BRPI0515290A - dispositivo para mems fabricado sobre um substrato pré-modelado - Google Patents

dispositivo para mems fabricado sobre um substrato pré-modelado

Info

Publication number
BRPI0515290A
BRPI0515290A BRPI0515290-9A BRPI0515290A BRPI0515290A BR PI0515290 A BRPI0515290 A BR PI0515290A BR PI0515290 A BRPI0515290 A BR PI0515290A BR PI0515290 A BRPI0515290 A BR PI0515290A
Authority
BR
Brazil
Prior art keywords
substrate
mems device
device manufactured
precast
electrode
Prior art date
Application number
BRPI0515290-9A
Other languages
English (en)
Inventor
Clarence Chui
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of BRPI0515290A publication Critical patent/BRPI0515290A/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)

Abstract

DISPOSITIVO PARA MEMS FABRICADO SOBRE UM SUBSTRATO PRé- MODELADO Trata-se de um dispositivo para sistemas microeletromecânicos fabricado sobre um substrato pré-modelado que tem ranhuras formadas nele. Um eletrodo inferior é depositado sobre o substrato e separado de um eletrodo superior ortogonal por uma cavidade. O eletrodo superior é configurado para ser móvel de modo a modular a luz refletida. Uma camada semi-refletiva e um material transparente são formados sobre o eletrodo superior móvel.
BRPI0515290-9A 2004-09-27 2005-08-22 dispositivo para mems fabricado sobre um substrato pré-modelado BRPI0515290A (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US61337604P 2004-09-27 2004-09-27
US11/174,220 US7373026B2 (en) 2004-09-27 2005-07-01 MEMS device fabricated on a pre-patterned substrate
PCT/US2005/029821 WO2006036385A1 (en) 2004-09-27 2005-08-22 Mems device fabricated on a pre-patterned substrate

Publications (1)

Publication Number Publication Date
BRPI0515290A true BRPI0515290A (pt) 2008-07-15

Family

ID=35431414

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0515290-9A BRPI0515290A (pt) 2004-09-27 2005-08-22 dispositivo para mems fabricado sobre um substrato pré-modelado

Country Status (8)

Country Link
US (5) US7373026B2 (pt)
EP (1) EP1803015B1 (pt)
AT (1) ATE521008T1 (pt)
AU (1) AU2005290163A1 (pt)
BR (1) BRPI0515290A (pt)
IL (1) IL180926A0 (pt)
TW (1) TWI391317B (pt)
WO (1) WO2006036385A1 (pt)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US7373026B2 (en) * 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
US7450295B2 (en) * 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) * 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7417784B2 (en) * 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7623287B2 (en) * 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7527996B2 (en) * 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7711239B2 (en) * 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7369292B2 (en) * 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7570415B2 (en) * 2007-08-07 2009-08-04 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7943202B2 (en) * 2008-05-07 2011-05-17 Qualcomm Mems Technologies, Inc. Apparatus and methods for providing a static interferometric display device
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
WO2011126953A1 (en) 2010-04-09 2011-10-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
CA2796519A1 (en) 2010-04-16 2011-10-20 Flex Lighting Ii, Llc Illumination device comprising a film-based lightguide
BR112012026329A2 (pt) 2010-04-16 2019-09-24 Flex Lighting Ii Llc sinal compreendendo um guia de luz baseado em película
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
WO2012137026A1 (en) * 2011-04-05 2012-10-11 Sony Ericsson Mobile Communications Ab Multi-band wireless terminals with metal backplates and multi-band antennae, and multi-band antenna systems with metal backplates and multi-band antennae

Family Cites Families (336)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US691282A (en) * 1901-05-11 1902-01-14 Arthur H Meade Chopper and thinner for plants.
US2534846A (en) 1946-06-20 1950-12-19 Emi Ltd Color filter
DE1288651B (de) 1963-06-28 1969-02-06 Siemens Ag Anordnung elektrischer Dipole fuer Wellenlaengen unterhalb 1 mm und Verfahren zur Herstellung einer derartigen Anordnung
US3616312A (en) 1966-04-15 1971-10-26 Ionics Hydrazine manufacture
FR1603131A (pt) 1968-07-05 1971-03-22
US3813265A (en) 1970-02-16 1974-05-28 A Marks Electro-optical dipolar material
US3653741A (en) 1970-02-16 1972-04-04 Alvin M Marks Electro-optical dipolar material
US3725868A (en) 1970-10-19 1973-04-03 Burroughs Corp Small reconfigurable processor for a variety of data processing applications
DE2336930A1 (de) 1973-07-20 1975-02-06 Battelle Institut E V Infrarot-modulator (ii.)
US4099854A (en) 1976-10-12 1978-07-11 The Unites States Of America As Represented By The Secretary Of The Navy Optical notch filter utilizing electric dipole resonance absorption
US4196396A (en) 1976-10-15 1980-04-01 Bell Telephone Laboratories, Incorporated Interferometer apparatus using electro-optic material with feedback
US4389096A (en) 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
US4663083A (en) 1978-05-26 1987-05-05 Marks Alvin M Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics
US4445050A (en) 1981-12-15 1984-04-24 Marks Alvin M Device for conversion of light power to electric power
US4228437A (en) 1979-06-26 1980-10-14 The United States Of America As Represented By The Secretary Of The Navy Wideband polarization-transforming electromagnetic mirror
NL8001281A (nl) 1980-03-04 1981-10-01 Philips Nv Weergeefinrichting.
US4377324A (en) * 1980-08-04 1983-03-22 Honeywell Inc. Graded index Fabry-Perot optical filter device
US4441791A (en) 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
FR2506026A1 (fr) 1981-05-18 1982-11-19 Radant Etudes Procede et dispositif pour l'analyse d'un faisceau de rayonnement d'ondes electromagnetiques hyperfrequence
NL8103377A (nl) 1981-07-16 1983-02-16 Philips Nv Weergeefinrichting.
US4571603A (en) * 1981-11-03 1986-02-18 Texas Instruments Incorporated Deformable mirror electrostatic printer
NL8200354A (nl) 1982-02-01 1983-09-01 Philips Nv Passieve weergeefinrichting.
US4500171A (en) * 1982-06-02 1985-02-19 Texas Instruments Incorporated Process for plastic LCD fill hole sealing
US4482213A (en) 1982-11-23 1984-11-13 Texas Instruments Incorporated Perimeter seal reinforcement holes for plastic LCDs
US4863245A (en) 1984-02-28 1989-09-05 Exxon Research And Engineering Company Superlattice electrooptic devices
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4566935A (en) * 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4617608A (en) 1984-12-28 1986-10-14 At&T Bell Laboratories Variable gap device and method of manufacture
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
GB2186708B (en) 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
US4663181A (en) * 1986-02-24 1987-05-05 Conoco Inc. Method for applying protective coatings
GB8610129D0 (en) 1986-04-25 1986-05-29 Secr Defence Electro-optical device
US4748366A (en) 1986-09-02 1988-05-31 Taylor George W Novel uses of piezoelectric materials for creating optical effects
US4786128A (en) 1986-12-02 1988-11-22 Quantum Diagnostics, Ltd. Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction
NL8701138A (nl) 1987-05-13 1988-12-01 Philips Nv Electroscopische beeldweergeefinrichting.
DE3716485C1 (de) 1987-05-16 1988-11-24 Heraeus Gmbh W C Xenon-Kurzbogen-Entladungslampe
US4900136A (en) * 1987-08-11 1990-02-13 North American Philips Corporation Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US4856863A (en) 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US4925259A (en) * 1988-10-20 1990-05-15 The United States Of America As Represented By The United States Department Of Energy Multilayer optical dielectric coating
JPH0268513A (ja) 1988-09-05 1990-03-08 Fuji Photo Film Co Ltd 色フィルタ
JP2700903B2 (ja) * 1988-09-30 1998-01-21 シャープ株式会社 液晶表示装置
US4982184A (en) * 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
US5206629A (en) 1989-02-27 1993-04-27 Texas Instruments Incorporated Spatial light modulator and memory for digitized video display
US5192946A (en) * 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
US5446479A (en) * 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5170156A (en) 1989-02-27 1992-12-08 Texas Instruments Incorporated Multi-frequency two dimensional display system
US5272473A (en) 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
US5162787A (en) 1989-02-27 1992-11-10 Texas Instruments Incorporated Apparatus and method for digitized video system utilizing a moving display surface
US5287096A (en) * 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
KR100202246B1 (ko) 1989-02-27 1999-06-15 윌리엄 비. 켐플러 디지탈화 비디오 시스템을 위한 장치 및 방법
US5214419A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Planarized true three dimensional display
US5214420A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Spatial light modulator projection system with random polarity light
US4900395A (en) * 1989-04-07 1990-02-13 Fsi International, Inc. HF gas etching of wafers in an acid processor
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5381253A (en) * 1991-11-14 1995-01-10 Board Of Regents Of University Of Colorado Chiral smectic liquid crystal optical modulators having variable retardation
US5124834A (en) 1989-11-16 1992-06-23 General Electric Company Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
US5500635A (en) * 1990-02-20 1996-03-19 Mott; Jonathan C. Products incorporating piezoelectric material
CH682523A5 (fr) * 1990-04-20 1993-09-30 Suisse Electronique Microtech Dispositif de modulation de lumière à adressage matriciel.
GB9012099D0 (en) 1990-05-31 1990-07-18 Kodak Ltd Optical article for multicolour imaging
DE69113150T2 (de) * 1990-06-29 1996-04-04 Texas Instruments Inc Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
US5216537A (en) 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5018256A (en) 1990-06-29 1991-05-28 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5153771A (en) 1990-07-18 1992-10-06 Northrop Corporation Coherent light modulation and detector
US5192395A (en) * 1990-10-12 1993-03-09 Texas Instruments Incorporated Method of making a digital flexure beam accelerometer
US5526688A (en) * 1990-10-12 1996-06-18 Texas Instruments Incorporated Digital flexure beam accelerometer and method
US5044736A (en) 1990-11-06 1991-09-03 Motorola, Inc. Configurable optical filter or display
US5331454A (en) 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
US5602671A (en) * 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
FR2669466B1 (fr) 1990-11-16 1997-11-07 Michel Haond Procede de gravure de couches de circuit integre a profondeur fixee et circuit integre correspondant.
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5136669A (en) 1991-03-15 1992-08-04 Sperry Marine Inc. Variable ratio fiber optic coupler optical signal processing element
CA2063744C (en) 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
FR2679057B1 (fr) * 1991-07-11 1995-10-20 Morin Francois Structure d'ecran a cristal liquide, a matrice active et a haute definition.
US5179274A (en) * 1991-07-12 1993-01-12 Texas Instruments Incorporated Method for controlling operation of optical systems and devices
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5254980A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated DMD display system controller
CH680534A5 (en) 1991-09-16 1992-09-15 Landis & Gyr Betriebs Ag Fabry=perot sensor for optical parameter measurement - uses two opposing mirrors respectively attached to deflected measuring membrane and transparent plate
US5315370A (en) * 1991-10-23 1994-05-24 Bulow Jeffrey A Interferometric modulator for optical signal processing
US5563398A (en) * 1991-10-31 1996-10-08 Texas Instruments Incorporated Spatial light modulator scanning system
CH681047A5 (en) * 1991-11-25 1992-12-31 Landis & Gyr Betriebs Ag Measuring parameter, esp. pressure difference, using Fabry-Perot detector - controlling optical length of detector according to output parameter to determine working point on graph
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
US5233456A (en) 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5228013A (en) 1992-01-10 1993-07-13 Bik Russell J Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays
US5296950A (en) * 1992-01-31 1994-03-22 Texas Instruments Incorporated Optical signal free-space conversion board
US5231532A (en) 1992-02-05 1993-07-27 Texas Instruments Incorporated Switchable resonant filter for optical radiation
US5212582A (en) 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
EP0562424B1 (en) 1992-03-25 1997-05-28 Texas Instruments Incorporated Embedded optical calibration system
US5312513A (en) 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5401983A (en) * 1992-04-08 1995-03-28 Georgia Tech Research Corporation Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
TW245772B (pt) * 1992-05-19 1995-04-21 Akzo Nv
JPH0651250A (ja) * 1992-05-20 1994-02-25 Texas Instr Inc <Ti> モノリシックな空間的光変調器およびメモリのパッケージ
US5347377A (en) 1992-06-17 1994-09-13 Eastman Kodak Company Planar waveguide liquid crystal variable retarder
US5818095A (en) * 1992-08-11 1998-10-06 Texas Instruments Incorporated High-yield spatial light modulator with light blocking layer
US5345328A (en) 1992-08-12 1994-09-06 Sandia Corporation Tandem resonator reflectance modulator
US5293272A (en) * 1992-08-24 1994-03-08 Physical Optics Corporation High finesse holographic fabry-perot etalon and method of fabricating
US5737050A (en) * 1992-08-25 1998-04-07 Matsushita Electric Industrial Co., Ltd. Light valve having reduced reflected light, high brightness and high contrast
US5327286A (en) 1992-08-31 1994-07-05 Texas Instruments Incorporated Real time optical correlation system
US5325116A (en) 1992-09-18 1994-06-28 Texas Instruments Incorporated Device for writing to and reading from optical storage media
US5296775A (en) 1992-09-24 1994-03-22 International Business Machines Corporation Cooling microfan arrangements and process
US5488505A (en) * 1992-10-01 1996-01-30 Engle; Craig D. Enhanced electrostatic shutter mosaic modulator
US5312512A (en) * 1992-10-23 1994-05-17 Ncr Corporation Global planarization using SOG and CMP
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5559358A (en) * 1993-05-25 1996-09-24 Honeywell Inc. Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
US5324683A (en) 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
US5489952A (en) * 1993-07-14 1996-02-06 Texas Instruments Incorporated Method and device for multi-format television
