AT334708B - Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden - Google Patents

Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden

Info

Publication number
AT334708B
AT334708B AT92175*#A AT92175A AT334708B AT 334708 B AT334708 B AT 334708B AT 92175 A AT92175 A AT 92175A AT 334708 B AT334708 B AT 334708B
Authority
AT
Austria
Prior art keywords
carbonitrides
carbides
nitrides
inorganic substrates
coating inorganic
Prior art date
Application number
AT92175*#A
Other languages
English (en)
Other versions
ATA92175A (de
Original Assignee
Ciba Geigy Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH170074A external-priority patent/CH595891A5/xx
Priority claimed from CH170174A external-priority patent/CH593133A5/de
Application filed by Ciba Geigy Ag filed Critical Ciba Geigy Ag
Priority to AT879575A priority Critical patent/AT350200B/de
Application granted granted Critical
Publication of AT334708B publication Critical patent/AT334708B/de
Publication of ATA92175A publication Critical patent/ATA92175A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
AT92175*#A 1973-02-06 1975-02-06 Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden AT334708B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT879575A AT350200B (de) 1973-02-06 1975-11-19 Verfahren zur herstellung von neuen steroid- spirolactonen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH170074A CH595891A5 (en) 1974-02-07 1974-02-07 Hard coating of carbides or (carbo)nitrides
CH170174A CH593133A5 (en) 1974-02-07 1974-02-07 Hard coating of carbides or (carbo)nitrides - applied by direct thermal reaction of iron, boron, silicon, etc., with di- or triazine cpd.

Publications (2)

Publication Number Publication Date
AT334708B true AT334708B (de) 1976-02-10
ATA92175A ATA92175A (de) 1976-05-15

Family

ID=25688419

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92175*#A AT334708B (de) 1973-02-06 1975-02-06 Verfahren zum beschichten von anorganischen substraten mit carbiden, nitriden und/oder carbonitriden

Country Status (6)

Country Link
JP (1) JPS5750869B2 (de)
AT (1) AT334708B (de)
CA (1) CA1053547A (de)
FR (1) FR2273078B1 (de)
GB (1) GB1488948A (de)
SE (1) SE410622B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6501560B2 (ja) * 2015-03-06 2019-04-17 東京エレクトロン株式会社 シリコン窒化物膜の成膜方法および成膜装置

Also Published As

Publication number Publication date
FR2273078A1 (de) 1975-12-26
SE7501313L (de) 1975-08-08
DE2505007A1 (de) 1975-08-14
ATA92175A (de) 1976-05-15
JPS50109826A (de) 1975-08-29
FR2273078B1 (de) 1977-04-15
JPS5750869B2 (de) 1982-10-29
CA1053547A (en) 1979-05-01
SE410622B (sv) 1979-10-22
DE2505007B2 (de) 1977-06-30
GB1488948A (en) 1977-10-19

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Legal Events

Date Code Title Description
EIH Change in the person of patent owner
ELJ Ceased due to non-payment of the annual fee
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties