JPS54161263A - Electron beam generator - Google Patents

Electron beam generator

Info

Publication number
JPS54161263A
JPS54161263A JP13038078A JP13038078A JPS54161263A JP S54161263 A JPS54161263 A JP S54161263A JP 13038078 A JP13038078 A JP 13038078A JP 13038078 A JP13038078 A JP 13038078A JP S54161263 A JPS54161263 A JP S54161263A
Authority
JP
Japan
Prior art keywords
electron beam
beam generator
generator
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13038078A
Other languages
English (en)
Inventor
Aasaa Beekaa Tonpuson
Emu Barushigaa Merubin
Toomasu Konshideiin Kebin
Emiiru Ritsujiyo Haabaato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of JPS54161263A publication Critical patent/JPS54161263A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP13038078A 1972-08-17 1978-10-23 Electron beam generator Pending JPS54161263A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS54161263A true JPS54161263A (en) 1979-12-20

Family

ID=23077025

Family Applications (3)

Application Number Title Priority Date Filing Date
JP9232973A Expired JPS557661B2 (ja) 1972-08-17 1973-08-17
JP13038078A Pending JPS54161263A (en) 1972-08-17 1978-10-23 Electron beam generator
JP1980138035U Pending JPS5661960U (ja) 1972-08-17 1980-09-26

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP9232973A Expired JPS557661B2 (ja) 1972-08-17 1973-08-17

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP1980138035U Pending JPS5661960U (ja) 1972-08-17 1980-09-26

Country Status (7)

Country Link
US (1) US3809899A (ja)
JP (3) JPS557661B2 (ja)
CA (1) CA1031080A (ja)
DE (2) DE2341377A1 (ja)
FR (2) FR2199613B1 (ja)
GB (2) GB1433945A (ja)
NL (2) NL7311344A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09218171A (ja) * 1997-01-20 1997-08-19 Hitachi Ltd 欠陥検査方法
JPH09219428A (ja) * 1997-01-20 1997-08-19 Hitachi Ltd 電子ビーム検査装置
JPH09219427A (ja) * 1997-01-20 1997-08-19 Hitachi Ltd 電子ビーム検査装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514266C2 (de) * 1975-03-27 1977-04-28 Siemens Ag Korpuskularstrahloptisches geraet mit zwei in strahlrichtung aufeinanderfolgenden teilraeumen unterschiedlicher druecke
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
US4379250A (en) * 1979-10-19 1983-04-05 Hitachi, Ltd. Field emission cathode and method of fabricating the same
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
EP0189498B1 (en) * 1985-01-29 1989-05-03 International Business Machines Corporation Field-emission scanning auger electron microscope
EP0462554B1 (en) * 1990-06-20 2000-10-11 Hitachi, Ltd. Charged particle beam apparatus
DE69131870T2 (de) * 1990-08-10 2000-08-17 Koninkl Philips Electronics Nv Ladungsträgerstrahl-Vorrichtung
JP3148353B2 (ja) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション 電子ビーム検査方法とそのシステム
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (ja) * 1939-05-08
NL112758C (ja) * 1942-10-28
NL102095C (ja) * 1955-07-01
NL289910A (ja) * 1962-03-08
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS5852244B2 (ja) * 1977-05-04 1983-11-21 松下電器産業株式会社 モ−タの回転数調整装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09218171A (ja) * 1997-01-20 1997-08-19 Hitachi Ltd 欠陥検査方法
JPH09219428A (ja) * 1997-01-20 1997-08-19 Hitachi Ltd 電子ビーム検査装置
JPH09219427A (ja) * 1997-01-20 1997-08-19 Hitachi Ltd 電子ビーム検査装置

Also Published As

Publication number Publication date
US3809899A (en) 1974-05-07
JPS557661B2 (ja) 1980-02-27
NL7311344A (ja) 1974-02-19
CA1031080A (en) 1978-05-09
NL7908479A (nl) 1980-03-31
GB1433944A (en) 1976-04-28
FR2199613A1 (ja) 1974-04-12
GB1433945A (en) 1976-04-28
FR2214962A1 (ja) 1974-08-19
JPS5661960U (ja) 1981-05-26
FR2199613B1 (ja) 1977-02-25
DE2341377A1 (de) 1974-03-07
JPS49132975A (ja) 1974-12-20
FR2214962B1 (ja) 1978-07-07
DE2366144C2 (de) 1982-12-30

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