CA1047899A - Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides - Google Patents

Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides

Info

Publication number
CA1047899A
CA1047899A CA219,428A CA219428A CA1047899A CA 1047899 A CA1047899 A CA 1047899A CA 219428 A CA219428 A CA 219428A CA 1047899 A CA1047899 A CA 1047899A
Authority
CA
Canada
Prior art keywords
group
carbon atoms
groups
substituted
process according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA219,428A
Other languages
English (en)
French (fr)
Inventor
Diethelm Bitzer
Dieter Lohmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH170374A external-priority patent/CH589723A5/de
Priority claimed from CH170474A external-priority patent/CH593345A5/de
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of CA1047899A publication Critical patent/CA1047899A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Carbon And Carbon Compounds (AREA)
CA219,428A 1974-02-07 1975-02-05 Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides Expired CA1047899A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH170374A CH589723A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen
CH170474A CH593345A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen

Publications (1)

Publication Number Publication Date
CA1047899A true CA1047899A (en) 1979-02-06

Family

ID=25688425

Family Applications (1)

Application Number Title Priority Date Filing Date
CA219,428A Expired CA1047899A (en) 1974-02-07 1975-02-05 Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides

Country Status (6)

Country Link
JP (1) JPS5753308B2 (US20080094685A1-20080424-C00004.png)
AT (1) AT332697B (US20080094685A1-20080424-C00004.png)
CA (1) CA1047899A (US20080094685A1-20080424-C00004.png)
FR (1) FR2273080B1 (US20080094685A1-20080424-C00004.png)
GB (1) GB1489102A (US20080094685A1-20080424-C00004.png)
SE (1) SE410743B (US20080094685A1-20080424-C00004.png)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124904A (US20080094685A1-20080424-C00004.png) * 1974-03-20 1975-10-01
GB2227755B (en) * 1988-12-08 1993-03-10 Univ Hull A process for improving the wear and corrosion resistance of metallic components
TWI343953B (en) * 2004-05-17 2011-06-21 Ring traveler and method for producing it
DE102005049393B4 (de) * 2005-10-15 2019-08-08 Kennametal Widia Produktions Gmbh & Co. Kg Verfahren zur Herstellung eines beschichteten Substratkörpers, Substratkörper mit einer Beschichtung und Verwendung des beschichteten Substratkörpers
JP2011166160A (ja) * 2011-03-22 2011-08-25 Tokyo Electron Ltd 積層膜の形成方法
CN113166933A (zh) 2018-09-28 2021-07-23 康宁股份有限公司 用于在金属基材上沉积无机颗粒的低温方法及由其生产的制品
CN109243654B (zh) * 2018-10-10 2022-10-18 镇江华核装备有限公司 一种核泄漏应急用屏蔽服的制备工艺

Also Published As

Publication number Publication date
JPS50117809A (US20080094685A1-20080424-C00004.png) 1975-09-16
AT332697B (de) 1976-10-11
DE2505009B2 (de) 1977-06-30
FR2273080B1 (US20080094685A1-20080424-C00004.png) 1977-09-16
GB1489102A (en) 1977-10-19
FR2273080A1 (US20080094685A1-20080424-C00004.png) 1975-12-26
SE7501315L (US20080094685A1-20080424-C00004.png) 1975-08-08
DE2505009A1 (de) 1975-08-14
JPS5753308B2 (US20080094685A1-20080424-C00004.png) 1982-11-12
SE410743B (sv) 1979-10-29
ATA92375A (de) 1976-01-15

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