DE69017317T2 - Mikroskopisches Verfahren und "Nahfeld"-Reflexionsmikroskop. - Google Patents

Mikroskopisches Verfahren und "Nahfeld"-Reflexionsmikroskop.

Info

Publication number
DE69017317T2
DE69017317T2 DE69017317T DE69017317T DE69017317T2 DE 69017317 T2 DE69017317 T2 DE 69017317T2 DE 69017317 T DE69017317 T DE 69017317T DE 69017317 T DE69017317 T DE 69017317T DE 69017317 T2 DE69017317 T2 DE 69017317T2
Authority
DE
Germany
Prior art keywords
wave guide
near field
wave
extremity
instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69017317T
Other languages
English (en)
Other versions
DE69017317D1 (de
Inventor
Fornel Frederique De
Jean-Pierre Goudonnet
Nathalie Cerre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIM D INVESTISSEMENT D Ste
Original Assignee
SIM D INVESTISSEMENT D Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9384942&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69017317(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SIM D INVESTISSEMENT D Ste filed Critical SIM D INVESTISSEMENT D Ste
Application granted granted Critical
Publication of DE69017317D1 publication Critical patent/DE69017317D1/de
Publication of DE69017317T2 publication Critical patent/DE69017317T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Glass Compositions (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Waveguide Aerials (AREA)
  • Pyrane Compounds (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Pyrrole Compounds (AREA)
DE69017317T 1989-08-28 1990-08-27 Mikroskopisches Verfahren und "Nahfeld"-Reflexionsmikroskop. Expired - Fee Related DE69017317T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8911297A FR2651332B1 (fr) 1989-08-28 1989-08-28 Microscope en champ proche en reflexion utilisant un guide d'ondes comme sonde de ce champ.

Publications (2)

Publication Number Publication Date
DE69017317D1 DE69017317D1 (de) 1995-04-06
DE69017317T2 true DE69017317T2 (de) 1995-11-09

Family

ID=9384942

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69017317T Expired - Fee Related DE69017317T2 (de) 1989-08-28 1990-08-27 Mikroskopisches Verfahren und "Nahfeld"-Reflexionsmikroskop.

Country Status (18)

Country Link
US (1) US5340981A (de)
EP (1) EP0415838B1 (de)
JP (1) JPH05503586A (de)
KR (1) KR920704173A (de)
CN (1) CN1050266A (de)
AT (1) ATE119296T1 (de)
AU (1) AU6400390A (de)
BR (1) BR9007631A (de)
CA (1) CA2065263A1 (de)
DD (1) DD297521A5 (de)
DE (1) DE69017317T2 (de)
ES (1) ES2075178T3 (de)
FI (1) FI920905A0 (de)
FR (1) FR2651332B1 (de)
IL (1) IL95487A0 (de)
OA (1) OA09600A (de)
WO (1) WO1991003757A1 (de)
ZA (1) ZA906786B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19741122A1 (de) * 1997-09-12 1999-03-18 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0529125B1 (de) * 1991-08-27 1996-07-31 International Business Machines Corporation Verfahren und Gerät zur Erzeugung hochauflösender optischer Bilder
FR2685127B1 (fr) 1991-12-13 1994-02-04 Christian Licoppe Photonanographe a gaz pour la fabrication et l'analyse optique de motifs a l'echelle nanometrique.
US5410151A (en) * 1993-07-15 1995-04-25 Sumitomo Electric Lightwave Corp. Fiber optic probe and method of making same
AU5934296A (en) * 1995-05-26 1996-12-11 General Scanning, Inc. Wide field of view microscope and scanning system useful in the microscope
US5623338A (en) * 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric near-field apparatus based on multi-pole sensing
US5646731A (en) * 1995-08-04 1997-07-08 International Business Machines Corporation Interferometric detecting/imaging method based on multi-pole sensing
US5623339A (en) * 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric measuring method based on multi-pole sensing
US5874726A (en) * 1995-10-10 1999-02-23 Iowa State University Research Foundation Probe-type near-field confocal having feedback for adjusting probe distance
KR100797562B1 (ko) * 2006-08-24 2008-01-24 조성구 반사식 초소형 현미경 모듈
CN100590437C (zh) * 2007-04-16 2010-02-17 中国科学院物理研究所 结合磁镊观测生物大分子的全反射近场显微镜
KR101198910B1 (ko) 2009-05-27 2012-11-08 광주과학기술원 레이저 간섭계 및 광신호 정렬 장치를 결합한 레이저 간섭계
CN109374928B (zh) * 2018-09-12 2020-10-27 东南大学 一种基于等离聚焦的近场扫描探针
FR3097980B1 (fr) * 2019-06-28 2022-08-19 Laurent Galinier Lentille multifocale à aberration de coma

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112402B1 (de) * 1982-12-27 1987-08-05 International Business Machines Corporation Lichtwellenleiter mit einer Submikronöffnung, Verfahren zur Herstellung des Wellenleiters und Verwendung des Wellenleiters mit einem optischen Speicher
DE3276138D1 (en) * 1982-12-27 1987-05-27 Ibm Optical near-field scanning microscope
DE3477271D1 (en) * 1984-12-28 1989-04-20 Ibm Waveguide for an optical near-field microscope
EP0283256A3 (de) * 1987-03-18 1990-02-07 Tektronix Inc. Optisches Abtastmikroskop
US4917462A (en) * 1988-06-15 1990-04-17 Cornell Research Foundation, Inc. Near field scanning optical microscopy
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19741122A1 (de) * 1997-09-12 1999-03-18 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)

Also Published As

Publication number Publication date
AU6400390A (en) 1991-04-08
FR2651332A1 (fr) 1991-03-01
FI920905A0 (fi) 1992-02-28
JPH05503586A (ja) 1993-06-10
US5340981A (en) 1994-08-23
KR920704173A (ko) 1992-12-19
IL95487A0 (en) 1991-06-30
DE69017317D1 (de) 1995-04-06
ZA906786B (en) 1991-06-26
EP0415838A1 (de) 1991-03-06
OA09600A (fr) 1993-04-30
WO1991003757A1 (fr) 1991-03-21
BR9007631A (pt) 1992-07-07
FR2651332B1 (fr) 1994-05-06
CA2065263A1 (fr) 1991-03-01
ATE119296T1 (de) 1995-03-15
DD297521A5 (de) 1992-01-09
EP0415838B1 (de) 1995-03-01
CN1050266A (zh) 1991-03-27
ES2075178T3 (es) 1995-10-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee