CA2113794A1 - Filtre interferentiel et sa methode de fabrication - Google Patents
Filtre interferentiel et sa methode de fabricationInfo
- Publication number
- CA2113794A1 CA2113794A1 CA 2113794 CA2113794A CA2113794A1 CA 2113794 A1 CA2113794 A1 CA 2113794A1 CA 2113794 CA2113794 CA 2113794 CA 2113794 A CA2113794 A CA 2113794A CA 2113794 A1 CA2113794 A1 CA 2113794A1
- Authority
- CA
- Canada
- Prior art keywords
- film
- multiple layer
- wavelength
- making
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPHEI5-26314 | 1993-01-20 | ||
JP2631493A JPH06265722A (ja) | 1993-01-20 | 1993-01-20 | 波長可変型干渉光フィルタとその製造方法及び波長可変型干渉光フィルタ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2113794A1 true CA2113794A1 (fr) | 1994-07-21 |
CA2113794C CA2113794C (fr) | 1999-09-21 |
Family
ID=12189922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2113794 Expired - Fee Related CA2113794C (fr) | 1993-01-20 | 1994-01-19 | Filtre interferentiel et sa methode de fabrication |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH06265722A (fr) |
CA (1) | CA2113794C (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113166943A (zh) * | 2018-12-17 | 2021-07-23 | 应用材料公司 | 用于透明基板的背侧涂层 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09293267A (ja) * | 1996-04-23 | 1997-11-11 | Minebea Co Ltd | 記録再生装置 |
US6112005A (en) * | 1997-11-12 | 2000-08-29 | Alliance Fiber Optics Products, Inc. | Filter device for use with light and method making the same |
JP2001111488A (ja) * | 1999-10-01 | 2001-04-20 | Nippon Telegr & Teleph Corp <Ntt> | Wdm信号分波装置 |
JP2005043755A (ja) * | 2003-07-24 | 2005-02-17 | Seiko Epson Corp | 光学多層膜フィルタ、光学多層膜フィルタの製造方法、光学ローパスフィルタ、及び電子機器装置 |
CN100385264C (zh) * | 2004-11-05 | 2008-04-30 | 中国科学院上海技术物理研究所 | 集成窄带滤光片 |
JP4760011B2 (ja) * | 2004-12-24 | 2011-08-31 | セイコーエプソン株式会社 | 光学部材 |
US8441710B2 (en) * | 2010-01-08 | 2013-05-14 | Semrock, Inc. | Tunable thin-film filter |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54141149A (en) * | 1978-04-24 | 1979-11-02 | Nec Corp | Interference filter |
JPS5945406A (ja) * | 1982-09-08 | 1984-03-14 | Ulvac Corp | 光学フイルタ |
JPS5972861A (ja) * | 1982-10-19 | 1984-04-24 | Canon Inc | 画像読取り装置 |
JPS62141508A (ja) * | 1985-12-16 | 1987-06-25 | Toshiba Corp | 光部品 |
JPS62164003A (ja) * | 1986-01-14 | 1987-07-20 | Toshiba Corp | 光部品 |
JPS6424202A (en) * | 1987-07-21 | 1989-01-26 | Brother Ind Ltd | Color separation device |
JPH04233501A (ja) * | 1990-12-28 | 1992-08-21 | Fujitsu Ltd | 投射型表示装置の波長フィルタ及びその製造装置 |
JPH055805A (ja) * | 1991-06-27 | 1993-01-14 | Mitsubishi Cable Ind Ltd | 波長可変フイルタモジユール |
JPH055806A (ja) * | 1991-06-27 | 1993-01-14 | Mitsubishi Cable Ind Ltd | 光フアイバ増幅器用の信号光透過フイルタモジユール |
JP4126201B2 (ja) * | 2002-06-04 | 2008-07-30 | アサヒビール株式会社 | ラップラウンドケース |
-
1993
- 1993-01-20 JP JP2631493A patent/JPH06265722A/ja active Pending
-
1994
- 1994-01-19 CA CA 2113794 patent/CA2113794C/fr not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113166943A (zh) * | 2018-12-17 | 2021-07-23 | 应用材料公司 | 用于透明基板的背侧涂层 |
Also Published As
Publication number | Publication date |
---|---|
CA2113794C (fr) | 1999-09-21 |
JPH06265722A (ja) | 1994-09-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |