ES2075178T3 - Procedimiento de microscopia y microscopio de reflexion en campo cercano. - Google Patents

Procedimiento de microscopia y microscopio de reflexion en campo cercano.

Info

Publication number
ES2075178T3
ES2075178T3 ES90402370T ES90402370T ES2075178T3 ES 2075178 T3 ES2075178 T3 ES 2075178T3 ES 90402370 T ES90402370 T ES 90402370T ES 90402370 T ES90402370 T ES 90402370T ES 2075178 T3 ES2075178 T3 ES 2075178T3
Authority
ES
Spain
Prior art keywords
wave guide
microscopy
near field
wave
extremity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90402370T
Other languages
English (en)
Inventor
Fornel Frederique De
Jean-Pierre Goudonnet
Nathalie Cerre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIM D INVESTISSEMENT D Ste
Original Assignee
SIM D INVESTISSEMENT D Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9384942&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2075178(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SIM D INVESTISSEMENT D Ste filed Critical SIM D INVESTISSEMENT D Ste
Application granted granted Critical
Publication of ES2075178T3 publication Critical patent/ES2075178T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Pyrrole Compounds (AREA)
  • Pyrane Compounds (AREA)
  • Waveguide Aerials (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

EL PRESENTE INVENTO SE REFIERE A UN PROCEDIMIENTO DE MICROSCOPIA CONCAMPO PROXIMO EN REFLEXION, DEL TIPO DE BARRIDO DE UNA SUPERFICIE (12) POR UNA SONDA OPTICA, COMO, PARTICULARMENTE, UNA GUIA DE ONDAS (18) EN LA QUE SE INYECTA UNA ONDA ELECTROMAGNETICA PREFERENTEMENTE COHERENTE, POR EJEMPLO EMITIDA POR UN LASER (2), PROCEDIMIENTO CARACTERIZADO PORQUE SE ACERCA EL EXTREMO (13) DE ESTA GUIA DE ONDAS (18) A UNA DISTANCIA D DE LA SUPERFICIE (12) A ESTUDIAR, COMO EL COEFICIENTE DE ACOPLAMIENTO ENTRE EL MODO PROPIO DE PROPAGACION DE DICHA GUIA DE ONDAS (18) Y EL MODO DE PROPAGACION DEL CAMPO ELECTRICO DE LA ONDA REFLEJADA POR DICHA SUPERFICIE (12), Y GUIADA EN RETORNO POR LA MISMA GUIA DE ONDAS (18), PRESENTA UN INCREMENTO EXPONENCIAL A MEDIDA QUE DICHO EXTREMO (13) SE APROXIMA A ESTA MISMA SUPERFICIE (12). EL CAMPO DEL INVENTO ES, PARTICULARMENTE, EL DE LA MICROSCOPIA POR BARRIDO, MEDIANTE ELEMENTOS PURAMENTE OPTICOS, Y CON RESOLUCIONES NANOMETRICAS. SE PUEDE IGUALMETE DESTINAR EL INVENTO AL CONTROL OPTICO DE LA DISTANCIA ENTRE UNA SUPERFICIE DADA Y UN INSTRUMENTO A DESPLAZAR POR ENCIMA DE DICHA SUPERFICIE, Y ESPECIALMENTE CUALQUIER INSTRUMENTO QUE SIRVA PARA LA MICROLITOGRAFIA DE LOS CIRCUITOS INTEGRADOS.
ES90402370T 1989-08-28 1990-08-27 Procedimiento de microscopia y microscopio de reflexion en campo cercano. Expired - Lifetime ES2075178T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8911297A FR2651332B1 (fr) 1989-08-28 1989-08-28 Microscope en champ proche en reflexion utilisant un guide d'ondes comme sonde de ce champ.

Publications (1)

Publication Number Publication Date
ES2075178T3 true ES2075178T3 (es) 1995-10-01

Family

ID=9384942

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90402370T Expired - Lifetime ES2075178T3 (es) 1989-08-28 1990-08-27 Procedimiento de microscopia y microscopio de reflexion en campo cercano.

Country Status (18)

Country Link
US (1) US5340981A (es)
EP (1) EP0415838B1 (es)
JP (1) JPH05503586A (es)
KR (1) KR920704173A (es)
CN (1) CN1050266A (es)
AT (1) ATE119296T1 (es)
AU (1) AU6400390A (es)
BR (1) BR9007631A (es)
CA (1) CA2065263A1 (es)
DD (1) DD297521A5 (es)
DE (1) DE69017317T2 (es)
ES (1) ES2075178T3 (es)
FI (1) FI920905A0 (es)
FR (1) FR2651332B1 (es)
IL (1) IL95487A0 (es)
OA (1) OA09600A (es)
WO (1) WO1991003757A1 (es)
ZA (1) ZA906786B (es)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69121201D1 (de) * 1991-08-27 1996-09-05 Ibm Verfahren und Gerät zur Erzeugung hochauflösender optischer Bilder
FR2685127B1 (fr) * 1991-12-13 1994-02-04 Christian Licoppe Photonanographe a gaz pour la fabrication et l'analyse optique de motifs a l'echelle nanometrique.
US5410151A (en) * 1993-07-15 1995-04-25 Sumitomo Electric Lightwave Corp. Fiber optic probe and method of making same
WO1996037797A1 (en) * 1995-05-26 1996-11-28 General Scanning, Inc. Wide field of view microscope and scanning system useful in the microscope
US5646731A (en) * 1995-08-04 1997-07-08 International Business Machines Corporation Interferometric detecting/imaging method based on multi-pole sensing
US5623339A (en) 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric measuring method based on multi-pole sensing
US5623338A (en) * 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric near-field apparatus based on multi-pole sensing
US5874726A (en) * 1995-10-10 1999-02-23 Iowa State University Research Foundation Probe-type near-field confocal having feedback for adjusting probe distance
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
KR100797562B1 (ko) * 2006-08-24 2008-01-24 조성구 반사식 초소형 현미경 모듈
CN100590437C (zh) * 2007-04-16 2010-02-17 中国科学院物理研究所 结合磁镊观测生物大分子的全反射近场显微镜
KR101198910B1 (ko) 2009-05-27 2012-11-08 광주과학기술원 레이저 간섭계 및 광신호 정렬 장치를 결합한 레이저 간섭계
CN109374928B (zh) * 2018-09-12 2020-10-27 东南大学 一种基于等离聚焦的近场扫描探针
FR3097980B1 (fr) * 2019-06-28 2022-08-19 Laurent Galinier Lentille multifocale à aberration de coma

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3276917D1 (en) * 1982-12-27 1987-09-10 Ibm Light waveguide with a submicron aperture, method for manufacturing the waveguide and application of the waveguide in an optical memory
EP0112401B1 (en) * 1982-12-27 1987-04-22 International Business Machines Corporation Optical near-field scanning microscope
DE3477271D1 (en) * 1984-12-28 1989-04-20 Ibm Waveguide for an optical near-field microscope
EP0283256A3 (en) * 1987-03-18 1990-02-07 Tektronix Inc. Scanning optical microscope
US4917462A (en) * 1988-06-15 1990-04-17 Cornell Research Foundation, Inc. Near field scanning optical microscopy
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe

Also Published As

Publication number Publication date
AU6400390A (en) 1991-04-08
DE69017317D1 (de) 1995-04-06
US5340981A (en) 1994-08-23
FR2651332B1 (fr) 1994-05-06
JPH05503586A (ja) 1993-06-10
EP0415838A1 (fr) 1991-03-06
FI920905A0 (fi) 1992-02-28
DE69017317T2 (de) 1995-11-09
WO1991003757A1 (fr) 1991-03-21
DD297521A5 (de) 1992-01-09
KR920704173A (ko) 1992-12-19
BR9007631A (pt) 1992-07-07
FR2651332A1 (fr) 1991-03-01
EP0415838B1 (fr) 1995-03-01
ZA906786B (en) 1991-06-26
IL95487A0 (en) 1991-06-30
ATE119296T1 (de) 1995-03-15
CA2065263A1 (fr) 1991-03-01
OA09600A (fr) 1993-04-30
CN1050266A (zh) 1991-03-27

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