CA1074218A - Organic stripping compositions and method for using same - Google Patents

Organic stripping compositions and method for using same

Info

Publication number
CA1074218A
CA1074218A CA285,868A CA285868A CA1074218A CA 1074218 A CA1074218 A CA 1074218A CA 285868 A CA285868 A CA 285868A CA 1074218 A CA1074218 A CA 1074218A
Authority
CA
Canada
Prior art keywords
carbon atoms
composition
organic
acid
ppm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA285,868A
Other languages
English (en)
French (fr)
Inventor
John E. Vander Mey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allied Corp
Original Assignee
Allied Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Chemical Corp filed Critical Allied Chemical Corp
Application granted granted Critical
Publication of CA1074218A publication Critical patent/CA1074218A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D9/00—Chemical paint or ink removers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Paints Or Removers (AREA)
CA285,868A 1976-10-04 1977-08-31 Organic stripping compositions and method for using same Expired CA1074218A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/729,515 US4165295A (en) 1976-10-04 1976-10-04 Organic stripping compositions and method for using same

Publications (1)

Publication Number Publication Date
CA1074218A true CA1074218A (en) 1980-03-25

Family

ID=24931404

Family Applications (1)

Application Number Title Priority Date Filing Date
CA285,868A Expired CA1074218A (en) 1976-10-04 1977-08-31 Organic stripping compositions and method for using same

Country Status (7)

Country Link
US (1) US4165295A (de)
JP (1) JPS5344491A (de)
CA (1) CA1074218A (de)
DE (1) DE2744027C2 (de)
FR (1) FR2366350A1 (de)
GB (1) GB1562356A (de)
IT (1) IT1143831B (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2821637A1 (de) * 1978-05-18 1979-11-22 Babcock Ag Geblaeseschlaegermuehle
DE2849894A1 (de) * 1978-11-17 1980-05-29 Hoechst Ag Verfahren zum reinigen von kupfer enthaltenden metalloberflaechen
FR2455075A1 (fr) * 1979-04-24 1980-11-21 Rhone Poulenc Ind Composition a base de solvants chlores pour l'elimination de resines photoresistantes
US4414035A (en) * 1979-05-21 1983-11-08 Petrolite Corporation Method for the removal of asphaltenic deposits
US4426311A (en) 1980-07-07 1984-01-17 Allied Corporation Methylene chloride-methane sulfonic acid stripping compositions and methods for using same
EP0043438A3 (de) * 1980-07-07 1982-09-29 Allied Corporation Methylenchlorid-Methansulfonsäure-Abziehzusammensetzung und Methoden für ihre Verwendung
US4304681A (en) * 1980-09-15 1981-12-08 Shipley Company, Inc. Novel stripping composition for positive photoresists and method of using same
US4395348A (en) * 1981-11-23 1983-07-26 Ekc Technology, Inc. Photoresist stripping composition and method
US4403029A (en) * 1982-09-02 1983-09-06 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
US4491530A (en) * 1983-05-20 1985-01-01 Allied Corporation Brown stain suppressing phenol free and chlorinated hydrocarbons free photoresist stripper
EP0163202B1 (de) * 1984-05-21 1991-02-06 Shipley Company Inc. Photolackentferner und Verfahren zum Entfernen von Photolacken
JPS6235357A (ja) * 1985-08-09 1987-02-16 Tokyo Ohka Kogyo Co Ltd ホトレジスト用剥離液
US4971715A (en) * 1988-11-18 1990-11-20 International Business Machines Corporation Phenolic-free stripping composition and use thereof
US4992108A (en) * 1990-01-18 1991-02-12 Ward Irl E Photoresist stripping compositions
US5556482A (en) * 1991-01-25 1996-09-17 Ashland, Inc. Method of stripping photoresist with composition containing inhibitor
DE9304878U1 (de) * 1993-03-31 1993-06-09 Morton International, Inc., Chicago, Ill. Entschichterlösung für lichtvernetzte Photoresistschablonen
GB2282607A (en) * 1993-10-06 1995-04-12 Itac Limited Stripping compositions comprising sulphonic acid and thickener
JP3236220B2 (ja) * 1995-11-13 2001-12-10 東京応化工業株式会社 レジスト用剥離液組成物
US5728664A (en) * 1996-04-15 1998-03-17 Ashland, Inc. Photoresist stripping compositions
US7534752B2 (en) * 1996-07-03 2009-05-19 Advanced Technology Materials, Inc. Post plasma ashing wafer cleaning formulation
US6273959B1 (en) * 1996-07-08 2001-08-14 Matsushita Electric Industrial Co., Ltd. Method of cleaning semiconductor device
JP3755776B2 (ja) * 1996-07-11 2006-03-15 東京応化工業株式会社 リソグラフィー用リンス液組成物及びそれを用いた基板の処理方法
US6896826B2 (en) 1997-01-09 2005-05-24 Advanced Technology Materials, Inc. Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
WO1998030667A1 (en) * 1997-01-09 1998-07-16 Advanced Technology Materials, Inc. Semiconductor wafer cleaning composition and method with aqueous ammonium fluoride and amine
US6755989B2 (en) * 1997-01-09 2004-06-29 Advanced Technology Materials, Inc. Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
US5939336A (en) * 1998-08-21 1999-08-17 Micron Technology, Inc. Aqueous solutions of ammonium fluoride in propylene glycol and their use in the removal of etch residues from silicon substrates
US6248704B1 (en) 1999-05-03 2001-06-19 Ekc Technology, Inc. Compositions for cleaning organic and plasma etched residues for semiconductors devices
US6403286B1 (en) 1999-11-04 2002-06-11 Corning Incorporated High aspect ratio patterning of glass film
KR100540525B1 (ko) * 2000-04-26 2006-01-11 다이킨 고교 가부시키가이샤 세정용 조성물
US6475292B1 (en) 2000-07-31 2002-11-05 Shipley Company, L.L.C. Photoresist stripping method
JP4124315B2 (ja) * 2001-05-01 2008-07-23 東京応化工業株式会社 被膜の処理方法およびこの方法を用いた半導体素子の製造方法
US6943142B2 (en) 2002-01-09 2005-09-13 Air Products And Chemicals, Inc. Aqueous stripping and cleaning composition
CN1261826C (zh) * 2002-01-11 2006-06-28 Az电子材料（日本）株式会社 一种用于正性或负性光刻胶的清洗剂组合物
JP4776191B2 (ja) * 2004-08-25 2011-09-21 関東化学株式会社 フォトレジスト残渣及びポリマー残渣除去組成物、並びにそれを用いた残渣除去方法
US7713885B2 (en) * 2005-05-11 2010-05-11 Micron Technology, Inc. Methods of etching oxide, reducing roughness, and forming capacitor constructions
US7687447B2 (en) * 2008-03-13 2010-03-30 Air Products And Chemicals, Inc. Semi-aqueous stripping and cleaning composition containing aminobenzenesulfonic acid
US8940104B2 (en) 2011-08-02 2015-01-27 Brewer Science Inc. Cleaning composition for temporary wafer bonding materials
JP6450366B2 (ja) 2013-03-29 2019-01-09 ライフ テクノロジーズ コーポレーション 半導体装置を処理するための方法
WO2016141302A1 (en) 2015-03-05 2016-09-09 Life Technologies Corporation Surface stabilization of biosensors
KR20170132813A (ko) 2015-03-26 2017-12-04 라이프 테크놀로지스 코포레이션 반도체 장치를 처리하는 방법
US11054749B2 (en) 2018-05-22 2021-07-06 Versum Materials Us, Llc Photoresist stripping composition and method

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA734389A (en) 1966-05-17 Pennsalt Chemicals Corporation Stripping composition and methods for its use
US1890214A (en) * 1929-05-18 1932-12-06 Aluminum Co Of America Cleaning composition
US2413365A (en) * 1944-04-13 1946-12-31 Wyandotte Chemicals Corp Cleaning composition for aluminum and aluminum alloys
US2687346A (en) * 1953-04-24 1954-08-24 Kelite Products Inc Process and composition for brightening the skin of aircraft
US3019194A (en) * 1957-02-18 1962-01-30 Alan D Brite Cleaning composition and method
LU37891A1 (de) * 1958-12-11
GB922507A (en) 1961-09-28 1963-04-03 Continental Titanium Metals Co Improvements in and relating to the conditioning of titanium or titanium base alloys
US3335087A (en) * 1965-12-20 1967-08-08 Pennsalt Chemical Corp Method of stripping resins
US3335088A (en) * 1965-12-20 1967-08-08 Pennsalt Chemicals Corp Method of stripping resins
US3582401A (en) * 1967-11-15 1971-06-01 Mallinckrodt Chemical Works Photosensitive resist remover compositions and methods
US3574123A (en) * 1968-04-23 1971-04-06 Grace W R & Co Paint stripping composition and process
GB1279834A (en) * 1968-10-07 1972-06-28 Chugai Kasei Co Ltd Improvements in metal cleaning and etching compositions
DE1958857C3 (de) * 1969-11-24 1973-09-20 Hanns Eggen Kg, 3000 Hannover Verfahren zum Entschlichten gekörnter oder eloxierter Aluminium Druckplatten
US3871929A (en) * 1974-01-30 1975-03-18 Allied Chem Polymeric etch resist strippers and method of using same
US4009115A (en) * 1974-02-14 1977-02-22 Amchem Products, Inc. Composition and method for cleaning aluminum at low temperatures
US4116853A (en) * 1974-02-14 1978-09-26 Amchem Products, Inc. Composition for cleaning aluminum at low temperatures
US3932130A (en) * 1974-07-03 1976-01-13 Texaco Inc. Inhibition of aluminum corrosion by sulfuric acid solutions
DE2454399C2 (de) * 1974-11-16 1981-09-24 Merck Patent Gmbh, 6100 Darmstadt Ablösemittel für Fotolacke
US3969135A (en) * 1975-02-13 1976-07-13 Oxy Metal Industries Corporation Low temperature aluminum cleaning composition and process
IT1125196B (it) * 1975-08-01 1986-05-14 Allied Chem Disassorbitore fotoresistivo privo di fenolo

Also Published As

Publication number Publication date
DE2744027C2 (de) 1986-06-05
FR2366350A1 (fr) 1978-04-28
US4165295A (en) 1979-08-21
IT1143831B (it) 1986-10-22
JPS5344491A (en) 1978-04-21
FR2366350B1 (de) 1982-11-12
GB1562356A (en) 1980-03-12
DE2744027A1 (de) 1978-04-06

Similar Documents

Publication Publication Date Title
CA1074218A (en) Organic stripping compositions and method for using same
US4215005A (en) Organic stripping compositions and method for using same
US4221674A (en) Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system
US4395348A (en) Photoresist stripping composition and method
US3871929A (en) Polymeric etch resist strippers and method of using same
US4304681A (en) Novel stripping composition for positive photoresists and method of using same
US4992108A (en) Photoresist stripping compositions
CA1194764A (en) Stripping compositions and methods of stripping resists
KR870000680B1 (ko) 포토레지스트 제거 탈막액조성물
US4242218A (en) Phenol-free photoresist stripper
US6558879B1 (en) Photoresist stripper/cleaner compositions containing aromatic acid inhibitors
KR20010034007A (ko) 개선된 수성 스트립핑 및 세정 조성물
US20110146724A1 (en) Photoresist stripping solutions
US8658583B2 (en) Method for making a photoresist stripping solution comprising an organic sulfonic acid and an organic hydrocarbon solvent
GB2209850A (en) Resist solvent composition
US4426311A (en) Methylene chloride-methane sulfonic acid stripping compositions and methods for using same
US3787239A (en) Chemical strippers and method of using
US5728664A (en) Photoresist stripping compositions
US5037724A (en) Peeling solution for photo- or electron beam-sensitive resin
CA1116059A (en) Phenol-free and chlorinated hydrocarbon-free photoresist stripper
JPS6161373B2 (de)
US5166039A (en) Peeling solution for photo- or electron beam-sensitive resin and process for peeling off said resin
KR800000892B1 (ko) 중합성 내부식 탈막액 조성물
KR20010004220A (ko) 네가티브 화학증폭 레지스트용 스트리퍼 조성물
KR20090016163A (ko) 포토레지스트 잔류물 제거용 박리액 조성물 및 이를 이용한박리 방법

Legal Events

Date Code Title Description
MKEX Expiry