AT332697B - Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden - Google Patents

Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden

Info

Publication number
AT332697B
AT332697B AT92375A AT92375A AT332697B AT 332697 B AT332697 B AT 332697B AT 92375 A AT92375 A AT 92375A AT 92375 A AT92375 A AT 92375A AT 332697 B AT332697 B AT 332697B
Authority
AT
Austria
Prior art keywords
carbonitrides
carbides
nitrides
inorganic substrates
coating inorganic
Prior art date
Application number
AT92375A
Other languages
English (en)
Other versions
ATA92375A (de
Original Assignee
Ciba Geigy Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH170374A external-priority patent/CH589723A5/de
Priority claimed from CH170474A external-priority patent/CH593345A5/de
Application filed by Ciba Geigy Ag filed Critical Ciba Geigy Ag
Publication of ATA92375A publication Critical patent/ATA92375A/de
Application granted granted Critical
Publication of AT332697B publication Critical patent/AT332697B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
AT92375A 1974-02-07 1975-02-06 Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden AT332697B (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH170374A CH589723A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen
CH170474A CH593345A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen

Publications (2)

Publication Number Publication Date
ATA92375A ATA92375A (de) 1976-01-15
AT332697B true AT332697B (de) 1976-10-11

Family

ID=25688425

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92375A AT332697B (de) 1974-02-07 1975-02-06 Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden

Country Status (6)

Country Link
JP (1) JPS5753308B2 (de)
AT (1) AT332697B (de)
CA (1) CA1047899A (de)
FR (1) FR2273080B1 (de)
GB (1) GB1489102A (de)
SE (1) SE410743B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124904A (de) * 1974-03-20 1975-10-01
GB2227755B (en) * 1988-12-08 1993-03-10 Univ Hull A process for improving the wear and corrosion resistance of metallic components
EP1598456B1 (de) * 2004-05-17 2008-11-12 Bräcker AG Ringläufer und Verfahren zu dessen Herstellung
DE102005049393B4 (de) * 2005-10-15 2019-08-08 Kennametal Widia Produktions Gmbh & Co. Kg Verfahren zur Herstellung eines beschichteten Substratkörpers, Substratkörper mit einer Beschichtung und Verwendung des beschichteten Substratkörpers
JP2011166160A (ja) * 2011-03-22 2011-08-25 Tokyo Electron Ltd 積層膜の形成方法
JP2022501514A (ja) * 2018-09-28 2022-01-06 コーニング インコーポレイテッド 金属基板上に無機粒子を堆積させるための低温法及びこの低温法によって製造される物品
CN109243654B (zh) * 2018-10-10 2022-10-18 镇江华核装备有限公司 一种核泄漏应急用屏蔽服的制备工艺

Also Published As

Publication number Publication date
ATA92375A (de) 1976-01-15
FR2273080B1 (de) 1977-09-16
FR2273080A1 (de) 1975-12-26
DE2505009B2 (de) 1977-06-30
SE7501315L (de) 1975-08-08
JPS50117809A (de) 1975-09-16
GB1489102A (en) 1977-10-19
SE410743B (sv) 1979-10-29
DE2505009A1 (de) 1975-08-14
JPS5753308B2 (de) 1982-11-12
CA1047899A (en) 1979-02-06

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Legal Events

Date Code Title Description
EIH Change in the person of patent owner
UEP Publication of translation of european patent specification
ELA Expired due to lapse of time
REN Ceased due to non-payment of the annual fee