CA1268673A - Method of producing transparent, haze-free tin oxide coatings - Google Patents
Method of producing transparent, haze-free tin oxide coatingsInfo
- Publication number
- CA1268673A CA1268673A CA000509005A CA509005A CA1268673A CA 1268673 A CA1268673 A CA 1268673A CA 000509005 A CA000509005 A CA 000509005A CA 509005 A CA509005 A CA 509005A CA 1268673 A CA1268673 A CA 1268673A
- Authority
- CA
- Canada
- Prior art keywords
- tin oxide
- haze
- free
- trichloride
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910001887 tin oxide Inorganic materials 0.000 title claims abstract description 69
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 title claims abstract description 67
- 238000000576 coating method Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000011521 glass Substances 0.000 claims abstract description 36
- UBOGEXSQACVGEC-UHFFFAOYSA-K phenyltin(3+);trichloride Chemical compound Cl[Sn](Cl)(Cl)C1=CC=CC=C1 UBOGEXSQACVGEC-UHFFFAOYSA-K 0.000 claims abstract description 23
- 239000011248 coating agent Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 9
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 claims description 8
- YMLFYGFCXGNERH-UHFFFAOYSA-K butyltin trichloride Chemical compound CCCC[Sn](Cl)(Cl)Cl YMLFYGFCXGNERH-UHFFFAOYSA-K 0.000 claims description 8
- 239000002019 doping agent Substances 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 7
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 5
- DDSPUNTXKUFWTM-UHFFFAOYSA-N oxygen(2-);tin(4+) Chemical compound [O-2].[O-2].[Sn+4] DDSPUNTXKUFWTM-UHFFFAOYSA-N 0.000 abstract description 2
- 230000000873 masking effect Effects 0.000 description 11
- 230000008021 deposition Effects 0.000 description 8
- 239000012159 carrier gas Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- GGAUUQHSCNMCAU-ZXZARUISSA-N (2s,3r)-butane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C[C@H](C(O)=O)[C@H](C(O)=O)CC(O)=O GGAUUQHSCNMCAU-ZXZARUISSA-N 0.000 description 4
- ISKQADXMHQSTHK-UHFFFAOYSA-N [4-(aminomethyl)phenyl]methanamine Chemical compound NCC1=CC=C(CN)C=C1 ISKQADXMHQSTHK-UHFFFAOYSA-N 0.000 description 3
- NPAIMXWXWPJRES-UHFFFAOYSA-N butyltin(3+) Chemical compound CCCC[Sn+3] NPAIMXWXWPJRES-UHFFFAOYSA-N 0.000 description 3
- AYOHIQLKSOJJQH-UHFFFAOYSA-N dibutyltin Chemical compound CCCC[Sn]CCCC AYOHIQLKSOJJQH-UHFFFAOYSA-N 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- ODOPKAJVFRHHGM-UHFFFAOYSA-N phenyltin Chemical compound [Sn]C1=CC=CC=C1 ODOPKAJVFRHHGM-UHFFFAOYSA-N 0.000 description 2
- 150000003606 tin compounds Chemical class 0.000 description 2
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 2
- QAEDZJGFFMLHHQ-UHFFFAOYSA-N trifluoroacetic anhydride Chemical compound FC(F)(F)C(=O)OC(=O)C(F)(F)F QAEDZJGFFMLHHQ-UHFFFAOYSA-N 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 description 1
- LRMSQVBRUNSOJL-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)F LRMSQVBRUNSOJL-UHFFFAOYSA-N 0.000 description 1
- 241001282736 Oriens Species 0.000 description 1
- STSCVKRWJPWALQ-UHFFFAOYSA-N TRIFLUOROACETIC ACID ETHYL ESTER Chemical compound CCOC(=O)C(F)(F)F STSCVKRWJPWALQ-UHFFFAOYSA-N 0.000 description 1
- GCTFWCDSFPMHHS-UHFFFAOYSA-M Tributyltin chloride Chemical compound CCCC[Sn](Cl)(CCCC)CCCC GCTFWCDSFPMHHS-UHFFFAOYSA-M 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- RJGHQTVXGKYATR-UHFFFAOYSA-L dibutyl(dichloro)stannane Chemical compound CCCC[Sn](Cl)(Cl)CCCC RJGHQTVXGKYATR-UHFFFAOYSA-L 0.000 description 1
- PKKGKUDPKRTKLJ-UHFFFAOYSA-L dichloro(dimethyl)stannane Chemical compound C[Sn](C)(Cl)Cl PKKGKUDPKRTKLJ-UHFFFAOYSA-L 0.000 description 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 231100000053 low toxicity Toxicity 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- AFCAKJKUYFLYFK-UHFFFAOYSA-N tetrabutyltin Chemical compound CCCC[Sn](CCCC)(CCCC)CCCC AFCAKJKUYFLYFK-UHFFFAOYSA-N 0.000 description 1
- GOWIXKGLTIIPQR-UHFFFAOYSA-K tribromo(ethyl)stannane Chemical compound CC[Sn](Br)(Br)Br GOWIXKGLTIIPQR-UHFFFAOYSA-K 0.000 description 1
- YFRLQYJXUZRYDN-UHFFFAOYSA-K trichloro(methyl)stannane Chemical compound C[Sn](Cl)(Cl)Cl YFRLQYJXUZRYDN-UHFFFAOYSA-K 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2453—Coating containing SnO2
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Surface Treatment Of Glass (AREA)
- Paints Or Removers (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US733,997 | 1985-05-14 | ||
| US06/733,997 US4600654A (en) | 1985-05-14 | 1985-05-14 | Method of producing transparent, haze-free tin oxide coatings |
| US79302385A | 1985-10-30 | 1985-10-30 | |
| US793,023 | 1985-10-30 | ||
| US06/802,551 US4737388A (en) | 1985-05-14 | 1985-11-27 | Non-iridescent, haze-free infrared reflecting coated glass structures |
| US802,551 | 1985-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1268673A true CA1268673A (en) | 1990-05-08 |
Family
ID=27419186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000509005A Expired - Fee Related CA1268673A (en) | 1985-05-14 | 1986-05-13 | Method of producing transparent, haze-free tin oxide coatings |
Country Status (16)
| Country | Link |
|---|---|
| EP (1) | EP0225342B1 (enExample) |
| KR (1) | KR920007956B1 (enExample) |
| CN (1) | CN1015185B (enExample) |
| AU (1) | AU576676B2 (enExample) |
| BR (1) | BR8606673A (enExample) |
| CA (1) | CA1268673A (enExample) |
| DE (1) | DE3673612D1 (enExample) |
| DK (1) | DK168330B1 (enExample) |
| ES (1) | ES8800365A1 (enExample) |
| FI (1) | FI83416C (enExample) |
| IE (1) | IE58959B1 (enExample) |
| IL (1) | IL78736A (enExample) |
| IN (1) | IN170102B (enExample) |
| MX (1) | MX163869B (enExample) |
| TR (1) | TR23083A (enExample) |
| WO (1) | WO1986006658A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5102721A (en) * | 1987-08-31 | 1992-04-07 | Solarex Corporation | Textured tin oxide |
| US4880664A (en) * | 1987-08-31 | 1989-11-14 | Solarex Corporation | Method of depositing textured tin oxide |
| US5013607A (en) * | 1987-09-30 | 1991-05-07 | Catalysts & Chemicals Industries Co., Ltd. | Transparent conductive ceramic-coated substrate processes for preparing same and uses thereof |
| WO1990002157A1 (fr) * | 1988-08-24 | 1990-03-08 | Catalysts & Chemicals Industries Co., Ltd. | Fluide de revetement formant un revetement ceramique conducteur transparent, materiau de base revetu de ceramique conductrice transparente, production dudit materiau et applications de ce materiau de base revetu de ceramique conductrice transparente |
| JPH02258691A (ja) * | 1989-03-31 | 1990-10-19 | Agency Of Ind Science & Technol | 透明導電膜の製造方法 |
| US5233465A (en) * | 1992-05-27 | 1993-08-03 | The Dow Chemical Company | Visibly transparent infrared reflecting film with color masking |
