BR9007682A - Processo de microlitografia em campo otico proximo e dispositivo para microlitografia utilizando dito processo - Google Patents

Processo de microlitografia em campo otico proximo e dispositivo para microlitografia utilizando dito processo

Info

Publication number
BR9007682A
BR9007682A BR909007682A BR9007682A BR9007682A BR 9007682 A BR9007682 A BR 9007682A BR 909007682 A BR909007682 A BR 909007682A BR 9007682 A BR9007682 A BR 9007682A BR 9007682 A BR9007682 A BR 9007682A
Authority
BR
Brazil
Prior art keywords
substrate
microlitography
optical
microlithography
proximity sensor
Prior art date
Application number
BR909007682A
Other languages
English (en)
Inventor
Frederique De Fornel
Jean-Pierre Goudonnet
James Montovani
Original Assignee
Spiral Rech & Dev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9385780&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=BR9007682(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Spiral Rech & Dev filed Critical Spiral Rech & Dev
Publication of BR9007682A publication Critical patent/BR9007682A/pt

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
BR909007682A 1989-09-22 1990-09-21 Processo de microlitografia em campo otico proximo e dispositivo para microlitografia utilizando dito processo BR9007682A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8912497A FR2652423B1 (fr) 1989-09-22 1989-09-22 Procede de microlithographie pour la realisation de structures superficielles submicrometriques sur un substrat du type d'une plaquette de silicium, ainsi qu'un dispositif le mettant en óoeuvre.
PCT/FR1990/000682 WO1991004513A1 (fr) 1989-09-22 1990-09-21 Procede de microlithographie en champ proche optique et dispositifs de microlithographie le mettant en ×uvre

Publications (1)

Publication Number Publication Date
BR9007682A true BR9007682A (pt) 1992-07-07

Family

ID=9385780

Family Applications (1)

Application Number Title Priority Date Filing Date
BR909007682A BR9007682A (pt) 1989-09-22 1990-09-21 Processo de microlitografia em campo otico proximo e dispositivo para microlitografia utilizando dito processo

Country Status (16)

