AT334708B - Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden - Google Patents

Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden

Info

Publication number
AT334708B
AT334708B AT92175*#A AT92175A AT334708B AT 334708 B AT334708 B AT 334708B AT 92175 A AT92175 A AT 92175A AT 334708 B AT334708 B AT 334708B
Authority
AT
Austria
Prior art keywords
carbonitrides
carbides
nitrides
inorganic substrates
coating inorganic
Prior art date
Application number
AT92175*#A
Other languages
English (en)
Other versions
ATA92175A (de
Original Assignee
Ciba Geigy Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH170174A external-priority patent/CH593133A5/de
Priority claimed from CH170074A external-priority patent/CH595891A5/xx
Application filed by Ciba Geigy Ag filed Critical Ciba Geigy Ag
Priority to AT879575A priority Critical patent/AT350200B/de
Application granted granted Critical
Publication of AT334708B publication Critical patent/AT334708B/de
Publication of ATA92175A publication Critical patent/ATA92175A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
AT92175*#A 1973-02-06 1975-02-06 Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden AT334708B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT879575A AT350200B (de) 1973-02-06 1975-11-19 Verfahren zur herstellung von neuen steroid- spirolactonen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH170174A CH593133A5 (en) 1974-02-07 1974-02-07 Hard coating of carbides or (carbo)nitrides - applied by direct thermal reaction of iron, boron, silicon, etc., with di- or triazine cpd.
CH170074A CH595891A5 (en) 1974-02-07 1974-02-07 Hard coating of carbides or (carbo)nitrides

Publications (2)

Publication Number Publication Date
AT334708B true AT334708B (de) 1976-02-10
ATA92175A ATA92175A (de) 1976-05-15

Family

ID=25688419

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92175*#A AT334708B (de) 1973-02-06 1975-02-06 Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden

Country Status (6)

Country Link
JP (1) JPS5750869B2 (de)
AT (1) AT334708B (de)
CA (1) CA1053547A (de)
FR (1) FR2273078B1 (de)
GB (1) GB1488948A (de)
SE (1) SE410622B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6501560B2 (ja) * 2015-03-06 2019-04-17 東京エレクトロン株式会社 シリコン窒化物膜の成膜方法および成膜装置
KR20210127620A (ko) * 2020-04-13 2021-10-22 에이에스엠 아이피 홀딩 비.브이. 질소 함유 탄소 막을 형성하는 방법 및 이를 수행하기 위한 시스템

Also Published As

Publication number Publication date
SE410622B (sv) 1979-10-22
SE7501313L (de) 1975-08-08
DE2505007B2 (de) 1977-06-30
ATA92175A (de) 1976-05-15
DE2505007A1 (de) 1975-08-14
FR2273078B1 (de) 1977-04-15
CA1053547A (en) 1979-05-01
FR2273078A1 (de) 1975-12-26
JPS5750869B2 (de) 1982-10-29
GB1488948A (en) 1977-10-19
JPS50109826A (de) 1975-08-29

Similar Documents

Publication Publication Date Title
CH534015A (de) Verfahren und Vorrichtung zum Beschichten einer Materialbahn
ATA441974A (de) Zur anwendung am fliessband bzw. auf einer fertigungsstrasse geeignetes verfahren zum beschichten bzw. uberziehen von gegenstanden und anlage zur durchfuhrung des verfahrens
AT348638B (de) Verfahren zum grundieren und ueberziehen einer oberflaeche mit einer siliconhaltigen ueberzugsmasse und grundiermittelmischung zur durchfuehrung des verfahrens
AT334709B (de) Verfahren zum erzeugen von diffusionsschichten aus carbiden, nitriden und/oder carbonitriden
CH550668A (de) Verfahren zum selbsttaetigen ausregeln von schwankungen der farb- und feuchtfluessigkeitsfuehrung an einer offsetmaschine.
CH408416A (de) Mittel zum Veredeln nichttextiler Substrate, Verfahren zu dessen Herstellung und Verwendung desselben
AT337133B (de) Vorrichtung zum ortlichen behandeln, z.b. farben, von laufendem garn- oder bandformigem material
NL177508C (nl) Werkwijze ter bekleding van vlakke textielvoorwerpen.
AT332697B (de) Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden
AT341879B (de) Verfahren und vorrichtung zum beidseitigen beschichten einer materialbahn
AT332698B (de) Verfahren zum erzeugen von diffusionsschichten aus carbiden, nitriden und/oder carbonitriden
AT343145B (de) Vorrichtung zum unterstutzen des abscheidens oder zum abscheiden von in einer tragerflussigkeit suspendierten komponenten
AT338059B (de) Verfahren zum aufbringen und binden einer lagerauskleidung und nach dem verfahren hergestelltes lager
AT328964B (de) Vorrichtung und verfahren zum schichten von artikeln mit gleichmassiger, gekrummter form
AT334708B (de) Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden
AT311297B (de) Verfahren zum Färben oder Bedrucken von Materialien
ATA88172A (de) Vorrichtung zum aufbringen einer ebenen schicht
AT315081B (de) Verfahren zum Bilden einer Trägerpackung und Vorrichtung zur Durchführung des Verfahrens
AT352057B (de) Verfahren zur umsetzung eines fluessigen, mikrobiologischen substrates und vorrichtung zur durchfuehrung des verfahrens
CH553042A (de) Vorrichtung zum bestreichen und/oder spachteln von plattenkanten oder leisten.
AT328588B (de) Verfahren zum verkleben oder beschichten von werkstoffen
CH616292B (de) Verfahren zum faerben oder bedrucken von textilen substraten.
NL183406C (nl) Werkwijze ter bereiding van een verknoopbare samenstelling, werkwijze ter bereiding van polysiloxaan elastomeren en gevormd voorwerp daaruit bestaande of daarmee bekleed.
AT321471B (de) Verfahren und Vorrichtung zum Dragieren von bewegten Formlingen
CH525089A (de) Verfahren und Anlage zum Durchlaufbeschichten starrer Trägerplatten mit mindestens einer endlosen Überzugsbahn

Legal Events

Date Code Title Description
EIH Change in the person of patent owner
ELJ Ceased due to non-payment of the annual fee
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties