CA2379337A1 - Procede de formation d'une couche mince circulaire ou annulaire - Google Patents

Procede de formation d'une couche mince circulaire ou annulaire Download PDF

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Publication number
CA2379337A1
CA2379337A1 CA002379337A CA2379337A CA2379337A1 CA 2379337 A1 CA2379337 A1 CA 2379337A1 CA 002379337 A CA002379337 A CA 002379337A CA 2379337 A CA2379337 A CA 2379337A CA 2379337 A1 CA2379337 A1 CA 2379337A1
Authority
CA
Canada
Prior art keywords
substrate
nozzle
coating
coating film
circular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002379337A
Other languages
English (en)
Inventor
Takuya Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Publication of CA2379337A1 publication Critical patent/CA2379337A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Ce procédé de formation d'une couche mince circulaire ou annulaire, sur un substrat (W), à l'aide d'un dispositif de conception simple, sans gâchis de liquide de revêtement, comprend les étapes suivantes consistant: à utiliser un dispositif de peinture (A) monté sur une table rotative (1) laquelle retient horizontalement et par aspiration le substrat (W), ainsi qu'une buse mobile horizontalement, réglable en hauteur par rapport à la table (1) et comportant un trou d'éjection (10a) au niveau de son embout, à faire tourner la table (1) et à appliquer, sur le substrat (W), à partir du trou d'éjection (10a), un liquide de revêtement à l'état linéaire, tout en déplaçant la buse (10) d'une distance déterminée entre le centre tournant de la table (1) et une position extérieure définie de celle-ci, dans une certaine direction, la buse (10) étant maintenue à une hauteur déterminée par rapport à la table (1), de manière à former une mince couche de revêtement circulaire ou annulaire sur le substrat (W).
CA002379337A 1999-07-29 2000-07-17 Procede de formation d'une couche mince circulaire ou annulaire Abandoned CA2379337A1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP21515299 1999-07-29
JP11/215152 1999-07-29
JP2000/44317 2000-02-22
JP2000044317 2000-02-22
PCT/JP2000/004789 WO2001008814A1 (fr) 1999-07-29 2000-07-17 Procede de formation d'une couche mince circulaire ou annulaire

Publications (1)

Publication Number Publication Date
CA2379337A1 true CA2379337A1 (fr) 2001-02-08

Family

ID=26520706

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002379337A Abandoned CA2379337A1 (fr) 1999-07-29 2000-07-17 Procede de formation d'une couche mince circulaire ou annulaire

Country Status (5)

Country Link
EP (1) EP1205258A1 (fr)
KR (1) KR20020048376A (fr)
CN (1) CN1365302A (fr)
CA (1) CA2379337A1 (fr)
WO (1) WO2001008814A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3655576B2 (ja) 2001-07-26 2005-06-02 株式会社東芝 液膜形成方法及び半導体装置の製造方法
JP5089969B2 (ja) * 2006-12-04 2012-12-05 武蔵エンジニアリング株式会社 液体材料吐出装置
CN101543810B (zh) * 2008-03-28 2012-04-18 汉能科技有限公司 一种燃料电池涂布装置及涂布方法
EP2161303B1 (fr) * 2008-09-08 2016-07-27 Tecnocap S.p.A. Une composition de plastisol, et une méthode et une usine pour appliquer la composition aux capsules de fermeture de récipients pour créer un joint, et aux capsules construites utilisant la composition, la méthode et l'usine
CN102698926B (zh) * 2012-05-03 2014-06-04 信华精机有限公司 一种uv镜套环自动涂油装置
CN104014940B (zh) * 2014-05-29 2016-03-16 大族激光科技产业集团股份有限公司 陶瓷基板的涂覆钻孔方法、涂层溶胶及涂覆装置
JP6764713B2 (ja) * 2016-07-05 2020-10-07 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法
CN108212690A (zh) * 2018-03-29 2018-06-29 苏州浦灵达自动化科技有限公司 一种机器人涂胶装置
CN110551987A (zh) * 2018-06-04 2019-12-10 至玥腾风科技投资集团有限公司 环形单晶无机非金属部件的制作方法、设备及飞轮
CN108890122B (zh) * 2018-07-28 2020-10-30 翔声科技（厦门）有限公司 一种陶瓷基板的划线方法
CN109482429A (zh) * 2018-12-20 2019-03-19 东莞市微应变传感科技有限公司 一种全自动离心均胶机
CN110090771A (zh) * 2019-06-05 2019-08-06 舜宇光学(中山)有限公司 镜头部品自动涂油装置
CN111672720B (zh) * 2020-06-29 2022-09-06 沈阳芯源微电子设备股份有限公司 喷涂方法
CN115007402B (zh) * 2022-04-13 2024-05-31 深圳市安优达自控设备有限公司 一种自动点胶贴装装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH047816A (ja) * 1990-04-26 1992-01-13 Sony Corp レジスト塗布方法
JPH0555134A (ja) * 1991-08-26 1993-03-05 Mitsubishi Electric Corp 半導体素子の製造方法
JPH05335298A (ja) * 1992-05-29 1993-12-17 Tanaka Kikinzoku Kogyo Kk 液体感光性レジストの塗布方法
SG130022A1 (en) * 1993-03-25 2007-03-20 Tokyo Electron Ltd Method of forming coating film and apparatus therefor

Also Published As

Publication number Publication date
CN1365302A (zh) 2002-08-21
WO2001008814A1 (fr) 2001-02-08
EP1205258A1 (fr) 2002-05-15
KR20020048376A (ko) 2002-06-22

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Legal Events

Date Code Title Description
FZDE Discontinued