Country Link
US (1) US5384464A (pt)
EP (1) EP0419369B1 (pt)
JP (1) JPH05504655A (pt)
CN (1) CN1052559A (pt)
AT (1) ATE165675T1 (pt)
AU (1) AU6416890A (pt)
BR (1) BR9007682A (pt)
CA (1) CA2066586A1 (pt)
DD (1) DD297721A5 (pt)
DE (1) DE69032277T2 (pt)
FI (1) FI921211A (pt)
FR (1) FR2652423B1 (pt)
HU (1) HUT62100A (pt)
OA (1) OA09538A (pt)
WO (1) WO1991004513A1 (pt)
ZA (1) ZA907560B (pt)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0459392B1 (en) * 1990-05-30 1999-08-18 Hitachi, Ltd. Method and apparatus for processing a minute portion of a specimen
US5226107A (en) * 1992-06-22 1993-07-06 General Dynamics Corporation, Space Systems Division Apparatus and method of using fiber-optic light guide for heating enclosed test articles
US5866911A (en) * 1994-07-15 1999-02-02 Baer; Stephen C. Method and apparatus for improving resolution in scanned optical system
JP2001519040A (ja) 1995-08-30 2001-10-16 ドイッチェ テレコム アーゲー 三次元表面の構造化におけるコントラストを向上させる方法
DE19630705A1 (de) 1995-08-30 1997-03-20 Deutsche Telekom Ag Verfahren zur Herstellung von 3-dimensional strukturierten Polymerschichten für die integrierte Optik
DE19632563A1 (de) * 1996-01-04 1997-07-10 Deutsche Telekom Ag Verfahren und Vorrichtung zur Herstellung strukturierter lambda/4-Plättchen, Spiegel, Gitter und Prismen auf dreidimensionalen Flächen
JP3264824B2 (ja) * 1996-04-11 2002-03-11 セイコーインスツルメンツ株式会社 光伝搬体プローブと走査型近視野顕微鏡及び光伝搬体プローブの透過孔形成方法
KR20000016497A (ko) 1996-06-10 2000-03-25 다니엘 제이. 설리반 포토레지스트내에 선택된 불연속 패턴이 기록될 수 있도록 간섭리소그래피를 개조하기 위한 방법
US6088505A (en) * 1996-06-10 2000-07-11 Holographic Lithography Systems, Inc. Holographic patterning method and tool for production environments
US6078055A (en) * 1997-03-19 2000-06-20 California Institute Of Technology Proximity lithography device
EP0880078A3 (en) * 1997-05-23 2001-02-14 Canon Kabushiki Kaisha Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
US6806477B1 (en) 1997-05-23 2004-10-19 Canon Kabushiki Kaisha Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
DE19726634A1 (de) * 1997-06-18 1998-12-24 Biotools Inst Fuer Computerint Verfahren und Vorrichtung zur Immobilisierung von Makromolekülen
TW460758B (en) 1998-05-14 2001-10-21 Holographic Lithography System A holographic lithography system for generating an interference pattern suitable for selectively exposing a photosensitive material
DE59915204D1 (de) 1998-08-28 2010-10-28 Febit Holding Gmbh Verfahren zur herstellung von biochemischen reaktionsträgern
US6312876B1 (en) 1999-07-08 2001-11-06 Taiwan Semiconductor Manufacturing Company Method for placing identifying mark on semiconductor wafer
JP4017795B2 (ja) * 1999-08-27 2007-12-05 富士フイルム株式会社 光波長変換素子およびその作製方法
US7167615B1 (en) 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
TW473823B (en) * 1999-11-18 2002-01-21 Nippon Kogaku Kk Exposure method as well as exposure apparatus, and method for manufacturing device
DE10051396A1 (de) 2000-10-17 2002-04-18 Febit Ferrarius Biotech Gmbh Verfahren und Vorrichtung zur integrierten Synthese und Analytbestimmung an einem Träger
US20020145113A1 (en) * 2001-04-09 2002-10-10 Applied Materials, Inc. Optical signal transmission for electron beam imaging apparatus
US20020160427A1 (en) * 2001-04-27 2002-10-31 Febit Ag Methods and apparatuses for electronic determination of analytes
FR2827967B1 (fr) * 2001-07-26 2003-10-24 Essilor Int Procede d'impression d'une structure stable photoinduite en champ proche,et pointe de fibre optique pour sa mise en oeuvre
CA2625647A1 (en) * 2005-10-12 2007-04-19 Adelaide Research And Innovation Pty Ltd Fabrication of nanowires
KR101403744B1 (ko) * 2008-04-07 2014-06-03 엘지전자 주식회사 패터닝 장치 및 방법
CN102279556B (zh) * 2011-06-02 2013-07-17 中山大学 相位全息与近场光学显微镜联用制备功能性光子晶体装置及其应用方法
FR3017963B1 (fr) * 2014-02-27 2016-03-25 Essilor Int Instrument optique pour identifier et localiser des microgravures presentes sur une lentille ophtalmique

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH461149A (de) * 1967-05-09 1968-08-15 Conradi G Ag Einrichtung an einer Zeichenmaschine oder einem Koordinatographen zur mindestens angenähert fehlerfreien Auftragung von Punkten, Linien und Symbolen auf eine zur Führungsebene des Arbeitswagens nicht parallele und/oder nicht plane photographische Schicht
JPS5694742A (en) * 1979-12-28 1981-07-31 Jeol Ltd Electronic beam exposure device
JPS5849298A (ja) * 1981-09-18 1983-03-23 旭光学工業株式会社 フォト自動製図機における自動合焦装置
DE3371946D1 (en) * 1983-06-17 1987-07-09 Lasarray Holding Ag Reference determining process for correcting mechanical movements when writing lines in a metallized grid by means of a laser, and apparatus therefor
EP0283256A3 (en) * 1987-03-18 1990-02-07 Tektronix Inc. Scanning optical microscope
EP0459392B1 (en) * 1990-05-30 1999-08-18 Hitachi, Ltd. Method and apparatus for processing a minute portion of a specimen

Also Published As

Publication number Publication date
WO1991004513A1 (fr) 1991-04-04
DE69032277T2 (de) 1998-12-17
HU9200910D0 (en) 1992-08-28
ATE165675T1 (de) 1998-05-15
FI921211A0 (fi) 1992-03-20
EP0419369A1 (fr) 1991-03-27
HUT62100A (en) 1993-03-29
EP0419369B1 (fr) 1998-04-29
FR2652423A1 (fr) 1991-03-29
DE69032277D1 (de) 1998-06-04
US5384464A (en) 1995-01-24
FI921211A (fi) 1992-03-20
OA09538A (fr) 1992-11-15
FR2652423B1 (fr) 1992-05-22
CN1052559A (zh) 1991-06-26
ZA907560B (en) 1991-07-31
JPH05504655A (ja) 1993-07-15
DD297721A5 (de) 1992-01-16
CA2066586A1 (fr) 1991-03-23
AU6416890A (en) 1991-04-18

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