BR112017024976A2 - sistemas, aparelho e método para embutir um componente 3d com uma estrutura de interligação - Google Patents

sistemas, aparelho e método para embutir um componente 3d com uma estrutura de interligação

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Publication number
BR112017024976A2
BR112017024976A2 BR112017024976A BR112017024976A BR112017024976A2 BR 112017024976 A2 BR112017024976 A2 BR 112017024976A2 BR 112017024976 A BR112017024976 A BR 112017024976A BR 112017024976 A BR112017024976 A BR 112017024976A BR 112017024976 A2 BR112017024976 A2 BR 112017024976A2
Authority
BR
Brazil
Prior art keywords
component
matrix
embedding
systems
substrate
Prior art date
Application number
BR112017024976A
Other languages
English (en)
Inventor
Fraser Rae David
Ann Keser Lizabeth
Tamunan Alvarado Reynante
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of BR112017024976A2 publication Critical patent/BR112017024976A2/pt

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    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
    • H01L2924/19042Component type being an inductor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19105Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/37Effects of the manufacturing process
    • H01L2924/37001Yield

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Geometry (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

um pacote incluindo uma matriz (110) próxima a uma estrutura (130) tendo um substrato (131) com interligações (132) e um primeiro componente (133) acoplado às interligações. o substrato é orientado em um ângulo maior do que 10 graus em relação a uma face da matriz. a matriz (110) pode ser virada para cima ou virada para baixo. o pacote inclui uma primeira camada de redistribuição 150 acoplando a matriz às interligações (132) do substrato e um composto de molde (120) cobrindo ao menos parcialmente a matriz (110) e a estrutura (130).
BR112017024976A 2015-05-22 2016-05-19 sistemas, aparelho e método para embutir um componente 3d com uma estrutura de interligação BR112017024976A2 (pt)

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US201562165820P 2015-05-22 2015-05-22
US14/861,484 US10163687B2 (en) 2015-05-22 2015-09-22 System, apparatus, and method for embedding a 3D component with an interconnect structure
PCT/US2016/033261 WO2016191193A1 (en) 2015-05-22 2016-05-19 System, apparatus, and method for embedding a 3d component with an interconnect structure

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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3449502B1 (en) 2016-04-26 2021-06-30 Linear Technology LLC Mechanically-compliant and electrically and thermally conductive leadframes for component-on-package circuits
US10475775B2 (en) 2016-08-31 2019-11-12 Advanced Semiconductor Engineering, Inc. Semiconductor package device and method of manufacturing the same
US10797039B2 (en) * 2016-12-07 2020-10-06 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming a 3D interposer system-in-package module
US10388637B2 (en) 2016-12-07 2019-08-20 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming a 3D interposer system-in-package module
KR101982056B1 (ko) * 2017-10-31 2019-05-24 삼성전기주식회사 팬-아웃 반도체 패키지 모듈
KR101982061B1 (ko) * 2017-12-19 2019-05-24 삼성전기주식회사 반도체 패키지
US10546817B2 (en) * 2017-12-28 2020-01-28 Intel IP Corporation Face-up fan-out electronic package with passive components using a support
US10497635B2 (en) 2018-03-27 2019-12-03 Linear Technology Holding Llc Stacked circuit package with molded base having laser drilled openings for upper package
US11178772B2 (en) * 2018-03-29 2021-11-16 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Component carrier connected with a separate tilted component carrier for short electric connection
US11410977B2 (en) 2018-11-13 2022-08-09 Analog Devices International Unlimited Company Electronic module for high power applications
US11844178B2 (en) 2020-06-02 2023-12-12 Analog Devices International Unlimited Company Electronic component
CN112908971A (zh) * 2021-01-28 2021-06-04 华进半导体封装先导技术研发中心有限公司 一种半导体封装结构及其制造方法、半导体器件