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5497197A (en) * 1993-11-04 1996-03-05 Texas Instruments Incorporated System and method for packaging data into video processor
US5500761A (en) 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
JPH07253594A (ja) * 1994-03-15 1995-10-03 Fujitsu Ltd 表示装置
US5665997A (en) 1994-03-31 1997-09-09 Texas Instruments Incorporated Grated landing area to eliminate sticking of micro-mechanical devices
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7776631B2 (en) 1994-05-05 2010-08-17 Qualcomm Mems Technologies, Inc. MEMS device and method of forming a MEMS device
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
KR0135391B1 (ko) 1994-05-28 1998-04-22 김광호 자기정렬된 액정표시장치용 박막트랜지스터 및 제조방법
US5497172A (en) * 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
US5499062A (en) * 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory
US6053617A (en) * 1994-09-23 2000-04-25 Texas Instruments Incorporated Manufacture method for micromechanical devices
US5506929A (en) * 1994-10-19 1996-04-09 Clio Technologies, Inc. Light expanding system for producing a linear or planar light beam from a point-like light source
US6560018B1 (en) 1994-10-27 2003-05-06 Massachusetts Institute Of Technology Illumination system for transmissive light valve displays
JP3435850B2 (ja) 1994-10-28 2003-08-11 株式会社デンソー 半導体力学量センサ及びその製造方法
US5474865A (en) 1994-11-21 1995-12-12 Sematech, Inc. Globally planarized binary optical mask using buried absorbers
US5610624A (en) * 1994-11-30 1997-03-11 Texas Instruments Incorporated Spatial light modulator with reduced possibility of an on state defect
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US6046840A (en) 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US5835256A (en) 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US6849471B2 (en) 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US5578976A (en) 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
JP3489273B2 (ja) 1995-06-27 2004-01-19 株式会社デンソー 半導体力学量センサの製造方法
JP3234854B2 (ja) * 1995-08-28 2001-12-04 アルプス電気株式会社 多層膜フィルタ及びその製造方法
US6324192B1 (en) * 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
GB9522135D0 (en) * 1995-10-30 1996-01-03 John Mcgavigan Holdings Limite Display panels
US5771321A (en) * 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US5967163A (en) 1996-01-30 1999-10-19 Abbott Laboratories Actuator and method
US6624944B1 (en) 1996-03-29 2003-09-23 Texas Instruments Incorporated Fluorinated coating for an optical element
US6582921B2 (en) * 1996-07-29 2003-06-24 Nanosphere, Inc. Nanoparticles having oligonucleotides attached thereto and uses thereof
US5710656A (en) * 1996-07-30 1998-01-20 Lucent Technologies Inc. Micromechanical optical modulator having a reduced-mass composite membrane
US5884083A (en) * 1996-09-20 1999-03-16 Royce; Robert Computer system to compile non-incremental computer source code to execute within an incremental type computer system
JPH10260641A (ja) * 1997-03-17 1998-09-29 Nec Corp フラットパネル型表示装置用ドライバｉｃの実装構造
DE69806846T2 (de) * 1997-05-08 2002-12-12 Texas Instruments Inc., Dallas Verbesserungen für räumliche Lichtmodulatoren
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
US5994174A (en) 1997-09-29 1999-11-30 The Regents Of The University Of California Method of fabrication of display pixels driven by silicon thin film transistors
US6333556B1 (en) 1997-10-09 2001-12-25 Micron Technology, Inc. Insulating materials
US5822170A (en) 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators
CN1283369A (zh) * 1997-10-31 2001-02-07 大宇电子株式会社 光学投影系统中的薄膜驱动的反光镜组的制造方法
US5945980A (en) * 1997-11-14 1999-08-31 Logitech, Inc. Touchpad with active plane for pen detection
US6028690A (en) * 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
US6180428B1 (en) * 1997-12-12 2001-01-30 Xerox Corporation Monolithic scanning light emitting devices using micromachining
WO1999036824A1 (fr) 1998-01-20 1999-07-22 Seiko Epson Corporation Dispositif de commutation optique et dispositif d'affichage d'images
US6016693A (en) * 1998-02-09 2000-01-25 The Regents Of The University Of California Microfabrication of cantilevers using sacrificial templates
US6660656B2 (en) 1998-02-11 2003-12-09 Applied Materials Inc. Plasma processes for depositing low dielectric constant films
US6340435B1 (en) * 1998-02-11 2002-01-22 Applied Materials, Inc. Integrated low K dielectrics and etch stops
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
US6097145A (en) * 1998-04-27 2000-08-01 Copytele, Inc. Aerogel-based phase transition flat panel display
US6160833A (en) 1998-05-06 2000-12-12 Xerox Corporation Blue vertical cavity surface emitting laser
US6282010B1 (en) * 1998-05-14 2001-08-28 Texas Instruments Incorporated Anti-reflective coatings for spatial light modulators
US6858080B2 (en) * 1998-05-15 2005-02-22 Apollo Diamond, Inc. Tunable CVD diamond structures
US6323982B1 (en) 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
KR100301803B1 (ko) * 1998-06-05 2001-09-22 김영환 박막트랜지스터 및 그의 제조방법
EP1087286A4 (en) * 1998-06-08 2007-10-17 Kaneka Corp TOUCH-SENSITIVE RESISTANCE BOARD FOR LIQUID CRYSTAL DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE COMPRISING SUCH A TOUCH-SOUND TABLE
KR100290895B1 (ko) * 1998-06-30 2001-07-12 김영환 반도체 소자의 커패시터 구조 및 이의 제조 방법
US6395618B2 (en) * 1998-07-10 2002-05-28 Stmicroelectronics S.R.L. Method for manufacturing integrated structures including removing a sacrificial region
