CA2241055A1 - Method and circuit arrangement for generating current pulses for electrolytic metal deposition - Google Patents
Method and circuit arrangement for generating current pulses for electrolytic metal deposition Download PDFInfo
- Publication number
- CA2241055A1 CA2241055A1 CA002241055A CA2241055A CA2241055A1 CA 2241055 A1 CA2241055 A1 CA 2241055A1 CA 002241055 A CA002241055 A CA 002241055A CA 2241055 A CA2241055 A CA 2241055A CA 2241055 A1 CA2241055 A1 CA 2241055A1
- Authority
- CA
- Canada
- Prior art keywords
- current
- pulse
- electroplating
- bath
- direct current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000001465 metallisation Methods 0.000 title claims description 7
- 238000009713 electroplating Methods 0.000 claims abstract description 75
- 238000004804 winding Methods 0.000 claims abstract description 25
- 239000003990 capacitor Substances 0.000 claims abstract description 18
- 230000001939 inductive effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000007747 plating Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000036961 partial effect Effects 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 150000002739 metals Chemical group 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 101000841325 Homo sapiens Urotensin-2 Proteins 0.000 description 1
- 102100029097 Urotensin-2 Human genes 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000001976 improved effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrolytic Production Of Metals (AREA)
- Ac-Ac Conversion (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19547948A DE19547948C1 (de) | 1995-12-21 | 1995-12-21 | Verfahren und Schaltungsanordnung zur Erzeugung von Strompulsen zur elektrolytischen Metallabscheidung |
| DE19547948.3-45 | 1995-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2241055A1 true CA2241055A1 (en) | 1997-07-03 |
Family
ID=7780889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002241055A Abandoned CA2241055A1 (en) | 1995-12-21 | 1996-09-27 | Method and circuit arrangement for generating current pulses for electrolytic metal deposition |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US6132584A (enExample) |
| EP (1) | EP0868545B1 (enExample) |
| JP (1) | JP4028892B2 (enExample) |
| KR (1) | KR100465545B1 (enExample) |
| CN (1) | CN1093337C (enExample) |
| AT (1) | ATE186081T1 (enExample) |
| BR (1) | BR9612163A (enExample) |
| CA (1) | CA2241055A1 (enExample) |
| CZ (1) | CZ290052B6 (enExample) |
| DE (2) | DE19547948C1 (enExample) |
| ES (1) | ES2139388T3 (enExample) |
| WO (1) | WO1997023665A1 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6174425B1 (en) | 1997-05-14 | 2001-01-16 | Motorola, Inc. | Process for depositing a layer of material over a substrate |
| US6946065B1 (en) * | 1998-10-26 | 2005-09-20 | Novellus Systems, Inc. | Process for electroplating metal into microscopic recessed features |
| US6793796B2 (en) | 1998-10-26 | 2004-09-21 | Novellus Systems, Inc. | Electroplating process for avoiding defects in metal features of integrated circuit devices |
| US6344419B1 (en) | 1999-12-03 | 2002-02-05 | Applied Materials, Inc. | Pulsed-mode RF bias for sidewall coverage improvement |
| US6231743B1 (en) | 2000-01-03 | 2001-05-15 | Motorola, Inc. | Method for forming a semiconductor device |
| KR20020078307A (ko) | 2001-04-09 | 2002-10-18 | 주식회사 하이닉스반도체 | 반도체 소자의 커패시터 제조 방법 |
| DE10259365A1 (de) | 2002-04-08 | 2003-10-30 | Siemens Ag | Vorrichtung und Verfahren zur Entfernung von Oberflächenbereichen eines Bauteils |
| NL1022786C2 (nl) * | 2003-02-26 | 2004-08-30 | Tendris Solutions Bv | Omzetschakeling, systeem en werkwijze voor het uitvoeren van een elektrochemisch proces. |
| DE10311575B4 (de) * | 2003-03-10 | 2007-03-22 | Atotech Deutschland Gmbh | Verfahren zum elektrolytischen Metallisieren von Werkstücken mit Bohrungen mit einem hohen Aspektverhältnis |
| US20070068821A1 (en) * | 2005-09-27 | 2007-03-29 | Takahisa Hirasawa | Method of manufacturing chromium plated article and chromium plating apparatus |
| RU2248416C1 (ru) * | 2003-11-04 | 2005-03-20 | Никифоров Алексей Александрович | Устройство для микродугового оксидирования |
| US20050157475A1 (en) * | 2004-01-15 | 2005-07-21 | Endicott Interconnect Technologies, Inc. | Method of making printed circuit board with electroplated conductive through holes and board resulting therefrom |
| DE102004045451B4 (de) * | 2004-09-20 | 2007-05-03 | Atotech Deutschland Gmbh | Galvanisches Verfahren zum Füllen von Durchgangslöchern mit Metallen, insbesondere von Leiterplatten mit Kupfer |
| SE0403047D0 (sv) * | 2004-12-14 | 2004-12-14 | Polymer Kompositer I Goeteborg | Pulse-plating method and apparatus |
| PL377451A1 (pl) * | 2005-10-05 | 2007-04-16 | Instytut Wysokich Ciśnień PAN | Sposób prowadzenia reakcji i reaktor chemiczny |
| EP1890004A1 (de) | 2006-08-08 | 2008-02-20 | Siemens Aktiengesellschaft | Verfahren zum Herstellen einer Nutzschicht aus wiederverwendetem Schichtmaterial |
| DE102006044416A1 (de) * | 2006-09-18 | 2008-03-27 | Siemens Ag | Verfahren zum elektrochemischen Be- oder Entschichten von Bauteilen |
| US20080271995A1 (en) * | 2007-05-03 | 2008-11-06 | Sergey Savastiouk | Agitation of electrolytic solution in electrodeposition |
| US8603864B2 (en) | 2008-09-11 | 2013-12-10 | Infineon Technologies Ag | Method of fabricating a semiconductor device |
| US11225727B2 (en) | 2008-11-07 | 2022-01-18 | Lam Research Corporation | Control of current density in an electroplating apparatus |
| US10011917B2 (en) | 2008-11-07 | 2018-07-03 | Lam Research Corporation | Control of current density in an electroplating apparatus |
| US9011706B2 (en) * | 2008-12-16 | 2015-04-21 | City University Of Hong Kong | Method of making foraminous microstructures |
| US9385035B2 (en) | 2010-05-24 | 2016-07-05 | Novellus Systems, Inc. | Current ramping and current pulsing entry of substrates for electroplating |
| JP6161863B2 (ja) * | 2010-12-28 | 2017-07-12 | 株式会社荏原製作所 | 電気めっき方法 |
| US9028666B2 (en) | 2011-05-17 | 2015-05-12 | Novellus Systems, Inc. | Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath |
| CN102277603A (zh) * | 2011-08-03 | 2011-12-14 | 深圳大学 | 一种感应热/电沉积制备涂层或薄膜的装置及方法 |
| PE20171124A1 (es) * | 2013-11-19 | 2017-08-08 | Hecker Electronica Potencia Y Procesos S A | Proceso de superposicion de corriente alterna sobre la corriente continua para procesos de electroobtencion o electrorefinacion de cobre u otros productos, en que la fuente de corriente alterna se conecta entre dos celdas consecutivas del grupo de celdas electroliticas utilizando un inductor para inyectar corriente alterna y un condensador para cerrar el circuito electrico |
| EP3029178A1 (en) | 2014-12-05 | 2016-06-08 | ATOTECH Deutschland GmbH | Method and apparatus for electroplating a metal onto a substrate |