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5031072A (en) * 1986-08-01 1991-07-09 Texas Instruments Incorporated Baseboard for orthogonal chip mount
KR940006185Y1 (ko) * 1990-06-07 1994-09-10 가시오 게이상기 가부시끼가이샤 Ic 모듈
US5545924A (en) * 1993-08-05 1996-08-13 Honeywell Inc. Three dimensional package for monolithic microwave/millimeterwave integrated circuits
US5362986A (en) * 1993-08-19 1994-11-08 International Business Machines Corporation Vertical chip mount memory package with packaging substrate and memory chip pairs
US5530623A (en) * 1993-11-19 1996-06-25 Ncr Corporation High speed memory packaging scheme
US5625734A (en) * 1995-05-31 1997-04-29 Motorola Optoelectronic interconnect device and method of making
US5629839A (en) * 1995-09-12 1997-05-13 Allen-Bradley Company, Inc. Module interconnect adapter for reduced parasitic inductance
US6087500A (en) * 1996-05-16 2000-07-11 Nissan Chemical Industries, Ltd. Methods for producing pyrimidine compounds
US6040624A (en) * 1997-10-02 2000-03-21 Motorola, Inc. Semiconductor device package and method
US6140696A (en) * 1998-01-27 2000-10-31 Micron Technology, Inc. Vertically mountable semiconductor device and methods
US6246016B1 (en) * 1999-03-11 2001-06-12 Lucent Technologies, Inc. Edge-mountable integrated circuit package and method of attaching the same to a printed wiring board
US6392896B1 (en) * 1999-12-22 2002-05-21 International Business Machines Corporation Semiconductor package containing multiple memory units
US6867377B2 (en) * 2000-12-26 2005-03-15 Emcore Corporation Apparatus and method of using flexible printed circuit board in optical transceiver device
US6771515B2 (en) * 2001-07-23 2004-08-03 Intel Corporation Systems having modules with on die terminations
US6674648B2 (en) * 2001-07-23 2004-01-06 Intel Corporation Termination cards and systems therefore
KR100442847B1 (ko) * 2001-09-17 2004-08-02 페어차일드코리아반도체 주식회사 3차원 구조를 갖는 전력 반도체 모듈 및 그 제조방법
DE10308855A1 (de) * 2003-02-27 2004-09-16 Infineon Technologies Ag Elektronisches Bauteil und Halbleiterwafer, sowie Verfahren zur Herstellung derselben
DE10332015A1 (de) 2003-07-14 2005-03-03 Infineon Technologies Ag Optoelektronisches Modul mit Senderchip und Verbindungsstück für das Modul zu einer optischen Faser und zu einer Schaltungsplatine, sowie Verfahren zur Herstellung derselben
JP4610235B2 (ja) * 2004-06-07 2011-01-12 ルネサスエレクトロニクス株式会社 階層型モジュール
KR20060064924A (ko) * 2004-12-09 2006-06-14 삼성전자주식회사 하이브리드 회로기판 및 이를 갖는 표시장치
US7768280B1 (en) * 2007-11-15 2010-08-03 Altera Corporation Apparatus for a low-cost semiconductor test interface system
US20090160053A1 (en) * 2007-12-19 2009-06-25 Infineon Technologies Ag Method of manufacturing a semiconducotor device
KR101458954B1 (ko) * 2008-01-17 2014-11-07 삼성전자주식회사 재배선층을 갖는 반도체 패키지 장치
US8659154B2 (en) 2008-03-14 2014-02-25 Infineon Technologies Ag Semiconductor device including adhesive covered element
US8183677B2 (en) * 2008-11-26 2012-05-22 Infineon Technologies Ag Device including a semiconductor chip
EP2302675A1 (en) * 2009-09-29 2011-03-30 STMicroelectronics (Grenoble 2) SAS Electronic circuit with an inductor
US8344842B1 (en) * 2010-01-20 2013-01-01 Vlt, Inc. Vertical PCB surface mount inductors and power converters
DE102010042987A1 (de) * 2010-10-27 2012-05-03 Robert Bosch Gmbh Verfahren zum Herstellen einer elektrischen Schaltung und elektrische Schaltung
JP5480923B2 (ja) * 2011-05-13 2014-04-23 シャープ株式会社 半導体モジュールの製造方法及び半導体モジュール
KR101321282B1 (ko) * 2011-06-17 2013-10-28 삼성전기주식회사 전력 모듈 패키지 및 이를 구비한 시스템 모듈
JP5728423B2 (ja) 2012-03-08 2015-06-03 株式会社東芝 半導体装置の製造方法、半導体集積装置及びその製造方法
US8803641B2 (en) * 2012-09-10 2014-08-12 Broadcom Corporation Multiple droplet liquid MEMS component
US8866292B2 (en) 2012-10-19 2014-10-21 Infineon Technologies Ag Semiconductor packages with integrated antenna and methods of forming thereof
US9475694B2 (en) * 2013-01-14 2016-10-25 Analog Devices Global Two-axis vertical mount package assembly
US8890284B2 (en) 2013-02-22 2014-11-18 Infineon Technologies Ag Semiconductor device
US8822268B1 (en) 2013-07-17 2014-09-02 Freescale Semiconductor, Inc. Redistributed chip packages containing multiple components and methods for the fabrication thereof
US9070568B2 (en) 2013-07-26 2015-06-30 Infineon Technologies Ag Chip package with embedded passive component
US20150076700A1 (en) 2013-09-18 2015-03-19 Weng Foong Yap System-in-packages containing embedded surface mount devices and methods for the fabrication thereof
US20150380392A1 (en) * 2014-06-27 2015-12-31 Apple Inc. Package with memory die and logic die interconnected in a face-to-face configuration
KR102212827B1 (ko) * 2014-06-30 2021-02-08 엘지이노텍 주식회사 인쇄회로기판, 패키지 기판 및 이의 제조 방법
CN106340513B (zh) * 2015-07-09 2019-03-15 台达电子工业股份有限公司 一种集成控制电路的功率模块

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WO2016191193A1 (en) 2016-12-01
SG11201708388VA (en) 2017-12-28
CN107636814A (zh) 2018-01-26
US20160343651A1 (en) 2016-11-24
US10163687B2 (en) 2018-12-25
JP2018519657A (ja) 2018-07-19
EP3298625A1 (en) 2018-03-28
KR20180010190A (ko) 2018-01-30

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