US5976902A (en) 1998-08-03 1999-11-02 Industrial Technology Research Institute Method of fabricating a fully self-aligned TFT-LCD
US5943155A (en) * 1998-08-12 1999-08-24 Lucent Techonolgies Inc. Mars optical modulators
US6249039B1 (en) * 1998-09-10 2001-06-19 Bourns, Inc. Integrated inductive components and method of fabricating such components
JP4074714B2 (ja) * 1998-09-25 2008-04-09 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
JP3919954B2 (ja) 1998-10-16 2007-05-30 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
US6171945B1 (en) * 1998-10-22 2001-01-09 Applied Materials, Inc. CVD nanoporous silica low dielectric constant films
US6288824B1 (en) * 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
US6391675B1 (en) * 1998-11-25 2002-05-21 Raytheon Company Method and apparatus for switching high frequency signals
US6194323B1 (en) * 1998-12-16 2001-02-27 Lucent Technologies Inc. Deep sub-micron metal etch with in-situ hard mask etch
US6335831B2 (en) * 1998-12-18 2002-01-01 Eastman Kodak Company Multilevel mechanical grating device
JP4377984B2 (ja) 1999-03-10 2009-12-02 キヤノン株式会社 カラーフィルタとその製造方法、該カラーフィルタを用いた液晶素子
JP2000267140A (ja) * 1999-03-16 2000-09-29 Fujitsu Ltd 液晶表示装置の製造方法
US6449084B1 (en) 1999-05-10 2002-09-10 Yanping Guo Optical deflector
JP3592136B2 (ja) * 1999-06-04 2004-11-24 キヤノン株式会社 液体吐出ヘッドおよびその製造方法と微小電気機械装置の製造方法
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
US6525310B2 (en) 1999-08-05 2003-02-25 Microvision, Inc. Frequency tunable resonant scanner
US6322712B1 (en) 1999-09-01 2001-11-27 Micron Technology, Inc. Buffer layer in flat panel display
KR100333482B1 (ko) * 1999-09-15 2002-04-25 오길록 초고속 반도체 광변조기 및 그 제조방법
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6351329B1 (en) * 1999-10-08 2002-02-26 Lucent Technologies Inc. Optical attenuator
US6960305B2 (en) * 1999-10-26 2005-11-01 Reflectivity, Inc Methods for forming and releasing microelectromechanical structures
US6549338B1 (en) 1999-11-12 2003-04-15 Texas Instruments Incorporated Bandpass filter to reduce thermal impact of dichroic light shift
US6552840B2 (en) * 1999-12-03 2003-04-22 Texas Instruments Incorporated Electrostatic efficiency of micromechanical devices
US6466358B2 (en) 1999-12-30 2002-10-15 Texas Instruments Incorporated Analog pulse width modulation cell for digital micromechanical device
WO2001063588A1 (en) * 2000-02-24 2001-08-30 Koninklijke Philips Electronics N.V. Display device comprising a light guide
US6531945B1 (en) * 2000-03-10 2003-03-11 Micron Technology, Inc. Integrated circuit inductor with a magnetic core
US6747775B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US6335224B1 (en) * 2000-05-16 2002-01-01 Sandia Corporation Protection of microelectronic devices during packaging
JP2001356701A (ja) 2000-06-15 2001-12-26 Fuji Photo Film Co Ltd 光学素子、光源ユニットおよび表示装置
US6452465B1 (en) 2000-06-27 2002-09-17 M-Squared Filters, Llc High quality-factor tunable resonator
US6452124B1 (en) 2000-06-28 2002-09-17 The Regents Of The University Of California Capacitive microelectromechanical switches
TW535024B (en) * 2000-06-30 2003-06-01 Minolta Co Ltd Liquid display element and method of producing the same
EP1170618B1 (en) 2000-07-03 2010-06-16 Sony Corporation Optical multilayer structure, optical switching device, and image display
JP4164992B2 (ja) * 2000-07-05 2008-10-15 ソニー株式会社 陰極線管及びその製造方法
CA2352729A1 (en) * 2000-07-13 2002-01-13 Creoscitex Corporation Ltd. Blazed micro-mechanical light modulator and array thereof
US6853129B1 (en) * 2000-07-28 2005-02-08 Candescent Technologies Corporation Protected substrate structure for a field emission display device
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
JP2002062505A (ja) 2000-08-14 2002-02-28 Canon Inc 投影型表示装置及びそれに用いる干渉性変調素子
US6376787B1 (en) * 2000-08-24 2002-04-23 Texas Instruments Incorporated Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer
US7196740B2 (en) * 2000-08-30 2007-03-27 Texas Instruments Incorporated Projection TV with improved micromirror array
US6643069B2 (en) 2000-08-31 2003-11-04 Texas Instruments Incorporated SLM-base color projection display having multiple SLM's and multiple projection lenses
US6466354B1 (en) 2000-09-19 2002-10-15 Silicon Light Machines Method and apparatus for interferometric modulation of light
GB2371119A (en) * 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
US6671149B1 (en) 2000-09-28 2003-12-30 Turnstone Systems, Inc. Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices
US6522801B1 (en) * 2000-10-10 2003-02-18 Agere Systems Inc. Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
US6859218B1 (en) * 2000-11-07 2005-02-22 Hewlett-Packard Development Company, L.P. Electronic display devices and methods
DE10055421A1 (de) * 2000-11-09 2002-05-29 Bosch Gmbh Robert Verfahren zur Erzeugung einer mikromechanischen Struktur und mikromechanische Struktur
KR100381011B1 (ko) * 2000-11-13 2003-04-26 한국전자통신연구원 멤즈소자 제조용 미세구조체를 고착없이 띄우는 방법
US6647171B1 (en) * 2000-12-01 2003-11-11 Corning Incorporated MEMS optical switch actuator
US6847752B2 (en) * 2000-12-07 2005-01-25 Bluebird Optical Mems Ltd. Integrated actuator for optical switch mirror array
US6906847B2 (en) 2000-12-07 2005-06-14 Reflectivity, Inc Spatial light modulators with light blocking/absorbing areas
WO2002079814A2 (en) * 2000-12-19 2002-10-10 Coventor Incorporated Method for fabricating a through-wafer optical mems device having an anti-reflective coating
US6947195B2 (en) * 2001-01-18 2005-09-20 Ricoh Company, Ltd. Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator
US20020167072A1 (en) * 2001-03-16 2002-11-14 Andosca Robert George Electrostatically actuated micro-electro-mechanical devices and method of manufacture
US6465856B2 (en) 2001-03-19 2002-10-15 Xerox Corporation Micro-fabricated shielded conductors
US20020171610A1 (en) * 2001-04-04 2002-11-21 Eastman Kodak Company Organic electroluminescent display with integrated touch-screen
US6531767B2 (en) 2001-04-09 2003-03-11 Analog Devices Inc. Critically aligned optical MEMS dies for large packaged substrate arrays and method of manufacture
US20020149850A1 (en) 2001-04-17 2002-10-17 E-Tek Dynamics, Inc. Tunable optical filter
US6525396B2 (en) 2001-04-17 2003-02-25 Texas Instruments Incorporated Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime
GB2375184A (en) * 2001-05-02 2002-11-06 Marconi Caswell Ltd Wavelength selectable optical filter
US6424094B1 (en) * 2001-05-15 2002-07-23 Eastman Kodak Company Organic electroluminescent display with integrated resistive touch screen
US7106307B2 (en) * 2001-05-24 2006-09-12 Eastman Kodak Company Touch screen for use with an OLED display
US6803534B1 (en) 2001-05-25 2004-10-12 Raytheon Company Membrane for micro-electro-mechanical switch, and methods of making and using it
US6743570B2 (en) * 2001-05-25 2004-06-01 Cornell Research Foundation, Inc. Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices
US6639724B2 (en) 2001-06-05 2003-10-28 Lucent Technologies Inc. Device having a barrier layer located therein and a method of manufacture therefor
US7005314B2 (en) * 2001-06-27 2006-02-28 Intel Corporation Sacrificial layer technique to make gaps in MEMS applications
JP3852306B2 (ja) * 2001-07-06 2006-11-29 ソニー株式会社 Ｍｅｍｓ素子の製造方法、ｇｌｖデバイスの製造方法、及びレーザディスプレイの製造方法
KR100437825B1 (ko) * 2001-07-06 2004-06-26 엘지.필립스 엘시디 주식회사 액정표시장치용 어레이기판
JP4032216B2 (ja) * 2001-07-12 2008-01-16 ソニー株式会社 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置
KR100452112B1 (ko) 2001-07-18 2004-10-12 한국과학기술원 정전 구동기
JP2003059905A (ja) * 2001-07-31 2003-02-28 Applied Materials Inc エッチング方法、キャパシタの製造方法、および半導体装置
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6600201B2 (en) 2001-08-03 2003-07-29 Hewlett-Packard Development Company, L.P. Systems with high density packing of micromachines
US6930364B2 (en) * 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
US20030053078A1 (en) 2001-09-17 2003-03-20 Mark Missey Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators
US6870581B2 (en) 2001-10-30 2005-03-22 Sharp Laboratories Of America, Inc. Single panel color video projection display using reflective banded color falling-raster illumination
JP4045090B2 (ja) * 2001-11-06 2008-02-13 オムロン株式会社 静電アクチュエータの調整方法
US6803160B2 (en) * 2001-12-13 2004-10-12 Dupont Photomasks, Inc. Multi-tone photomask and method for manufacturing the same
AU2002219261A1 (en) 2001-12-18 2003-06-30 Nokia Corporation Electrically tunable interferometric filter
JP3893421B2 (ja) 2001-12-27 2007-03-14 富士フイルム株式会社 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置
US7116459B2 (en) * 2001-12-27 2006-10-03 Texas Instruments Incorporated Field diode detection of excess light conditions for spatial light modulator
US6959990B2 (en) 2001-12-31 2005-11-01 Texas Instruments Incorporated Prism for high contrast projection
KR100439423B1 (ko) * 2002-01-16 2004-07-09 한국전자통신연구원 마이크로전자기계 액튜에이터
US6608268B1 (en) * 2002-02-05 2003-08-19 Memtronics, A Division Of Cogent Solutions, Inc. Proximity micro-electro-mechanical system
US6794119B2 (en) * 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
WO2003069404A1 (fr) 2002-02-15 2003-08-21 Bridgestone Corporation Unite d'affichage d'images
JP3558066B2 (ja) * 2002-02-19 2004-08-25 ソニー株式会社 Ｍｅｍｓ素子とその製造方法、光変調素子、ｇｌｖデバイスとその製造方法、及びレーザディスプレイ
US6643053B2 (en) 2002-02-20 2003-11-04 The Regents Of The University Of California Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics
US6574033B1 (en) * 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US7145143B2 (en) 2002-03-18 2006-12-05 Honeywell International Inc. Tunable sensor
US7027200B2 (en) * 2002-03-22 2006-04-11 Reflectivity, Inc Etching method used in fabrications of microstructures
US6700770B2 (en) 2002-03-22 2004-03-02 Turnstone Systems, Inc. Protection of double end exposed systems
US7029829B2 (en) * 2002-04-18 2006-04-18 The Regents Of The University Of Michigan Low temperature method for forming a microcavity on a substrate and article having same
US6791441B2 (en) * 2002-05-07 2004-09-14 Raytheon Company Micro-electro-mechanical switch, and methods of making and using it
US6741377B2 (en) * 2002-07-02 2004-05-25 Iridigm Display Corporation Device having a light-absorbing mask and a method for fabricating same
US7071289B2 (en) * 2002-07-11 2006-07-04 The University Of Connecticut Polymers comprising thieno [3,4-b]thiophene and methods of making and using the same
US20040058531A1 (en) * 2002-08-08 2004-03-25 United Microelectronics Corp. Method for preventing metal extrusion in a semiconductor structure.
TW544787B (en) * 2002-09-18 2003-08-01 Promos Technologies Inc Method of forming self-aligned contact structure with locally etched gate conductive layer
KR100512960B1 (ko) * 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
US6806557B2 (en) 2002-09-30 2004-10-19 Motorola, Inc. Hermetically sealed microdevices having a single crystalline silicon getter for maintaining vacuum
US6661069B1 (en) 2002-10-22 2003-12-09 International Business Machines Corporation Micro-electromechanical varactor with enhanced tuning range
FR2846318B1 (fr) * 2002-10-24 2005-01-07 Commissariat Energie Atomique Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression
US6747785B2 (en) * 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
US7370185B2 (en) 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
US6909589B2 (en) * 2002-11-20 2005-06-21 Corporation For National Research Initiatives MEMS-based variable capacitor
US6958846B2 (en) * 2002-11-26 2005-10-25 Reflectivity, Inc Spatial light modulators with light absorbing areas
US6844959B2 (en) * 2002-11-26 2005-01-18 Reflectivity, Inc Spatial light modulators with light absorbing areas
US7553686B2 (en) * 2002-12-17 2009-06-30 The Regents Of The University Of Colorado, A Body Corporate Al2O3 atomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices
US6944008B2 (en) * 2002-12-18 2005-09-13 Lucent Technologies Inc. Charge dissipation in electrostatically driven devices
TWI289708B (en) * 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
TW594155B (en) * 2002-12-27 2004-06-21 Prime View Int Corp Ltd Optical interference type color display and optical interference modulator
TW559686B (en) * 2002-12-27 2003-11-01 Prime View Int Co Ltd Optical interference type panel and the manufacturing method thereof
US20040140557A1 (en) 2003-01-21 2004-07-22 United Test & Assembly Center Limited Wl-bga for MEMS/MOEMS devices
TW557395B (en) * 2003-01-29 2003-10-11 Yen Sun Technology Corp Optical interference type reflection panel and the manufacturing method thereof
TW200413810A (en) * 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US20040157426A1 (en) 2003-02-07 2004-08-12 Luc Ouellet Fabrication of advanced silicon-based MEMS devices
TW200417806A (en) 2003-03-05 2004-09-16 Prime View Int Corp Ltd A structure of a light-incidence electrode of an optical interference display plate
US6720267B1 (en) * 2003-03-19 2004-04-13 United Microelectronics Corp. Method for forming a cantilever beam model micro-electromechanical system
TW567355B (en) * 2003-04-21 2003-12-21 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US7072093B2 (en) 2003-04-30 2006-07-04 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
US6829132B2 (en) * 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
US6819469B1 (en) 2003-05-05 2004-11-16 Igor M. Koba High-resolution spatial light modulator for 3-dimensional holographic display
JP4338442B2 (ja) * 2003-05-23 2009-10-07 富士フイルム株式会社 透過型光変調素子の製造方法
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US6811267B1 (en) * 2003-06-09 2004-11-02 Hewlett-Packard Development Company, L.P. Display system with nonvisible data projection
FR2857953B1 (fr) 2003-07-21 2006-01-13 Commissariat Energie Atomique Structure empilee, et procede pour la fabriquer
US7173314B2 (en) * 2003-08-13 2007-02-06 Hewlett-Packard Development Company, L.P. Storage device having a probe and a storage cell with moveable parts
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
TWI305599B (en) * 2003-08-15 2009-01-21 Qualcomm Mems Technologies Inc Interference display panel and method thereof
TWI251712B (en) * 2003-08-15 2006-03-21 Prime View Int Corp Ltd Interference display plate
TW593127B (en) * 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
US20050057442A1 (en) * 2003-08-28 2005-03-17 Olan Way Adjacent display of sequential sub-images
TWI230801B (en) 2003-08-29 2005-04-11 Prime View Int Co Ltd Reflective display unit using interferometric modulation and manufacturing method thereof
JP3979982B2 (ja) * 2003-08-29 2007-09-19 シャープ株式会社 干渉性変調器および表示装置
TWI232333B (en) * 2003-09-03 2005-05-11 Prime View Int Co Ltd Display unit using interferometric modulation and manufacturing method thereof
TW200521477A (en) * 2003-09-25 2005-07-01 Matsushita Electric Ind Co Ltd Projector and projection method
US6982820B2 (en) * 2003-09-26 2006-01-03 Prime View International Co., Ltd. Color changeable pixel
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7110159B2 (en) * 2003-12-11 2006-09-19 Micronic Laser Systems Method and apparatus for patterning a workpiece and methods of manufacturing the same
US7323217B2 (en) * 2004-01-08 2008-01-29 Qualcomm Mems Technologies, Inc. Method for making an optical interference type reflective panel
TWI235345B (en) 2004-01-20 2005-07-01 Prime View Int Co Ltd A structure of an optical interference display unit
TWI261683B (en) 2004-03-10 2006-09-11 Qualcomm Mems Technologies Inc Interference reflective element and repairing method thereof
US6912082B1 (en) 2004-03-11 2005-06-28 Palo Alto Research Center Incorporated Integrated driver electronics for MEMS device using high voltage thin film transistors
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7612759B2 (en) 2004-05-12 2009-11-03 Shimano Inc. Cycle computer display apparatus
US7145213B1 (en) * 2004-05-24 2006-12-05 The United States Of America As Represented By The Secretary Of The Air Force MEMS RF switch integrated process
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
EP1779173A1 (en) * 2004-07-29 2007-05-02 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
US7126741B2 (en) 2004-08-12 2006-10-24 Hewlett-Packard Development Company, L.P. Light modulator assembly
US7373026B2 (en) * 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate

Also Published As

Publication number Publication date
US7373026B2 (en) 2008-05-13
TWI391317B (zh) 2013-04-01
EP1803015A1 (en) 2007-07-04
EP1803015B1 (en) 2011-08-17
AU2005290163A2 (en) 2006-04-06
US20120140313A1 (en) 2012-06-07
US8126297B2 (en) 2012-02-28
US8285089B2 (en) 2012-10-09
US20080192328A1 (en) 2008-08-14
ATE521008T1 (de) 2011-09-15
WO2006036385A1 (en) 2006-04-06
IL180926A0 (en) 2007-07-04
US7664345B2 (en) 2010-02-16
US7587104B2 (en) 2009-09-08
US20060067646A1 (en) 2006-03-30
US20100129025A1 (en) 2010-05-27
US20080192329A1 (en) 2008-08-14
AU2005290163A1 (en) 2006-04-06
TW200626485A (en) 2006-08-01

Similar Documents

Publication Publication Date Title
BRPI0515290A (pt) dispositivo para mems fabricado sobre um substrato pré-modelado
WO2009006120A8 (en) Microelectromechanical device with optical function separated from mechanical and electrical function
TW200717027A (en) Support structure for MEMS device and methods therefor
USD589196S1 (en) Light fixture for pathway, bollard, or side light applications
FR2874754B1 (fr) Dispositifs micro-electromecaniques
TW200711545A (en) A method of manufacturing a MEMS element
DE60314510D1 (de) Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters
DE602005000385D1 (de) Mikroelektromechanisches System mit zwei stabilen Kipplagen
WO2009006118A3 (en) Microelectromechanical device with optical function separated from mechanical and electrical function
SG121059A1 (en) Interferometric modulator array with integrated mems electrical switches
DE602005003187D1 (de) Wellenlängenselektiver optischer Schalter
DE602005016348D1 (de) Material mit hierarchisierter Porosität enthaltend Silizium
TW200715358A (en) MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same
WO2004093268A3 (en) Light emitting devices
DE60334175D1 (de) Mikroelektromechanisches Betätigungssystem
TW200635845A (en) MEMS switches with deforming membranes
WO2009010207A3 (de) Lichtlenkende oberflächenstruktur
FR2886581B1 (fr) Pneumatique comportant une couche etanche separee de la structure de base
EP1932803A3 (en) MEMS device with Z-axis asymetry
USD589001S1 (en) Light switch
ATE364853T1 (de) Retroreflektiver artikel mit mikrostrukturierter haftschicht
DE602004003638D1 (de) Konfokales Mikroskop
ITTO20040702A1 (it) Procedimento per la produzione di lastre di materiale plastico trasparente con parti sovrainiettate non trasparenti
USD601294S1 (en) Ionic pillar lamp
DE602005006427D1 (de) Betätigungskappe

Legal Events

Date Code Title Description
B11A Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing
B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]