CA1076265A - Thick film resistance thermometer - Google Patents
Thick film resistance thermometerInfo
- Publication number
- CA1076265A CA1076265A CA295,006A CA295006A CA1076265A CA 1076265 A CA1076265 A CA 1076265A CA 295006 A CA295006 A CA 295006A CA 1076265 A CA1076265 A CA 1076265A
- Authority
- CA
- Canada
- Prior art keywords
- paste
- platinum
- path
- strip
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 87
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 37
- 239000002245 particle Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 238000010304 firing Methods 0.000 claims abstract description 23
- 239000000919 ceramic Substances 0.000 claims abstract description 14
- 239000011521 glass Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 4
- 238000009966 trimming Methods 0.000 claims description 4
- 238000007650 screen-printing Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 32
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- 238000003801 milling Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000001856 Ethyl cellulose Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052797 bismuth Inorganic materials 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920001249 ethyl cellulose Polymers 0.000 description 3
- 235000019325 ethyl cellulose Nutrition 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000010970 precious metal Substances 0.000 description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000010561 standard procedure Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- WUOACPNHFRMFPN-VIFPVBQESA-N (R)-(+)-alpha-terpineol Chemical compound CC1=CC[C@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-VIFPVBQESA-N 0.000 description 1
- ZMXIYERNXPIYFR-UHFFFAOYSA-N 1-ethylnaphthalene Chemical compound C1=CC=C2C(CC)=CC=CC2=C1 ZMXIYERNXPIYFR-UHFFFAOYSA-N 0.000 description 1
- -1 1772PC. ) Chemical compound 0.000 description 1
- SYQQWGGBOQFINV-FBWHQHKGSA-N 4-[2-[(2s,8s,9s,10r,13r,14s,17r)-10,13-dimethyl-17-[(2r)-6-methylheptan-2-yl]-3-oxo-1,2,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-2-yl]ethoxy]-4-oxobutanoic acid Chemical compound C1CC2=CC(=O)[C@H](CCOC(=O)CCC(O)=O)C[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2 SYQQWGGBOQFINV-FBWHQHKGSA-N 0.000 description 1
- 101100281516 Caenorhabditis elegans fox-1 gene Proteins 0.000 description 1
- 241000974840 Ellipes Species 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- RJTJVVYSTUQWNI-UHFFFAOYSA-N beta-ethyl naphthalene Natural products C1=CC=CC2=CC(CC)=CC=C21 RJTJVVYSTUQWNI-UHFFFAOYSA-N 0.000 description 1
- RUJPNZNXGCHGID-UHFFFAOYSA-N beta-terpineol Chemical compound CC(=C)C1CCC(C)(O)CC1 RUJPNZNXGCHGID-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- IGARGHRYKHJQSM-UHFFFAOYSA-N cyclohexylbenzene Chemical compound C1CCCCC1C1=CC=CC=C1 IGARGHRYKHJQSM-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Chemical group 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000010665 pine oil Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 150000003097 polyterpenes Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Chemical group 0.000 description 1
- 239000004332 silver Chemical group 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
- H01C17/06526—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of metals
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49085—Thermally variable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49099—Coating resistive material on a base
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Thermistors And Varistors (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/760,044 US4146957A (en) | 1977-01-17 | 1977-01-17 | Thick film resistance thermometer |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1076265A true CA1076265A (en) | 1980-04-22 |
Family
ID=25057909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA295,006A Expired CA1076265A (en) | 1977-01-17 | 1978-01-16 | Thick film resistance thermometer |
Country Status (10)
Country | Link |
---|---|
US (1) | US4146957A (en, 2012) |
JP (1) | JPS5389957A (en, 2012) |
AU (1) | AU512656B2 (en, 2012) |
BE (1) | BE875505Q (en, 2012) |
BR (1) | BR7800229A (en, 2012) |
CA (1) | CA1076265A (en, 2012) |
DE (1) | DE2801720A1 (en, 2012) |
FR (1) | FR2377619A1 (en, 2012) |
GB (1) | GB1585689A (en, 2012) |
IT (1) | IT7847628A0 (en, 2012) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IE47186B1 (en) * | 1977-09-13 | 1984-01-11 | Johnson Matthey Co Ltd | Improvements in and relating to the measurement of temperature |
US4286377A (en) * | 1978-07-03 | 1981-09-01 | General Electric Company | Method of manufacture for a resistance heater and temperature sensor |
IT1121122B (it) * | 1979-01-08 | 1986-03-26 | Cise Spa | Circuito elettrico e struttura per sonde di pressione e temperatura dotato di accorgimenti adatti per la correzione dell errore di temperatura sul segnale di pressione e per eliminare l influenza della resistenza elettrica dei conduttori del cavo |
DE2920901C3 (de) * | 1979-05-23 | 1982-03-18 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Bolometer |
DE2933676C2 (de) * | 1979-08-20 | 1982-02-11 | Hottinger Baldwin Messtechnik Gmbh, 6100 Darmstadt | Verfahren zur Justierung von Meßwertumformern mit Dehnungsmeßstreifen und Dehnungsmeßstreifen zur Durchführung des Verfahrens. |
US4298856A (en) * | 1979-09-04 | 1981-11-03 | Western Electric Company, Incorporated | Metallized resistor and methods of manufacturing and adjusting the resistance of same |
JPS56106159A (en) * | 1980-01-28 | 1981-08-24 | Hitachi Ltd | Production of sensor for detecting flow speed and flow rate |
US4375056A (en) * | 1980-02-29 | 1983-02-22 | Leeds & Northrup Company | Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture |
US4469717A (en) * | 1980-02-29 | 1984-09-04 | Leeds & Northrup Company | Thin film resistance thermometer with a predetermined temperature coefficient of resistance and its method of manufacture |
JPS5922385B2 (ja) * | 1980-04-25 | 1984-05-26 | 日産自動車株式会社 | セラミツク基板のスル−ホ−ル充填用導電体ペ−スト |
US4311982A (en) * | 1980-08-01 | 1982-01-19 | The Yellow Springs Instrument Company, Inc. | Trimmable wirewound resistance temperature transducer |
JPS57124221A (en) * | 1981-01-24 | 1982-08-03 | Japan Atom Energy Res Inst | Temperature sensitive resistance element of cryogenic thermometer and its production |
US4386460A (en) * | 1981-05-14 | 1983-06-07 | Bell Telephone Laboratories, Incorporated | Method of making multi-megohm thin film resistors |
US4436438A (en) | 1981-07-21 | 1984-03-13 | Wahl Instruments, Inc. | Multiple probe temperature measuring system and probes therefor |
US4461785A (en) * | 1982-11-19 | 1984-07-24 | E. I. Du Pont De Nemours And Company | Process for electrical terminal contact metallization |
JPS59162413A (ja) * | 1983-03-07 | 1984-09-13 | Hitachi Ltd | 熱式流量計 |
DE3630393C2 (de) * | 1985-09-10 | 1994-06-23 | Sharp Kk | Widerstandsthermometer |
JP2605297B2 (ja) * | 1987-09-04 | 1997-04-30 | 株式会社村田製作所 | 白金温度センサおよびその製造方法 |
JP2564845B2 (ja) * | 1987-09-04 | 1996-12-18 | 株式会社村田製作所 | 白金温度センサ |
US5134248A (en) * | 1990-08-15 | 1992-07-28 | Advanced Temperature Devices, Inc. | Thin film flexible electrical connector |
US5161541A (en) * | 1991-03-05 | 1992-11-10 | Edentec | Flow sensor system |
US5573692A (en) * | 1991-03-11 | 1996-11-12 | Philip Morris Incorporated | Platinum heater for electrical smoking article having ohmic contact |
US5321382A (en) * | 1991-07-08 | 1994-06-14 | Nippondenso Co., Ltd. | Thermal type flow rate sensor |
JPH0564744U (ja) * | 1992-02-13 | 1993-08-27 | 株式会社チノー | 温度素子 |
US5250358A (en) * | 1992-09-02 | 1993-10-05 | Motorola, Inc. | Palladium thick film resistor containing boron nitride |
US5521576A (en) * | 1993-10-06 | 1996-05-28 | Collins; Franklyn M. | Fine-line thick film resistors and resistor networks and method of making same |
DE9411235U1 (de) * | 1994-07-12 | 1994-09-08 | Murata Elektronik GmbH, 90441 Nürnberg | Sensor zum Erfassen einer Temperatur und/oder einer Strömung |
US5573004A (en) * | 1994-10-06 | 1996-11-12 | Edentec Corporation | Electrically stable electrode and sensor apparatus |
WO1998036888A1 (en) * | 1997-02-24 | 1998-08-27 | Superior Micropowders Llc | Aerosol method and apparatus, particulate products, and electronic devices made therefrom |
US6338809B1 (en) * | 1997-02-24 | 2002-01-15 | Superior Micropowders Llc | Aerosol method and apparatus, particulate products, and electronic devices made therefrom |
US20050097987A1 (en) * | 1998-02-24 | 2005-05-12 | Cabot Corporation | Coated copper-containing powders, methods and apparatus for producing such powders, and copper-containing devices fabricated from same |
US6292091B1 (en) * | 1999-07-22 | 2001-09-18 | Rohm Co., Ltd. | Resistor and method of adjusting resistance of the same |
DE10016415A1 (de) * | 2000-04-01 | 2001-10-11 | Bosch Gmbh Robert | Sensorelement, insbesondere Temperaturfühler |
JP3921327B2 (ja) | 2000-04-14 | 2007-05-30 | 京セラ株式会社 | セラミックヒータ及びその製造方法 |
WO2001082314A1 (de) * | 2000-04-25 | 2001-11-01 | Epcos Ag | Elektrisches bauelement, verfahren zu dessen herstellung und dessen verwendung |
US6229428B1 (en) * | 2000-05-30 | 2001-05-08 | The United States Of America As Represented By The Secretary Of The Navy | Microcircuit resistor stack |
DE10049718A1 (de) * | 2000-10-07 | 2002-04-18 | Heidenhain Gmbh Dr Johannes | Vorrichtung zur Erfassung einer thermisch bedingten Längenausdehnung eines Maschinenteils |
US6435005B1 (en) | 2000-12-19 | 2002-08-20 | Delphi Technologies, Inc. | Heater patterns for planar gas sensors |
US6365880B1 (en) | 2000-12-19 | 2002-04-02 | Delphi Technologies, Inc. | Heater patterns for planar gas sensors |
JP2007027192A (ja) * | 2005-07-12 | 2007-02-01 | Denso Corp | レーザトリミング方法 |
TWM450811U (zh) * | 2012-12-13 | 2013-04-11 | Viking Tech Corp | 電阻元件 |
DE102014104219B4 (de) * | 2014-03-26 | 2019-09-12 | Heraeus Nexensos Gmbh | Keramikträger sowie Sensorelement, Heizelement und Sensormodul jeweils mit einem Keramikträger und Verfahren zur Herstellung eines Keramikträgers |
US10375765B2 (en) * | 2016-04-15 | 2019-08-06 | Hewlett-Packard Development Company, L.P. | 3-dimensional printed load cell parts |
JP6490039B2 (ja) * | 2016-10-21 | 2019-03-27 | ミネベアミツミ株式会社 | ひずみゲージ |
US11280685B2 (en) | 2018-10-01 | 2022-03-22 | Goodrich Corporation | Additive manufactured resistance temperature detector |
US10622125B1 (en) * | 2019-03-07 | 2020-04-14 | Nmb Technologies Corporation | Strain gauge |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3629776A (en) * | 1967-10-24 | 1971-12-21 | Nippon Kogaku Kk | Sliding thin film resistance for measuring instruments |
US3699650A (en) * | 1971-01-25 | 1972-10-24 | Spacetac Inc | Co-firing process for making a resistor |
GB1415644A (en) * | 1971-11-18 | 1975-11-26 | Johnson Matthey Co Ltd | Resistance thermometer element |
DE2450551C2 (de) * | 1974-10-24 | 1977-01-13 | Heraeus Gmbh W C | Elektrischer messwiderstand fuer ein widerstandsthermometer und verfahren zu seiner herstellung |
DE2527739C3 (de) * | 1975-06-21 | 1978-08-31 | W.C. Heraeus Gmbh, 6450 Hanau | Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer |
-
1977
- 1977-01-17 US US05/760,044 patent/US4146957A/en not_active Expired - Lifetime
- 1977-12-30 GB GB54238/77A patent/GB1585689A/en not_active Expired
-
1978
- 1978-01-13 BR BR7800229A patent/BR7800229A/pt unknown
- 1978-01-13 IT IT7847628A patent/IT7847628A0/it unknown
- 1978-01-13 FR FR7800919A patent/FR2377619A1/fr active Granted
- 1978-01-14 JP JP237778A patent/JPS5389957A/ja active Pending
- 1978-01-16 AU AU32455/78A patent/AU512656B2/en not_active Expired
- 1978-01-16 CA CA295,006A patent/CA1076265A/en not_active Expired
- 1978-01-16 DE DE19782801720 patent/DE2801720A1/de not_active Withdrawn
-
1979
- 1979-04-11 BE BE0/194550A patent/BE875505Q/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
BR7800229A (pt) | 1978-10-24 |
US4146957A (en) | 1979-04-03 |
IT7847628A0 (it) | 1978-01-13 |
JPS5389957A (en) | 1978-08-08 |
AU512656B2 (en) | 1980-10-23 |
AU3245578A (en) | 1979-07-26 |
FR2377619B1 (en, 2012) | 1984-04-27 |
FR2377619A1 (fr) | 1978-08-11 |
DE2801720A1 (de) | 1978-07-20 |
GB1585689A (en) | 1981-03-11 |
BE875505Q (fr) | 1979-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEX | Expiry |