| DE69904942D1 (de) * | 1998-07-10 | 2003-02-20 | Gilles Merienne | Flüssige cvd-vorläuferverbindung |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3406085A (en) * | 1964-05-11 | 1968-10-15 | Corning Glass Works | Photochromic window |
| US3420693A (en) * | 1964-06-05 | 1969-01-07 | Ball Brothers Co Inc | Glass having dual protective coatings thereon and a method for forming such coatings |
| US3949146A (en) * | 1973-08-24 | 1976-04-06 | Rca Corporation | Process for depositing transparent electrically conductive tin oxide coatings on a substrate |
| US4265974A (en) * | 1976-11-01 | 1981-05-05 | Gordon Roy G | Electrically conductive, infrared reflective, transparent coatings of stannic oxide |
| US4440822A (en) * | 1977-04-04 | 1984-04-03 | Gordon Roy G | Non-iridescent glass structures |
| US4459789A (en) * | 1982-05-20 | 1984-07-17 | Ford Donald F | Window |
| US4590096A (en) * | 1984-12-28 | 1986-05-20 | M&T Chemicals Inc. | Water vapor, reaction rate and deposition rate control of tin oxide film by CVD on glass |
| US4548836A (en) * | 1985-02-25 | 1985-10-22 | Ford Motor Company | Method of making an infrared reflective glass sheet-II |
| US4547400A (en) * | 1985-02-25 | 1985-10-15 | Ford Motor Company | Method of making infrared reflective glass sheet-I |
-
1986
- 1986-04-25 BR BR8606673A patent/BR8606673A/pt not_active IP Right Cessation
- 1986-04-25 WO PCT/US1986/000890 patent/WO1986006658A1/en not_active Ceased
- 1986-04-25 KR KR1019870700025A patent/KR920007956B1/ko not_active Expired
- 1986-04-25 AU AU58103/86A patent/AU576676B2/en not_active Ceased
- 1986-04-25 EP EP86903044A patent/EP0225342B1/en not_active Expired - Lifetime
- 1986-04-25 DE DE8686903044T patent/DE3673612D1/de not_active Expired - Fee Related
- 1986-04-29 IN IN384/DEL/86A patent/IN170102B/en unknown
- 1986-05-08 MX MX2429A patent/MX163869B/es unknown
- 1986-05-08 IL IL78736A patent/IL78736A/xx not_active IP Right Cessation
- 1986-05-13 IE IE126186A patent/IE58959B1/en not_active IP Right Cessation
- 1986-05-13 ES ES554900A patent/ES8800365A1/es not_active Expired
- 1986-05-13 CA CA000509005A patent/CA1268673A/en not_active Expired - Fee Related
- 1986-05-14 CN CN86103417A patent/CN1015185B/zh not_active Expired
- 1986-05-14 TR TR267/86A patent/TR23083A/xx unknown
-
1987
- 1987-01-09 FI FI870078A patent/FI83416C/fi not_active IP Right Cessation
- 1987-01-12 DK DK013687A patent/DK168330B1/da not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR920007956B1 (ko) | 1992-09-19 |
| FI870078A0 (fi) | 1987-01-09 |
| EP0225342B1 (en) | 1990-08-22 |
| CN1015185B (zh) | 1991-12-25 |
| FI870078L (fi) | 1987-01-09 |
| IN170102B (enExample) | 1992-02-08 |
| BR8606673A (pt) | 1987-08-11 |
| MX163869B (es) | 1992-06-29 |
| DK13687D0 (da) | 1987-01-12 |
| TR23083A (tr) | 1989-03-13 |
| CN86103417A (zh) | 1986-11-12 |
| ES8800365A1 (es) | 1987-11-01 |
| WO1986006658A1 (en) | 1986-11-20 |
| DK13687A (da) | 1987-01-12 |
| AU576676B2 (en) | 1988-09-01 |
| ES554900A0 (es) | 1987-11-01 |
| IL78736A (en) | 1989-03-31 |
| IE861261L (en) | 1986-11-14 |
| AU5810386A (en) | 1986-12-04 |
| IE58959B1 (en) | 1993-12-01 |
| DE3673612D1 (de) | 1990-09-27 |
| FI83416B (fi) | 1991-03-28 |
| EP0225342A1 (en) | 1987-06-16 |
| KR870700415A (ko) | 1987-12-29 |
| FI83416C (fi) | 1991-07-10 |
| DK168330B1 (da) | 1994-03-14 |
| EP0225342A4 (en) | 1987-08-12 |
| IL78736A0 (en) | 1986-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |