CA1214230A - High resistance film resistor and method of making the same - Google Patents

High resistance film resistor and method of making the same

Info

Publication number
CA1214230A
CA1214230A CA000436745A CA436745A CA1214230A CA 1214230 A CA1214230 A CA 1214230A CA 000436745 A CA000436745 A CA 000436745A CA 436745 A CA436745 A CA 436745A CA 1214230 A CA1214230 A CA 1214230A
Authority
CA
Canada
Prior art keywords
substrate
resistance
film
dielectric film
resistance element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000436745A
Other languages
English (en)
French (fr)
Inventor
Charles T. Plough, Jr.
Ralph D. Hight
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vishay Dale Electronics LLC
Original Assignee
Dale Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dale Electronics Inc filed Critical Dale Electronics Inc
Application granted granted Critical
Publication of CA1214230A publication Critical patent/CA1214230A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
CA000436745A 1982-09-30 1983-09-15 High resistance film resistor and method of making the same Expired CA1214230A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/431,274 US4498071A (en) 1982-09-30 1982-09-30 High resistance film resistor
US431,274 1982-09-30

Publications (1)

Publication Number Publication Date
CA1214230A true CA1214230A (en) 1986-11-18

Family

ID=23711220

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000436745A Expired CA1214230A (en) 1982-09-30 1983-09-15 High resistance film resistor and method of making the same

Country Status (7)

Country Link
US (1) US4498071A (OSRAM)
JP (1) JPS59132102A (OSRAM)
CA (1) CA1214230A (OSRAM)
DE (1) DE3334922C2 (OSRAM)
FR (1) FR2537329B1 (OSRAM)
GB (1) GB2128813B (OSRAM)
IT (1) IT1197722B (OSRAM)

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JPS61188901A (ja) * 1985-02-16 1986-08-22 株式会社日本自動車部品総合研究所 流量センサ用膜式抵抗
US4900417A (en) * 1987-05-08 1990-02-13 Dale Electronics, Inc. Nichrome resistive element and method of making same
US4908185A (en) * 1987-05-08 1990-03-13 Dale Electronics, Inc. Nichrome resistive element and method of making same
US4837550A (en) * 1987-05-08 1989-06-06 Dale Electronics, Inc. Nichrome resistive element and method of making same
AU622856B2 (en) * 1987-10-23 1992-04-30 Nicrobell Pty Limited Thermocouples of enhanced stability
US4912286A (en) * 1988-08-16 1990-03-27 Ebonex Technologies Inc. Electrical conductors formed of sub-oxides of titanium
US5370458A (en) * 1990-10-09 1994-12-06 Lockheed Sanders, Inc. Monolithic microwave power sensor
JPH065401A (ja) * 1992-06-23 1994-01-14 Mitsubishi Electric Corp チップ型抵抗素子及び半導体装置
US5585776A (en) * 1993-11-09 1996-12-17 Research Foundation Of The State University Of Ny Thin film resistors comprising ruthenium oxide
WO1998051127A1 (en) 1997-05-06 1998-11-12 Thermoceramix, L.L.C. Deposited resistive coatings
EP0982741B1 (en) * 1998-08-25 2006-02-15 Hughes Electronics Corporation Method for fabricating a thin film resistor onto a ceramic-polymer substrate
US6222166B1 (en) * 1999-08-09 2001-04-24 Watlow Electric Manufacturing Co. Aluminum substrate thick film heater
JP2004528677A (ja) 2000-11-29 2004-09-16 サーモセラミックス インコーポレイテッド 抵抗加熱器及びその使用法
US6501906B2 (en) * 2000-12-18 2002-12-31 C.T.R. Consultoria Tecnica E Representacoes Lda Evaporation device for volatile substances
US6880234B2 (en) * 2001-03-16 2005-04-19 Vishay Intertechnology, Inc. Method for thin film NTC thermistor
DE50111791D1 (de) 2001-04-05 2007-02-15 C T R Vorrichtung zum Verdampfen von flüchtigen Substanzen, insbesondere von Insektiziden und/oder Duftstoffen
US6991003B2 (en) * 2003-07-28 2006-01-31 M.Braun, Inc. System and method for automatically purifying solvents
GB0418218D0 (en) * 2004-08-16 2004-09-15 Tyco Electronics Ltd Uk Electrical device having a heat generating electrically resistive element and heat dissipating means therefor
FR2927218B1 (fr) 2008-02-06 2010-03-05 Hydromecanique & Frottement Procede de fabrication d'un element chauffant par depot de couches minces sur un substrat isolant et l'element obtenu
JP5944123B2 (ja) * 2011-07-25 2016-07-05 株式会社立山科学デバイステクノロジー 電圧非直線性抵抗素子の製造方法
JP6037426B2 (ja) * 2012-03-23 2016-12-07 株式会社テクノ菱和 イオナイザー電極
JP6457172B2 (ja) * 2013-10-22 2019-01-23 Koa株式会社 抵抗素子の製造方法

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DE937178C (de) * 1950-08-08 1955-12-29 Elektrowerk G M B H Widerstand mit negativem Temperaturkoeffizienten
DE967799C (de) * 1951-11-09 1957-12-12 Siemens Ag Verfahren zur Herstellung von elektrischen Widerstaenden
DE1100772B (de) * 1957-02-05 1961-03-02 Kanthal Ab Flammgespritzter elektrischer Widerstand
DE1186539B (de) * 1960-09-07 1965-02-04 Erie Resistor Ltd Elektrischer Widerstand mit einer Widerstandsschicht aus Metalloxyd oder Metall und Verfahren zu seiner Herstellung
US3174920A (en) * 1961-06-09 1965-03-23 Post Daniel Method for producing electrical resistance strain gages by electropolishing
NL291334A (OSRAM) * 1962-04-27
GB1083575A (en) * 1963-07-10 1967-09-13 Marconi Co Ltd Improvements in or relating to circuit modules
GB1078820A (en) * 1963-09-06 1967-08-09 Matsushita Electric Industrial Co Ltd Method of manufacturing film resistors
US3434206A (en) * 1964-05-12 1969-03-25 Z Elektroizmeritelnykh Priboro Method of manufacturing a laminated foil resistor
AT273301B (de) * 1964-08-17 1969-08-11 Amphenol Corp Metallschichtwiderstand
US3517436A (en) * 1965-05-04 1970-06-30 Vishay Intertechnology Inc Precision resistor of great stability
US3525680A (en) * 1965-12-20 1970-08-25 Ibm Method and apparatus for the radio frequency sputtering of dielectric materials
US3591479A (en) * 1969-05-08 1971-07-06 Ibm Sputtering process for preparing stable thin film resistors
US3742120A (en) * 1970-10-28 1973-06-26 Us Navy Single layer self-destruct circuit produced by co-deposition of tungstic oxide and aluminum
US3718883A (en) * 1971-10-15 1973-02-27 Vishay Intertechnology Inc Electrical components with flexible terminal means
US3791863A (en) * 1972-05-25 1974-02-12 Stackpole Carbon Co Method of making electrical resistance devices and articles made thereby
US3876912A (en) * 1972-07-21 1975-04-08 Harris Intertype Corp Thin film resistor crossovers for integrated circuits
JPS5626996B2 (OSRAM) * 1972-11-29 1981-06-22
US3895219A (en) * 1973-11-23 1975-07-15 Norton Co Composite ceramic heating element
US4016525A (en) * 1974-11-29 1977-04-05 Sprague Electric Company Glass containing resistor having a sub-micron metal film termination
US4007352A (en) * 1975-07-31 1976-02-08 Hewlett-Packard Company Thin film thermal print head
US4064477A (en) * 1975-08-25 1977-12-20 American Components Inc. Metal foil resistor
US4129848A (en) * 1975-09-03 1978-12-12 Raytheon Company Platinum film resistor device
US3978316A (en) * 1975-09-19 1976-08-31 Corning Glass Works Electrical heating unit
US4057707A (en) * 1975-10-17 1977-11-08 Corning Glass Works Electric heating unit
FR2344940A1 (fr) * 1976-03-18 1977-10-14 Electro Resistance Procede pour la fabrication de resistances electriques a partir d'une feuille metallique fixee sur un support isolant et dispositif s'y rapportant
FR2351478A1 (fr) * 1976-05-14 1977-12-09 Thomson Csf Procede de realisation de resistances en couches minces passivees et resistances obtenues par ce procede
FR2354617A1 (fr) * 1976-06-08 1978-01-06 Electro Resistance Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues
BE855171A (fr) * 1976-06-08 1977-11-28 Electro Resistance Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues
US4306217A (en) * 1977-06-03 1981-12-15 Angstrohm Precision, Inc. Flat electrical components
GB2050705A (en) * 1977-06-03 1981-01-07 Angstrohm Precision Inc Metal foil resistor
US4172249A (en) * 1977-07-11 1979-10-23 Vishay Intertechnology, Inc. Resistive electrical components
GB1586857A (en) * 1977-08-30 1981-03-25 Emi Ltd Resistive films
GB2018036B (en) * 1978-03-31 1982-08-25 Vishay Intertechnology Inc Precision resistors subassemblies therefor and their manufacture
US4174513A (en) * 1978-04-05 1979-11-13 American Components Inc. Foil type resistor with firmly fixed lead wires
US4318072A (en) * 1979-09-04 1982-03-02 Vishay Intertechnology, Inc. Precision resistor with improved temperature characteristics
GB2084247B (en) * 1980-08-23 1984-03-07 Kyoto Ceramic Glow plugs for use in diesel engines

Also Published As

Publication number Publication date
DE3334922C2 (de) 1987-05-14
FR2537329B1 (fr) 1987-09-18
GB8324705D0 (en) 1983-10-19
IT1197722B (it) 1988-12-06
IT8349053A0 (it) 1983-09-28
JPH0152881B2 (OSRAM) 1989-11-10
US4498071A (en) 1985-02-05
JPS59132102A (ja) 1984-07-30
IT8349053A1 (it) 1985-03-28
GB2128813B (en) 1986-04-03
DE3334922A1 (de) 1984-04-05
GB2128813A (en) 1984-05-02
FR2537329A1 (fr) 1984-06-08

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Legal Events

Date Code Title Description
MKEX Expiry