CA2610555C - Two-dimensional small angle x-ray scattering camera - Google Patents

Two-dimensional small angle x-ray scattering camera Download PDF

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Publication number
CA2610555C
CA2610555C CA2610555A CA2610555A CA2610555C CA 2610555 C CA2610555 C CA 2610555C CA 2610555 A CA2610555 A CA 2610555A CA 2610555 A CA2610555 A CA 2610555A CA 2610555 C CA2610555 C CA 2610555C
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CA
Canada
Prior art keywords
camera
blocks
collimating
dimensional
optic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA2610555A
Other languages
English (en)
French (fr)
Other versions
CA2610555A1 (en
Inventor
Licai Jiang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osmic Inc
Original Assignee
Osmic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osmic Inc filed Critical Osmic Inc
Publication of CA2610555A1 publication Critical patent/CA2610555A1/en
Application granted granted Critical
Publication of CA2610555C publication Critical patent/CA2610555C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA2610555A 2005-05-31 2006-01-04 Two-dimensional small angle x-ray scattering camera Expired - Lifetime CA2610555C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/142,862 US7139366B1 (en) 2005-05-31 2005-05-31 Two-dimensional small angle x-ray scattering camera
US11/142,862 2005-05-31
PCT/US2006/000290 WO2006130182A1 (en) 2005-05-31 2006-01-04 Two-dimensional small angle x-ray scattering camera

Publications (2)

Publication Number Publication Date
CA2610555A1 CA2610555A1 (en) 2006-12-07
CA2610555C true CA2610555C (en) 2014-03-18

Family

ID=36143216

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2610555A Expired - Lifetime CA2610555C (en) 2005-05-31 2006-01-04 Two-dimensional small angle x-ray scattering camera

Country Status (5)

Country Link
US (3) US7139366B1 (https=)
EP (1) EP1886125B1 (https=)
JP (1) JP5214442B2 (https=)
CA (1) CA2610555C (https=)
WO (1) WO2006130182A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10317677A1 (de) * 2003-04-17 2004-11-18 Bruker Axs Gmbh Primärstrahlfänger
US7139366B1 (en) * 2005-05-31 2006-11-21 Osmic, Inc. Two-dimensional small angle x-ray scattering camera
US7848483B2 (en) * 2008-03-07 2010-12-07 Rigaku Innovative Technologies Magnesium silicide-based multilayer x-ray fluorescence analyzers
JP5237186B2 (ja) 2009-04-30 2013-07-17 株式会社リガク Ｘ線散乱測定装置およびｘ線散乱測定方法
JP2013219601A (ja) * 2012-04-10 2013-10-24 Canon Inc シリアルデータ送信システム
WO2013185000A1 (en) 2012-06-08 2013-12-12 Rigaku Innovative Technologies, Inc. X-ray beam system offering 1d and 2d beams
JP6322627B2 (ja) * 2012-06-08 2018-05-09 リガク イノベイティブ テクノロジーズ インコーポレイテッド デュアルモード小角散乱カメラ
US9024268B2 (en) * 2013-03-15 2015-05-05 Bruker Axs, Inc. One-dimensional x-ray detector with curved readout strips
US9575017B2 (en) * 2014-02-24 2017-02-21 Rigaku Innovative Technologies, Inc. High performance Kratky assembly
EP3364421B1 (en) * 2017-02-17 2019-04-03 Rigaku Corporation X-ray optical device
US11181489B2 (en) * 2018-07-31 2021-11-23 Lam Research Corporation Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering
US12436115B2 (en) * 2022-02-25 2025-10-07 Proto Patents Ltd. Transmission X-ray diffraction apparatus and related method

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4054402B2 (ja) 1997-04-25 2008-02-27 株式会社東芝 Ｘ線断層撮影装置
JPS5816553U (ja) * 1981-07-24 1983-02-01 理学電機株式会社 Ｘ線小角散乱測定装置用試料加熱装置
DE3406905A1 (de) 1984-02-25 1985-09-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Roentgengeraet
GB8411731D0 (en) 1984-05-09 1984-06-13 Unilever Plc Oral compositions
DE3785763T2 (de) 1986-08-15 1993-10-21 Commw Scient Ind Res Org Instrumente zur konditionierung von röntgen- oder neutronenstrahlen.
EP0311177B1 (de) 1987-10-05 1993-12-15 Philips Patentverwaltung GmbH Anordnung zur Untersuchung eines Körpers mit einer Strahlenquelle
US5028352A (en) 1989-07-11 1991-07-02 University Of New Mexico Low density/low surface area silica-alumina composition
EP0753140A1 (en) * 1995-01-27 1997-01-15 Koninklijke Philips Electronics N.V. Method for ge-xrf x-ray analysis of materials, and apparatus for carrying out the method
JP3468623B2 (ja) * 1995-08-08 2003-11-17 理学電機株式会社 Ｘ線回折装置の光学系切換装置
US5619548A (en) 1995-08-11 1997-04-08 Oryx Instruments And Materials Corp. X-ray thickness gauge
JP3529065B2 (ja) * 1995-08-14 2004-05-24 理学電機株式会社 Ｘ線小角散乱装置
US6054712A (en) 1998-01-23 2000-04-25 Quanta Vision, Inc. Inspection equipment using small-angle topography in determining an object's internal structure and composition
JP3710023B2 (ja) * 1997-08-27 2005-10-26 株式会社リガク クラツキ型スリット装置
US6175117B1 (en) 1998-01-23 2001-01-16 Quanta Vision, Inc. Tissue analysis apparatus
US6041099A (en) * 1998-02-19 2000-03-21 Osmic, Inc. Single corner kirkpatrick-baez beam conditioning optic assembly
US6014423A (en) * 1998-02-19 2000-01-11 Osmic, Inc. Multiple corner Kirkpatrick-Baez beam conditioning optic assembly
US6621888B2 (en) * 1998-06-18 2003-09-16 American Science And Engineering, Inc. X-ray inspection by coherent-scattering from variably disposed scatterers identified as suspect objects
EP1120086A4 (en) 1998-09-17 2003-05-21 Quanta Vision Inc DEVICE FOR REDUCED ANGLE MAMMOGRAPHY AND VARIANTS
DE19955848A1 (de) * 1998-11-17 2000-05-18 Ifg Inst Fuer Geraetebau Gmbh Verfahren zur röntgenologischen Abbildung von Untersuchungsobjekten mit geringen Dichteunterschieden sowie röntgenoptische Systeme
NL1015740C1 (nl) * 1999-07-23 2000-09-27 Koninkl Philips Electronics Nv Stralingsanalysetoestel voorzien van een regelbare collimator.
US6330301B1 (en) 1999-12-17 2001-12-11 Osmic, Inc. Optical scheme for high flux low-background two-dimensional small angle x-ray scattering
US6459761B1 (en) * 2000-02-10 2002-10-01 American Science And Engineering, Inc. Spectrally shaped x-ray inspection system
US6453006B1 (en) * 2000-03-16 2002-09-17 Therma-Wave, Inc. Calibration and alignment of X-ray reflectometric systems
JP3759421B2 (ja) * 2000-04-10 2006-03-22 株式会社リガク 小角散乱測定用のｘ線光学装置と多層膜ミラー
JP4514982B2 (ja) * 2001-04-11 2010-07-28 株式会社リガク 小角散乱測定装置
JP3762665B2 (ja) * 2001-07-03 2006-04-05 株式会社リガク Ｘ線分析装置およびｘ線供給装置
US6956928B2 (en) 2003-05-05 2005-10-18 Bruker Axs, Inc. Vertical small angle x-ray scattering system
US7139366B1 (en) 2005-05-31 2006-11-21 Osmic, Inc. Two-dimensional small angle x-ray scattering camera

Also Published As

Publication number Publication date
US7139366B1 (en) 2006-11-21
US7734011B2 (en) 2010-06-08
EP1886125A1 (en) 2008-02-13
EP1886125B1 (en) 2013-08-21
JP5214442B2 (ja) 2013-06-19
CA2610555A1 (en) 2006-12-07
WO2006130182A1 (en) 2006-12-07
US8094780B2 (en) 2012-01-10
JP2008542751A (ja) 2008-11-27
US20080069302A1 (en) 2008-03-20
US20100284516A1 (en) 2010-11-11
US20060269045A1 (en) 2006-11-30

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