CA2348653A1 - Hollow cathode array for plasma generation - Google Patents

Hollow cathode array for plasma generation Download PDF

Info

Publication number
CA2348653A1
CA2348653A1 CA002348653A CA2348653A CA2348653A1 CA 2348653 A1 CA2348653 A1 CA 2348653A1 CA 002348653 A CA002348653 A CA 002348653A CA 2348653 A CA2348653 A CA 2348653A CA 2348653 A1 CA2348653 A1 CA 2348653A1
Authority
CA
Canada
Prior art keywords
plasma
cells
cathode assembly
substrate
generating apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002348653A
Other languages
English (en)
French (fr)
Inventor
Tyau-Jeen Lin
Jyh-Hong Eric Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2348653A1 publication Critical patent/CA2348653A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32596—Hollow cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
CA002348653A 1998-12-07 1999-12-06 Hollow cathode array for plasma generation Abandoned CA2348653A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11111698P 1998-12-07 1998-12-07
US60/111,116 1998-12-07
PCT/US1999/028841 WO2000034979A1 (en) 1998-12-07 1999-12-06 Hollow cathode array for plasma generation

Publications (1)

Publication Number Publication Date
CA2348653A1 true CA2348653A1 (en) 2000-06-15

Family

ID=22336697

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002348653A Abandoned CA2348653A1 (en) 1998-12-07 1999-12-06 Hollow cathode array for plasma generation

Country Status (8)

Country Link
EP (1) EP1141996A1 (zh)
JP (1) JP2002532828A (zh)
KR (1) KR20010101137A (zh)
CN (1) CN1331836A (zh)
AU (1) AU1842200A (zh)
CA (1) CA2348653A1 (zh)
TW (1) TW470995B (zh)
WO (1) WO2000034979A1 (zh)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10120405B4 (de) * 2001-04-25 2008-08-21 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung eines Niedertemperatur-Plasmas
KR20040022639A (ko) * 2002-09-09 2004-03-16 주식회사 네오바이오텍 탄소계 물질 박막 형성방법
DE10256663B3 (de) * 2002-12-04 2005-10-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungslampe für EUV-Strahlung
SE529058C2 (sv) 2005-07-08 2007-04-17 Plasma Surgical Invest Ltd Plasmaalstrande anordning, plasmakirurgisk anordning, användning av en plasmakirurgisk anordning och förfarande för att bilda ett plasma
SE529056C2 (sv) 2005-07-08 2007-04-17 Plasma Surgical Invest Ltd Plasmaalstrande anordning, plasmakirurgisk anordning och användning av en plasmakirurgisk anordning
SE529053C2 (sv) 2005-07-08 2007-04-17 Plasma Surgical Invest Ltd Plasmaalstrande anordning, plasmakirurgisk anordning och användning av en plasmakirurgisk anordning
JP4984285B2 (ja) * 2007-01-23 2012-07-25 独立行政法人産業技術総合研究所 高密度プラズマ処理装置
US8742282B2 (en) * 2007-04-16 2014-06-03 General Electric Company Ablative plasma gun
CA2695902C (en) * 2007-08-06 2016-01-05 Plasma Surgical Investments Limited Cathode assembly and method for pulsed plasma generation
US8735766B2 (en) 2007-08-06 2014-05-27 Plasma Surgical Investments Limited Cathode assembly and method for pulsed plasma generation
US8613742B2 (en) 2010-01-29 2013-12-24 Plasma Surgical Investments Limited Methods of sealing vessels using plasma
US9089319B2 (en) 2010-07-22 2015-07-28 Plasma Surgical Investments Limited Volumetrically oscillating plasma flows
JP5702968B2 (ja) 2010-08-11 2015-04-15 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ制御方法
DE102012201956A1 (de) * 2012-02-09 2013-08-14 Krones Ag Hohlkathoden-Gaslanze für die Innenbeschichtung von Behältern
KR101506305B1 (ko) * 2012-12-17 2015-03-26 한국생산기술연구원 중공관 단위체로 구성된 음극을 포함하는 질화처리용 플라즈마 장치 및 그를 이용한 플라즈마 질화처리 방법
CN103730320B (zh) * 2013-12-23 2016-09-28 苏州市奥普斯等离子体科技有限公司 一种微空心阴极等离子体处理装置
US20160093477A1 (en) 2014-09-25 2016-03-31 Apple Inc. Durable 3d geometry conformal anti-reflection coating
WO2022047227A2 (en) 2020-08-28 2022-03-03 Plasma Surgical Investments Limited Systems, methods, and devices for generating predominantly radially expanded plasma flow

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4637853A (en) * 1985-07-29 1987-01-20 International Business Machines Corporation Hollow cathode enhanced plasma for high rate reactive ion etching and deposition
JPS644481A (en) * 1987-06-24 1989-01-09 Minoru Sugawara Parallel-plate discharge electrode
JPH0266941A (ja) * 1988-08-31 1990-03-07 Nec Corp エッチング装置
SE503260C2 (sv) * 1992-06-15 1996-04-29 Akerlund & Rausing Ab Förfarande för framställning av en barriärfilm medelst plasmabehandling
CA2126731A1 (en) * 1993-07-12 1995-01-13 Frank Jansen Hollow cathode array and method of cleaning sheet stock therewith
DE19755902C1 (de) * 1997-12-08 1999-05-12 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Vergüten von Oberflächen

Also Published As

Publication number Publication date
WO2000034979A1 (en) 2000-06-15
CN1331836A (zh) 2002-01-16
TW470995B (en) 2002-01-01
JP2002532828A (ja) 2002-10-02
AU1842200A (en) 2000-06-26
EP1141996A1 (en) 2001-10-10
KR20010101137A (ko) 2001-11-14

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