| SG11202005062SA (en) | 2016-07-13 | 2020-06-29 | Alligant Scientific Llc | Electrochemical methods, devices and compositions |
| RU2722754C1 (ru) * | 2019-04-23 | 2020-06-03 | Общество с ограниченной ответственностью "Керамик тех" (ООО "Керамик тех") | Устройство для формирования электрохимическим оксидированием покрытий на вентильных металлах или сплавах |
| CN114836797B (zh) * | 2022-05-12 | 2023-08-29 | 广州市慧科高新材料科技有限公司 | 一种基于脉冲搭桥的通孔填孔电镀工艺 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3616434A (en) * | 1968-04-18 | 1971-10-26 | Novachrome Inc | Apparatus with power source for plating |
| US3959088A (en) * | 1975-03-19 | 1976-05-25 | The United States Of America As Represented By The Secretary Of The Army | Method and apparatus for generating high amperage pulses from an A-C power source |
| CH629542A5 (de) * | 1976-09-01 | 1982-04-30 | Inoue Japax Res | Verfahren und vorrichtung zur galvanischen materialablagerung. |
| US4208254A (en) * | 1976-09-22 | 1980-06-17 | Satoshi Ichioka | Method of plating an iron-cobalt alloy on a substrate |
| US4517059A (en) * | 1981-07-31 | 1985-05-14 | The Boeing Company | Automated alternating polarity direct current pulse electrolytic processing of metals |
| GB8801827D0 (en) * | 1988-01-27 | 1988-02-24 | Jct Controls Ltd | Improvements in electrochemical processes |
| DE4005346A1 (de) * | 1990-02-20 | 1991-08-22 | Siemens Ag | Verfahren zur erzeugung von hochfrequenten strompulsen mit steilen pulsflanken in galvanikanlagen und versorgungsschaltung zur durchfuehrung des verfahrens |
-
1995
- 1995-12-21 DE DE19547948A patent/DE19547948C1/de not_active Expired - Fee Related
-
1996
- 1996-09-27 WO PCT/EP1996/004232 patent/WO1997023665A1/de not_active Ceased
- 1996-09-27 ES ES96934478T patent/ES2139388T3/es not_active Expired - Lifetime
- 1996-09-27 JP JP52324197A patent/JP4028892B2/ja not_active Expired - Fee Related
- 1996-09-27 DE DE59603510T patent/DE59603510D1/de not_active Expired - Fee Related
- 1996-09-27 AT AT96934478T patent/ATE186081T1/de not_active IP Right Cessation
- 1996-09-27 BR BR9612163A patent/BR9612163A/pt not_active Application Discontinuation
- 1996-09-27 CN CN96199166A patent/CN1093337C/zh not_active Expired - Fee Related
- 1996-09-27 KR KR10-1998-0704072A patent/KR100465545B1/ko not_active Expired - Fee Related
- 1996-09-27 CA CA002241055A patent/CA2241055A1/en not_active Abandoned
- 1996-09-27 CZ CZ19981700A patent/CZ290052B6/cs not_active IP Right Cessation
- 1996-09-27 US US09/091,136 patent/US6132584A/en not_active Expired - Fee Related
- 1996-09-27 EP EP96934478A patent/EP0868545B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| HK1017392A1 (en) | 1999-11-19 |
| US6132584A (en) | 2000-10-17 |
| KR19990071793A (ko) | 1999-09-27 |
| ATE186081T1 (de) | 1999-11-15 |
| DE19547948C1 (de) | 1996-11-21 |
| EP0868545A1 (de) | 1998-10-07 |
| KR100465545B1 (ko) | 2005-02-28 |
| DE59603510D1 (de) | 1999-12-02 |
| BR9612163A (pt) | 1999-07-13 |
| ES2139388T3 (es) | 2000-02-01 |
| CN1205745A (zh) | 1999-01-20 |
| WO1997023665A1 (de) | 1997-07-03 |
| JP4028892B2 (ja) | 2007-12-26 |
| JP2000505145A (ja) | 2000-04-25 |
| CN1093337C (zh) | 2002-10-23 |
| CZ290052B6 (cs) | 2002-05-15 |
| CZ170098A3 (cs) | 1998-10-14 |
| EP0868545B1 (de) | 1999-10-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |