Top surface 24 ... Wall part 241 ... Female screw 271 ... Central axis 272 ... Center 3 ... 2nd base 32 ... top plate 33 ... side wall 321 ... upper surface (second surface) 331 ... inner wall surface 4 ... analog circuit board 40 ... external force detection circuit 401 ... AD converter 402 ... arithmetic unit 41 ... hole 43 ... pipe 5 ... digital circuit board 6, 6A, 6B, 6C, 6D ... Sensor device (pressure detection part) 60 ... Package (accommodating part) 61 ... Bottom plate member (first member) 611 ... Edge part 62 ... Lid member (second member) 625 ... Central part 626 ... Outer peripheral part 63 ... Sealing 64 ... Connection part 65 ... Recess 66 ... Terminal 661 ... Lower part 662 ... Upper part 67 ... Side wall member (third member) 671 ... Lower side part 672 ... Upper part 673 ... Step DESCRIPTION OF SYMBOLS 71 ... Pressurizing volt | bolt 90a, 90b, 90c ... Conversion output circuit 91 ... Operational amplifier 92 ... Capacitor 93 ... Switching element 10 ... Charge output element (piezoelectric element) 11 ... Ground electrode layer 12 ... 1st sensor 121 ... 1st piezoelectricity Body layer (piezoelectric layer) 122 ... Output electrode layer 123 ... Second piezoelectric layer (piezoelectric layer) 13 ... Second sensor 131 ... Third piezoelectric layer (piezoelectric layer) 132 ... Output electrode layer 133 ... fourth piezoelectric layer (piezoelectric layer) 14 ... third sensor 141 ... fifth piezoelectric layer (piezoelectric layer) 142 ... output electrode layer 143 ... sixth piezoelectric layer (piezoelectric layer) 500 ... single arm robot 510 ... base 520 ... arm 521 ... first arm element 522 ... second arm element 523 ... third arm element 524 ... fourth arm element 525 ... fifth arm element 53 ... End effector 531 ... First finger 532 ... Second finger 600 ... Multi-arm robot 610 ... Base 620 ... First arm 621 ... First arm element 622 ... Second arm element 630 ... Second arm 631 ... First arm element 632 ... Second arm element 640a ... First end effector 641a ... First finger 642a ... Second finger 640b ... Second end effector 641b ... First finger 642b ... Second Finger 700 ... Electronic component inspection device 710 ... Base 711 ... Electronic component 712u ... Upstream stage 712d ... Downstream stage 713 ... Imaging device 714 ... Inspection table 720 ... Support base 731 ... Y stage 732 ... Arms 733 ... X stage 734 ... Imaging camera 740 ... Electronic component conveying device 741 ... Grip portion 742 ... Rotating shaft 743 ... Fine adjustment plate 744x, 744y, 744θ ... piezoelectric motor 750 ... control device 800 ... part processing device 810 ... base 820 ... support 830 ... feed mechanism 831 ... feed motor 832 ... guide 840 ... tool displacement portion 841 ... displacement motor 842 ... holding portion 843 ... Tool mounting portion 850 ... Tool 860 ... Parts to be processed LD ... Stacking direction SD ... Holding direction NL ₁ , NL ₂ ... Normal Qx, Qy, Qz, Qx1, Qy1, Qz1, Qx2, Qy2, Qz2, Qx3, Qy3 , Qz3, Qx4, Qy4, Qz4 ... Charge Vx, Vy, Vz, Vx1, Vy1, Vz1, Vx2, Vy2, Vz2, Vx3, Vy3, Vz3, Vx4, Vy4, Vz4 ... Voltage θ ... Inclination angle ε ... Inclination angle η …angle

Claims (9)

A first base;
A second base;
A sensor device sandwiched between the first base and the second base;
A bolt that fastens the first base and the second base ;
The sensor device is
A side wall member having a terminal;
A bottom plate member connected to the side wall member;
A piezoelectric element that is disposed in a recess formed by the side wall member and the bottom plate member and outputs a signal in response to an external force;
A connection portion formed of a conductive paste and electrically connecting the terminal and the piezoelectric element;
A lid member connected to the side wall member and sealing the recess,
The bottom plate member is in contact with the first base on one side and in contact with the piezoelectric element on the other side,
The lid member is in contact with the second base on one surface and in contact with the piezoelectric element on the other surface;
The longitudinal elastic modulus of the bottom plate member is lower than the longitudinal elastic modulus of the side wall member,
The side wall member is not in contact with the first base and the second base,
The constituent material of the piezoelectric element includes quartz,
The constituent material of the bottom plate member includes any one of stainless steel, Kovar, copper, iron, carbon steel, and titanium. The longitudinal elastic modulus of the lid member is lower than the longitudinal elastic modulus of the side wall member,
The force detection device according to claim 1, wherein a constituent material of the lid member includes any one of stainless steel, Kovar, copper, iron, carbon steel, and titanium.   The force detection device according to claim 1, wherein the conductive paste includes an Ag paste. The force detection device according to claim 2 or 3, wherein a difference between a longitudinal elastic modulus of the bottom plate member and a longitudinal elastic modulus of the lid member is 1/10 or less of a longitudinal elastic modulus of the bottom plate member .   The force detection device according to any one of claims 2 to 4, wherein a constituent material of the bottom plate member and a constituent material of the lid member are the same. The material of the sidewall member, the force detection device according to claim 1, any one of 5, including a ceramic.   The force detection device according to claim 1, wherein the constituent material of the bottom plate member includes Kovar.   The force detection device according to claim 7, wherein the constituent material of the lid member includes Kovar. With an arm,
An end effector provided on the arm;
9. A robot, comprising: the force detection device according to claim 1 provided between the arm and the end effector.

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