CA1031080A - Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope - Google Patents

Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Info

Publication number
CA1031080A
CA1031080A CA178,925A CA178925A CA1031080A CA 1031080 A CA1031080 A CA 1031080A CA 178925 A CA178925 A CA 178925A CA 1031080 A CA1031080 A CA 1031080A
Authority
CA
Canada
Prior art keywords
thermionic
field emission
tube including
beam tube
emission cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA178,925A
Other languages
English (en)
French (fr)
Inventor
Thompson A. Baker
Melvin M. Balsiger
Herbert E. Litsjo
Kevin T. Considine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Priority to CA233,767A priority Critical patent/CA998731A/en
Application granted granted Critical
Publication of CA1031080A publication Critical patent/CA1031080A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA178,925A 1972-08-17 1973-08-16 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope Expired CA1031080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA233,767A CA998731A (en) 1972-08-17 1975-08-20 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (1)

Publication Number Publication Date
CA1031080A true CA1031080A (en) 1978-05-09

Family

ID=23077025

Family Applications (1)

Application Number Title Priority Date Filing Date
CA178,925A Expired CA1031080A (en) 1972-08-17 1973-08-16 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Country Status (7)

Country Link
US (1) US3809899A (ja)
JP (3) JPS557661B2 (ja)
CA (1) CA1031080A (ja)
DE (2) DE2341377A1 (ja)
FR (2) FR2199613B1 (ja)
GB (2) GB1433944A (ja)
NL (2) NL7311344A (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514266C2 (de) * 1975-03-27 1977-04-28 Siemens Ag Korpuskularstrahloptisches geraet mit zwei in strahlrichtung aufeinanderfolgenden teilraeumen unterschiedlicher druecke
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
DE3039283A1 (de) * 1979-10-19 1981-05-14 Hitachi, Ltd., Tokyo Feldemissionskathode und verfahren zu ihrer herstellung
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
EP0189498B1 (en) * 1985-01-29 1989-05-03 International Business Machines Corporation Field-emission scanning auger electron microscope
US5254856A (en) * 1990-06-20 1993-10-19 Hitachi, Ltd. Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
EP0689224B1 (en) * 1990-08-10 1999-12-22 Koninklijke Philips Electronics N.V. Charged particle beam device
JP3148353B2 (ja) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション 電子ビーム検査方法とそのシステム
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP2951609B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 電子ビーム検査装置
JP2969091B2 (ja) * 1997-01-20 1999-11-02 株式会社日立製作所 電子ビーム検査装置
JP2951610B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 欠陥検査方法
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (ja) * 1939-05-08
NL112758C (ja) * 1942-10-28
NL102095C (ja) * 1955-07-01
NL289910A (ja) * 1962-03-08
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5852244B2 (ja) * 1977-05-04 1983-11-21 松下電器産業株式会社 モ−タの回転数調整装置

Also Published As

Publication number Publication date
JPS5661960U (ja) 1981-05-26
FR2214962A1 (ja) 1974-08-19
NL7908479A (nl) 1980-03-31
JPS49132975A (ja) 1974-12-20
DE2366144C2 (de) 1982-12-30
US3809899A (en) 1974-05-07
FR2199613B1 (ja) 1977-02-25
FR2214962B1 (ja) 1978-07-07
FR2199613A1 (ja) 1974-04-12
JPS54161263A (en) 1979-12-20
NL7311344A (ja) 1974-02-19
GB1433945A (en) 1976-04-28
JPS557661B2 (ja) 1980-02-27
DE2341377A1 (de) 1974-03-07
GB1433944A (en) 1976-04-28

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