US3809899A - Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope - Google Patents
Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope Download PDFInfo
- Publication number
- US3809899A US3809899A US00281375A US28137572A US3809899A US 3809899 A US3809899 A US 3809899A US 00281375 A US00281375 A US 00281375A US 28137572 A US28137572 A US 28137572A US 3809899 A US3809899 A US 3809899A
- Authority
- US
- United States
- Prior art keywords
- cathode
- electron
- chamber
- tip
- emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 claims description 29
- 230000005686 electrostatic field Effects 0.000 claims description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 12
- 229910052721 tungsten Inorganic materials 0.000 claims description 12
- 239000010937 tungsten Substances 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 8
- 108010083687 Ion Pumps Proteins 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000004080 punching Methods 0.000 claims description 5
- 238000005304 joining Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000005684 electric field Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000013011 mating Effects 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Definitions
- An electron beam tube comprising:
- interconnecting means includes means for mechanically joining said chambers and means for puncturing a sealing diaphragm member in said first chamber to provide communication between said first chamber and said second chamber.
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (15)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00281375A US3809899A (en) | 1972-08-17 | 1972-08-17 | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
GB3159874A GB1433945A (en) | 1972-08-17 | 1973-08-13 | Electronbeam tubes for scanning electron microscopes |
GB3818173A GB1433944A (en) | 1972-08-17 | 1973-08-13 | Method and apparatus for producing electron emission from a field emission cathode |
DE19732341377 DE2341377A1 (de) | 1972-08-17 | 1973-08-16 | Elektronenstrahlroehre mit thermionikfeld-emissionskathode fuer ein abtastendes elektronenmikroskop |
FR7330655A FR2199613B1 (ja) | 1972-08-17 | 1973-08-16 | |
CA178,925A CA1031080A (en) | 1972-08-17 | 1973-08-16 | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
DE2366144A DE2366144C2 (de) | 1972-08-17 | 1973-08-16 | Verfahren und Anordnung zum Bilden einer Öffnung für den Durchtritt des Elektronenstrahls in einer zwischen zwei Kammern angeordneten dichtenden Membran einer evakuierten Elektronenstrahlröhre und Anwendung des Verfahrens |
JP9232973A JPS557661B2 (ja) | 1972-08-17 | 1973-08-17 | |
NL7311344A NL7311344A (ja) | 1972-08-17 | 1973-08-17 | |
US441718A US3881125A (en) | 1972-08-17 | 1974-02-11 | Separable-chamber electron-beam tube including means for puncturing a pressure seal therein |
FR7412881A FR2214962B1 (ja) | 1972-08-17 | 1974-04-04 | |
CA233,767A CA998731A (en) | 1972-08-17 | 1975-08-20 | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
JP13038078A JPS54161263A (en) | 1972-08-17 | 1978-10-23 | Electron beam generator |
NL7908479A NL7908479A (nl) | 1972-08-17 | 1979-11-21 | Elektronenstraalbuis. |
JP1980138035U JPS5661960U (ja) | 1972-08-17 | 1980-09-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00281375A US3809899A (en) | 1972-08-17 | 1972-08-17 | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
US3809899A true US3809899A (en) | 1974-05-07 |
Family
ID=23077025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00281375A Expired - Lifetime US3809899A (en) | 1972-08-17 | 1972-08-17 | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
Country Status (7)
Country | Link |
---|---|
US (1) | US3809899A (ja) |
JP (3) | JPS557661B2 (ja) |
CA (1) | CA1031080A (ja) |
DE (2) | DE2341377A1 (ja) |
FR (2) | FR2199613B1 (ja) |
GB (2) | GB1433944A (ja) |
NL (2) | NL7311344A (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4066905A (en) * | 1975-03-27 | 1978-01-03 | Siemens Aktiengesellschaft | Particle beam apparatus with zones of different pressure |
US4139773A (en) * | 1977-11-04 | 1979-02-13 | Oregon Graduate Center | Method and apparatus for producing bright high resolution ion beams |
US4175234A (en) * | 1977-08-05 | 1979-11-20 | University Of Virginia | Apparatus for producing ions of thermally labile or nonvolatile solids |
US4379250A (en) * | 1979-10-19 | 1983-04-05 | Hitachi, Ltd. | Field emission cathode and method of fabricating the same |
US4698502A (en) * | 1985-01-29 | 1987-10-06 | International Business Machines Corporation | Field-emission scanning auger electron microscope |
US5235188A (en) * | 1990-08-10 | 1993-08-10 | U.S. Philips Corporation | Charged particle beam device |
US5254856A (en) * | 1990-06-20 | 1993-10-19 | Hitachi, Ltd. | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems |
US5502306A (en) * | 1991-05-30 | 1996-03-26 | Kla Instruments Corporation | Electron beam inspection system and method |
US5616926A (en) * | 1994-08-03 | 1997-04-01 | Hitachi, Ltd. | Schottky emission cathode and a method of stabilizing the same |
US20110221360A1 (en) * | 2010-03-10 | 2011-09-15 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Feedback loop for emitter flashing |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5648028A (en) * | 1979-09-26 | 1981-05-01 | Toshiba Corp | Electron gun |
US4468586A (en) * | 1981-05-26 | 1984-08-28 | International Business Machines Corporation | Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution |
JP2969091B2 (ja) * | 1997-01-20 | 1999-11-02 | 株式会社日立製作所 | 電子ビーム検査装置 |
JP2951609B2 (ja) * | 1997-01-20 | 1999-09-20 | 株式会社日立製作所 | 電子ビーム検査装置 |
JP2951610B2 (ja) * | 1997-01-20 | 1999-09-20 | 株式会社日立製作所 | 欠陥検査方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2266218A (en) * | 1939-05-08 | 1941-12-16 | Krause Friedrich | Electron microscope vacuum system |
US2916668A (en) * | 1955-07-01 | 1959-12-08 | Research Corp | Heat stabilized field emission electron sources |
US3248542A (en) * | 1962-03-08 | 1966-04-26 | Hilger & Watts Ltd | Electron beam devices having plural chambers designed to be assembled and disassembled |
US3374386A (en) * | 1964-11-02 | 1968-03-19 | Field Emission Corp | Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL112758C (ja) * | 1942-10-28 | |||
US3174026A (en) * | 1962-06-20 | 1965-03-16 | Budd Co | Method and means of circumventing cathode maintenance in electron beam devices |
US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
JPS5852244B2 (ja) * | 1977-05-04 | 1983-11-21 | 松下電器産業株式会社 | モ−タの回転数調整装置 |
-
1972
- 1972-08-17 US US00281375A patent/US3809899A/en not_active Expired - Lifetime
-
1973
- 1973-08-13 GB GB3818173A patent/GB1433944A/en not_active Expired
- 1973-08-13 GB GB3159874A patent/GB1433945A/en not_active Expired
- 1973-08-16 DE DE19732341377 patent/DE2341377A1/de not_active Ceased
- 1973-08-16 CA CA178,925A patent/CA1031080A/en not_active Expired
- 1973-08-16 FR FR7330655A patent/FR2199613B1/fr not_active Expired
- 1973-08-16 DE DE2366144A patent/DE2366144C2/de not_active Expired
- 1973-08-17 JP JP9232973A patent/JPS557661B2/ja not_active Expired
- 1973-08-17 NL NL7311344A patent/NL7311344A/xx unknown
-
1974
- 1974-04-04 FR FR7412881A patent/FR2214962B1/fr not_active Expired
-
1978
- 1978-10-23 JP JP13038078A patent/JPS54161263A/ja active Pending
-
1979
- 1979-11-21 NL NL7908479A patent/NL7908479A/nl not_active Application Discontinuation
-
1980
- 1980-09-26 JP JP1980138035U patent/JPS5661960U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2266218A (en) * | 1939-05-08 | 1941-12-16 | Krause Friedrich | Electron microscope vacuum system |
US2916668A (en) * | 1955-07-01 | 1959-12-08 | Research Corp | Heat stabilized field emission electron sources |
US3248542A (en) * | 1962-03-08 | 1966-04-26 | Hilger & Watts Ltd | Electron beam devices having plural chambers designed to be assembled and disassembled |
US3374386A (en) * | 1964-11-02 | 1968-03-19 | Field Emission Corp | Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder |
Non-Patent Citations (1)
Title |
---|
Electron Gun Using a Field Emmision Source, Creve, Review of Scientific Instruments Vol. 39 No. 4 April 1968 pp. 576 583. * |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4066905A (en) * | 1975-03-27 | 1978-01-03 | Siemens Aktiengesellschaft | Particle beam apparatus with zones of different pressure |
US4175234A (en) * | 1977-08-05 | 1979-11-20 | University Of Virginia | Apparatus for producing ions of thermally labile or nonvolatile solids |
US4139773A (en) * | 1977-11-04 | 1979-02-13 | Oregon Graduate Center | Method and apparatus for producing bright high resolution ion beams |
US4379250A (en) * | 1979-10-19 | 1983-04-05 | Hitachi, Ltd. | Field emission cathode and method of fabricating the same |
US4698502A (en) * | 1985-01-29 | 1987-10-06 | International Business Machines Corporation | Field-emission scanning auger electron microscope |
US5254856A (en) * | 1990-06-20 | 1993-10-19 | Hitachi, Ltd. | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems |
US5442183A (en) * | 1990-06-20 | 1995-08-15 | Hitachi, Ltd. | Charged particle beam apparatus including means for maintaining a vacuum seal |
US5235188A (en) * | 1990-08-10 | 1993-08-10 | U.S. Philips Corporation | Charged particle beam device |
US5502306A (en) * | 1991-05-30 | 1996-03-26 | Kla Instruments Corporation | Electron beam inspection system and method |
US5616926A (en) * | 1994-08-03 | 1997-04-01 | Hitachi, Ltd. | Schottky emission cathode and a method of stabilizing the same |
US20110221360A1 (en) * | 2010-03-10 | 2011-09-15 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Feedback loop for emitter flashing |
US8674300B2 (en) * | 2010-03-10 | 2014-03-18 | ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprüftechnik mbH | Feedback loop for emitter flashing |
Also Published As
Publication number | Publication date |
---|---|
JPS557661B2 (ja) | 1980-02-27 |
JPS5661960U (ja) | 1981-05-26 |
DE2366144C2 (de) | 1982-12-30 |
GB1433944A (en) | 1976-04-28 |
DE2341377A1 (de) | 1974-03-07 |
NL7908479A (nl) | 1980-03-31 |
JPS54161263A (en) | 1979-12-20 |
FR2199613B1 (ja) | 1977-02-25 |
GB1433945A (en) | 1976-04-28 |
FR2199613A1 (ja) | 1974-04-12 |
CA1031080A (en) | 1978-05-09 |
FR2214962A1 (ja) | 1974-08-19 |
JPS49132975A (ja) | 1974-12-20 |
NL7311344A (ja) | 1974-02-19 |
FR2214962B1 (ja) | 1978-07-07 |
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