JPS5753308B2 - - Google Patents

Info

Publication number
JPS5753308B2
JPS5753308B2 JP1617175A JP1617175A JPS5753308B2 JP S5753308 B2 JPS5753308 B2 JP S5753308B2 JP 1617175 A JP1617175 A JP 1617175A JP 1617175 A JP1617175 A JP 1617175A JP S5753308 B2 JPS5753308 B2 JP S5753308B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1617175A
Other versions
JPS50117809A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH170474A external-priority patent/CH593345A5/de
Priority claimed from CH170374A external-priority patent/CH589723A5/de
Application filed filed Critical
Publication of JPS50117809A publication Critical patent/JPS50117809A/ja
Publication of JPS5753308B2 publication Critical patent/JPS5753308B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP1617175A 1974-02-07 1975-02-07 Expired JPS5753308B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH170474A CH593345A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen
CH170374A CH589723A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen

Publications (2)

Publication Number Publication Date
JPS50117809A JPS50117809A (ja) 1975-09-16
JPS5753308B2 true JPS5753308B2 (ja) 1982-11-12

Family

ID=25688425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1617175A Expired JPS5753308B2 (ja) 1974-02-07 1975-02-07

Country Status (6)

Country Link
JP (1) JPS5753308B2 (ja)
AT (1) AT332697B (ja)
CA (1) CA1047899A (ja)
FR (1) FR2273080B1 (ja)
GB (1) GB1489102A (ja)
SE (1) SE410743B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124904A (ja) * 1974-03-20 1975-10-01
GB2227755B (en) * 1988-12-08 1993-03-10 Univ Hull A process for improving the wear and corrosion resistance of metallic components
EP1598456B1 (de) * 2004-05-17 2008-11-12 Bräcker AG Ringläufer und Verfahren zu dessen Herstellung
DE102005049393B4 (de) * 2005-10-15 2019-08-08 Kennametal Widia Produktions Gmbh & Co. Kg Verfahren zur Herstellung eines beschichteten Substratkörpers, Substratkörper mit einer Beschichtung und Verwendung des beschichteten Substratkörpers
JP2011166160A (ja) * 2011-03-22 2011-08-25 Tokyo Electron Ltd 積層膜の形成方法
JP2022501514A (ja) * 2018-09-28 2022-01-06 コーニング インコーポレイテッド 金属基板上に無機粒子を堆積させるための低温法及びこの低温法によって製造される物品
CN109243654B (zh) * 2018-10-10 2022-10-18 镇江华核装备有限公司 一种核泄漏应急用屏蔽服的制备工艺

Also Published As

Publication number Publication date
SE7501315L (ja) 1975-08-08
JPS50117809A (ja) 1975-09-16
ATA92375A (de) 1976-01-15
DE2505009A1 (de) 1975-08-14
SE410743B (sv) 1979-10-29
CA1047899A (en) 1979-02-06
GB1489102A (en) 1977-10-19
FR2273080A1 (ja) 1975-12-26
AT332697B (de) 1976-10-11
DE2505009B2 (de) 1977-06-30
FR2273080B1 (ja) 1977-09-16

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