CA2379077A1 - Filtre optique interferentiel a bande etroite - Google Patents

Filtre optique interferentiel a bande etroite Download PDF

Info

Publication number
CA2379077A1
CA2379077A1 CA002379077A CA2379077A CA2379077A1 CA 2379077 A1 CA2379077 A1 CA 2379077A1 CA 002379077 A CA002379077 A CA 002379077A CA 2379077 A CA2379077 A CA 2379077A CA 2379077 A1 CA2379077 A1 CA 2379077A1
Authority
CA
Canada
Prior art keywords
layer
layers
lambda
thickness
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002379077A
Other languages
English (en)
Inventor
Burkhard Danielzik
Rudiger Hentschel
Ulf Brauneck
Markus Kuhr
Bernd Metz
Stefan Bauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Carl Zeiss AG
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2379077A1 publication Critical patent/CA2379077A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/281Interference filters designed for the infrared light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/285Interference filters comprising deposited thin solid films
    • G02B5/288Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Filters (AREA)
CA002379077A 1999-07-12 2000-07-10 Filtre optique interferentiel a bande etroite Abandoned CA2379077A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19932082.9 1999-07-12
DE1999132082 DE19932082A1 (de) 1999-07-12 1999-07-12 Interferenzoptisches Schmalbandfilter
PCT/EP2000/006518 WO2001004668A1 (fr) 1999-07-12 2000-07-10 Filtre optique interferentiel a bande etroite

Publications (1)

Publication Number Publication Date
CA2379077A1 true CA2379077A1 (fr) 2001-01-18

Family

ID=7914238

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002379077A Abandoned CA2379077A1 (fr) 1999-07-12 2000-07-10 Filtre optique interferentiel a bande etroite

Country Status (7)

Country Link
EP (1) EP1194799A1 (fr)
CN (1) CN1360681A (fr)
AU (2) AU5826800A (fr)
CA (1) CA2379077A1 (fr)
DE (1) DE19932082A1 (fr)
TW (1) TW452666B (fr)
WO (2) WO2001004668A1 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10143145C1 (de) * 2001-09-03 2002-10-31 Fraunhofer Ges Forschung Verfahren und Einrichtung zur Herstellung von Schichtsystemen für optische Präzisionselemente
US20080037127A1 (en) * 2006-03-31 2008-02-14 3M Innovative Properties Company Wide angle mirror system
DK2251453T3 (da) 2009-05-13 2014-07-07 Sio2 Medical Products Inc Beholderholder
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
CN103930595A (zh) 2011-11-11 2014-07-16 Sio2医药产品公司 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备
CN102759768B (zh) * 2012-07-31 2014-12-31 杭州科汀光学技术有限公司 一种光学滤波器
CA2890066C (fr) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Procedes d'inspection de revetement
EP2920567B1 (fr) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Procédé et appareil pour détecter des caractéristiques d'intégrité de revêtement de barrière rapide
JP6382830B2 (ja) 2012-11-30 2018-08-29 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 医療シリンジ、カートリッジ等上でのpecvd堆積の均一性制御
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
CN110074968B (zh) 2013-03-11 2021-12-21 Sio2医药产品公司 涂布包装材料
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
EP3122917B1 (fr) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Revêtements antistatiques pour des récipients en plastique
JP2018523538A (ja) 2015-08-18 2018-08-23 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 低酸素透過速度を有する薬剤包装及び他の包装
CN106597591B (zh) * 2017-01-25 2022-07-26 杭州科汀光学技术有限公司 一种高截止、低波纹的准矩形窄带滤光片
CN111399104B (zh) * 2020-04-26 2021-02-09 腾景科技股份有限公司 一种双峰超窄带陡峭光学干涉滤波器及其制作方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH557546A (de) * 1972-10-19 1974-12-31 Balzers Patent Beteilig Ag Aus einer mehrzahl von einfachen oder zusammengesetzen (lambda)/4-schichten bestehender reflexionsvermindernder belag.
US4373782A (en) * 1980-06-03 1983-02-15 Optical Coating Laboratory, Inc. Non-polarizing thin film edge filter
SU1125588A1 (ru) * 1982-01-27 1984-11-23 Киевское Научно-Производственное Объединение "Аналитприбор" Интерференционный отрезающий фильтр
JPS619604A (ja) * 1984-06-23 1986-01-17 Koshin Kogaku:Kk 誘電体多層膜フイルタ
US4793669A (en) * 1987-09-11 1988-12-27 Coherent, Inc. Multilayer optical filter for producing colored reflected light and neutral transmission
US4896928A (en) * 1988-08-29 1990-01-30 Coherent, Inc. Chromatically invariant multilayer dielectric thin film coating
JP3172537B2 (ja) * 1994-03-29 2001-06-04 カール−ツァイス−スティフツング 湾曲した基材のコーティング用pcvd法及び装置
DE4445427C2 (de) * 1994-12-20 1997-04-30 Schott Glaswerke Plasma-CVD-Verfahren zur Herstellung einer Gradientenschicht
US6011652A (en) * 1997-12-23 2000-01-04 Cushing; David Henry Multilayer thin film dielectric bandpass filter

Also Published As

Publication number Publication date
WO2001004668A1 (fr) 2001-01-18
AU5826800A (en) 2001-01-30
WO2001004669A1 (fr) 2001-01-18
AU6690600A (en) 2001-01-30
EP1194799A1 (fr) 2002-04-10
TW452666B (en) 2001-09-01
CN1360681A (zh) 2002-07-24
DE19932082A1 (de) 2001-01-18

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Legal Events

Date Code Title Description
FZDE Discontinued