CA2113794C - Filtre interferentiel et sa methode de fabrication - Google Patents

Filtre interferentiel et sa methode de fabrication

Info

Publication number
CA2113794C
CA2113794C CA 2113794 CA2113794A CA2113794C CA 2113794 C CA2113794 C CA 2113794C CA 2113794 CA2113794 CA 2113794 CA 2113794 A CA2113794 A CA 2113794A CA 2113794 C CA2113794 C CA 2113794C
Authority
CA
Canada
Prior art keywords
evaporation
substrate
specific
refractive index
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2113794
Other languages
English (en)
Other versions
CA2113794A1 (fr
Inventor
Daikou Tei
Naoyuki Mekada
Masao Sadamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Santec Corp
Original Assignee
Santec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Santec Corp filed Critical Santec Corp
Publication of CA2113794A1 publication Critical patent/CA2113794A1/fr
Application granted granted Critical
Publication of CA2113794C publication Critical patent/CA2113794C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Physical Vapour Deposition (AREA)
CA 2113794 1993-01-20 1994-01-19 Filtre interferentiel et sa methode de fabrication Expired - Fee Related CA2113794C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPHEI5-26314 1993-01-20
JP2631493A JPH06265722A (ja) 1993-01-20 1993-01-20 波長可変型干渉光フィルタとその製造方法及び波長可変型干渉光フィルタ装置

Publications (2)

Publication Number Publication Date
CA2113794A1 CA2113794A1 (fr) 1994-07-21
CA2113794C true CA2113794C (fr) 1999-09-21

Family

ID=12189922

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2113794 Expired - Fee Related CA2113794C (fr) 1993-01-20 1994-01-19 Filtre interferentiel et sa methode de fabrication

Country Status (2)

Country Link
JP (1) JPH06265722A (fr)
CA (1) CA2113794C (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09293267A (ja) * 1996-04-23 1997-11-11 Minebea Co Ltd 記録再生装置
US6112005A (en) * 1997-11-12 2000-08-29 Alliance Fiber Optics Products, Inc. Filter device for use with light and method making the same
JP2001111488A (ja) * 1999-10-01 2001-04-20 Nippon Telegr & Teleph Corp <Ntt> Ｗｄｍ信号分波装置
JP2005043755A (ja) * 2003-07-24 2005-02-17 Seiko Epson Corp 光学多層膜フィルタ、光学多層膜フィルタの製造方法、光学ローパスフィルタ、及び電子機器装置
CN100385264C (zh) * 2004-11-05 2008-04-30 中国科学院上海技术物理研究所 集成窄带滤光片
JP4760011B2 (ja) * 2004-12-24 2011-08-31 セイコーエプソン株式会社 光学部材
US8441710B2 (en) * 2010-01-08 2013-05-14 Semrock, Inc. Tunable thin-film filter
CN113166943A (zh) * 2018-12-17 2021-07-23 应用材料公司 用于透明基板的背侧涂层

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54141149A (en) * 1978-04-24 1979-11-02 Nec Corp Interference filter
JPS5945406A (ja) * 1982-09-08 1984-03-14 Ulvac Corp 光学フイルタ
JPS5972861A (ja) * 1982-10-19 1984-04-24 Canon Inc 画像読取り装置
JPS62141508A (ja) * 1985-12-16 1987-06-25 Toshiba Corp 光部品
JPS62164003A (ja) * 1986-01-14 1987-07-20 Toshiba Corp 光部品
JPS6424202A (en) * 1987-07-21 1989-01-26 Brother Ind Ltd Color separation device
JPH04233501A (ja) * 1990-12-28 1992-08-21 Fujitsu Ltd 投射型表示装置の波長フィルタ及びその製造装置
JPH055805A (ja) * 1991-06-27 1993-01-14 Mitsubishi Cable Ind Ltd 波長可変フイルタモジユール
JPH055806A (ja) * 1991-06-27 1993-01-14 Mitsubishi Cable Ind Ltd 光フアイバ増幅器用の信号光透過フイルタモジユール
JP4126201B2 (ja) * 2002-06-04 2008-07-30 アサヒビール株式会社 ラップラウンドケース

Also Published As

Publication number Publication date
CA2113794A1 (fr) 1994-07-21
JPH06265722A (ja) 1994-09-22

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