CH430025A - Verfahren zum Betrieb von Hochvakuumanlagen und Vakuumanlage zur Durchführung des Verfahrens - Google Patents
Verfahren zum Betrieb von Hochvakuumanlagen und Vakuumanlage zur Durchführung des VerfahrensInfo
- Publication number
- CH430025A CH430025A CH261164A CH261164A CH430025A CH 430025 A CH430025 A CH 430025A CH 261164 A CH261164 A CH 261164A CH 261164 A CH261164 A CH 261164A CH 430025 A CH430025 A CH 430025A
- Authority
- CH
- Switzerland
- Prior art keywords
- recipient
- gas
- liquefied
- evaporation
- vacuum
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 15
- 239000007789 gas Substances 0.000 claims description 36
- 238000001704 evaporation Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH261164A CH430025A (de) | 1959-04-07 | 1964-03-02 | Verfahren zum Betrieb von Hochvakuumanlagen und Vakuumanlage zur Durchführung des Verfahrens |
| NL6405217A NL6405217A (en, 2012) | 1959-04-07 | 1964-05-11 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH7164159A CH367269A (de) | 1959-04-07 | 1959-04-07 | Verfahren zum Betrieb von Hochvakuumanlagen, deren Rezipient zwecks Beschickung und Entnahme der im Vakuum zu behandelnden Gegenstände geöffnet werden kann, und Vakuumanlage zur Durchführung dieses Verfahrens |
| CH261164A CH430025A (de) | 1959-04-07 | 1964-03-02 | Verfahren zum Betrieb von Hochvakuumanlagen und Vakuumanlage zur Durchführung des Verfahrens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH430025A true CH430025A (de) | 1967-02-15 |
Family
ID=32231701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH261164A CH430025A (de) | 1959-04-07 | 1964-03-02 | Verfahren zum Betrieb von Hochvakuumanlagen und Vakuumanlage zur Durchführung des Verfahrens |
Country Status (2)
| Country | Link |
|---|---|
| CH (1) | CH430025A (en, 2012) |
| NL (1) | NL6405217A (en, 2012) |
-
1964
- 1964-03-02 CH CH261164A patent/CH430025A/de unknown
- 1964-05-11 NL NL6405217A patent/NL6405217A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL6405217A (en, 2012) | 1965-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69203744T2 (de) | Verbessertes Verfahren zum Expandieren von Zellmaterialien. | |
| DE4329178B4 (de) | Dampfphasenreinigung | |
| DE102008037300A1 (de) | Herstellung eines Reingases, insbesondere für die Dichtheitsprüfung an einem druckbeaufschlagten Bauteil | |
| DE3876345T2 (de) | Verfahren und vorrichtung zur behandlung von mit tritium kontaminierten festen organischen abfaellen. | |
| AT155712B (de) | Verfahren zur Herstellung von Halbleiterüberzügen. | |
| CH430025A (de) | Verfahren zum Betrieb von Hochvakuumanlagen und Vakuumanlage zur Durchführung des Verfahrens | |
| WO1992010939A1 (de) | Verfahren und vorrichtung zur behandlung von frischfleisch | |
| CH367269A (de) | Verfahren zum Betrieb von Hochvakuumanlagen, deren Rezipient zwecks Beschickung und Entnahme der im Vakuum zu behandelnden Gegenstände geöffnet werden kann, und Vakuumanlage zur Durchführung dieses Verfahrens | |
| AT215713B (de) | Verfahren zum Betrieb von Hochvakuumanlagen, deren Rezipient zwecks Beschickung und Entnahme der im Vakuum zu behandelnden Gegenstände geöffnet werden kann, und Vakuumanlage zur Durchführung dieses Verfahrens | |
| DE924335C (de) | Verfahren zum Evakuieren eines Gefaesses | |
| DE19527734A1 (de) | Verfahren und Vorrichtung zur Konservierung von Geweben und Organen, insbesondere von Transplantationsgeweben und -organen | |
| DE1492500B2 (en, 2012) | ||
| DE711994C (de) | Schalter mit Lichtbogenloeschung durch gespannte Daempfe | |
| DE102007016716B3 (de) | Verfahren zur Enttankung von Raumfahrzeugen | |
| DE1753586B1 (de) | Verfahren zum Gefriertrocknen und Konservieren von feuchtigkeitsempfindlichem Gut | |
| EP0823214A2 (de) | Verfahren zur Bekämpfung von Hausstaubmilben unter Kälteeinwirkung | |
| DE2142205C3 (de) | Verfahren zur selektiven, aromaerhaltenden Extraktion von Nikotin aus Tabak | |
| AT79386B (de) | Gasfüllanlage für Luftschiffe. | |
| US2139681A (en) | Vacuum moistening process | |
| DE759138C (de) | Vorrichtung zum Einschleusen von Objekten in Korpuskularstrahlgefaesse, insbesondere Elektronenmikroskope | |
| DD144600A5 (de) | Vorrichtung zur speicherung und rueckgewinnung einer kondensierbaren verbindung | |
| DE2307473C3 (de) | Verfahren zur Trennung eines Lösungsmittels von einem in ihm gelösten oder suspendierten oder das Lösungsmittel enthaltenden Feststoff | |
| DE1010695B (de) | Verfahren zur Vakuumerzeugung mittels einer Diffusionspumpe | |
| DE2730054B1 (de) | Verfahren zur Langzeitlagerung von Saatgut | |
| DE959912C (de) | Verfahren zur inneren Konservierung von Dampfkesseln und Vorrichtung zur Ausfuehrungdes Verfahrens |