CA2326202C - Method and apparatus for deposition of biaxially textured coatings - Google Patents
Method and apparatus for deposition of biaxially textured coatings Download PDFInfo
- Publication number
- CA2326202C CA2326202C CA002326202A CA2326202A CA2326202C CA 2326202 C CA2326202 C CA 2326202C CA 002326202 A CA002326202 A CA 002326202A CA 2326202 A CA2326202 A CA 2326202A CA 2326202 C CA2326202 C CA 2326202C
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- flux
- energetic particles
- target
- directed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Moulding By Coating Moulds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98201006 | 1998-03-31 | ||
EP98201006.8 | 1998-03-31 | ||
PCT/EP1999/002168 WO1999050471A1 (en) | 1998-03-31 | 1999-03-30 | Method and apparatus for deposition of biaxially textured coatings |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2326202A1 CA2326202A1 (en) | 1999-10-07 |
CA2326202C true CA2326202C (en) | 2008-06-17 |
Family
ID=8233538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002326202A Expired - Fee Related CA2326202C (en) | 1998-03-31 | 1999-03-30 | Method and apparatus for deposition of biaxially textured coatings |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1070154A1 (de) |
JP (1) | JP2002509988A (de) |
KR (1) | KR20010042128A (de) |
CN (1) | CN1295628A (de) |
AU (1) | AU746645C (de) |
CA (1) | CA2326202C (de) |
RU (1) | RU2224050C2 (de) |
WO (1) | WO1999050471A1 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100352976B1 (ko) * | 1999-12-24 | 2002-09-18 | 한국기계연구원 | 전기도금법에 의한 2축 집합조직을 갖는 니켈 도금층 및 그 제조방법 |
EA200601832A1 (ru) * | 2006-08-16 | 2008-02-28 | Владимир Яковлевич ШИРИПОВ | Способ ионной обработки поверхности диэлектрика и устройство для осуществления способа |
KR20120042748A (ko) | 2009-05-13 | 2012-05-03 | 씨브이 홀딩스 엘엘씨 | 코팅된 표면 검사를 위한 가스제거 방법 |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
KR101794586B1 (ko) | 2011-05-23 | 2017-11-08 | 삼성디스플레이 주식회사 | 스퍼터링용 분할 타겟 장치 및 그것을 이용한 스퍼터링 방법 |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
JP6095678B2 (ja) | 2011-11-11 | 2017-03-15 | エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド | 薬剤パッケージ用の不動態化、pH保護又は滑性皮膜、被覆プロセス及び装置 |
RU2502151C1 (ru) * | 2012-04-24 | 2013-12-20 | Федеральное государственное бюджетное учреждение науки Институт общей физики им. А.М. Прохорова Российской академии наук (ИОФ РАН) | Способ изготовления фотокатода и устройство для изготовления фотокатода |
EP2846755A1 (de) | 2012-05-09 | 2015-03-18 | SiO2 Medical Products, Inc. | Saccharidschutzschicht für eine arzneimittelverpackung |
CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
EP2920567B1 (de) | 2012-11-16 | 2020-08-19 | SiO2 Medical Products, Inc. | Verfahren und vorrichtung zur erkennung von schnellen sperrbeschichtungsintegritätseigenschaften |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
WO2014085346A1 (en) | 2012-11-30 | 2014-06-05 | Sio2 Medical Products, Inc. | Hollow body with inside coating |
EP2956258A1 (de) | 2013-02-15 | 2015-12-23 | Regents of the University of Minnesota | Teilchenfunktionalisierung |
EP2961858B1 (de) | 2013-03-01 | 2022-09-07 | Si02 Medical Products, Inc. | Beschichtete spritze. |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
CA2904611C (en) | 2013-03-11 | 2021-11-23 | Sio2 Medical Products, Inc. | Coated packaging |
EP2971227B1 (de) | 2013-03-15 | 2017-11-15 | Si02 Medical Products, Inc. | Beschichtungsverfahren. |
EP3042978B1 (de) * | 2013-09-04 | 2020-07-29 | Toyo Kohan Co., Ltd. | Geschichtetes substrat für epitaxialwachstum und verfahren zur herstellung davon |
US11066745B2 (en) | 2014-03-28 | 2021-07-20 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
JP6526071B6 (ja) * | 2014-06-23 | 2019-06-26 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 層を堆積する方法、トランジスタを製造する方法、電子デバイスのための層スタック、及び電子デバイス |
CN104109841B (zh) * | 2014-07-23 | 2016-08-24 | 中国科学院上海光学精密机械研究所 | 磁控溅射倾斜沉积镀膜装置 |
CN104593742B (zh) * | 2015-01-20 | 2017-02-22 | 清华大学深圳研究生院 | 一种制备具有双轴织构的氧化物薄膜的设备和方法 |
CA2995225C (en) | 2015-08-18 | 2023-08-29 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
RU2620534C2 (ru) * | 2015-09-08 | 2017-05-26 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Казанский (Приволжский) федеральный университет" (ФГАОУВПО КФУ) | Способ нанесения покрытий и устройство для его осуществления |
CN113808935B (zh) * | 2020-06-16 | 2023-12-15 | 中微半导体设备(上海)股份有限公司 | 耐腐蚀涂层形成方法和装置、等离子体零部件和反应装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4333022A1 (de) * | 1993-09-29 | 1995-03-30 | Ronald Dipl Phys Gottzein | Verfahren zur Herstellung bitexturierter Dünnfilme auf amorphen oder beliebig strukturierten Substraten |
DE4436285C2 (de) * | 1994-10-11 | 2002-01-10 | Univ Stuttgart | Verfahren und Vorrichtung zum Aufbringen von Orientierungsschichten auf ein Substrat zum Ausrichten von Flüssigkristallmolekülen |
DE19641584C1 (de) * | 1996-09-30 | 1998-01-08 | Siemens Ag | Anordnung und Verfahren zum Aufbringen einer dünnen Schicht auf ein Substrat |
-
1999
- 1999-03-30 AU AU34188/99A patent/AU746645C/en not_active Ceased
- 1999-03-30 KR KR1020007010530A patent/KR20010042128A/ko not_active Application Discontinuation
- 1999-03-30 RU RU2000127113/02A patent/RU2224050C2/ru not_active IP Right Cessation
- 1999-03-30 WO PCT/EP1999/002168 patent/WO1999050471A1/en not_active Application Discontinuation
- 1999-03-30 CA CA002326202A patent/CA2326202C/en not_active Expired - Fee Related
- 1999-03-30 JP JP2000541356A patent/JP2002509988A/ja not_active Withdrawn
- 1999-03-30 EP EP99915721A patent/EP1070154A1/de not_active Withdrawn
- 1999-03-30 CN CN99804648A patent/CN1295628A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
RU2224050C2 (ru) | 2004-02-20 |
JP2002509988A (ja) | 2002-04-02 |
AU746645B2 (en) | 2002-05-02 |
CA2326202A1 (en) | 1999-10-07 |
CN1295628A (zh) | 2001-05-16 |
WO1999050471A1 (en) | 1999-10-07 |
EP1070154A1 (de) | 2001-01-24 |
KR20010042128A (ko) | 2001-05-25 |
AU746645C (en) | 2003-02-20 |
AU3418899A (en) | 1999-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |